TY - JOUR A1 - Martusevich, A. A1 - Kornev, R. A1 - Ermakov, A. A1 - Gornushkin, Igor A1 - Nazarov, V. A1 - Shabarova, L. A1 - Shkrunin, V. T1 - Spectroscopy of Laser-Induced Dielectric Breakdown Plasma in Mixtures of Air with Inert Gases Ar, He, Kr, and Xe JF - Sensors N2 - The generation of ozone and nitrogen oxides by laser-induced dielectric breakdown (LIDB) in mixtures of air with noble gases Ar, He, Kr, and Xe is investigated using OES and IR spectroscopy, mass spectrometry, and absorption spectrophotometry. It is shown that the formation of NO and NO2 noticeably depends on the type of inert gas; the more complex electronic configuration and the lower ionization potential of the inert gas led to increased production of NO and NO2. The formation of ozone occurs mainly due to the photolytic reaction outside the gas discharge zone. Equilibrium thermodynamic analysis showed that the formation of NO in mixtures of air with inert gases does not depend on the choice of an inert gas, while the equilibrium concentration of the NO+ ion decreases with increasing complexity of the electronic configuration of an inert gas. KW - Laser-induced dielectric breakdown (LIDB) KW - Nitrogen monoxide KW - Nitrogen dioxide KW - Ozone KW - Emission spectroscopy KW - Inert gases KW - Thermodynamic analysis PY - 2023 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-568258 DO - https://doi.org/10.3390/s23020932 SN - 1424-8220 VL - 23 IS - 2 SP - 1 EP - 13 PB - MDPI CY - Basel, Switzerland AN - OPUS4-56825 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kornev, R. A1 - Gornushkin, Igor B. A1 - Nazarov, V. A1 - Shkrunin, V. A1 - Ermakov, A. T1 - Features of hydrogen reduction of SiF4 in ICP plasma JF - Spectrochimica Acta Part B N2 - Probe diagnostics is used to determine the electron temperature and electron number density in a low pressure inductively coupled plasma (ICP) ignited in the mixture of SiF4, Ar and H2. Emission spectra of mixtures with different stoichiometry of components are investigated and the electron density distribution function (EDDF) is estimated. The optimal conditions for high conversion of SiF4 into Si are found by studying the dependence of the yield of silicon upon the ratio of reagents. The maximum achieved yield of silicon is 85% under the optimal conditions. Based on the analysis of IR and MS spectra of exhaust gases, 5% of initial SiF4 converts into volatile fluorosilanes. A rate of production of Si is 0.9 g/h at the energy consumption 0.56 kWh /g. KW - Plasma enhanced chemical vapor deposition KW - PECVD KW - Silicon tetrafluoride KW - Emission spectroscopy KW - Probe diagnostics PY - 2022 DO - https://doi.org/10.1016/j.sab.2022.106502 SN - 0584-8547 VL - 195 SP - 106502 PB - Elsevier B.V. AN - OPUS4-55316 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -