TY - CONF A1 - Bayerlein, Bernd T1 - Focused ion beam techniques beyond the ordinary - Methodological developments within ADVENT N2 - This poster presents the focused ion beam preparation methodologies developed within the framework of the EU funded EURAMET project ADVENT (Advanced Energy-Saving Technology). It summarises the key breakthroughs achieved for various in situ investigation techniques, e.g. in situ experiments at the Synchrotron facility BESSY II (IR-SNOM and XRS), TEM and SMM instrumentation. The created experimental devices from diverse thin-film semiconductor materials paved the way to dynamic structural studies bearing the potential to determine nanoscale correlations between strain and electric fields and, moreover, for the fundamental development of new in situ capabilities. N2 - Dieses Poster zeigt die FIB Präparationstechniquen, die im Rahmen des EU-finanzierten EURAMET-Projekts ADVENT (Advanced Energy Saving Technology) entwickelt wurden. Es fasst die wichtigsten Errungenschaften zusammen, die für verschiedene in situ Untersuchungstechniken erzielt wurden, z.B. situ-Experimente in dem Synchrotronring BESSY II (IR-SNOM und XRS), in situ TEM Experimente und für die SMM Technik. Die experimentellen Probenstrukturen, die aus verschiedenen Dünnschicht-Halbleitermaterialien erzeugt wurden, ebneten den Weg für dynamische Strukturstudien, die das Potenzial haben, nanoskalige Korrelationen zwischen Dehnung und elektrischen Feldern zu bestimmen und darüber hinaus neue in situ Messmethoden zu entwickeln. T2 - Final Meeting CY - Online Meeting DA - 30.06.2020 KW - FIB KW - Sample preparation KW - In situ KW - TEM KW - AFM PY - 2020 AN - OPUS4-51606 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Weinel, Kristina A1 - Hesse, René A1 - Agudo Jacome, Leonardo A1 - Gonzalez-Martinez, I. T1 - Complex artificial features on a TEM transparent membrane N2 - The phenomenon of expelling nanomaterial from microparticles of different materials, such as Au, WO3 or B2O3 under the influence of a convergent electron beam (CB) of a transmission electron microscope (TEM) was reviewed by Ignacio Gonzalez-Martinez [1]. Converging the e-beam in a TEM means that a high amount of energy enters the microparticle at a very local place and interact with the matter. Obviously, during the convergent beam protocol, no imaging with the electron beam is possible, but at the end, nanoparticles with different appearances lie down next to the microparticle while its size is reduced. Hence, there is a blind spot in the observation, which we want to fill, as we want to help clarify the nature of the expelling phenomenon. One hypothesis that explains the phenomenon is the so-called damage (of the microparticle) induced by an electric field (DIEF). Within this theory, the material is ionized and expelled in form of ionic waves. Our aim is therefore to fabricate specimens with artificial microlandscapes, as schematically exemplified in figure 1a), using the focused ion beam (FIB) and micromanipulators, as experimental setups to follow the paths of the expelled material. As a first step towards the fabrication of such specimen, we make experimental feasibility studies for each fabrication method, FIB structuring with Ga+ ion beam and micromanipulated microparticle deposition. Bridges (gray regions in Fig. 1) are created by milling a commercially available electron transparent membrane (silicon oxide or carbon) of a Cu-TEM grid. Platinum or carbon walls (blue features in Fig. 1) are built to stand on those bridges. Microparticles (yellow sphere in Fig. 1) of gold or other material are deposited in the center of the bridges. Figure 2a) shows four square holes (black area) and between them the residual silicon oxide membrane bridges (dark grey). On top of the bridges, walls (light grey) are deposited. The width of the bridges is different, the walls overlap the holes as well as the distance between the walls is very small, so these and other parameters need to be optimized. Figure 2b) shows a square hole (black) with bridges (white) on the right side on top of a carbon membrane (grey). There are still some obstacles which needs to be eliminated. For instance, the deposition process of the walls is not reliable as visible at the wall on top where a hole arises instead of a wall. These studies are still in progress and the results are further discussed in terms of the applicability for the DIEF experiment in the TEM. T2 - 4th EuFN and FIT4NANO Joint Workshop / Meeting CY - Vienna, Austria DA - 27.09.2021 KW - Transmission electron microscope (TEM) KW - Sample preparation KW - Micromanipulation KW - Focussed ion beam growth KW - Nano-landscape PY - 2021 AN - OPUS4-58259 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bayerlein, Bernd T1 - Probenpräparation für AFM-basierte Untersuchungsverfahren N2 - Adapted and advanced sample preparation of semiconductor layer systems with the focused ion beam for AFM-based test methods N2 - Der vorliegende Vortrag gibt einen Überblick über Probenpräparationen mit der Focused Ion Beam (FIB) für AFM-basierte Untersuchungsverfahren. Anhand zweier Beispiele wird gezeigt, wie ionenstrahlpolierte Lamellen aus Halbleiter-Schichtsystemen elektrisch leitfähig auf Substrate platziert werden, so dass in-situ und in-operando Messungen mit Scanning Microwave Microscope (SMM) bzw. Spectroscopic infrared scanning near-field optical microscope (IR-SNOM) durchgeführt werden können. T2 - 15. Berlin-Brandenburger Präparatorentreffen CY - Potsdam/Golm, Germany DA - 11.04.2019 KW - Focused Ion Beam KW - AFM based test methods KW - Sample preparation KW - Semiconductor materials KW - Layer system PY - 2019 AN - OPUS4-47784 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -