TY - CONF A1 - Mieller, Björn A1 - Eddah, Mustapha A1 - Bajer, Evgenia A1 - Markötter, Henning A1 - Kranzmann, Axel T1 - Destructive and non-destructive 3D-characterization of inner metal structures in ceramic packages N2 - Ceramic multilayer packages provide successful solutions for manifold applications in telecommunication, microsystem, and sensor technology. In such packages, three-dimensional circuitry is generated by combination of structured and metallized ceramic layers by means of tape casting and multilayer technology. During development and for quality assurance in manufacturing, characterization of integrity, deformation, and positioning of the inner metal features is necessary. Visualization with high resolution and material contrast is needed. Robot-assisted 3D-materialography is a useful technique to characterize such multimaterial structures. In that, many sections of the specimen are polished and imaged automatically. A three-dimensional representation of the structure is created by digital combination of the image stack. A quasi non-destructive approach is to perform X-ray computer tomography (CT) with different beam energies. The energies are chosen to achieve a good imaging of either the metal features, or the ceramic matrix of the structure. The combination of the respective tomograms results in a high contrast representation of the entire structure. Both methods were tested to characterize Ag and Ag/Pd conductors in a ceramic multilayer package. The results were compared in terms of information content, effort, and applicability of the methods. T2 - 98th DKG Annual Meeting - CERAMICS 2023 CY - Jena, Germany DA - 27.03.2023 KW - Ceramics KW - Synchrotron CT KW - 3D materialography PY - 2023 AN - OPUS4-57268 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -