TY - JOUR A1 - Gornushkin, Igor B. A1 - Sennikov, P. A1 - Kornev, R. A1 - Ermakov, A. A1 - Shkrunin, V. T1 - Laser Induced Dielectric Breakdown for Chemical Vapor Deposition by Hydrogen Reduction of Volatile Boron Halides BCl3 and  BF3 N2 - A possibility of deposition from laser-induced plasma is investigated in search for an economic and simple method for obtaining isotopic compounds from enriched gaseous precursors although no isotopic compounds are used in this the proof-of-principle work. A breakdown in mixtures of BCl3 and BCl3 with hydrogen, argon, and methane are studied both theoretically and experimentally. Equilibrium chemistry calculations show the deposition of boron, boron carbide, and carbon is thermodynamically favorable in BCl3 systems and only carbon in BF3 systems. Dynamic calculation of expanding plasma is performed using fluid dynamics coupled with equilibrium chemistry. Condensed phases of boron, boron carbide, and graphite are predicted with maximum concentrations in peripheral zones of the plasma. In experiment, plasma is induced in mixtures BCl3, H2 + BCl3, H2 + Ar + BCl3, H2 + BCl3 + CH4, BF3, H2 + BF3, H2 + Ar + BF3, and H2 + Ar + BF3. The gases are analyzed before, during, and after laser irradiation by optical and mass spectrometry methods. The results show the composition of reaction products close to that predicted theoretically. The conversion of precursor gases BCl3 and BF3 into gaseous and condensed products is 100% for BCl3 and 80% for BF3. Solid deposits of up to 30 mg are obtained from all reaction mixtures. Due to technical reasons only FTIR characterization of the BCl3 + H2 + CH4 deposit is done. It points to presence of condensed boron and boron carbide predicted by the model. Overall, the calculations and preliminary experimental results imply the chemical vapor deposition with laser induced plasma is promising for conversion of gaseous enriched precursors into elemental isotopes and their isotopic compounds. KW - Boron halides KW - Chemical vapor deposition KW - Laser induced dielectric breakdown, Hydrogen reduction PY - 2020 DO - https://doi.org/10.1007/s11090-020-10096-w VL - 40 IS - 5 SP - 1145 EP - 1162 PB - Springer AN - OPUS4-50968 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. A1 - Sennikov, P. T1 - Laser Induced Plasma for Chemical Vapor Deposition: Theory and Experiment N2 - A possibility of deposition from laser-induced plasma (LIP) is investigated in search for an economic and simple method to obtain isotopic compounds from enriched gaseous precursors. A breakdown in mixtures of BCl3 and BCl3 with hydrogen, argon, and methane are studied both theoretically and experimentally. Calculations of expanding plasma of different composition are performed with the use of the fluid dynamic code coupled to the equilibrium chemistry solver. Condensed phases of boron, boron carbide, and graphite are predicted showing maximum concentrations in peripheral zones of the plasma. In experiment LIP is induced in mixtures BCl3, Н2+BCl3, H2+Ar+BCl3, H2+BCl3+CH4, BF3, Н2+BF3, H2+Ar+BF3, and H2+Ar+BF3. The gases are analyzed before, during, and after laser irradiation by optical and mass spectroscopic methods. The composition of reaction products is found to be close to that predicted theoretically. The conversion of precursor gases BCl3 and BF3 into gaseous and condensed products is 100% for BCl3 and 80% for BF3. Solid deposits of up to 30 mg are obtained from all the reaction mixtures. FTIR analysis of BCl3+H2+CH4 deposits points to a presence of condensed boron and boron carbide that are also predicted by the model. Both calculations and preliminary experimental results suggest the chemical vapor deposition by LIP is promising for conversion of gaseous enriched precursors into elemental isotopes and their isotopic compounds. T2 - International Online Meeting on Laser Induced Breakdown Spectroscopy (IIOMLIBS) CY - Online meeting DA - 06.07.2020 KW - Chemical vapor deposition KW - Laser induced plasma PY - 2020 AN - OPUS4-50994 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Gornushkin, Igor B. A1 - Gaft, M. A1 - Nagli, L. A1 - Raichlin, Y. T1 - Laser-induced breakdown spectroscopy (LIBS) of BaF2-Tm3+ N2 - Our recent study was focused on the emission from Laser Induced Plasma (LIP) at the delay times of tenths of microseconds after the laser pulse. At these long delays, the spectrum is dominated by the broadband molecular emission and plasma induced luminescence (PIL) produced by a luminescent matrix; only solitary atomic emission lines can be seen. Barium fluoride BaF2 activated by thulium (Tm) is a famous scintillator that presents the promising object for LIP in terms of both the potential for BaF molecular emission and Tm3+ PIL. The detection of molecular and PIL bands presents a new opportunity for analysis of halogens and rare-earth elements, which are the difficult objects for LIBS. In this paper, we show that the UV, Green, Extreme Red, and Infrared molecular bands from BaF and blue luminescence from Tm3+ are present in the LIP emission spectra while the detection of atomic Emission from F I and Tm I was impossible with the same experimental setup. Thus, the detection of molecular emission and PIL can be more sensitive than the traditional detection of Emission from atoms and ions. KW - BaF KW - Laser-Induced Breakdown Spectroscopy (LIBS) KW - Rare-Earth elements (Tm3+) KW - Plasma-induced luminescence PY - 2020 DO - https://doi.org/10.1016/j.sab.2020.105767 VL - 164 SP - 105767 PB - Elsevier B.V. AN - OPUS4-50360 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - Plasma Fundamentals and Diagnostics N2 - This course will provide an introduction to plasma diagnostic techniques. The major focus of the course will be on the discussions of the practical procedures as well as the underlying physical principles for the measurements of plasma fundamental characteristics (e.g., temperatures, thermodynamic properties, and electron number density). Particular emphasis will be placed on inductively coupled plasma–atomic emission spectrometry, but other analytical plasmas will also be used as examples when appropriate. Selected examples on how one can manipulate the operating conditions of the plasma source, based on the results of plasma diagnostic measurements, to improve its performance used for spectrochemical analysis will also be covered. Topics to be covered include thermal equilibrium, line profiles, temperatures, electron densities, excitation processes, microreactions, pump and probe diagnostics, tomography, temporal and spatial resolution. Basis of plasma computer modeling will be presented. T2 - Winter Plasma Conference CY - Tucson, AZ, USA DA - 10.01.2020 KW - Plasma modeling KW - Thermal equilibrium KW - Plasma processes KW - Electron number density KW - Temperatures KW - Emission line profiles KW - Spatial information PY - 2020 AN - OPUS4-50324 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Galbacs, G. A1 - Keri, A. A1 - Kalomista, I. A1 - Kovacs-Szeles, E. A1 - Gornushkin, Igor B. T1 - Deuterium analysis by inductively coupled plasma mass spectrometry using polyatomic species: An experimental study supported by plasma chemistry modeling N2 - based on the use of the signal from hydrogen-containing polyatomic ions formed in the inductively coupled plasma. Prior to analytical experiments, a theoretical study was performed to assess the concentration of polyatomic species present in an equilibrium Ar-O-D-H plasma, as a function of temperature and stoichiometric composition. It was established that the highest sensitivity and linearity measurement of D concentration in a wide range can be achieved by monitoring the ions of D2 and ArD, at masses 4 and 42, respectively. Results of the calculations are in good agreement with the experiments. Signal stability, spectral interferences, as well as the effect of plasma parameters were also assessed. Under optimized conditions, the limit of detection (LOD) was found to be 3 ppm atom fraction for deuterium when measured as ArD (in calcium and potassium free water), or 78 ppm when measured as D2. The achieved LOD values and the 4 to 5 orders of magnitude dynamic range easily allow the measurement of deuterium concentrations at around or above the natural level, up to nearly 100% (or 1 Mio ppm) in a standard quadrupole ICP-MS instrument. An even better performance is expected from the method in high resolution ICP-MS instruments equipped with low dead volume sample introduction systems KW - ICP MS KW - Deuterium KW - Deuterium enriched water PY - 2020 DO - https://doi.org/10.1016/j.aca.2020.01.011 VL - 1104 SP - 28 EP - 37 PB - Elsevier B.V. AN - OPUS4-50777 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Sennikov, P. A1 - Gornushkin, Igor B. A1 - Kornev, R. A1 - Nazarov, V. A1 - Polyakov, V. A1 - Shkrunin, V. T1 - Hydrogen Reduction of MoF6 and Molybdenum Carbide Formation in RF Inductively Coupled Low‑Pressure Discharge: Experiment and Equilibrium Thermodynamics Consideration N2 - The physical plasma parameters, temperature and electron number density, are studied in the RF-IC (RF inductively coupled) discharge at a reduced pressure of 3 Torr in mixtures of MoF6 with Ar, H2 and CH4. The emission spectra of mixtures are investigated. It is shown that in the presence of argon, the concentration of free electrons in plasma and dissociation rate of MoF6 increase. A main role of molecular hydrogen is the generation of atomic hydrogen that binds atomic fuorine and leads to the formation of gaseous and solid products. Exhaust gas mixtures exiting the reactor are analyzed by mass spectrometry. It is shown that for all cases, the conversion of MoF6 into reaction products is close to 100%. A thermodynamic analysis of the equilibrium composition of MoF6 systems with Ar, H2 and CH4 was carried out and the obtained results are in good agreement with experimentally observed composition of the solid and gas phases. Analysis of solid deposits from mixture MoF6/H2/Ar revealed the presence of molybdenum powder and large amount of amorphous MoFx. The deposit obtained from mixtures with methane, MoF6/H2/Ar/CH4, contained crystalline molybdenum carbide, Mo3C2. KW - Molybdenum carbide KW - RF ICP discharge KW - Reduction of MoF6 KW - Thermodynamic KW - Molybdenum PY - 2020 DO - https://doi.org/10.1007/s11090-020-10138-3 SN - 0272-4324 VL - 41 IS - 2 SP - 673 EP - 690 PB - Springer AN - OPUS4-51569 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Gaft, M. A1 - Nagli, L. A1 - Gornushkin, Igor B. A1 - Raichlin, Y. T1 - Review on recent advances in analytical applications of molecular emission and modelling N2 - The review mainly deals with two topics that became important in applications of laser-induced breakdown spectroscopy (LIBS) in recent years: the emission of halogen- and rare-earth-containing molecules and selective excitation of molecules by molecular laser-induced fluorescence (MLIF). The first topic is related to the emission of alkaline-earth diatomic halides MX, M = Ca, Mg, Ba, Sr and X = F, Cl, Br, and I and rare-earth element (REE) oxides LaO, YO, and ScO. These molecules form in laser-induced plasma (LIP) soon after its ignition and persist for a long time, emitting broad bands in a visible part of the spectrum. They are best detected after relatively long delay times when emission from interfering plasma species (atoms and ions) has already been quenched. Such behavior of molecular spectra allows of using, for their detection, inexpensive CCD detectors equipped with simple electronic or mechanical shutters and low-resolution spectrometers. A main target for analysis by molecular spectroscopy is halogens; these elements are difficult to detect by atomic spectroscopy because their most intense atomic lines lie in the vacuum UV. Therefore, in many situations, emission from CaF and CaCl may provide a substantially more sensitive detection of F and Cl than emission from elemental F and Cl and their ions. This proved to be important in mining and concrete industries and even Mars exploration. A similar situation is observed for REEs; their detection by atomic spectroscopy sometimes fails even despite the abundance of atomic and ionic REEs' lines in the UV-VIS. For example, in minerals and rocks with low concentrations of REEs, emission from major and minor mineral elements hinders the weak emission from REEs. Many REEs do not form molecules that show strong emission bands in LIP but can still be detected with the aid of LIP. All REEs except La, Y, and Sc exhibit long-lived luminescence in solid matrices that is easily excited by LIP. The luminescence can be detected simultaneously with molecular emission of species in LIP within the same time and spectral window. The second topic is related to the combination of MLIF and LIBS, which is a technique that was proved to be efficient for analysis of isotopic molecules in LIP. For example, the characteristic spectral signals from isotopic molecules containing 10B and 11B are easier to detect with MLIF-LIBS than with laser ablation molecular isotopic spectrometry (LAMIS) because MLIF provides strong resonance excitation of only targeted isotopes. The technique is also very efficient in detection of halogen molecules although it requires an additional tunable laser that makes the experimental setup bulky and more expensive. KW - Plasma induced luminescence KW - Molecular emission KW - Laser induced plasma KW - Plasma modeling KW - Molecular analysis KW - LIBS PY - 2020 DO - https://doi.org/10.1016/j.sab.2020.105989 VL - 173 SP - 105989 PB - Elsevier B. V. AN - OPUS4-51420 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Képeš, E. A1 - Gornushkin, Igor B. A1 - Pořízka, P. A1 - Kaiser, J. T1 - Tomography of double-pulse laser-induced plasmas in the orthogonal geometry N2 - The temporal evolution of laser-induced plasmas is studied in the orthogonal double-pulse arrangement. Both the pre-ablation mode (an air spark is induced above the sample surface prior to the ablation pulse) and the re-heating mode (additional energy is delivered into the plasma created by the ablation pulse) is considered. The plasmas are investigated in terms of the temporal evolution of their electron density, temperature, and volume. The plasma volumes are determined using a time-resolved tomography technique based on the Radon transformation. The reconstruction is carried out for both white-light and band-pass filtered emissivities. The white-light reconstruction corresponds to the overall size of the plasmas. On the other hand, the band-pass emissivity reconstruction shows the distribution of the atomic sample species (Cu I). Moreover, through spectrally resolved tomographic reconstruction, the spatial homogeneity of the electron density and temperature of the plasmas is also investigated at various horizontal slices of the plasmas. Our results show that the pre-ablation geometry yields a more temporally stable and spatially uniform plasma, which could be beneficial for calibration-free laser-induced breakdown spectroscopy (LIBS) approaches. On the contrary, the plasma generated in the re-heating geometry exhibits significant variations in electron density and temperature along its vertical axis. Overall, our results shed further light on the mechanisms involved in the LIBS signal enhancement using double-pulse ablation. KW - Laser-induced plasma KW - Laser-induced breakdown spectroscopy KW - Double-pulse laserinduced breakdown spectroscopy KW - Plasma tomography KW - Radon reconstruction PY - 2020 DO - https://doi.org/10.1016/j.aca.2020.06.078 SN - 0003-2670 SN - 0378-4304 VL - 1135 SP - 1 EP - 11 PB - Elsevier CY - Amsterdam AN - OPUS4-51142 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Qiu, Yan A1 - Yu, H. A1 - Gornushkin, Igor B. A1 - Li, J. A1 - Wu, Q. A1 - Zhang, Z. A1 - Li, X. T1 - Measurement of trace chromium on structural steel surface from a nuclear power plant using dual-pulse fiber-optic laser-induced breakdown spectroscopy N2 - Remote and on-line measurement of chromium on structural steel surface in nuclear power plants is critical for protection against fluid accelerated corrosion. To improve the insufficient sensitivity of fiber-optic laser-induced breakdown spectroscopy toward trace element detection, a dual-pulse spectral enhancement system is set up. In an iron matrix, for the purpose of improving sensitivity of trace chromium analysis and reducing the self-absorption of iron, the effects of key parameters are investigated. The optimal values of the parameters are found to be: 450 ns inter-pulse delay, 700 ns gate delay, 30 mJ/6 mJ pulse energy ratio, and 19.8 mm lens-to-sample distance (corresponding to a 799 μm laser focused spot size). Compared to the single-pulse system, the shot number of dual-pulse ablation is limited for reducing surface damage. After the optimization of the dual-pulse system, the signal-to-noise ratio of the trace chromium emission line has been improved by 3.5 times in comparison with the single-pulse system, and the self-absorption coefficient of matrix iron has been significantly reduced with self-reversal eliminated. The number of detectable lines for trace elements has more than doubled thus increasing the input for spectral calibration without significantly increasing the ablation mass. Three calibration methods including internal standardization, partial least squares regression and random forest regression are employed to determine the chromium and manganese concentrations in standard samples of low alloy steel, and the limit of detection is respectively calculated as 36 and 515 ppm. The leave-one-out cross validation method is utilized to evaluate the accuracy of chromium quantification, and the concentration mapping of chromium is performed on the surface of a steel sample (16MND5) with a relative error of 0.02 wt.% KW - Fiber-optic laser-induced breakdown spectroscopy (FO-LIBS) KW - Dual-pulse KW - Parameter optimization KW - Spectral enhancement KW - Self-absorption coefficient KW - Concentration mapping PY - 2020 DO - https://doi.org/10.1016/j.apsusc.2020.147497 SN - 0169-4332 VL - 533 IS - 147497 SP - 1 EP - 29 PB - Elsevier CY - Amsterdam AN - OPUS4-51143 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Gornushkin, Igor B. A1 - Sennikov, P. G. A1 - Kornev, R. A. A1 - Polyakov, V. S. T1 - Equilibrium calculations for plasmas of volatile halides of III, IV and VI group elements mixed with H2 and H2 + CX4 (X = H, Cl, F) relevant to PECVD of isotopic materials N2 - The composition of hydrogen and hydrogen-methane plasmas containing ~10% of BX₃, SiX₄, GeX₄ (X = F, Cl), SF₆, MoF₆ and WF₆ is calculated for the temperature range ~300-4000 K using the equilibrium chemical model. The calculations provide valuable information about thermodynamic parameters (pressure, temperature) needed for condensation of pure elements (in H₂ plasma) and their carbides (in H₂ + CH₄ plasma) and about intermediate reaction products. Using volatile fluorides for plasma chemical deposition alleviates obtaining monoisotopic elements and their isotopic compounds because fluorine is monoisotopic. PECVD is promising method for one-step conversion of fluorides to elemental isotopes and their carbides. For fluorides, further insight is needed into properties of plasmas supported by different types of discharges. KW - Plasma chemistry KW - Modeling chemical reactions KW - Plasma enhanced chemical vapor deposition KW - Reduction of volatile chlorides and fluorides by hydrogen PY - 2020 DO - https://doi.org/10.1007/s10967-020-07295-2 VL - 326 IS - 1 SP - 407 EP - 421 PB - Springer CY - Dordrecht AN - OPUS4-51144 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - Laser induced gas breakdown in reactive mixtures containing halides of boron and silicon: diagnostics and modeling N2 - We run two pilot LIP experiments in reactive gas mixtures. First, LIP is excited in BCl3 or BF3 plus H2 or CH4 to evaluate the efficiency of deposition of solid boron and boron carbide, materials that are largely used for refractory coatings. Second, we investigate a possibility of synthesis of fluorochlorosilanes SiFxCl4-x (x = 1, 2, 3) by LIP induced in SiF4+SiCl4 gas mixtures. Using fluorochlorosilanes with different combinations of F and Cl in the SiFxCly molecule may add flexibility in processes of silicon deposition and etching. The gases used and solid deposits are analyzed by optical emission spectroscopy (OES) and IR and mass spectrometry (MS). We also model the laser induced plasma by performing static equilibrium chemistry calculations to see whether desired reaction products are thermodynamically favorable and dynamic calculations of the expanding plasma plume to see how and where the products form. T2 - International Workshop on Laser Induced breakdown Spectroscopy CY - Online meeting DA - 01.12.2020 KW - Silicon halides KW - Chemical vapor deposition KW - Laser induced dielectric breakdown KW - Hydrogen reduction PY - 2020 AN - OPUS4-51725 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kepes, E. A1 - Gornushkin, Igor B. A1 - Pořízka, P. A1 - Kaiser, J T1 - Spatiotemporal spectroscopic characterization of plasmas induced by non-orthogonal laser ablation N2 - Ablation geometry significantly affects the plasma parameters and the consequent spectroscopic observations in laser-induced breakdown spectroscopy. Nevertheless, plasmas induced by laser ablation under inclined incidence angles are studied to a significantly lesser extent compared to plasmas induced by standard orthogonal ablation. However, inclined ablation is prominent in stand-off applications, such as the Curiosity Mars rover, where the orthogonality of the ablation laser pulse cannot be always secured. Thus, in this work, we characterize non-orthogonal ablation plasmas by applying plasma imaging, tomography, and spectral measurements. We confirm earlier observations according to which non-orthogonal ablation leads to a laser-induced plasma that consists of two distinct parts: one expanding primarily along the incident laser pulse and one expanding along the normal of the sample surface. Moreover, we confirm that the former emits mainly continuum radiation, while the latter emits mainly sample-specific characteristic radiation. We further investigate and compare the homogeneity of the plasmas and report that inclined ablation affects principally the ionic emissivity of laser-induced plasmas. Overall, our results imply that the decreased fluence resulting from inclined angle ablation and the resulting inhomogeneities of the plasmas must be considered for quantitative LIBS employing non-orthogonal ablation. KW - Radon transformation KW - Laser induced plasma KW - Plasma tomography PY - 2020 DO - https://doi.org/10.1039/d0an01996h VL - 146 IS - 3 SP - 920 EP - 929 PB - The Royal Society of Chemistry AN - OPUS4-51774 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Gornushkin, Igor B. A1 - Sennikov, P. A1 - Kornev, R. A1 - Ermakov, A. A1 - Shkrunin, V. A1 - Polyakov, V. T1 - Laser induced dielectric breakdown for synthesis of chlorofluorosilanes N2 - Tetrafluorosilane (SF4) and tetrachlorosilane (SiCl4) plasmas have been widely used as a source of either F or Cl for etching silicon or as a source of silicon for deposition of Si-based materials. Using different combinations of F and Cl in molecules of chlorofluorosilane SiFxCly adds additional flexibility in realization of these processes. Direct synthesis of SiFxCl4-x (x=1, 2, 3) from SiF4 and SiCl4 is thermodynamically forbidden under standard conditions. This restriction is removed in low-temperature plasmas studied in this work: a laser induced dielectric breakdown (LIDB) plasma and steady-state inductively-coupled plasma (ICP). The plasmas differ in many respects including energy content, temperature, and electron density that lead to different ionization/excitation states of plasma species, which are observed from plasma optical emission spectra. IR spectroscopy and mass-spectrometry confirm the formation of three chlorofluorosilanes, SiF3Cl, SiF2Cl2, and SiFCl3 that constitute ~60% in products of LIDB plasma and split 50/50 between SiF3Cl, SiFCl3 and SiF2Cl2. Experimental observations are verified by equilibrium static calculations via the minimization of Gibbs free energy and by dynamic calculations via the chemical-hydrodynamic plasma model of a spherically expanding plasma plume. The both types of calculations qualitatively agree with the results of spectroscopic analysis and reproduce dominant presence of SiF2Cl2 as the temperature of the gas approaches the room temperature. KW - Chemical-hydrodynamic modeling KW - Chlorofluorosilanes KW - Laser induced dielectric breakdown KW - Inductively coupled plasma KW - Equilibrium chemical modeling PY - 2020 DO - https://doi.org/10.1016/j.jfluchem.2020.109692 VL - 241 SP - 109692 PB - Elsevier B.V. AN - OPUS4-51646 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - Reverse deposition of TI-oxides under nanosecond laser ablation of TI N2 - Processes of laser induced oxidation of metals are typically studied in the framework of heterogeneous chemical reactions occurring on the irradiated surface, which lead to the formation of dense oxide films deposited on it. Such technology has many applications like color-laser marking technology and laser recording on thin metal films for creation of diffractive optical elements . Under the conditions of strong laser ablation, another oxidation mechanism becomes possible: evaporated atoms react with oxygen in a surrounding atmosphere and the products of such reaction are redeposited back onto the substrate. The chemical and phase composition of such deposited layer, its density, morphology and structure depend on the conditions of laser ablation. By varying these conditions, the main properties of such coating can be controlled that is important for some potential application (for example in biomedicine). In our report we present the study of the processes of redeposition of oxides structure under the conditions of multipulse nanosecond laser ablation of titanium (Grade 2) in air atmosphere at normal conditions. Our experiments show that titanium-implants with such deposited oxide layer have increased biocompatibility. Modelling of chemical reaction in laser-induced plasma coupled with experimental methods of plasma optical emission spectroscopy allows us to determine the types of main chemical reactions in laser plasma as well as it influences on the plume dynamics and vapor condensation kinetics. As a result, we propose the general physical picture of reverse deposition of oxides structure under the condition of strong nanosecond laser ablation. The formation of the titanium oxide precipitate is explained not only by collisions in the plasma, but also by the chemical interaction of titanium and oxygen, which leads to the formation of а low pressure area near the substrate and additionally stimulates the reverse deposition of oxides. We expect, similar processes are valid not only for titanium but also for other metals and, possibly, semiconductors. T2 - 28th International Conference on Advanced Laser Technologies CY - Online meeting DA - 06.09.2021 KW - Laser ablation KW - Laser induced plasma deposition KW - Surface coating KW - Emission spectroscopy KW - Titanium dioxide KW - Hydrodynamic model KW - Plasma chemistry PY - 2021 AN - OPUS4-53245 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - Optical Detection of Defects during Laser Metal Deposition - Simulations and Experiment N2 - Laser metal deposition is a rapidly evolving method for additive manufacturing that combines high performance and simplified production routine. Quality of production depends on instrumental design and operational parameters that require constant control during the process. In this work, feasibility of using optical spectroscopy as a control method is studied via modeling and experimentally. A simplified thermal model is developed based on the time-dependent diffusion-conduction heat equation and geometrical light collection into detection optics. Intense light emitted by a laser-heated spot moving across a sample surface is collected and processed to yield the temperature and other temperature-related parameters. In a presence of surface defects the temperature field is distorted in a specific manner that depends on a shape and size of the defect. Optical signals produced by such the distorted temperature fields are simulated and verified experimentally using a 3D metal printer and a sample with artificially carved defects. Three quantities are tested as possible metrics for process monitoring: temperature, integral intensity, and correlation coefficient. The shapes of the simulated signals qualitatively agree with the experimental signals; this allows a cautious inference that optical spectroscopy is capable of detecting a defect and, possibly, predicting its character, e.g. inner or protruding. T2 - 28th International Conference on Advanced Laser Technologies CY - Online meeting DA - 06.09.2021 KW - Additive manufacturing KW - Laser metal deposition KW - Optical sensor KW - Optical emission spectroscopy KW - Process control PY - 2021 AN - OPUS4-53246 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Gornushkin, Igor B. A1 - Pignatelli, Giuseppe A1 - Straße, Anne T1 - Optical detection of defects during laser metal deposition: Simulations and experiment N2 - Laser metal deposition is a rapidly evolving method for additive manufacturing that combines high performance and simplified production routine. Quality of production depends on instrumental design and operational parameters that require constant control during the process. In this work, feasibility of using optical spectroscopy as a control method is studied via modeling and experimentally. A simplified thermal model is developed based on the time-dependent diffusion-conduction heat equation and geometrical light collection into detection optics. Intense light emitted by a laser-heated spot moving across a sample surface is collected and processed to yield the temperature and other temperature-related parameters. In a presence of surface defects the temperature field is distorted in a specific manner that depends on a shape and size of the defect. Optical signals produced by such the distorted temperature fields are simulated and verified experimentally using a 3D metal printer and a sample with artificially carved defects. Three quantities are tested as possible metrics for process monitoring: temperature, integral intensity, and correlation coefficient. The shapes of the simulated signals qualitatively agree with the experimental signals; this allows a cautious inference that optical spectroscopy is capable of detecting a defect and, possibly, predicting its character, e.g. inner or protruding. KW - Additive manufacturing KW - Laser metal deposition (LMD) KW - Thermal model KW - Optical sensor KW - Process control PY - 2021 DO - https://doi.org/10.1016/j.apsusc.2021.151214 SN - 0169-4332 VL - 570 SP - 1 EP - 13 PB - Elsevier CY - Amsterdam AN - OPUS4-53292 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Sennikov, P. A1 - Ermakov, A. A1 - Kornev, R. A1 - Gornushkin, Igor B. T1 - Laser induced dielectric breakdown in reactive mixture SiF4 + H2 N2 - Important chemical process of reduction of SiF4 by hydrogen is realized in laser induced dielectric breakdown (LIDB) plasma in a gas mixture of SiF4 and H2. The process may be an alternative to a method of Plasma enhanced chemical vapor deposition (PECVD) which is commonly used for production of pure and isotopically pure silicon films. The composition of laser induced plasma in gases SiF4, SiF4 + H2, SiF4 + H2 + Ar at atmospheric pressure is studied and compared to the composition of inductively coupled plasma (ICP) in the same gases but at reduced pressure of 3 Torr. The gaseous products of chemical reactions are inferred from optical emission spectroscopy (OES) and IR spectroscopy. The reaction products of silicon fluoride SiF and fluorosilanes SiHxFy (x, y = 1, 2, 3) in LIDB plasma are observed and confirmed by equilibrium chemistry calculations and simulations of plasma expansion dynamics using a fluid dynamic-chemical plasma model. It is further suggested that chemisorption of fluorinated species like SiFx (x = 1, 2) followed by the surface reaction with H-atoms lead to a formation of silicon-to‑silicon bonds on a substrate surface. A conclusion is drawn that energetic laser induced plasma can prove efficient for one-step PECVD by hydrogen reduction of SiF4. KW - Silicon halides KW - Chemical vapor deposition KW - Laser induced dielectric breakdown KW - Hydrogen reduction PY - 2021 DO - https://doi.org/10.1016/j.sab.2021.106099 VL - 179 SP - 106099 PB - Elsevier B.V. AN - OPUS4-53583 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - Modeling Equilibrium Chemistry in Laser Induced Plasmas and Plasma Chemical Reactors N2 - A brief introduction will be given on modeling chemical reactions in laser induced plasmas using stoichiometric and non-stoichiometric approaches. Several applications will be considered, which can benefit from such modeling. Those include plasma enhanced chemical vapor deposition (PECVD), surface modification and surface coating, and molecular analysis by LIBS. Each application will be illustrated by simulations of relevant chemical systems. For PECVD, chemical systems are BCl3/H2/Ar, BF3/H2/Ar, BCl3/BF3, Mo/BF3/H2; for surface modification/coating it is Ti/air; for molecular LIBS they are CaCO3/Ar, Ca(OH)2/Ar, and CaCl2/Ar. Advantages and shortcomings of equilibrium chemical hydrodynamic models of laser induced plasmas will be discussed. T2 - Moscow University, Department of Chemistry CY - Moscow, Russia DA - 26.10.2021 KW - Laser ablation KW - Laser induced plasma deposition KW - Emission spectroscopy KW - Surface coating KW - Hydrodynamic model KW - Plasma chemistry PY - 2021 AN - OPUS4-53629 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - Molecule formation in reactive LIBS plasmas: model and experiment N2 - Formation and detection of molecules in laser induced plasmas (LIP) is a hot topic. In analytical plasmas like LIBS, the detection of molecules is important for identification of geological and other materials, analysis of isotopes and difficult elements (Cl, F, etc.) via molecular emission. In chemical plasmas, like PECVD (plasma enhanced chemical vapor deposition) or PLD (pulsed laser deposition), molecules formed in the plasma determine a composition and a thickness of deposits. Similarly, molecules play an important role in microstructuring and oxidizing metal surfaces by laser ablation. It is unfortunate that different communities, which utilize plasma methods and seek for solutions of similar problems, do not strongly overlap, and do not fully use knowledge accumulated by each other. In this presentation, mechanisms of formation of molecules will be analyzed on the example of LIPs used for chemical vapor deposition and metal microstructuring. Theoretical analysis includes equilibrium chemistry calculations combined with plasma hydrodynamics. First, LIP excited in a gas mixture of BCl3 or BF3 with H2 or CH4 will be analyzed; this chemical system is used for obtaining deposits of refractory solid boron and boron carbide. Second, a breakdown in the SiF4 + SiCl4 gas mixtures will be described; this method allows synthesis of fluorochlorosilanes SiFxCl4-x (x = 1, 2, 3), the good etching agents (Figure). Third, solid ablation of Mo in BF3+H2 and Ti in air will be considered aimed at obtaining deposits of high hardness MoxBy and films of TixOy on textured Ti surfaces, correspondingly. In experiment, reaction gases before and after laser illumination, and solid deposits are analyzed by optical emission spectroscopy (OES), IR and mass spectrometry (MS), SEM, X-ray, and AFM. It will be shown that the hydrodynamic-chemical model adequately predicts the composition of LIPs, zones of molecular formation, dependence on reactant stoichiometry, plasma temperature and pressure. T2 - Euro-Mediterranean Symposium on Laser-Induced Breakdown Spectroscopy CY - Gijon, Spain DA - 29.11.2021 KW - Laser induced plasma KW - Plasma chemistry KW - Molecules formation KW - Plasma enhanced chemical deposition PY - 2021 AN - OPUS4-53850 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - Laser induced gas breakdown in reactive mixtures N2 - Plasma-chemical approach is used for synthesis of various gaseous, liquid, and solid substances since 1960th. Nowadays, the method of plasma enhanced chemical vapor deposition (PECVD) is used for production of thin films, protective coatings, carbon-based nanostructures, high purity isotopic materials, biomaterials, and other products. Plasma for PECVD is typically created in various electrical discharges, e.g. DC and AC glow discharges or discharges operated at audio (10-20 kHz), radio (13.56 MHz), and microwave (2.45 GHz) frequencies. Plasma induced by a laser, a laser induced plasma (LIP), is rarely used to deposit materials from the gas phase as in PECVD. This work is aimed at reviving interest to this latter technology and showing its efficiency and potential. We run several pilot experiments. First, LIP is excited in BCl3 or BF3 plus H2 or CH4 to evaluate the efficiency of deposition of solid boron and boron carbide, the materials, which are largely used for refractory coatings. Second, we investigate a possibility of synthesis of fluorochlorosilanes SiFxCl4-x (x = 1, 2, 3) by LIP induced in SiF4 + SiCl4 gas mixtures. Using fluorochlorosilanes with different combinations of F and Cl in the SiFxCly molecule may add flexibility in processes of silicon deposition and etching. Third, LIP is excited in reactive mixture MoF6+H2+BF3 or on a Mo target ablated into H2/BF3 atmosphere. The goal is obtaining superhard molybdenum borides MoB, Mo2B, or MoB2. The gases used and solid deposits are analyzed by optical emission spectroscopy (OES), IR and mass spectrometry (MS). We also model the plasma and perform static equilibrium chemistry calculations to see if the desired reaction products are thermodynamically favorable. Dynamic calculations of the expanding plasma plume are performed using a hydrodynamic code combined with the open source chemical software. T2 - SciX 2021, The Federation of Analytical Chemistry and Spectroscopy Societies (FACSS) CY - Providence, RI, USA DA - September 26, 2021 KW - Laser ablation KW - Laser induced plasma deposition KW - Emission spectroscopy KW - Surface coating KW - Plasma chemistry KW - Hydrodynamic model PY - 2021 AN - OPUS4-53560 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - Laser dielectric breakdown as a novel method for producing molybdenum borides N2 - Superhard materials with a Vickers hardness in the range of 30-40 GPa are of great interest, both from a fundamental and a practical viewpoints, since they have outstanding mechanical, thermal and chemical properties. Molybdenum borides belong to this group of materials. A review of publications on synthesis of molybdenum boride indicates a) great interest in this superhard material and b) the need for new effective methods of its synthesis, especially in a nanocrystalline form. Very promising are the plasma-chemical methods based on laser induced breakdown. The breakdown can be created either in reactive gases containing volatile compounds of boron and molybdenum or on solid samples. For gas breakdown, molybdenum hexafluoride MoF6 and boron trifluoride BF3 were used in the mixture with hydrogen and argon; for solid breakdown, the pure molybdenum sample was ablated into the mixture of H2 and BF3. The plasma-chemical synthesis of MoxBy structures was carried out in the reactor shown in Figure. Laser breakdown was created by a pulsed Nd: YAG laser operating at 1064 nm with a 15 ns pulse duration, 5 Hz repetition rate, and 800 mJ pulse energy. The laser was focused by a 5 cm focal length lens to produce 26 J/cm3 energy density in the focal point. The ratios H2:BF3: MoF6 = 5:2:1 and H2:BF3 = 3:1 were used in a pressure range 30 - 760 Torr. After ablation in the mixture H2 + BF3 + MoF6, the deposit contained an amorphous phase with a small impurity of crystalline molybdenum and no boride phase. After ablation of metallic Mo into H2 + BF3, the main phase was MoB2 in the form of nano dispersed powder with an average grain size of 100 nm. The degree of conversion of boron trifluoride and the yield of molybdenum boride were studied as a function of pressure. It was established that 30 Torr is optimal for the formation of MoB2. This work was supported by the Russian Science Foundation grant No. 20-13-00035. T2 - Euro-Mediterranean Symposium on Laser-Induced Breakdown Spectroscopy CY - Online meeting DA - 29.11.2021 KW - Plasma enhanced chemical deposition KW - Laser induced plasma KW - Plasma chemistry KW - Molybdenum boride PY - 2021 AN - OPUS4-53901 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Huan, Y. A1 - Gojani, Ardian A1 - Gornushkin, Igor B. A1 - Wang, X. A1 - Liu, D. A1 - Rong, M. T1 - Dynamics of laser-induced plasma splitting N2 - The dynamics of laser-induced plasma plume splitting is investigated using spatiotemporal plasma imaging and spectrometry in this paper. Plasma plume splitting into fast and slow components is clearly observed using plasma optical emission as time evolves. The spatial resolved plasma spectra are used to investigate the plasma species distribution, which reveals that the charged copper ions, which radiate at wavelength range 485 nm - 504 nm, are merely present in the fast component. In order to further interpret the mechanism, the pressure-dependent and laser energy-dependent plume splitting are analyzed. Based on the results, the charge separation field is proposed to explain this phenomenon. This work can be of importance for such areas as laser induced breakdown spectroscopy, laser-induced ion source formation, pulse laser deposition, film growth, and nanoscale synthesis. KW - Spectroscopy KW - Laser induced plasma KW - Splitting KW - Imaging PY - 2020 DO - https://doi.org/10.1016/j.optlaseng.2019.105832 SN - 0143-8166 VL - 124 SP - 1 EP - 5 PB - Elsevier CY - Amsterdam AN - OPUS4-48746 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - model of laser induced plasma relevant to structuring and coating of titanium implants N2 - The presentation will give a brief overview of the processes occurring in laser-induced plasma and methods of modeling these processes. In particular, a chemical-hydrodynamic model will be considered, which is related to the modification of the surface of metallic titanium by laser pulses. The details and simplifications of this model, its shortcomings and the possibilities of their elimination will be discussed. This model is related to the structuring of the surface of dental implants with a laser and the deposition of an oxide film on it. T2 - THE 2-nd THEMATIC INTERNATIONAL SCIENTIFIC AUTUMN SCHOOL ON LASER MICRO- & NANOTHECHNOLOGIES: 2021 – BIOMEDICAL TECHNOLOGIES CY - St. Petersburg, Russia DA - 09.11.2021 KW - Laser ablation KW - Laser induced plasma deposition KW - Surface coating KW - Emission spectroscopy KW - Hydrodynamic model KW - Plasma chemistry PY - 2021 AN - OPUS4-53718 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - Modeling Equilibrium Chemistry in Laser Induced Plasmas and Plasma Chemical Reactors N2 - A brief introduction will be given on modeling chemical reactions in laser induced plasmas using stoichiometric and non-stoichiometric approaches. Several applications will be considered, which can benefit from such modeling. Those include plasma enhanced chemical vapor deposition (PECVD), surface modification and surface coating, and molecular analysis by LIBS. Each application will be illustrated by simulations of relevant chemical systems. For PECVD, chemical systems are BCl3/H2/Ar, BF3/H2/Ar, BCl3/BF3, Mo/BF3/H2; for surface modification/coating it is Ti/air; for molecular LIBS they are CaCO3/Ar, Ca(OH)2/Ar, and CaCl2/Ar. Advantages and shortcomings of equilibrium chemical hydrodynamic models of laser induced plasmas will be discussed. T2 - 1st NIP Conference National Institute of Physics (IKF), the Albanian Academy of Sciences CY - Online meeting DA - 10.02.2022 KW - Laser ablation KW - Laser induced plasma deposition KW - Surface coating KW - Titanium dioxide KW - Emission spectroscopy KW - Hydrodynamic model KW - Plasma chemistry PY - 2022 AN - OPUS4-54328 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - Plasma Fundamentals and Diagnostics N2 - This course will provide an introduction to plasma diagnostic techniques. The major focus of the course will be on the discussions of the practical procedures as well as the underlying physical principles for the measurements of plasma fundamental characteristics (e.g., temperatures and electron number density). Particular emphasis will be placed on laser induced plasma–atomic emission spectrometry, but other analytical plasmas will also be used as examples when appropriate. Selected examples on how one can manipulate the operating conditions of the plasma source, based on the results of plasma diagnostic measurements, to improve its performance used for spectrochemical analysis will also be covered. Topics to be covered include thermal equilibrium, line profiles, temperatures, electron densities, excitation processes, temporal and spatial resolution. T2 - 2022 Winter Conference on Plasma Spectrochemistry CY - Tucson, Arizona, USA DA - 17.01.2022 KW - Thermal equilibrium KW - Excitation processes KW - Electron number density KW - Temperatures KW - Spatial information KW - Emission line profiles PY - 2022 AN - OPUS4-54288 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - Deposition of Titanium Oxides by Nanosecond Laser Ablation: Simulation and Experiment N2 - Surface modification of titanium by laser ablation is investigated theoretically and experimentally. The modification consists in texturing the surface and redeposition of chemically transformed material from the ablation plasma. The redeposition is driven by the hydrodynamic flow in the plasma. Such surface modification improves the biocompatibility of titanium implants. T2 - 2022 Winter Conference on Plasma Spectrochemistry CY - Tucson, Arizona, USA DA - 17.01.2022 KW - Laser ablation KW - Laser induced plasma deposition KW - Surface coating KW - Titanium dioxide KW - Emission spectroscopy KW - Hydrodynamic model KW - Plasma chemistry PY - 2022 AN - OPUS4-54289 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kornev, R. A. A1 - Sennikov, P. G. A1 - Gornushkin, Igor B. A1 - Ermakov, A. A. A1 - Shkrunin, V. E. A1 - Polykov, V. S. A1 - Kornev, A. R. A1 - Kornev, K. D. T1 - Laser induced dielectric breakdown as a novel method for the synthesis of molybdenum boride N2 - Laser induced dielectric breakdown (LIDB) on a surface of solid Mo in H2/BF3 atmosphere at 30-760 Torr and in a gaseous mixture MoF6/H2/BF3 + at 760 Torr pressure is tested for synthesis and deposition of superhard molybdenum borides that are needed in many areas of industry and technology. The emission spectra of the plasma and the dynamics of the gas discharge near the substrate are investigated. A comparative analysis of the gas mixture before and after exposure to LIDB plasma is carried out using IR spectroscopy. The conditions for the formation of molybdenum borides are determined. A thermodynamic analysis of the MoF6/H2/BF3 and Mo/H2/BF3 systems is carried out to determine the temperature range for the formation of molybdenum borides and establish the main chemical reactions responsible for their formation. Deposits containing MoB and MoB2 phases are obtained. For the mixture MoF6/H2/BF3, the deposit exhibits an amorphous layered structure, which contains 19.15 wt% F, 30.45% O, and 0.8% Si. For the Mo/H2/BF3 system at the pressures 30 and 160 Torr, nanopowder of molybdenum boride is produced with a characteristic grain size of 100 nm. At pressures above 160 Torr, Mo nanopowder with a grain size <30 nm is obtained. KW - LIDB plasma KW - MoF6 KW - BF3 KW - Hydrogen reduction KW - Molybdenum boride PY - 2022 DO - https://doi.org/10.1007/s11090-021-10224-0 SN - 1572-8986 SP - 1 EP - 18 PB - Springer CY - Dordrecht AN - OPUS4-54290 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - Optical Detection of Defects during Laser Metal Deposition N2 - Laser metal deposition is a rapidly evolving method for additive manufacturing that combines high performance and simplified production routine. Quality of production depends on an instrumental design and operational parameters, which require constant control during the process. In this work, feasibility of using optical spectroscopy as a control method is studied via modeling and experimentally. A simplified thermal model is developed based on the time-dependent diffusion-conduction heat equation and geometrical light collection into detection optics. Intense light emitted by a laser-heated spot moving across a sample surface is collected and processed to yield the temperature and other temperature-related parameters. In the presence of surface defects, the temperature field is distorted in a specific manner that depends on shape and size of the defect. Optical signals produced by such the distorted temperature fields are simulated and verified experimentally using a 3D metal printer and a sample with artificially carved defects. Three quantities are tested as possible metrics for monitoring the process: temperature, integral intensity, and correlation coefficient. The shapes of the simulated signals qualitatively agree with the experimental signals; this allows for a cautious inference that optical spectroscopy can detect surface defects and, possibly, predict their characters, e.g., inner or protruding. T2 - Colloquium Spectroscopicum Internationale XLII (CSI XLII) CY - Gijon, Spain DA - 30 May 2022 KW - Additive manufacturing KW - Laser metal deposition KW - Optical sensor KW - Optical emission spectroscopy KW - Process control PY - 2022 AN - OPUS4-55063 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kornev, R. A1 - Gornushkin, Igor B. A1 - Nazarov, V. A1 - Shkrunin, V. A1 - Ermakov, A. T1 - Features of hydrogen reduction of SiF4 in ICP plasma N2 - Probe diagnostics is used to determine the electron temperature and electron number density in a low pressure inductively coupled plasma (ICP) ignited in the mixture of SiF4, Ar and H2. Emission spectra of mixtures with different stoichiometry of components are investigated and the electron density distribution function (EDDF) is estimated. The optimal conditions for high conversion of SiF4 into Si are found by studying the dependence of the yield of silicon upon the ratio of reagents. The maximum achieved yield of silicon is 85% under the optimal conditions. Based on the analysis of IR and MS spectra of exhaust gases, 5% of initial SiF4 converts into volatile fluorosilanes. A rate of production of Si is 0.9 g/h at the energy consumption 0.56 kWh /g. KW - Plasma enhanced chemical vapor deposition KW - PECVD KW - Silicon tetrafluoride KW - Emission spectroscopy KW - Probe diagnostics PY - 2022 DO - https://doi.org/10.1016/j.sab.2022.106502 SN - 0584-8547 VL - 195 SP - 106502 PB - Elsevier B.V. AN - OPUS4-55316 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Giuseppe, Pignatelli A1 - Anne, Strasse A1 - Gumenyuk, Andrey A1 - Gornushkin, Igor B. T1 - Online monitoring of 3D printing of steel via optical emission spectroscopy N2 - Additive manufacturing by laser metal deposition (LMD) requires continuous online monitoring to ensure quality of printed parts. Optical emission spectroscopy (OES) is proposed for the online detection of printing defects by monitoring minute variations in the temperature of a printed spot during laser scan. A two-lens optical system is attached to a moving laser head and focused on a molten pool created on a substrate during LMD. The light emitted by the pool is collected by an ultraviolet–visible (UV–vis) spectrometer and processed. Two metrics are used to monitor variations in the surface temperature: the spectrally integrated emission intensity and correlation coefficient. The variations in the temperature are introduced by artificial defects, shallow grooves, and holes of various widths and diameters carved on a substrate surface. The metrics show sufficient sensitivity for revealing the surface defects, except for the smallest holes with an under-millimeter diameter. Additionally, numeric simulations are carried out for the detection of emission in the UV–vis and near-infrared (NIR) spectral ranges at various surface temperatures. It is concluded that both the metrics perform better in the NIR range. In general, this work demonstrates that spectrally resolved OES suits well for monitoring surface defects during 3D metal printing. KW - Process control KW - Additive manufacturing KW - Laser metal deposition KW - Optical emission spectroscopy KW - Optical sensor PY - 2022 DO - https://doi.org/10.1515/mt-2021-2082 VL - 64 IS - 1 SP - 24 EP - 32 PB - De Gruyter AN - OPUS4-54413 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Veico, V. P. A1 - Karlagina, Yu. Yu. A1 - Samokhvalov, A. A. A1 - Polyakov, D. S. A1 - Manokhin, S. S. A1 - Radaev, M. M. A1 - Odintsova, G. V. A1 - Gornushkin, Igor B. T1 - Surface Structuring and Reverse Deposition of Nanoporous Titanium Oxides by Laser Ablation of Titanium in Air N2 - The deposition of titanium oxides during titanium laser ablation in air has been experimentally and numerically investigated. A titanium sample was irradiated by nanosecond pulses from an Yb-fber laser with a beam scanned across the sample surface for its texturing. As a result, the hierarchical structure was observed consisting of a microrelief formed by the laser ablation and a nanoporous coating formed by the reverse deposition from the laser induced plasma plume. The chemical and phase composition of the nanoporous coating, as well as the morphology and structure of the surface, were studied using scanning electron microscopy, atomic force microscopy, and X-ray microanalysis. It was found that the deposit consists mostly of porous TiO2 with 26% porosity and inclusions of TiO, Ti2O3, and Ti2O3N. Optical emission spectroscopy was used to control the plasma composition and estimate the effective temperature of plasma plume. The chemical-hydrodynamic model of laser induced plasma was developed to get a deeper insight into the deposition process. The model predicts that condensed titanium oxides, formed in peripheral plasma zones, gradually accumulate on the surface during the plasma plume evolution. A satisfactory agreement between the experimental and calculated chemical composition of the plasma plume as well as between the experimental and calculated composition and thickness of the deposited film was demonstrated. This allows a cautious conclusion that the formation of condensed oxides in the plasma and their consequent deposition onto the ablation surface are among the key mechanisms of formation of porous surface films. KW - Laser ablation KW - Laser induced plasma deposition KW - Surface coating KW - Titanium dioxide KW - Hydrodynamic model KW - Plasma chemistry KW - Emission spectroscopy PY - 2022 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-548555 DO - https://doi.org/10.1007/s11090-022-10256-0 VL - 42 IS - 4 SP - 923 EP - 937 PB - Springer AN - OPUS4-54855 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Gornushkin, Igor B. A1 - Veiko, V. P. A1 - Karlagina, Y. Y. A1 - Samokhvalov, A. A. A1 - Polyakov, D. S. T1 - Equilibrium model of titanium laser induced plasma in air with reverse deposition of titanium oxides N2 - A chemical-hydrodynamic model of laser induced plasma is developed to study a process of deposition of titanium oxides from titanium laser induced plasma to the titanium target surface. The model is relevant to texturing and coating of titanium bone implants that is done by scanning the ablation laser across implant surfaces. Such the procedure improves the biocompatibility and durability of the implants. The model considers plasma chemical reactions, formation of condensed species inside the plasma plume, and deposition and accumulation of these species on the ablation surface. A chemical part of the model is based on minimization of Gibbs free energy of the chemical system; it is used to calculate the chemical composition of the plasma. A hydrodynamic part uses the 2D fluid-dynamic equations that model a 3D axisymmetric plasma plume and assumes the mass and energy exchange between the plasma and the surface. The initial parameters for the model are inferred from experiment. The model shows that condensed titanium oxides, mostly TiO2, form in a peripheral plasma zone and gradually adhere to the surface during the plasma plume evolution. The model predicts the major component and thickness of the deposit and can be applied for the optimization of experiments aimed at surface modification. KW - Fluid dynamic model KW - Plasma chemistry KW - Laser ablation KW - Laser induced plasma deposition KW - Surface coating KW - Titanium dioxide PY - 2022 DO - https://doi.org/10.1016/j.sab.2022.106449 SN - 0038-6987 SN - 0584-8547 VL - 193 SP - 1 EP - 7 PB - Elsevier CY - Amsterdam AN - OPUS4-54866 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - A Long Way of Plasma Modeling: Personal Experience N2 - Modeling is an important tool for understanding a physical phenomenon. It helps to interpret results of experiments and optimize experimental parameters for obtaining a desirable result. Modeling laser induced plasma is beneficial for many scientific and industrial fields, e.g., analytical chemistry, pulsed laser deposition, plasma enhanced chemical vapor deposition, laser welding, additive manufacturing etc. In this presentation, a personal experience in development of a physical model of laser induced plasma will be given in a chronological sequence starting from early 2000th and until now. Over the time, the model evolved from its simple analytical form that described plasma emission spectra to its current numerical form that describes plasma dynamics, chemistry, and interaction with a substrate surface. Several examples will be given for the application of the model to practical problems such as spectroscopic chemical analysis, plasma enhanced chemical vapor deposition, and surface modification by laser ablation. T2 - XII World Conference on Laser Induced Breakdown Spectroscopy CY - Bari, Italy DA - 05.09.2022 KW - Laser induced plasma KW - CFD computational fluid dynamic KW - Plasma modeling KW - Plasma chemistry PY - 2022 AN - OPUS4-55669 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Gornushkin, Igor B. A1 - Völker, Tobias T1 - Intrinsic Performance of Monte Carlo Calibration-Free Algorithm for Laser-Induced Breakdown Spectroscopy N2 - The performance of the Monte Carlo (MC) algorithm for calibration-free LIBS was studied on the example of a simulated spectrum that mimics a metallurgical slag sample. The underlying model is that of a uniform, isothermal, and stationary plasma in local thermodynamical equilibrium. Based on the model, the algorithm generates from hundreds of thousands to several millions of simultaneous configurations of plasma parameters and the corresponding number of spectra. The parameters are temperature, plasma size, and concentrations of species. They are iterated until a cost function, which indicates a difference between synthetic and simulated slag spectra, reaches its minimum. After finding the minimum, the concentrations of species are read from the model and compared to the certified values. The algorithm is parallelized on a graphical processing unit (GPU) to reduce computational time. The minimization of the cost function takes several minutes on the GPU NVIDIA Tesla K40 card and depends on the number of elements to be iterated. The intrinsic accuracy of the MC calibration-free method is found to be around 1% for the eight elements tested. For a real experimental spectrum, however, the efficiency may turn out to be worse due to the idealistic nature of the model, as well as incorrectly chosen experimental conditions. Factors influencing the performance of the method are discussed. KW - Laser induced breakdown spectroscopy KW - Calibration-free analysis KW - Monte Carlo algorithm PY - 2022 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-558016 DO - https://doi.org/10.3390/s22197149 VL - 22 IS - 19 SP - 7149 PB - MDPI AN - OPUS4-55801 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Völker, Tobias A1 - Gornushkin, Igor B. T1 - Importance of physical units in the Boltzmann plot method N2 - The Boltzmann plot is one of the most widely used methods for determining the temperature in different types of laboratory plasmas. It operates on the logarithm as a function of the dimensional argument, which assumes that the correct physical units are used. In many works using the Boltzmann method, there is no analysis of the dimension of this argument, which may be the cause of a potential error. This technical note offers a brief description of the method and shows how to correctly use physical units when using transcendental functions like the logarithm. KW - Boltzmann plot KW - Laser induced plasma PY - 2022 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-558039 DO - https://doi.org/10.1039/d2ja00241h SP - 1 EP - 3 PB - Royal Society of Chemistry AN - OPUS4-55803 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - Modeling, Diagnostics and Applications of Laser Induced Plasma N2 - Laser-induced plasmas are widely used in many areas of science and technology; examples include spectrochemical analysis, thin film deposition, and material processing. Several topics will be addressed. First, general phenomenology of laser-induced plasmas will be discussed. Then, a chemical model will be presented based on a coupled solution of Navier-Stokes, state, radiative transfer, material transport, and chemical equations. Results of computer simulations for several chemical systems will be shown and compared to experimental observations obtained by optical imaging, spectroscopy, and tomography. The latter diagnostic tools will also be briefly discussed. Finally, a prospective application of laser-induced plasma and plasma modeling will be illustrated on the example of chemical vapor deposition of molybdenum borides and micro processing and coating of titanium dental implants. T2 - University of Saragossa, Department of Chemistry CY - Saragossa, Spain DA - June 30, 2022 KW - Laser ablation KW - Laser induced plasma KW - Plasma modeling KW - Plasma diagnostics KW - Surface coating PY - 2022 AN - OPUS4-55166 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - Back Deposition of Titanium Oxides under Laser Ablation of Titanium: Simulation and Experiment N2 - Titanium is widely used in medicine for implants and prostheses, thanks to its high biocompatibility, good mechanical properties, and high corrosion resistance. Pure titanium, however, has low wear resistance and may release metallic titanium into surrounding tissues. Structuring and coating its surface with oxide layers are necessary for high wear resistance and improved biocompatibility. In this work, a combination of theoretical and experimental methods was used to study processes responsible for deposition of titanium oxides during ablation of titanium in air. The deposition process was modeled via the Navier-Stokes equations that accounted for the material removal and accumulation of the deposit on the ablation surface. The chemical part was based on the equilibrium model embedded into the hydrodynamic code. Simulations showed that the most active zone of production of condensed titanium oxides were at plasma periphery whereas a zone of strong condensation of titanium metal was above the molten pool. In experiment, a pulsed Yb fiber laser was scanned across a titanium surface. The temperature and composition of the plasma were inferred from plasma emission spectra. The post-ablation surface was analyzed by SEM, TEM, STEM, AFM, and XRD. The developed model well reproduced the main features of experimental data. It was concluded that the deposition of condensed metal oxides from the plasma is a principal mechanism of formation of nanoporous oxide layer on the metal surface. The method of surface structuring and modification by nanosecond laser ablation can be developed into a useful technology that may find applications in medicine, photonics, and other areas. T2 - SciX 2022, The Federation of Analytical Chemistry and Spectroscopy Societies (FACSS) CY - Cincinnati, OH, USA DA - 02.10.2022 KW - Surface coating KW - Laser ablation KW - Plasma modeling PY - 2022 AN - OPUS4-55969 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Martusevich, A. A1 - Kornev, R. A1 - Ermakov, A. A1 - Gornushkin, Igor B. A1 - Nazarov, V. A1 - Shabarova, L. A1 - Shkrunin, V. T1 - Spectroscopy of Laser-Induced Dielectric Breakdown Plasma in Mixtures of Air with Inert Gases Ar, He, Kr, and Xe N2 - The generation of ozone and nitrogen oxides by laser-induced dielectric breakdown (LIDB) in mixtures of air with noble gases Ar, He, Kr, and Xe is investigated using OES and IR spectroscopy, mass spectrometry, and absorption spectrophotometry. It is shown that the formation of NO and NO2 noticeably depends on the type of inert gas; the more complex electronic configuration and the lower ionization potential of the inert gas led to increased production of NO and NO2. The formation of ozone occurs mainly due to the photolytic reaction outside the gas discharge zone. Equilibrium thermodynamic analysis showed that the formation of NO in mixtures of air with inert gases does not depend on the choice of an inert gas, while the equilibrium concentration of the NO+ ion decreases with increasing complexity of the electronic configuration of an inert gas. KW - Laser-induced dielectric breakdown (LIDB) KW - Nitrogen monoxide KW - Nitrogen dioxide KW - Ozone KW - Emission spectroscopy KW - Inert gases KW - Thermodynamic analysis PY - 2023 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-568258 DO - https://doi.org/10.3390/s23020932 SN - 1424-8220 VL - 23 IS - 2 SP - 1 EP - 13 PB - MDPI CY - Basel, Switzerland AN - OPUS4-56825 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Völker, Tobias A1 - Gornushkin, Igor B. T1 - Extension of the Boltzmann plot method for multiplet emission lines N2 - The Boltzmann plot method is widely used to determine the temperature of laser induced plasma. It involves the use of individual lines that are not easy to find in complex spectra and/or in the spectral range available. If the number of such lines is not enough to build a reliable Boltzmann plot, overlapping lines are often used, which are separated by software. However, line separation is a rather imprecise procedure, which, in addition, requires significant computational costs. This study proposes an extension of the Boltzmann plot method that allows a specific group of unresolved lines to be included in a Boltzmann plot without the need to separate them. This group of lines are multiplets, lines of the same element with similar upper and lower transition states. The multiplet lines along with the individual lines are included in the algorithm, which also includes a correction for self-absorption and is used to determine the plasma temperature. The algorithm is tested on synthetic spectra which are consistent with the model of a homogeneous isothermal plasma in local thermodynamic equilibrium and is shown to be superior to the standard Boltzmann plot method both in more accurate determination of the plasma temperature and in a significant reduction in the computational time. The advantages and disadvantages of the method are discussed in the context of its applications in laser induced breakdown spectroscopy. KW - LIBS KW - Spectroscopy KW - Boltzmann plot KW - Multiplet KW - Spectral overlap PY - 2023 DO - https://doi.org/10.1016/j.jqsrt.2023.108741 SN - 1879-1352 VL - 310 SP - 1 EP - 5 PB - Elsevier AN - OPUS4-58058 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - Plasma Fundamentals and Diagnostics N2 - This course will provide an introduction to plasma diagnostic techniques. The major focus of the course will be on the discussions of the practical procedures as well as the underlying physical principles for the measurements of plasma fundamental characteristics (e.g., temperatures, thermodynamic properties, and electron number density). Particular emphasis will be placed on inductively coupled plasma–atomic emission spectrometry, but other analytical plasmas will also be used as examples when appropriate. Selected examples on how one can manipulate the operating conditions of the plasma source, based on the results of plasma diagnostic measurements, to improve its performance used for spectrochemical analysis will also be covered. Topics to be covered include thermal equilibrium, line profiles, temperatures, electron densities, excitation processes, micro reactions, pump and probe diagnostics, tomography, temporal and spatial resolution. Basis of plasma computer modeling will be presented. T2 - 2024 Winter Conference on Plasma Spectrochemistry CY - Tucson, Arizona, USA DA - 15.01.2024 KW - Plasma KW - Plasma fundamentals KW - Plasma diagnostics PY - 2024 AN - OPUS4-59430 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - Laser-Induced Plasma for Spectroscopy and More N2 - An overview of personal experience with laser-induced plasma (LIP) will be given. The combination of LIP with laser-induced fluorescence, atomic absorption, Raman spectroscopy and spatial heterodyne spectroscopy for elemental and isotopic analysis will be discussed. Unusual applications of LIP will be covered, such as LIP-based lasers and LIP-based chemical reactors. T2 - 2024 Winter Conference on Plasma Spectrochemistry CY - Tucson, Arizona, USA DA - 15.01.2024 KW - Laser induced plasma KW - Laser ablation KW - LIP-LIF KW - LIP-AAS PY - 2024 AN - OPUS4-59431 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kornev, Roman A1 - Gornushkin, Igor B. A1 - Shabarova, Lubov A1 - Kadomtseva, Alena A1 - Mochalov, Georgy A1 - Rekunov, Nikita A1 - Romanov, Sergey A1 - Medov, Vitaly A1 - Belousova, Darya A1 - Maleev, Nikita T1 - Plasma-Chemical Disposal of Silicon and Germanium Tetrachlorides Waste by Hydrogen Reduction N2 - The processes of hydrogen reduction of silicon and germanium chlorides under the conditions of high-frequency (40.68 MHz) counteracted arc discharge stabilized between two rod electrodes are investigated. The main gas-phase and solid products of plasma-chemical transformations are determined. Thermodynamic analysis of SiCl4 + H2 and GeCl4 + H2 systems for optimal process parameters was carried out. Using the example of hydrogen reduction of SiCl4 by the method of numerical modeling, gas-dynamic and thermal processes for this type of discharge are investigated. The impurity composition of gas-phase and solid reaction products is investigated. The possibility of single-stage production of high-purity Si and Ge mainly in the form of compact ingots, as well as high-purity chlorosilanes and trichlorogermane, is shown. KW - High-frequency arc discharge KW - Hydrogen reduction KW - Silicon chlorides KW - Germanium chlorides PY - 2024 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-594454 DO - https://doi.org/10.3390/sci6010001 VL - 6 IS - 1 SP - 1 EP - 12 PB - MDPI AG AN - OPUS4-59445 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. A1 - Kornev, R. A1 - Bulanov, A. A1 - Ermakov, A. T1 - Laser-Induced Dielectric Breakdown as a Novel Method for Obtaining Isotopically Enriched Nanoscale Substances N2 - The possibility of obtaining high-purity, isotopically modified and nanostructured elemental substances 29Si, 98Mo, and 100Mo, as well as 98Mox10By compounds from volatile halides under conditions of laser optical breakdown of a pulsed Nd:YAG laser is shown. Currently, research in the field of developing new methods for obtaining high-purity, isotopically modified and nanostructured substances is being actively conducted. Interest in Si and Mo combining these forms has noticeably increased. In nuclear medicine, 29Si-enriched nanoparticles can be used as contrast agents in magnetic resonance imaging (MRI), and 98Mo and 100Mo isotopes can be used to obtain the unstable 99mTc radioisotope. These applications do not require large amounts of isotopically modified Si and Mo. Their obtaining belongs to the problems of small chemistry. When obtaining isotopically modified Si and Mo, it is expedient to use their volatile fluorides, for which technologies of isotope enrichment and deep purification are well developed. These halides have high chemical and thermal stability; therefore, plasma-chemical methods based on the plasma of a pulsed discharge generated by laser breakdown can be promising for separating 29Si, 98Mo, and 100Mo from them. Laser breakdown in H2+Ar+SiF4 and H2+Ar+MoF6 mixtures in various stoichiometric ratios in the pressure range 30–760 Torr was carried out using a pulsed Nd:YAG laser. The pulse duration at a wavelength of 1064 nm was 15 ns, the repetition rate was 5 Hz. A pulse energy of 800 mJ was focused by a lens with a focal length of 5 cm. The energy density at the focus was 26 J/cm3 . It has been shown that when using a mixture based on 29SiF4, the sample contains a 29Si crystalline phase with an average grain size of 30–50 nm (Fig. 1a). When using a mixture based on 98MoF6, the sample contains a 98Mo crystalline phase with an average grain size of 70–100 nm (Fig. 1b). In this type of gas discharge, the possibility of forming superhard materials, isotopically modified molybdenum borides, was also studied. These substances in the form of nanosized particles have improved tribological properties. After ablation of metallic Mo in the H2 + BF3 mixture, the main phase was MoB2 in the form of a nanodispersed powder with an average grain size of 100 nm (Fig. 1c) [1]. A technique for modeling gas-dynamic and thermal conditions in a low-temperature chemically active plasma induced by laser breakdown is proposed. Using computational experiments, the features of gas mixture heating and the formation of nanoparticles in the LIBS reactor were studied T2 - 17the International Conference on Laser Applications in Life Sciences CY - Mugla, Turkey DA - 15.10.2023 KW - Laser induced plasma KW - Chemical vapor deposition KW - Isotopically enriched nanomaterials PY - 2023 AN - OPUS4-58888 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - INPR A1 - Gornushkin, Igor B. A1 - Kornev, R. A. A1 - Shabarova, L. V. A1 - Ermakov, A. A. A1 - Mochalov, G. M. A1 - Rekunov, N. V. A1 - Medov, V. A. A1 - Chaschina, A. D. A1 - Kalinina, A. A. T1 - Features of Plasma-Chemical Hydrogen Reduction of Volatile Silicon and Germanium Chlorides in RF-arc Discharge N2 - The processes of hydrogen reduction of silicon and germanium chlorides under the conditions of radio-frequency (40.68 MHz) counteracted arc discharge stabilized between two rod electrodes were investigated. The main gas-phase and solid products of plasma-chemical transformations were determined. Thermodynamic analysis of SiCl4 + H2 and GeCl4 + H2 systems was carried out. It is shown that under the implemented experimental conditions, equilibrium components of the products are established. The detected spectra of chemical activity were studied, which gave reason to assume that the molecular mechanism of the hydrogen reduction process is the main one. The impurity composition of gas-phase and solid reaction products was investigated. The possibility of single-stage production of high-purity Si and Ge mainly in the form of compact ingots, as well as high-purity chlorosilanes and trichlorogermane, was shown. KW - RF-arc discharge KW - Hydrogen reduction KW - Silicon chloride KW - Germanium chloride KW - Thermodynamic KW - Silicon KW - Germanium PY - 2023 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-588909 DO - https://doi.org/10.20944/preprints202311.1412.v1 SP - 1 EP - 14 PB - MDPI CY - Basel AN - OPUS4-58890 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - Improved Data Processing for Accurate Plasma Diagnostics with Implications for Calibration-Free LIBS N2 - Many LIBS papers report the determination of plasma temperature using the Boltzmann plot method or the determination of electron density using the Stark line broadening relation. This requires measuring the integrated intensities of the spectral lines and the linewidth under the assumption of optical thinness. It is taken for granted that this can be easily done either by working with the raw spectra or by fitting the appropriate function to the observed spectral lines. However, extracting the necessary information from raw spectral data is not as easy as it might seem. The quality of such extraction will depend to a decisive extent on the type of spectral instrument used. The spectrum emitted by the plasma is distorted by the device; an example is shown in Fig. 1. The elimination of this distortion belongs to the class of inverse problems, the successful solution of which fundamentally depends on the quality of the available information. When it comes to spectroscopy, the quality of information primarily means high spectral resolution and low noise. Not all spectrometers used in LIBS can provide the quality needed to solve the inverse problem; this casts doubt on many published plasma measurements. This communication will be devoted to the general shortcomings of spectral data processing and the inaccuracies in determining the plasma parameters resulting from these shortcomings. The analysis is based on the use of synthetic spectra generated by plasma with known temperature, particle density and electron density. The estimation of errors caused by inadequate processing of spectral data is made by comparing the initial and measured plasma parameters from the spectra. Recommendations will be made for which analytic function best approximates the observed spectral lines, and how data processing errors affect the accuracy of calibration-free LIBS will be discussed. These issues were only partially covered in previously published works, for example [1, 2]. T2 - Colloquium Spectroscopicum Internationale XLIII, The 5th Asian Symposium on Laser Induced Breakdown Spectroscopy June 26-30, 2023 CY - Tokushima, Japan DA - 26.06.2023 KW - Laser induced breakdown spectroscopy KW - Calibration-free LIBS KW - Data processing PY - 2023 AN - OPUS4-58589 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - Importance of Spectral Resolution for Accurate Plasma Diagnostics with Implications for Calibration-Free LIBS N2 - In the LIBS literature, almost every second article reports the determination of the plasma temperature using the Boltzmann plot method or the determination of the electron density using the Stark line broadening relation. The first requires the measurement of the integrated intensities of the spectral lines, and the second requires the measurement of the linewidth, under the same assumption of optical thinness. It is taken for granted that this can be easily done either by working with the raw spectra or by fitting an appropriate function to the observed spectral lines. As a rule, reported data are not verified either by an alternative method (e.g., Thomson scattering) or by computer simulations using synthetic spectra. However, the question of how to extract the necessary information from the raw spectral data is not as simple as it might seem. The quality of such an extraction will depend critically on the type of spectral instrument used, its resolution, and the noise superimposed on the data. The problem is that we do not see the spectrum emitted by the plasma, but the spectrum distorted by the measurement; an exaggerated example of such a distortion is shown in Fig. 1. The elimination of this distortion belongs to the class of inverse problems, the so-called ill-posed problems, whose successful solution crucially depends on the quality of the information available. When it comes to spectroscopy, quality of information primarily means high spectral resolution and low noise. Not all spectrometers used in LIBS can provide the quality needed to solve the inverse problem; this casts doubt on many published plasma measurements. The current presentation will be devoted to general shortcomings in the processing of spectral data and inaccuracies in the determination of plasma parameters resulting from these shortcomings. The analysis is based on the use of synthetic spectra produced by plasma with known characteristics, i.e., temperature, species densities, and electron density. The estimation of errors caused by inadequate processing of spectral data is made by comparing the initial and reconstructed plasma parameters. Recipes will be given for which the analytic function best approximates the observed spectral lines, and how data processing errors affect accuracy of calibration-free LIBS will be discussed. These issues were only partially covered in previously published works, for example [1, 2, 3]. T2 - EMS LIBS 2023 CY - Porto, Portugal DA - 04.09.2023 KW - Laser induced breakdown spectroscopy KW - Calibration-free analysis KW - Data processing PY - 2023 AN - OPUS4-58590 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - Improved Data Processing for Accurate Plasma Diagnostics and Calibration-Free LIBS N2 - Many applications of LIBS require the measurement of plasma temperature and electron density, which in turn requires knowledge of the integrated line intensity and the shape of the spectral lines. While the integral intensity is preserved as light passes through the spectrometer, the shape emitted by an individual atom or ion is greatly distorted. This is due, firstly, to the transfer of light through the plasma (self-absorption), secondly, to the influence of the instrumental function of the spectrometer, and, thirdly, to the aberrations of the optical system. In addition, processing of spectral information, such as background removal, noise reduction, deconvolution, and line fitting, introduces additional errors in the reconstructed linewidth and line integral, which leads to erroneous temperature and electron density values. This communication will be devoted to the general shortcomings of spectral data processing and the resulting inaccuracies in determining the plasma parameters. The analysis is based on the use of synthetic spectra generated by plasma with known temperature and particle density. The estimation of errors caused by inadequate processing of the spectral data is made by comparing the initial and determined plasma parameters. As a result, an improved data processing method will be proposed that takes into account the spectrum distortion by the instrumental function and integration on the pixel detector. The former is accounted for by convolution (instead of deconvolution) of the estimated line profile using a predetermined slit function, and the latter is achieved by piecewise integration of the line profile by the pixel detector, taking into account the pixel size and uniform or non-uniform pixel separation. Recommendations will be made for which analytic function best approximates the observed spectral lines and examples will be given for the application of this routine to calibration-free LIBS using both synthetic and experimental data. T2 - SciX 2023 CY - Sparks, USA DA - 08.10.2023 KW - Laser induced plasma KW - Calibration-free analysis KW - Plasma modeling KW - Emission spectroscopy PY - 2023 AN - OPUS4-58591 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. A1 - Mendez, Cristina A1 - Bordel, Nerea T1 - Investigation of LIBS-RF Plasma for Analytical Spectroscopy N2 - Laser breakdown spectroscopy (LIBS) is a common tool for applications in various fields of science and technology. Originally an atomic analysis technique, LIBS was later extended to molecular analysis due to the transient nature of the laser-induced plasma, which develops from a hot dissociation stage on a nanosecond to several microsecond scale to a relatively cold recombination stage on a scale of 10 to 100 microseconds after breakdown. Molecules formed during the recombination stage or incompletely dissociated after ablation can be efficiently detected, allowing the analysis of "difficult" elements or even molecular isotopes. However, with a small amount of ablated material and a short lifetime of the luminous plasma, analytical signals, especially molecular ones, can be very weak. Several methods have been proposed for reheating the plasma and increasing its lifetime, for example, a two-pulse LIBS or a LIBS combined with microwave radiation or with an electric spark discharge. Here we propose another one, LIBS combined with a capacitively coupled RF discharge at 13.6 MHz. The advantages of this combination are an increase in the lifetime of atomic and molecular emission and operation in a low-pressure atmosphere, which significantly reduces pressure line broadening and allows high-resolution spectroscopy. Another major advantage is operating in a chemically controlled atmosphere that can predictably drive desired chemical reactions. In this presentation, we will show the first results obtained with RF-LIBS combination. These will include separate and joint characterization of LIBS and RF plasmas and evaluation of its potential for elemental and molecular analysis and for plasma enhanced chemical vapor deposition. T2 - SciX 2023 CY - Sparks, USA DA - 08.10.2023 KW - Laser induced breakdown spectroscopy KW - Capacitively coupled discharge KW - RF-LIBS combination KW - Plasma reheating PY - 2023 AN - OPUS4-58592 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - Modeling laser-induced plasma in vacuum and low-pressure co2 atmosphere N2 - The aim of the project is to develop an adequate model of laser induced plasma for conditions expected in space missions, i.e., vacuum, or low-pressure CO2 atmosphere. Numerical modeling will help to find optimal experimental parameters for the laser ablation under artificial lunar or Martian environments and obtain both qualitative, in terms of a composition, and quantitative, in terms of an elemental abundance, information about interrogated samples based on spectral data generated by the model. The best operational conditions will be found at a low cost without conducting tedious and time-consuming optimization experiments. The modeling approaches will be supported by machine learning to accelerate the optimization. T2 - Workshop on DFG project CY - Brno, Czech Republic DA - 10.08.2023 KW - Laser induced plasma KW - CFD computational fluid dynamic KW - Plasma modeling PY - 2023 AN - OPUS4-58595 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Völker, Tobias A1 - Gornushkin, Igor B. T1 - Investigation of a method for the correction of self-absorption by Planck function in laser induced breakdown spectroscopy N2 - The electron density and temperature of a laser-induced plasma can be determined from the width and intensity of the spectral lines, provided that the corresponding optical transitions are optically thin. However, the lines in laser induced plasma are often self-absorbed. One of the methods of correction of this effect is based on the use of the Planck function and an iterative numerical calculation of the plasma temperature. In this study, the method is further explored and its inherent errors and limitations are evaluated. For this, synthetic spectra are used that fully correspond to the assumed conditions of a homogeneous isothermal plasma at local thermodynamic equilibrium. Based on the error analysis, the advantages and disadvantages of the method are discussed in comparison with other methods of self-absorption correction. KW - LIBS KW - Self-absorption KW - Planck function PY - 2023 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-572677 DO - https://doi.org/10.1039/D2JA00352J SN - 0267-9477 SP - 1 EP - 6 PB - Royal Society of Chemistry (RSC) AN - OPUS4-57267 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -