TY - JOUR A1 - Florian, Camilo A1 - Wonneberger, R. A1 - Undisz, A. A1 - Kirner, Sabrina V. A1 - Wasmuth, Karsten A1 - Spaltmann, Dirk A1 - Krüger, Jörg A1 - Bonse, Jörn T1 - Chemical effects during the formation of various types of femtosecond laser-generated surface structures on titanium alloy N2 - In this contribution, chemical, structural, and mechanical alterations in various types of femtosecond laser-generated surface structures, i.e., laser-induced periodic surface structures (LIPSS, ripples), Grooves, and Spikes on titanium alloy, are characterized by various surface analytical techniques, including X-ray diffraction and glow-discharge optical emission spectroscopy. The formation of oxide layers of the different laser-based structures inherently influences the friction and wear performance as demonstrated in oil-lubricated reciprocating sliding tribological tests (RSTTs) along with subsequent elemental mapping by energy-dispersive X-ray analysis. It is revealed that the fs-laser scan processing (790 nm, 30 fs, 1 kHz) of near-wavelength-sized LIPSS leads to the formation of a graded oxide layer extending a few hundreds of nanometers into depth, consisting mainly of amorphous oxides. Other superficial fs-laser-generated structures such as periodic Grooves and irregular Spikes produced at higher fluences and effective number of pulses per unit area present even thicker graded oxide layers that are also suitable for friction reduction and wear resistance. Ultimately, these femtosecond laser-induced nanostructured surface layers efficiently prevent a direct metal-to-metal contact in the RSTT and may act as an anchor layer for specific wear-reducing additives contained in the used engine oil. KW - Laser-induced oxide layer KW - Laser-induced periodic surface strctures (LIPSS) KW - Femtosecond laser processing KW - Tribology KW - Surface processing PY - 2020 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-505660 DO - https://doi.org/10.1007/s00339-020-3434-7 SN - 0947-8396 SN - 1432-0630 VL - 126 IS - 4 SP - 266 PB - Springer Nature Switzerland AG AN - OPUS4-50566 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Florian, Camilo T1 - Femtosecond laser nanostructuring of metal and semiconductor surfaces N2 - The irradiation of solids with high-intensity laser pulses can excite materials into extreme conditions, which then return to equilibrium via various structural and topographical relaxation mechanisms. Thus, ultrafast laser processing can manifest in various morphological surface transformations, ranging from direct contour shaping to large-area-surface functionalization through the generation of self-organized nano- and microstructures. The interaction mechanisms between semiconductors and metals with ultrashort laser pulses have been extensively studied using femtosecond laser sources, generating a general understanding of the main interaction mechanisms present during the processing of those materials. In the specific case of nanometer-scaled laser-induced periodic surface structures (LIPSS), however, the general explanation that fits all the experimental outcomes is still to be completed. The most accepted explanation consists in the interference of the incoming laser pulse with light scattered at the rough surface, e.g. via surface plasmon polaritons. Such scattering and interference effects generate a spatially modulated pattern of the absorbed optical energy featuring maxima and minima with periods very close to the laser irradiation wavelength, λ. One general criterion that allows to classify LIPSS in terms of their spatial periodicity (Λ) for normally incident radiation is the following: low spatial frequency for Λ≈λ, and high spatial frequency for Λ≪λ. In this way, the right combination of irradiation parameters (laser fluence, number of pulses per spot area unit and repetition rate) could be used to cover a wide size range that can ultimately be exploited for different applications in optics, biology, fluidics and tribology among others. T2 - SPIE Photonics West Conference, Symposium "Synthesis and Photonics of Nanoscale Materials XVII" CY - San Francisco, CA, USA DA - 01.02.2020 KW - Laser-induced periodic surface structures (LIPSS) KW - Femtosecond laser ablation KW - Metal KW - Semiconductor PY - 2020 AN - OPUS4-50388 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Florian, Camilo T1 - Femtosecond laser functionalized surfaces inspired by nature N2 - Nature has continuously inspired science when practical problems need to be solved in a functional and efficient way. The challenge for researchers usually consists in the transfer of such biological functionalities to diverse types of technical materials with the available processing technologies. In this regard, femtosecond laser-based approaches offer a large flexibility to modify virtually any material (metals, semiconductors and dielectrics), provide the ability to work under different environment conditions (air, vacuum or reactive atmospheres) and when combined with the proper optics, they offer exceptional spatial resolutions that could be used to mimic effectively very complex functionalities. In the particular case of surface processing, lasers have been proven feasible to functionalize materials by customizing its optical properties, chemical composition and surface morphology in a controllable way and in some cases at industrially relevant speeds. In this work, we present a selection of technical applications based on surface modifications in the form of laser-induced periodic surface structures (LIPSS) to tailor the material properties for utilization in optics, fluid transport, wetting control and tribology. T2 - SPIE Photonics West Conference, Symposium "Laser-Based Micro- and Nano-Processing XIV" CY - San Francisco, CA, USA DA - 01.02.2020 KW - Laser-induced periodic surface structures, LIPSS KW - Biomimetics KW - Surface functionalization KW - Laser ablation PY - 2020 AN - OPUS4-50400 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Florian, Camilo A1 - Kirner, Sabrina V. A1 - Krüger, Jörg A1 - Bonse, Jörn T1 - Surface functionalization by laser-induced periodic surface structures N2 - In recent years, the improved understanding of the formation of laser-induced periodic surface structures (LIPSS) has led to an emerging variety of applications that modify the optical, mechanical, and chemical properties of many materials. Such structures strongly depend on the laser beam polarization and are formed usually after irradiation with ultrashort linearly polarized laser pulses. The most accepted explanation for the origin of the structures is based on the interference of the incident laser radiation with electromagnetic surface waves that propagate or scatter at the surface of the irradiated materials. This leads to an intensity modulation that is finally responsible for the selective ablation in the form of parallel structures with periods ranging from hundreds of nanometers up to some micrometers. The versatility when forming such structures is based on the high reproducibility with different wavelengths, pulse durations and repetition rate laser sources, customized micro- and nanometric spatial resolutions, and compatibility with industrially relevant processing speeds when combined with fast scanning devices. In this contribution, we review the latest applications in the rapidly emerging field of surface functionalization through LIPSS, including biomimetic functionalities on fluid transport, control of the wetting properties, specific optical responses in technical materials, improvement of tribological performance on metallic surfaces, and bacterial and cell growth for medical devices, among many others. KW - Laser-induced periodic surface structures (LIPSS) KW - Laser processing KW - Surface functionalization KW - Applications PY - 2020 DO - https://doi.org/10.2351/7.0000103 SN - 1938-1387 VL - 32 IS - 2 SP - 022063 PB - Laser Institute of America AN - OPUS4-50780 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Florian, Camilo A1 - Déziel, J.-L. A1 - Kirner, Sabrina V. A1 - Siegel, J. A1 - Bonse, Jörn T1 - The role of the laser-induced oxide layer in the formation of laser-induced periodic surface structures N2 - Laser-induced periodic surface structures (LIPSS) are often present when processing solid targets with linearly polarized ultrashort laser pulses. The different irradiation parameters to produce them on metals, semiconductors and dielectrics have been studied extensively, identifying suitable regimes to tailor its properties for applications in the fields of optics, medicine, fluidics and tribology, to name a few. One important parameter widely present when exposing the samples to the high intensities provided by these laser pulses in air environment, that generally is not considered, is the formation of a superficial laser-induced oxide layer. In this paper, we fabricate LIPSS on a layer of the oxidation prone hard-coating material chromium nitride in order to investigate the impact of the laser-induced oxide layer on its formation. A variety of complementary surface analytic techniques were employed, revealing morphological, chemical and structural characteristics of well-known high-spatial frequency LIPSS (HSFL) together with a new type of low-spatial frequency LIPSS (LSFL) with an anomalous orientation parallel to the laser polarization. Based on this input, we performed finite-difference time-domain calculations considering a layered system resembling the geometry of the HSFL along with the presence of a laser-induced oxide layer. The simulations support a scenario that the new type of LSFL is formed at the interface between the laser-induced oxide layer and the non-altered material underneath. These findings suggest that LSFL structures parallel to the polarization can be easily induced in materials that are prone to oxidation. KW - Laser-induced oxide layer KW - Laser-induced periodic surface structures (LIPSS) KW - Surface chemistry KW - Femtosecond laser processing KW - Nanostructuring PY - 2020 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-502530 DO - https://doi.org/10.3390/nano10010147 SN - 2079-4991 VL - 10(1) IS - Special issue "Laser-generated periodic nanostructures" SP - 147-1 EP - 147-18 PB - MDPI CY - Basel AN - OPUS4-50253 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Lone, S. A. A1 - Muck, M. A1 - Fosodeder, P. A1 - Mardare, C.C. A1 - Florian, Camilo A1 - Weth, A. A1 - Krüger, Jörg A1 - Steinwender, C. A1 - Baumgartner, W. A1 - Bonse, Jörn A1 - Heitz, J. A1 - Hassel, A.W. T1 - Impact of Femtosecond Laser Treatment Accompanied with Anodization of Titanium Alloy on Fibroblast Cell Growth N2 - Herein, Ti6Al4V alloy is surface modified by femtosecond laser ablation. The microstructure image obtained by secondary electron microscopy reveals a combination of micrometer spikes or cones superimposed by nanoripples (laser‐induced periodic surface structures). To make the surface hydrophilic, anodization is performed resulting in further smoothness of microstructure and a final thickness of 35 ± 4 nm is estimated for oxide produced after anodization at 10 V (scan rate = 0.1 V s−1) versus standard hydrogen electrode. The obtained electrochemically active surface area (ECSA) is approximately 8 times larger compared with flat mirror polished Ti6Al4V surface. Combined chemical analysis by Pourbaix diagram and X‐ray photoelectron spectroscopy (XPS) analyses reveal that titanium and aluminum are passivating into TiO2 and Al2O3, but the dissolution of aluminum in the form of solvated ion is inevitable. Finally, cell seeding experiments on anodized and laser‐treated titanium alloy samples show that the growth of murine fibroblast cells is significantly suppressed due to unique surface texture of the laser‐treated and anodized titanium alloy sample. KW - Anodization KW - Femtosecond laser ablation KW - Laser-induced periodic surface structures, LIPSS KW - Ti6Al4V alloys KW - X-ray photoelectron spectroscopy PY - 2020 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-510263 DO - https://doi.org/https://doi.org/10.1002/pssa.201900838 SN - 1862-6300 SN - 1862-6319 VL - 217 IS - 13 SP - 1900838-1 EP - 1900838-9 PB - WILEY-VCH Verlag CY - Weinheim, Germany AN - OPUS4-51026 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Florian, Camilo A1 - Fischer, Daniel A1 - Freiberg, K. A1 - Duwe, M. A1 - Sahre, Mario A1 - Schneider, S. A1 - Hertwig, Andreas A1 - Krüger, Jörg A1 - Rettenmayr, M. A1 - Beck, Uwe A1 - Undisz, A. A1 - Bonse, Jörn T1 - Single Femtosecond Laser-Pulse-Induced Superficial Amorphization and Re-Crystallization of Silicon N2 - Superficial amorphization and re-crystallization of silicon in <111> and <100> orientation after irradiation by femtosecond laser pulses (790 nm, 30 fs) are studied using optical imaging and transmission electron microscopy. Spectroscopic imaging ellipsometry (SIE) allows fast data acquisition at multiple wavelengths and provides experimental data for calculating nanometric amorphous layer thickness profiles with micrometric lateral resolution based on a thin-film layer model. For a radially Gaussian laser beam and at moderate peak fluences above the melting and below the ablation thresholds, laterally parabolic amorphous layer profiles with maximum thicknesses of several tens of nanometers were quantitatively attained. The accuracy of the calculations is verified experimentally by high-resolution transmission electron microscopy (HRTEM) and energy dispersive X-ray spectroscopy (STEM-EDX). Along with topographic information obtained by atomic force microscopy (AFM), a comprehensive picture of the superficial re-solidification of silicon after local melting by femtosecond laser pulses is drawn. KW - Femtosecond laser KW - Silicon KW - Amorphization KW - Crystallization KW - Spectroscopic imaging ellipsometry PY - 2021 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-523687 UR - https://www.mdpi.com/1996-1944/14/7/1651 DO - https://doi.org/10.3390/ma14071651 SN - 1996-1944 VL - 14 IS - 7 SP - 1651-1 EP - 1651-21 PB - MDPI AG CY - Basel, Switzerland AN - OPUS4-52368 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Florian, Camilo A1 - Deziel, J.-L. A1 - Kirner, Sabrina V. A1 - Siegel, J. A1 - Bonse, Jörn T1 - Femtosecond laser-induced oxidation in the formation of periodic surface structures N2 - Micro- and nanostructuring with laser-induced periodic surface structures (LIPSS) has been demonstrated to be feasible in a wide variety of materials including metals, semiconductors and dielectrics. Suitable processing regimes for flat, curved and complex surfaces have been identified for many materials, allowing the generation of diverse applications in fields such as optics, tribology and medicine, to name a few. A common side effect when producing such structures in air environment is the formation of a thin surface oxide layer in the laser irradiated areas. Previous studies have shown that oxidation plays an important role in the tribological performance for which the structures where created, and very recently it has been shown that the laser-induced oxide graded layers may contribute to the formation of a new type of embedded low-spatial frequency LIPSS (LSFL) with annomalous orientation parallel to the laser polarization, in addition to the appearance of the well-known high-spatial frequency LIPSS (HSFL) at the surface. In this contribution, we explore this effect experimentally for chromium nitride (CrN) irradiated with femtosecond laser pulses and compare the findings to finite-difference time-domain (FDTD) simulations of the intensity distributions at different depth positions. T2 - 2021 Conference on Lasers and Electro-Optics/Europe – European Quantum Electronics Virtual Conferences CY - Munich, Germany DA - 21.06.2021 KW - Femtosecond laser ablation KW - Finite-difference time-domain calculations KW - Laser-induced periodic surface structures (LIPSS) KW - Surface oxidation PY - 2021 SN - 978-1-6654-1876-8 DO - https://doi.org/10.1109/CLEO/Europe-EQEC52157.2021.9542774 VL - 2021 SP - 1 PB - Institute of Electrical and Electronics Engineers (IEEE) CY - Piscataway, NJ, USA AN - OPUS4-53457 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Florian, Camilo T1 - Femtosecond laser-induced oxidation in the formation of periodic surface structures N2 - Laser-induced oxide graded layers may contribute to the formation of a new type of embedded low-spatial frequency LIPSS with an anomalous orientation parallel to the laser polarization. In this contribution, we explore this effect experimentally with femtosecond laser pulses and numerically by finite-difference time-domain (FDTD) calculations. T2 - 2021 Conference on Lasers and Electro-Optics/Europe – European Quantum Electronics Virtual Conferences CY - Online meeting DA - 21.06.2021 KW - Laser-induced periodic surface structures (LIPSS) KW - Surface oxidation KW - Femtosecond laser ablation KW - Finite-difference time-domain calculations PY - 2021 AN - OPUS4-52859 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Florian, Camilo T1 - Silicon surface amorphization and re-crystallization via single femtosecond laser pulses N2 - Silicon is the material responsible for most of the technological developments during the past century, making it one of the most studied materials along different disciplines. However, there are still unturned stones regarding its superficial re-solidification after femtosecond laser-induced local melting. In this presentation, we report irradiation experiments with single femtosecond pulses (790 nm, 30 fs) with a spatially Gaussian distribution on two different types of silicon with orientations <111> and <100>. The surface modifications were studied in detail via different techniques, including optical microscopy, atomic force microscopy, spectroscopic imaging ellipsometry, energy dispersive X-ray spectroscopy and high-resolution transmission electron microscopy. We quantitatively estimate the resulting radial amorphous layer depth profiles with maximum thicknesses around some tenths of nanometers for fluences in between the melting and ablation thresholds. In particular, spectroscopic imaging ellipsometry (SIE) allowed fast data acquisition using multiple wavelengths to provide experimental measurements for calculating the nanometric radial amorphous layer thickness profiles with micrometric lateral resolution based on a thin-film layer model. SIE proved to be capable of detecting and measuring nanometric structural and chemical modifications (oxidation) on the studied laser spots. The accuracy of the SIE-based calculations is verified experimentally by characterizing an in-depth material lamella via high-resolution transmission electron microscopy (HRTEM) and energy dispersive X-ray spectroscopy (STEM-EDX). For completeness, we present a mathematical modelling for the melt layer thickness considering different optical absorption processes including one photon absorption, two photon absorption and free-carrier absorption, highlighting the relevance of the latter one in the femtosecond laser-induced melting of silicon. T2 - 28th International Conference on Advanced Laser Technologies (ALT'21) CY - Online meeting DA - 06.09.2021 KW - Silicon KW - Femtosecond laser KW - Phase transitions KW - Spectroscopic imaging ellipsometry KW - Transmission electron microscopy PY - 2021 AN - OPUS4-53235 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Fosodeder, P. A1 - Baumgartner, W. A1 - Steinwender, C. A1 - Hassel, A. W. A1 - Florian, Camilo A1 - Bonse, Jörn A1 - Heitz, J. T1 - Repellent rings at titanium cylinders against overgrowth by fibroblasts N2 - The invention of new miniaturized and smart medical implants continues in all medical fields, including miniaturized heart pacemakers. These implants often come with a titanium (Ti) casing, which may have to be removed after several months or years and shall therefore not be completely overgrown by cells or scar tissue after implantation. Scar tissue is mainly formed by fibroblast cells and extracellular matrix proteins like collagen produced by them. Suppression of fibroblast growth at Ti surfaces could be achieved by 800 nm femtosecond laser-ablation creating self-organized sharp spikes with dimensions in the 10 μm-range which are superposed by fine sub-μm parallel ripples. On flat Ti control samples, the best results regarding suppression of cell growth were obtained on spike-structures which were additionally electrochemically anodized under acidic conditions. When Ti cylinders with a diameter of 8 mm (similar as the pacemakers) were placed upright in a culture of murine fibroblasts, a multi-layer cell growth up to a height of at least 1.5 mm occurred within 19–22 days. We have demonstrated that a laser-structured and anodized ring around the Ti cylinder surface is an effective way to create a barrier that murine fibroblasts were not able to overgrow within this time. KW - Cell-repellent surfaces KW - Femtosecond laser-processing KW - Electrochemical treatment KW - Laser-induced micro- and nanostructures KW - Medical implants PY - 2020 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-509966 DO - https://doi.org/10.1515/aot-2019-0070 SN - 2193-8576 SN - 2193-8584 VL - 9 IS - 3 (Topical issue: Laser micro- and nano-material processing - Part 2) SP - 113 EP - 120 PB - De Gruyter CY - Berlin AN - OPUS4-50996 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Florian, Camilo T1 - Influence of oxidation in the formation and performance of laser-induced periodic surface structures N2 - The fabrication of laser-induced periodic surface structures (LIPSS) has been reported for metallic, semiconductor and dielectric materials when irradiated with linearly polarized ultrashort laser pulses. Different sets of processing parameters have been identified and extensively studied, allowing the use of LIPSS for applications in medicine, tribology and surface wetting to name a few. One important parameter that is often not considered is the laser-induced oxidation that is produced especially when oxidation prone materials are irradiated in air environment. This surface oxidation can potentially influence the final structures size, shape and orientation and modify their functionality in some specific applications. In this work, we first study the influence of the laser-induced oxidation layer on the formation of LIPSS by characterizing the response of the oxidation prone hard-coating material chromium nitride. Moreover, we employ complementary surface and depth-profiling analytic techniques to reveal morphological, chemical and structural features of different types of surface structures and LIPSS produced on titanium-based substrates. Finite-difference time-domain (FDTD) calculations finally explain how this superficial oxidation layer promotes the formation of a new type of low spatial frequency LIPSS. Also, we measure the depth-extent of the different oxides formed and demonstrate its beneficial influence for friction reduction and wear resistance applications. T2 - SPIE Photonics West Conference, Symposium "Laser-Based Micro- and Nano-Processing XVI" CY - San Francisco, CA, USA DA - 22.01.2022 KW - Laser-induced periodic surface structures (LIPSS) KW - Oxidation KW - Femtosecond laser KW - Laser processing KW - Finite-difference time-domain calculations (FDTD) PY - 2022 AN - OPUS4-54322 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Florian, Camilo T1 - Optical thickness-profiling for fs-laserinduced superficial amorphization and oxide removal on silicon N2 - Amorphization and re-crystallization of polished silicon wafers cut in <111> and <100> orientation were studied after irradiation by single Ti:sapphire femtosecond laser pulses (790 nm, 30 fs) using optical imaging, topographic characterization, and transmission electron microscopy. Spectroscopic imaging ellipsometry (SIE) enabled fast data acquisition at multiple wavelengths and provided experimental data for calculating the amorphous layer thickness profiles with lateral resolution in the micrometer and vertical resolution in the nanometer range based on a thin-film layer model including the topmost native oxide. For a radially Gaussian shaped laser beam and at moderate peak laser fluences above the melting but below the ablation threshold, laterally parabolic amorphous layer profiles with maximum thicknesses of some tens of nanometers were quantitatively derived. Moreover, the threshold fluence of the native oxide removal was quantified. At laser peak fluences closely below the ablation threshold of silicon, SIE is capable to reveal even the laser-induced removal and formation of the native oxide covering the Si wafers under ambient air conditions. The accuracy of these all-optical, non-destructive SIE-based layer thickness assessments is verified experimentally through high-resolution transmission electron microscopy (HRTEM) and energy dispersive X-ray spectroscopy (STEM-EDX). Along with topographic information obtained by atomic force microscopy (AFM), a comprehensive picture of the oxide removal and superficial re-solidification of silicon after local melting by femtosecond laser pulses can be drawn. T2 - E-MRS Spring Meeting 2025 CY - Strasbourg, France DA - 26.05.2025 KW - Femtosecond laser KW - Laser-induced amorphization KW - Native oxide layer KW - Spectroscopic imaging ellipsometry KW - Transmission electron microscopy PY - 2025 AN - OPUS4-63275 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Hülagü, Deniz A1 - Hirahara, Kenta A1 - Fischer, Daniel A1 - Florian, Camilo A1 - Schusterbauer, Robert A1 - Ermilova, Elena A1 - Krüger, Jörg A1 - Unterreiner, Andreas-Neil A1 - Bonse, Jörn A1 - Hertwig, Andreas T1 - Using imaging ellipsometry to understand femtosecond laser materials processing of group IV materials N2 - Laser materials processing is an important tool for creating and shaping new materials. Laser machining, especially with ultrashort pulses offers the modification of surfaces, thin coatings, and bulk materials with an unprecedented precision and control. The most desired feature of pulsed laser processing in the femtosecond range is that the heat-affected zone in the irradiated material will be extremely small. To better understand the mechanisms involved during laser irradiation, it is important to analyse the outcome of light-matter interaction with spectroscopic methods. Ellipsometry, especially spectroscopic imaging ellipsometry (SIE), has become an important tool for this in recent times, as it gives access to local layer thicknesses, materials dielectric functions, and features like changes in surface roughness. This work includes an overview over our recent studies examining near-infrared fs-laser surface processing of different group IV materials. The superficial phase change of silicon from crystalline to amorphous has been investigated in the past as the result of laser processing strongly depends on the crystal orientation. Moreover, SIE is capable of determining the properties of buried a-Si interfaces with micrometer lateral and sub-nanoneter vertical precision. Additionally, the growth of native and laser-induced oxides can be revealed. T2 - ICSE10 - 10th International Conference on Spectroscopic Ellipsometry CY - Boulder, CO, USA DA - 08.06.2025 KW - Laser surface ablation KW - Amorphous Carbon KW - Silicon KW - Correlative Imaging Ellipsometry PY - 2025 AN - OPUS4-63633 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -