TY - JOUR A1 - Moritz, W. A1 - Werner, R. A1 - Tausche, A. A1 - Cherkaschinin, G. A1 - Molajew, R. A1 - Wirth, Thomas A1 - Unger, Wolfgang A1 - Linke, S. T1 - Alloys for gas sensors investigated using the continuous gradient-high throughput screening macroscope CG-HTSM N2 - Ternary alloys have been studied as the gate metal of chemical sensors based on the field effect in silicon. The investigation of reduced poisoning of hydrogen sensors by H2S is presented in the alloy system PdxNiyCo1-x-y. A new method in high throughput screening of alloys is applied. Not singular sample compositions but a continuous gradient in alloy concentrations was produced on a semiconductor sample. A laser scanning system produces a photo current in the semiconductor to map the sensor signal and provide a quasi continuous alloy characterization. The new system is therefore called Continuous Gradient—High Throughput Screening Macroscope (CG-HTSM). Typically 625 alloys are characterized in 15 minutes. The resolution of our set-up allows distinguishing 100.000 alloy compositions. KW - Alloy KW - Sensor KW - High throughput screening KW - Macroscope PY - 2011 DO - https://doi.org/10.1166/sl.2011.1586 SN - 1546-198X SN - 1546-1971 VL - 9 IS - 2 SP - 662 EP - 664 PB - American Scientific Publishers (ASP) CY - Stevenson Ranch, CA, USA AN - OPUS4-24504 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Abou-Ras, D. A1 - Caballero, R. A1 - Fischer, C.-H. A1 - Kaufmann, C.A. A1 - Lauermann, I. A1 - Mainz, R. A1 - Mönig, H. A1 - Schöpke, A. A1 - Stephan, C. A1 - Streeck, C. A1 - Schorr, S. A1 - Eicke, A. A1 - Döbeli, M. A1 - Gade, B. A1 - Hinrichs, J. A1 - Nunney, T. A1 - Dijkstra, H. A1 - Hoffmann, V. A1 - Klemm, D. A1 - Efimova, V. A1 - Bergmaier, A. A1 - Dollinger, G. A1 - Wirth, Thomas A1 - Unger, Wolfgang A1 - Rockett, A.A. A1 - Perez-Rodriguez, A. A1 - Alvarez-Garcia, J. A1 - Izquierdo-Roca, V. A1 - Schmid, T. A1 - Choi, P.-P. A1 - Müller, M. A1 - Bertram, F. A1 - Christen, J. A1 - Khatri, H. A1 - Collins, R.W. A1 - Marsillac, S. A1 - Kötschau, I. T1 - Comprehensive comparison of various techniques for the analysis of elemental distributions in thin films N2 - The present work shows results on elemental distribution analyses in Cu(In,Ga)Se2 thin films for solar cells performed by use of wavelength-dispersive and energy-dispersive X-ray spectrometry (EDX) in a scanning electron microscope, EDX in a transmission electron microscope, X-ray photoelectron, angle-dependent soft X-ray emission, secondary ion-mass (SIMS), time-of-flight SIMS, sputtered neutral mass, glow-discharge optical emission and glow-discharge mass, Auger electron, and Rutherford backscattering spectrometry, by use of scanning Auger electron microscopy, Raman depth profiling, and Raman mapping, as well as by use of elastic recoil detection analysis, grazing-incidence X-ray and electron backscatter diffraction, and grazing-incidence X-ray fluorescence analysis. The Cu(In,Ga)Se2 thin films used for the present comparison were produced during the same identical deposition run and exhibit thicknesses of about 2 µm. The analysis techniques were compared with respect to their spatial and depth resolutions, measuring speeds, availabilities, and detection limits. KW - Elemental distributions KW - Comparison KW - Depth profiling KW - Chemical mapping KW - Thin films KW - Solar cells KW - Chalcopyrite-type KW - Cu(In,Ga)Se2 PY - 2011 DO - https://doi.org/10.1017/S1431927611000523 SN - 1431-9276 SN - 1435-8115 VL - 17 IS - 5 SP - 728 EP - 751 PB - Cambridge University Press CY - New York, NY AN - OPUS4-24506 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Beck, Uwe A1 - Reiners, Georg A1 - Wirth, Thomas A1 - Hoffmann, V. A1 - Präßler, F. T1 - Multilayer reference coatings for depth profile standards N2 - Depth profiles of layer systems consisting of different film materials and having different thicknesses are of great practical importance. Multilayer reference coatings of conducting (Ti/Al) and non-conducting (SiO2/Si3N4) material are analyzed with Auger electron spectroscopy (AES) and glow discharge optical emission spectroscopy (GDOES) depth profiling. Deposition techniques, physical vapor deposition for Ti/Al layers and plasma-enhanced chemical vapor deposition for SiO2/Si3N4 layers, as well as measurement and testing procedures for the determination of layer thickness such as optical and mechanical stylus and spectroscopie ellipsometry are discussed. GDOES depth profiles in direct current (d.c.) and radio frequency (r.f.) mode are related to measurements of crater profiles and compared with line scans and depth profiles performed by AES. It is shown that such multilayer reference systems are appropriate for calibration of depth profiles, i.e. the definition and the evaluation of the depth resolution at the interface, the determination of sputter rates both for d.c.- and r.f.-GDOES and AES, the optimization of the conditions of analysis, and the quantification of analysis itself. KW - Depth profiling KW - Multilayers KW - Glow discharge KW - Auger electron spectroscopy PY - 1996 DO - https://doi.org/10.1016/S0040-6090(96)09083-9 SN - 0040-6090 VL - 290-291 SP - 57 EP - 62 PB - Elsevier CY - Amsterdam AN - OPUS4-25436 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - RPRT A1 - Almagro, J.-F. A1 - Busch, P. A1 - Gohil, D. D. A1 - Heikinheimo, E. A1 - Karduck, P. A1 - Richter, S. A1 - Sloof, W. G. A1 - Thiot, J.-F. A1 - Wirth, Thomas T1 - Electron-Probe MICROanalysis of LighT Elements - Measurement Methods and Certified Reference Materials (MICROLITE) PY - 2002 IS - 65 SP - 1 EP - 156 PB - National Physical Laboratory CY - Teddington, Middlesex AN - OPUS4-1911 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Wirth, Thomas A1 - Beck, Uwe A1 - Hoffmann, V. A1 - Kurt, R. A1 - Kämmer, K. A1 - Thielsch, R. T1 - Interference Phenomena at Transparent Layers in Glow Discharge Optical Emission Spectrometry KW - Glow discharge optical emission spectroscopy KW - Depth profile KW - Interference KW - Transparent layers KW - Layer thickness KW - Refractive index KW - GD-OES PY - 1999 SN - 0003-7028 SN - 1943-3530 VL - 53 IS - 8 SP - 987 EP - 990 PB - Society for Applied Spectroscopy CY - Frederick, Md. AN - OPUS4-777 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Wirth, Thomas A1 - Sahre, Mario A1 - Männ, Marion A1 - Gamer, Nadja A1 - Hoffmann, V. A1 - Hentschel, R. A1 - Brauneck, U. A1 - Mollenhauer, R. ED - Berg, S. T1 - Reference coatings for gdoes depth profiling - Preliminary results of a VAMAS project T2 - 7th International Conference on Plasma Surface Engineering (PSE 2000) CY - Garmisch-Partenkirchen, Germany DA - 2000-09-17 PY - 2000 SN - 0257-8972 IS - 142-144 PB - Elsevier CY - Amsterdam AN - OPUS4-970 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Müller, Ralf A1 - Behrens, Harald A1 - Ageo-Blanco, Boris A1 - Reinsch, Stefan A1 - Wirth, Thomas T1 - Foaming Species and Trapping Mechanisms in Barium Silicate Glass Sealants N2 - Barium silicate glass powders 4 h milled in CO2 and Ar and sintered in air are studied with microscopy, total carbon analysis, differential thermal Analysis (DTA), vacuum hot extraction mass spectroscopy (VHE-MS), Fourier-transformed infrared (FTIR) spectroscopy, X-ray photoelectron spectroscopy (XPS), and time-of-flight secondary-ion mass spectrometry (TOF-SIMS). Intensive foaming of powder compacts is evident, and VHE studies prove that foaming is predominantly caused by carbonaceous species for both milling gases. DTA Shows that the decomposition of BaCO3 particles mix-milled with glass powders occurs at similar temperatures as foaming of compacts. However, no carbonate at the glass surface could be detected by FTIR spectroscopy, XPS, and TOF-SIMS after heating to the temperature of sintering. Instead, CO2 molecules unable to rotate identified by FTIR spectroscopy after milling, probably trapped by mechanical dissolution into the glass bulk. Such a mechanism or microencapsulation in cracks and particle aggregates can explain the contribution of Ar to foaming after intense milling in Ar atmosphere. The amount of CO2 molecules and Ar, however, cannot fully explain the extent of foaming. Carbonates mechanically dissolved beneath the surface or encapsulated in cracks and micropores of particle aggregates are therefore probably the major foaming source. KW - Milling KW - Foaming KW - Glass powder KW - Sintering PY - 2021 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-531227 DO - https://doi.org/10.1002/adem.202100445 SN - 1438-1656 VL - 24 IS - 6 SP - 2100445-1 EP - 2100445-13 AN - OPUS4-53122 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kirner, Sabrina A1 - Wirth, Thomas A1 - Sturm, Heinz A1 - Krüger, Jörg A1 - Bonse, Jörn T1 - Nanometer-resolved chemical analyses of femtosecond laser-induced periodic surface structures on titanium N2 - The chemical characteristics of two different types of laser-induced periodic surface structures (LIPSS), so-called high and low spatial frequency LIPSS (HSFL and LSFL), formed upon irradiation of titanium surfaces by multiple femtosecond laser pulses in air (30 fs, 790 nm, 1 kHz), are analyzed by various optical and electron beam based surface analytical techniques, including micro-Raman spectroscopy, energy dispersive X-ray analysis, X-ray photoelectron spectroscopy, and Auger electron spectroscopy. The latter method was employed in a high-resolution mode being capable of spatially resolving even the smallest HSFL structures featuring spatial periods below 100 nm. In combination with an ion sputtering technique, depths-resolved chemical information of superficial oxidation processes was obtained, revealing characteristic differences between the two different types of LIPSS. Our results indicate that a few tens of nanometer shallow HSFL are formed on top of a ∼150 nm thick graded superficial oxide layer without sharp interfaces, consisting of amorphous TiO2 and partially crystallized Ti2O3. The larger LSFL structures with periods close to the irradiation wavelength originate from the laser-interaction with metallic titanium. They are covered by a ∼200 nm thick amorphous oxide layer, which consists mainly of TiO2 (at the surface) and other titanium oxide species of lower oxidation states underneath. KW - Laser-induced periodic surface structures (LIPSS) KW - Femtosecond laser KW - Oxidation KW - Titanium KW - Auger electron spectroscopy PY - 2017 DO - https://doi.org/10.1063/1.4993128 SN - 0021-8979 VL - 122 IS - 10 SP - 104901, 1 EP - 9 PB - AIP Publishing CY - Melville, NY, USA AN - OPUS4-41905 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Hodoroaba, Vasile-Dan A1 - Wirth, Thomas A1 - Reiners, Georg ED - Berg, S. T1 - Glow Discharge Optical Emission Spectroscopy (GDOES) - A powerful tool for the characterisation of coatings T2 - 7th International Conference on Plasma Surface Engineering (PSE 2000) CY - Garmisch-Partenkirchen, Germany DA - 2000-09-17 PY - 2000 SN - 0257-8972 IS - 142-144 SP - 1(?) EP - 15(?) PB - Elsevier CY - Amsterdam AN - OPUS4-960 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Rades, Steffi A1 - Ortel, Erik A1 - Wirth, Thomas A1 - Holzweber, Markus A1 - Pellegrino, F. A1 - Martra, G. A1 - Hodoroaba, Vasile-Dan T1 - Analysis of fluorine traces in TiO2 nanoplatelets by SEM/EDX, AES and TOF-SIMS N2 - Hydrothermal synthesis of anatase TiO2 nanosheets with a high fraction of exposed {001} facets and related high photocatalytic activity - as an alternative to bipyramidal anatase TiO2 nanoparticles mainly exposing the {101} facets. The scope of the material preparation work is the thermal reduction of residual fluorides from HF (capping agent) induced during the synthesis of TiO2 nanosheets by calcination at 873K. The analytical task consists of detection and localization of fluorine present at the surface and/or in the bulk of TiO2 nanosheets before and after calcination by SEM/EDX, Auger electron spectroscopy and ToF-SIMS. KW - Fluorine KW - SEM/EDX KW - TiO2 nanoplatelets KW - Auger electron spectroscopy KW - TOF-SIMS PY - 2017 UR - https://www.cambridge.org/core/journals/microscopy-and-microanalysis/article/analysis-of-fluorine-traces-in-tio2-nanoplatelets-by-semedx-aes-and-tofsims/91EA2C0666B7927FCA57D2AD114910F6 DO - https://doi.org/10.1017/S1431927617010200 SN - 1435-8115 SN - 1431-9276 VL - 23 IS - S1 (July) SP - 1908 EP - 1909 PB - Cambridge University Press CY - New York, NY, U.S.A. AN - OPUS4-42455 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kim, K. J. A1 - Kim, A. S. A1 - Jang, J. S. A1 - Suh, J. K. A1 - Wirth, Thomas A1 - Hodoroaba, Vasile-Dan A1 - Unger, Wolfgang A1 - Araujo, J. R. A1 - Archanjo, B. S. A1 - Galhardo, C. E. A1 - Damasceno, J. A1 - Achete, C. A. A1 - Wang, H. A1 - Wang, M. A1 - Bennett, J. A1 - Simons, D. A1 - Kurokawa, A. A1 - Terauchi, S. A1 - Fujimoto, T. A1 - Streeck, C. A1 - Beckhoff, B. A1 - Spencer, S. A1 - Shard, A. T1 - Measurement of mole fractions of Cu, In, Ga and Se in Cu(In,Ga)Se2 films N2 - CCQM key comparison K-129 for the quantitative analysis of Cu(In,Ga)Se2 (CIGS) films has been performed by the Surface Analysis Working Group (SAWG) of the Consultative Committee for Amount of Substance (CCQM). The objective of this key comparison is to compare the equivalency of the National Metrology Institutes (NMIs) and Designated Institutes (DIs) for the measurement of mole fractions of Cu, In, Ga and Se in a thin CIGS film. The measurand of this key comparison is the average mole fractions of Cu, In, Ga and Se of a test CIGS alloy film in the unit of mole fraction (mol/mol). Mole fraction with the metrological unit of mol/mol can be practically converted to atomic fraction with the unit of at%. In this key comparison, a CIGS film with certified mole fractions was supplied as a reference specimen to determine the relative sensitivity factors (RSFs) of Cu, In, Ga and Se. The mole fractions of the reference specimen were certified by isotope dilution - inductively coupled plasma/mass spectrometry (ID-ICP/MS) and are traceable to the SI. A total number counting (TNC) method was recommended as a method to determine the signal intensities of the constituent elements acquired in the depth profiles by Secondary Ion Mass Spectrometry (SIMS), X-ray Photoelectron Spectroscopy (XPS) and Auger Electron Spectroscopy (AES). Seven NMIs and one DI participated in this key comparison. The mole fractions of the CIGS films were measured by depth profiling based-SIMS, AES and XPS. The mole fractions were also measured by non-destructive X-Ray Fluorescence (XRF) Analysis and Electron Probe Micro Analysis (EPMA) with Energy Dispersive X-ray Spectrometry (EDX). In this key comparison, the average degrees of equivalence uncertainties for Cu, In, Ga and Se are 0.0093 mol/mol, 0.0123 mol/mol, 0.0047 mol/mol and 0.0228 mol/mol, respectively. These values are much smaller than that of Fe in a Fe-Ni alloy film in CCQM K-67 (0.0330 mol/mol). This means that the quantification of multi-element alloy films is possible by depth profiling analysis using the TNC method. KW - CIGS KW - Key comparison KW - CCQM KW - SIMS KW - XPS KW - AES KW - XRF KW - EPMA PY - 2016 UR - http://iopscience.iop.org/article/10.1088/0026-1394/53/1A/08011 DO - https://doi.org/10.1088/0026-1394/53/1A/08011 SN - 0026-1394 SN - 1681-7575 VL - 53, Technical Supplement SP - Article 08011, 1 EP - 19 PB - IOP Publishing AN - OPUS4-38110 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -