TY - CONF A1 - Gornushkin, Igor B. T1 - Modeling Equilibrium Chemistry in Laser Induced Plasmas and Plasma Chemical Reactors N2 - A brief introduction will be given on modeling chemical reactions in laser induced plasmas using stoichiometric and non-stoichiometric approaches. Several applications will be considered, which can benefit from such modeling. Those include plasma enhanced chemical vapor deposition (PECVD), surface modification and surface coating, and molecular analysis by LIBS. Each application will be illustrated by simulations of relevant chemical systems. For PECVD, chemical systems are BCl3/H2/Ar, BF3/H2/Ar, BCl3/BF3, Mo/BF3/H2; for surface modification/coating it is Ti/air; for molecular LIBS they are CaCO3/Ar, Ca(OH)2/Ar, and CaCl2/Ar. Advantages and shortcomings of equilibrium chemical hydrodynamic models of laser induced plasmas will be discussed. T2 - Moscow University, Department of Chemistry CY - Moscow, Russia DA - 26.10.2021 KW - Laser ablation KW - Laser induced plasma deposition KW - Emission spectroscopy KW - Surface coating KW - Hydrodynamic model KW - Plasma chemistry PY - 2021 AN - OPUS4-53629 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Sennikov, P. A1 - Ermakov, A. A1 - Kornev, R. A1 - Gornushkin, Igor B. T1 - Laser induced dielectric breakdown in reactive mixture SiF4 + H2 N2 - Important chemical process of reduction of SiF4 by hydrogen is realized in laser induced dielectric breakdown (LIDB) plasma in a gas mixture of SiF4 and H2. The process may be an alternative to a method of Plasma enhanced chemical vapor deposition (PECVD) which is commonly used for production of pure and isotopically pure silicon films. The composition of laser induced plasma in gases SiF4, SiF4 + H2, SiF4 + H2 + Ar at atmospheric pressure is studied and compared to the composition of inductively coupled plasma (ICP) in the same gases but at reduced pressure of 3 Torr. The gaseous products of chemical reactions are inferred from optical emission spectroscopy (OES) and IR spectroscopy. The reaction products of silicon fluoride SiF and fluorosilanes SiHxFy (x, y = 1, 2, 3) in LIDB plasma are observed and confirmed by equilibrium chemistry calculations and simulations of plasma expansion dynamics using a fluid dynamic-chemical plasma model. It is further suggested that chemisorption of fluorinated species like SiFx (x = 1, 2) followed by the surface reaction with H-atoms lead to a formation of silicon-to‑silicon bonds on a substrate surface. A conclusion is drawn that energetic laser induced plasma can prove efficient for one-step PECVD by hydrogen reduction of SiF4. KW - Silicon halides KW - Chemical vapor deposition KW - Laser induced dielectric breakdown KW - Hydrogen reduction PY - 2021 DO - https://doi.org/10.1016/j.sab.2021.106099 VL - 179 SP - 106099 PB - Elsevier B.V. AN - OPUS4-53583 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. A1 - Sennikov, P. A1 - Kornev, R. T1 - Laser induced gas breakdown in reactive mixtures N2 - Plasma-chemical approach is used for synthesis of various gaseous, liquid, and solid substances since 1960th. Nowadays, the method of plasma enhanced chemical vapor deposition (PECVD) is used for production of thin films, protective coatings, carbon-based nanostructures, high purity isotopic materials, biomaterials, and other products. Plasma for PECVD is typically created in various electrical discharges, e.g. DC and AC glow discharges or discharges operated at audio (10-20 kHz), radio (13.56 MHz), and microwave (2.45 GHz) frequencies. Plasma induced by a laser, a laser induced plasma (LIP), is rarely used to deposit materials from the gas phase as in PECVD. This work is aimed at reviving interest to this latter technology and showing its efficiency and potential. We run several pilot experiments. First, LIP is excited in BCl3 or BF3 plus H2 or CH4 to evaluate the efficiency of deposition of solid boron and boron carbide, the materials, which are largely used for refractory coatings. Second, we investigate a possibility of synthesis of fluorochlorosilanes SiFxCl4-x (x = 1, 2, 3) by LIP induced in SiF4 + SiCl4 gas mixtures. Using fluorochlorosilanes with different combinations of F and Cl in the SiFxCly molecule may add flexibility in processes of silicon deposition and etching. Third, LIP is excited in reactive mixture MoF6+H2+BF3 or on a Mo target ablated into H2/BF3 atmosphere. The goal is obtaining superhard molybdenum borides MoB, Mo2B, or MoB2. The gases used and solid deposits are analyzed by optical emission spectroscopy (OES), IR and mass spectrometry (MS). We also model the plasma and perform static equilibrium chemistry calculations to see if the desired reaction products are thermodynamically favorable. Dynamic calculations of the expanding plasma plume are performed using a hydrodynamic code combined with the open source chemical software. T2 - SciX 2021, The Federation of Analytical Chemistry and Spectroscopy Societies (FACSS) CY - Providence, RI, USA DA - September 26, 2021 KW - Laser ablation KW - Laser induced plasma deposition KW - Emission spectroscopy KW - Surface coating KW - Plasma chemistry KW - Hydrodynamic model PY - 2021 AN - OPUS4-53560 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. A1 - Veiko, V. P. A1 - Karlagina, J. J. A1 - Polyakov, D. S. A1 - Samokhvalov, A. A. T1 - Reverse deposition of TI-oxides under nanosecond laser ablation of TI N2 - Processes of laser induced oxidation of metals are typically studied in the framework of heterogeneous chemical reactions occurring on the irradiated surface, which lead to the formation of dense oxide films deposited on it. Such technology has many applications like color-laser marking technology and laser recording on thin metal films for creation of diffractive optical elements . Under the conditions of strong laser ablation, another oxidation mechanism becomes possible: evaporated atoms react with oxygen in a surrounding atmosphere and the products of such reaction are redeposited back onto the substrate. The chemical and phase composition of such deposited layer, its density, morphology and structure depend on the conditions of laser ablation. By varying these conditions, the main properties of such coating can be controlled that is important for some potential application (for example in biomedicine). In our report we present the study of the processes of redeposition of oxides structure under the conditions of multipulse nanosecond laser ablation of titanium (Grade 2) in air atmosphere at normal conditions. Our experiments show that titanium-implants with such deposited oxide layer have increased biocompatibility. Modelling of chemical reaction in laser-induced plasma coupled with experimental methods of plasma optical emission spectroscopy allows us to determine the types of main chemical reactions in laser plasma as well as it influences on the plume dynamics and vapor condensation kinetics. As a result, we propose the general physical picture of reverse deposition of oxides structure under the condition of strong nanosecond laser ablation. The formation of the titanium oxide precipitate is explained not only by collisions in the plasma, but also by the chemical interaction of titanium and oxygen, which leads to the formation of а low pressure area near the substrate and additionally stimulates the reverse deposition of oxides. We expect, similar processes are valid not only for titanium but also for other metals and, possibly, semiconductors. T2 - 28th International Conference on Advanced Laser Technologies CY - Online meeting DA - 06.09.2021 KW - Laser ablation KW - Laser induced plasma deposition KW - Surface coating KW - Emission spectroscopy KW - Titanium dioxide KW - Hydrodynamic model KW - Plasma chemistry PY - 2021 AN - OPUS4-53245 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kepes, E. A1 - Gornushkin, Igor B. A1 - Pořízka, P. A1 - Kaiser, J T1 - Spatiotemporal spectroscopic characterization of plasmas induced by non-orthogonal laser ablation N2 - Ablation geometry significantly affects the plasma parameters and the consequent spectroscopic observations in laser-induced breakdown spectroscopy. Nevertheless, plasmas induced by laser ablation under inclined incidence angles are studied to a significantly lesser extent compared to plasmas induced by standard orthogonal ablation. However, inclined ablation is prominent in stand-off applications, such as the Curiosity Mars rover, where the orthogonality of the ablation laser pulse cannot be always secured. Thus, in this work, we characterize non-orthogonal ablation plasmas by applying plasma imaging, tomography, and spectral measurements. We confirm earlier observations according to which non-orthogonal ablation leads to a laser-induced plasma that consists of two distinct parts: one expanding primarily along the incident laser pulse and one expanding along the normal of the sample surface. Moreover, we confirm that the former emits mainly continuum radiation, while the latter emits mainly sample-specific characteristic radiation. We further investigate and compare the homogeneity of the plasmas and report that inclined ablation affects principally the ionic emissivity of laser-induced plasmas. Overall, our results imply that the decreased fluence resulting from inclined angle ablation and the resulting inhomogeneities of the plasmas must be considered for quantitative LIBS employing non-orthogonal ablation. KW - Radon transformation KW - Laser induced plasma KW - Plasma tomography PY - 2020 DO - https://doi.org/10.1039/d0an01996h VL - 146 IS - 3 SP - 920 EP - 929 PB - The Royal Society of Chemistry AN - OPUS4-51774 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Xue, Boyang A1 - You, Yi A1 - Gornushkin, Igor B. A1 - Zheng, R. A1 - Riedel, Jens T1 - High-throughput underwater elemental analysis by μJ-laser-induced breakdown spectroscopy at kHz repetition rates: part I, ultrasound-enhanced optical emission spectroscopy towards application perspectives N2 - In recent years, laser-induced breakdown spectroscopy (LIBS) has gained significant attention as a means for simple elemental analyses. The suitability of LIBS for contactless analysis allows it to be a perfect candidate for underwater applications. While the majority of LIBS systems still rely upon sub-kHz pulsed lasers, this contribution introduces 10s-kHz low pulse-energy lasers into underwater LIBS to improve the throughput and statistical validity. Interestingly, the spectral component significantly changed above a critical laser repetition-rate threshold. Spectral lines of atomic hydrogen and oxygen stemming from water become visible beyond a ∼10 kHz repetition rate. This observation suggests a different plasma dynamic compared to low repetition rates. When the pulse-to-pulse interval becomes sufficiently short, a cumulative effect begins to be significant. Apparently, the new phenomena occur on a timescale corresponding to a threshold rate of ∼10 kHz, i.e. ∼100 μs. Analytically, the high repetition rates result in improved statistical validity and throughput. More plasma events per unit time allowed the use of low efficiency Echelle spectrometers without compromising on the analytical performance. Meanwhile, the presence of H I and O I out of the water (as the matrix) also offers internal standardization in underwater elemental analysis. Since the laser fluence was on the lower edge of the plasma threshold, an additional ultrasound source was introduced to induce external perturbation, which significantly improved the plasma formation stability. A huge advantage of LIBS is the possibility of detecting almost all elements within a sample simultaneously. Throughout the periodic table, chlorine is one of the most challenging elements. Consequently, Ca2+ and Na+ were used as samples to demonstrate the capability of this high repetition-rate LIBS platform. As an ambitious benchmark for our system, chlorine detection in water was also discussed. KW - High repetition rate KW - Laser-induced breakdown spectroscopy PY - 2020 DO - https://doi.org/10.1039/D0JA00290A VL - 35 IS - 12 SP - 2901 EP - 2911 PB - The Royal Society of Chemistry AN - OPUS4-51564 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Shabanov, Sergej V. A1 - Gornushkin, Igor B. T1 - Geometrical effects in data collection and processing for calibration-free laser-induced breakdown spectroscopy N2 - Data processing in the calibration-free laser-induced breakdown spectroscopy (LIBS) is usually based on the solution of the radiative transfer equation along a particular line of sight through a plasma plume. The LIBS data processing is generalized to the case when the spectral data are collected from large portions of the plume. It is shown that by adjusting the optical depth and width of the lines the spectra obtained by collecting light from an entire spherical homogeneous plasma plume can be least-square fitted to a spectrum obtained by collecting the radiation just along a plume diameter with a relative error of 10 −11 or smaller (for the optical depth not exceeding 0.3) so that a mismatch of geometries of data processing and data collection cannot be detected by fitting. Despite the existence of such a perfect least-square fit, the errors in the line optical depth and width found by a data processing with an inappropriate geometry can be large. It is shown with analytic and numerical examples that the corresponding relative errors in the found elemental number densities and concentrations may be as high as 50% and 20%, respectively. Safe for a few found exceptions, these errors are impossible to eliminate from LIBS data processing unless a proper solution of the radiative transfer equation corresponding to the ray tracing in the spectral data collection is used. KW - Laser induced plasma KW - LIBS KW - Plasma modeling KW - Plasma diagnostics PY - 2018 DO - https://doi.org/10.1016/j.jqsrt.2017.09.018 SN - 0022-4073 SN - 1879-1352 VL - 204 SP - 190 EP - 205 PB - Elsevier AN - OPUS4-43131 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. A1 - Völker, Tobias A1 - Kazakov, Alexander Ya. T1 - Improved algorithm for calibration-free laser induced breakdown spectroscopy N2 - An improved algorithm for calibration-free laser induced breakdown spectroscopy (CF LIBS) will be presented which includes several novel features in comparison with previously proposed similar algorithms. In particular, it allows using spectral lines with arbitrary optical thickness for the construction of Saha-Boltzmann plots, retrieves the absorption path length (plasma diameter) directly from a spectrum, replaces the Lorentzian line profile function by the Voigt function, and allows for self-absorption correction using pre-calculated and tabulated data rather than approximating functions. The tabulated data embody the solutions of the radiative transfer equation for numerous combinations of optical thicknesses and line widths. The algorithm is thoroughly verified using synthetic spectra. T2 - LIBS 2018 at SciX 2018 CY - Atlanta, GA, USA DA - 21.10.2018 KW - Plasma diagnostics KW - Laser induced plasma KW - LIBS KW - Plasma modeling PY - 2018 AN - OPUS4-46930 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Yuan, Huan A1 - Gojani, Ardian A1 - Gornushkin, Igor B. A1 - Wang, X. T1 - Investigation of laser-induced plasma at varying pressure and laser focusing N2 - Expansion dynamics of laser-induced plasma is studied for different focal positions of the ablation laser in the pressure range 10-2 - 105 Pa of the ambient air. The experimental results indicate that both the parameters significantly affect the plasma size, shape, intensity, reproducibility, and distance from the target surface. At pressures above 10 Pa, the plasma plume is confined by the ambient gas; the plumes are more compact and travel shorter distances from the target as compared to the analogous plume characteristics at pressures below 10 Pa. The pulse-to-pulse reproducibility of the integral emission intensity of the plasma is also different for different focal positions and pressures. It is found that the focal positions -1 cm and -2 cm below the target surface yield the most reproducible and intense emission signals as measured at the 600 ns delay time with the 100 ns gate. The information obtained can be of importance for pulsed laser deposition, laser welding, and analytical spectroscopy at reduced pressures. In general, a correct choice of the focal position and pressure of an ambient gas is very important for obtaining the strongest plasma emission, good reproducibility, and desired plasma plume shape. KW - Laser-induced plasma KW - Plasma expansion KW - Imaging PY - 2018 DO - https://doi.org/10.1016/j.sab.2018.10.005 SN - 0584-8547 VL - 150 SP - 33 EP - 37 PB - Elsevier AN - OPUS4-46207 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Martusevich, A. A1 - Kornev, R. A1 - Ermakov, A. A1 - Gornushkin, Igor B. A1 - Nazarov, V. A1 - Shabarova, L. A1 - Shkrunin, V. T1 - Spectroscopy of Laser-Induced Dielectric Breakdown Plasma in Mixtures of Air with Inert Gases Ar, He, Kr, and Xe N2 - The generation of ozone and nitrogen oxides by laser-induced dielectric breakdown (LIDB) in mixtures of air with noble gases Ar, He, Kr, and Xe is investigated using OES and IR spectroscopy, mass spectrometry, and absorption spectrophotometry. It is shown that the formation of NO and NO2 noticeably depends on the type of inert gas; the more complex electronic configuration and the lower ionization potential of the inert gas led to increased production of NO and NO2. The formation of ozone occurs mainly due to the photolytic reaction outside the gas discharge zone. Equilibrium thermodynamic analysis showed that the formation of NO in mixtures of air with inert gases does not depend on the choice of an inert gas, while the equilibrium concentration of the NO+ ion decreases with increasing complexity of the electronic configuration of an inert gas. KW - Laser-induced dielectric breakdown (LIDB) KW - Nitrogen monoxide KW - Nitrogen dioxide KW - Ozone KW - Emission spectroscopy KW - Inert gases KW - Thermodynamic analysis PY - 2023 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-568258 DO - https://doi.org/10.3390/s23020932 SN - 1424-8220 VL - 23 IS - 2 SP - 1 EP - 13 PB - MDPI CY - Basel, Switzerland AN - OPUS4-56825 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -