TY - CHAP A1 - Österle, Werner ED - Czichos, Horst T1 - Sub-surface microstructural analysis T2 - Handbook of technical diagnostics - Fundamentals and application to structures and systems N2 - Many performance properties of devices or interacting machine parts are related to superficial layers which often show completely different or at least modified microstructures compared to the bulk materials. A quasi non-destructive technique will be described which enables us to obtain detailed information of a material's state at a certain site of interest down to a depth of 10 µm from the surface with nanometre or even atomistic resolution. KW - FIB-Technik KW - Zielpräparation KW - Randschichtanalyse KW - Nanocharakterisierung PY - 2013 SN - 978-3-642-25849-7 SN - 978-3-642-25850-3 DO - https://doi.org/10.1007/978-3-642-25850-3_16 IS - Chapter 16 SP - 323 EP - 337 PB - Springer CY - Berlin Heidelberg AN - OPUS4-27644 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -