TY - CONF A1 - Mrkwitschka, Paul A1 - Mieller, Björn A1 - Rabe, Torsten A1 - Markötter, Henning ED - Petzow, G. ED - Mücklich, F. T1 - Machine learning assisted characterization of a Low Temperature Cofired Ceramic (LTCC) module measured by synchrotron computed tomography N2 - The 5G technology promises real time data transmission for industrial processes, autonomous driving, virtual and augmented reality, E-health applications and many more. The Low Temperature Co-fired Ceramics (LTCC) technology is well suited for the manufacturing of microelectronic components for such applications. Still, improvement of the technology such as further miniaturization is required. This study focuses on the characterization of inner metallization of LTCC multilayer modules, especially on the vertical interconnect access (VIA). Critical considerations for this characterization are delamination, pore clustering in and at the edge of the VIA, deformation, and stacking offset. A LTCC multilayer consisting of a glassy crystalline matrix with silver based VIAs was investigated by synchrotron x-ray tomography (CT). The aim of this study is to propose a multitude of structural characteristic values to maximize the information gained from the available dataset. Data analysis has been done with the open source software ImageJ as well as several additional plugins. The high-resolution CT data was evaluated through 2D slices for accessibility reasons. The segmentation of all 2000 slices to assess the different regions e.g. pores, silver and glass ceramic was done by a supervised machine learning algorithm. A quantitative evaluation of shape, deformation, and porosity of the VIA with respect to its dimensions is presented and the suitability of the characterization approach is assessed. T2 - 54. Metallographie Taagung CY - Online meeting DA - 16.09.2020 KW - Machine Learning KW - LTCC KW - Synchrotron Tomography PY - 2020 SN - 978-3-88355-422-8 VL - 54 SP - 136 EP - 141 PB - Deutsche Gesellschaft für Materialkunde e.V CY - Sankt Augustin AN - OPUS4-51298 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Rabe, Torsten A1 - Schulz, Bärbel A1 - Paulick, C. T1 - Development of ceramic helical springs for sensor applications N2 - At high temperatures and in harsh environments ceramic springs are often superior to metallic ones and allow for innovative solutions. A further application was proposed by using ceramic springs as capacitive force sensor. Lower and upper coil surfaces are coated by electrically conducting layers. Deformation of such spring results in a change of capacity. Sensor application calls for helical springs with rectangular cross-section, a linear stress-strain characteristic over entire deformation range and low manufacturing tolerances relating to inner and outer diameter, coil cross section and spring pitch. Furthermore, complex spring design with integrated connecting elements has to be realized. Alumina, zirconia (Y-TZP) and silicon nitride springs were produced by hard machining starting from sintered hollow cylinders. After external and internal cylindrical grinding the hollow cylinders were filled with hard wax, followed by multi-stage cutting of spring coils with custom-made cutting discs. Finally, hard wax was removed by melting and burnout. Best surface and edge qualities of springs were reached using Y-TZP material and hot isostatic pressed alumina. Y-TZP springs produced with material-specifically selected cutting discs and optimized process parameters show sharp coil edges without spallings and mean roughness values of inner surfaces < 0.2 μm. Manufacturing tolerances of spring diameters, spring pitch, height and width of coil cross section are in the range of ± 10 microns. Good reproducibility of spring geometry by optimized hard machining technology allows for production of Y-TZP springs with spring constants differing less than ± 1 % within a series. According to DIN 2090 spring constant for rectangular coil cross section is proportional to the square of height and width of coil cross section and indirectly proportional to number of active coils and to the cube of the mean spring diameter. Hence, spring constants can be tailored over a range of many orders of magnitude by changing the spring dimensions. Good agreement was reached between calculated target spring constants and measured values on produced springs. Alumina and zirconia springs were characterized relating to deformation behavior under dynamic compression load with various deformation speeds and under static tensile loads over long periods of time. Contrary to alumina springs, a non-linear stress-strain behavior of TZP springs was proved in both test series. It is supposed, that pseudoelasticity caused by stress-induced transformation of tetragonal to monoclinic phase is responsible for this special feature of TZP springs. Therefore, TZP material cannot be used for capacitive spring sensors. T2 - European Ceramic Society Conference (ECerS) CY - Torino, Italy DA - 16.06.2019 KW - Ceramic spring KW - Sensor KW - Spring constant KW - Failure test KW - Microstructure PY - 2019 AN - OPUS4-48610 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Rabe, Torsten A1 - Schulz, Bärbel A1 - Kalinka, Gerhard T1 - Deformation behavior of alumina and zirconia springs at room temperature N2 - At high temperatures and in harsh environments ceramic springs are often superior to metallic springs and allow for innovative solutions. A recently proposed application involves ceramic springs with metallized surfaces as capacitive force sensor. A strictly linear stress-strain characteristic of the spring is a precondition for such a sensor. Helical ceramic springs with rectangular cross-section have been produced from sintered hollow cylinders. Alumina, ATZ, Y-TZP, and Ce-TZP springs with identical dimensions were characterized and compared regarding deformation behavior. Spring deformation was investigated under various load scenarios. Dynamic compression was performed with deformation speeds from 0.3 to 30 mm/min. Spring constants of alumina springs are strain rate independent. By contrast, Y-TZP spring constant increases by approximately 3 % within the experimental framework. A high-precision test facility was developed to characterize spring displacement in nm range under static tensile load over long periods of time. Spring elongation with asymptotic course was observed for zirconia containing materials at room temperature. This effect is particularly strong in the case of Y-TZP. Up to 0.3 % time-dependent elongation was measured after 24 h under constant load. Deformation is completely reversible after unloading. Alumina springs do not show any time-dependent deformation under identical test conditions. Contrary to alumina springs, a non-linear stress-strain behavior of TZP springs at room temperature was proved in both test series. It is supposed, that pseudo-elasticity caused by stress-induced phase transformation from tetragonal to monoclinic is responsible for this special behavior of TZP springs. T2 - D-A-CH Keramiktagung CY - Leoben, Austria DA - 06.05.2019 KW - Phase transformation KW - Ceramic spring KW - Force-distance diagram KW - Deformation behavior PY - 2019 AN - OPUS4-48026 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Rabe, Torsten A1 - Schulz, Bärbel A1 - Paulick, C. A1 - Kalinka, Gerhard T1 - Helical zirconia (TZP) springs manufacturing and testing under mechanical and thermal load N2 - Helical springs with a rectangular cross-section have been machined from sintered and grinded hollow cylinders with high geometrical precision and good reproducibility. Such springs made from tetragonal zirconia polycrystal (TZP) ceramic show excellent edge quality because of high fracture toughness and bending strength of the starting material. Hence, springs with desired geometric dimension and tailored spring constant can be manufactured for highly demanding applications at high temperatures and in harsh environments. Prior to any practical use, application limits of springs under mechanical and thermal load have to be analyzed. Therefore, different displacement experiments were carried out on the helical TZP springs. - Dynamic displacement tests at various temperatures from -15°C to +60°C using a piezo actor to load/unload springs with frequencies between 1 and 40 Hz: Springs remained undamaged and the spring constants were not altered, even after more than one million cycles of compression loading. - Long-time displacement measurements under static tensile loading at room temperature with a high-precision interferometer test facility: Significant spring elongation under constant strain was surprisingly proved over a period of many hours already at room temperature. - Creeping experiments for 48 h under static compression load at different temperatures up to 1000 °C: After cooling down and load removing no permanent length reduction of springs was observed for test temperatures up to 700 °C. However, reshaping of TZP springs by plastic deformation is possible at higher temperatures and opens up additional possibilities for spring design and manufacturing. T2 - German Ceramic Society, Annual Meeting 2018 CY - München, Germany DA - 09.04.2018 KW - Ceramic springs KW - Manufacturing KW - Mechanical and thermal testing PY - 2018 AN - OPUS4-44728 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -