TY - JOUR A1 - Senoner, Mathias A1 - Unger, Wolfgang A1 - Reiners, Georg T1 - Quality assurance in nano-scale analysis JF - Applied physics A N2 - Zusammenfassung Some methods of nano-scale analysis are on the threshold of being a standard method in industry and therefore quality assurance becomes important. But, at the present time, there are deficits in standardisation and validation of these methods. Therefore, we have organised method comparisons and interlaboratory comparisons to overcome these deficits. We report the results of an interlaboratory comparison in step-height determination by atomic force microscopy and the development of a reference material for laterally resolving methods of material analysis. PY - 2003 DO - https://doi.org/10.1007/s00339-002-1976-5 SN - 0947-8396 VL - 76 IS - 6 SP - 919 EP - 921 PB - Springer CY - Berlin AN - OPUS4-2289 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -