TY - JOUR A1 - Seah, M.P. A1 - Spencer, S.J. A1 - Bensebaa, F. A1 - Vickridge, I. A1 - Danzebrink, H. A1 - Krumrey, M. A1 - Gross, Thomas A1 - Österle, Werner A1 - Wendler, E. A1 - Rheinländer, B. A1 - Azuma, Y. A1 - Kojima, I. A1 - Suzuki, N. A1 - Suzuki, M. A1 - Tanuma, S. A1 - Moon, D.W. A1 - Lee, H.J. A1 - Cho, H.M. A1 - Chen, H.Y. A1 - Wee, A. T. S. A1 - Osipowicz, T. A1 - Pan, J.S. A1 - Jordaan, W.A. A1 - Hauert, R. A1 - Klotz, U. A1 - van der Marel, C. A1 - Verheijen, M. A1 - Tamminga, Y. A1 - Jeynes, C. A1 - Bailey, P. A1 - Biswas, S. A1 - Falke, U. A1 - Nguyen, N.V. A1 - Chandler-Horowitz, D. A1 - Ehrstein, J.R. A1 - Muller, D. A1 - Dura, J.A. T1 - Critical review of the current status of thickness measurements for ultrathin SiO2 on Si - Part V: Results of a CCQM pilot study N2 - Results are reported from a pilot study under the Consultative Committee for Amount of Substance (CCQM) to compare measurements of and resolve any relevant measurement issues in, the amount of thermal SiO2 oxide on (100) and (111) orientation Si wafer substrates in the thickness range 1.5 - 8 nm. As a result of the invitation to participate in this activity, 45 sets of measurements have been made in different laboratories using 10 analytical methods: medium-energy ion scattering spectrometry (MEIS), nuclear reaction analysis (NRA), RBS, elastic backscattering spectrometry (EBS), XPS, SIMS, ellipsometry, grazing-incidence x-ray reflectrometry (GIXRR), neutron reflectometry and transmission electron microscopy (TEM). The measurements are made on separate sets of 10 carefully prepared samples, all of which have been characterised by a combination of ellipsometry and XPS using carefully established reference conditions and reference parameters. The results have been assessed against the National Physical Laboratory (NPL) data and all show excellent linearity. The remaining data sets correlate with the NPL data with average root-mean-square scatters of 0.15 nm, half being better than 0.1 nm and a few at or better than 0.05 nm. Each set of data allows a relative scaling constant and a zero thickness offset to be determined. Each method has an inherent zero thickness offset between 0 nm and 1 nm and it is these offsets, measured here for the first time, that have caused many problems in the past. There are three basic classes of offset: water and carbonadeous contamination equivalent to ~1 nm as seen by ellipsometry; adsorbed oxygen mainly from water at an equivalent thickness of 0.5 nm as seen by MEIS, NRA, RBS and possibly GIXRR; and no offset as seen by XPS using the Si 2p peaks. Each technique has a different uncertainty for the scaling constant and consistent results have been achieved. X-Ray photoelectron spectroscopy has large uncertainties for the scaling constant but a high precision and, critically, if used correctly, has zero offset. Thus, a combination of XPS and the other methods allows the XPS scaling constant to be determined with low uncertainty, traceable via the other methods. XPS laboratories returning results early were invited to test a new reference procedure. All showed very significant improvements. The reference attenuation lengths thus need scaling by 0.986 ± 0.009 (at an expansion factor of 2) deduced from the data for the other methods. Several other methods have small offsets and, to the extent that these can be shown to be constant or measurable, then these methods will also show low uncertainty. Recommendations are provided for parameters for XPS, MEIS, RBS and NRA to improve their accuracy. KW - Calibration KW - Ellipsometry KW - GIXRR KW - Interlaboratory study KW - MEIS KW - Neutron reflectometry KW - NRA KW - RBS KW - Silicon dioxide KW - SIMS KW - XPS PY - 2004 DO - https://doi.org/10.1002/sia.1909 SN - 0142-2421 SN - 1096-9918 VL - 36 IS - 9 SP - 1269 EP - 1303 PB - Wiley CY - Chichester AN - OPUS4-5549 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - RPRT A1 - Seah, M.P. A1 - Spencer, S.J. A1 - Bensebaa, F. A1 - Vickridge, I. A1 - Danzebrink, H. A1 - Krumrey, M. A1 - Gross, Thomas A1 - Österle, Werner A1 - Wendler, E. A1 - Rheinländer, B. A1 - Azuma, Y. A1 - Kojima, I. A1 - Suzuki, N. A1 - Suzuki, M. A1 - Tanuma, S. A1 - Moon, D.W. A1 - Lee, H.J. A1 - Cho, H.M. A1 - Chen, H.Y. A1 - Wee, A. T. S. A1 - Osipowicz, T. A1 - Pan, J.S. A1 - Jordaan, W.A. A1 - Hauert, R. A1 - Klotz, U. A1 - van der Marel, C. A1 - Verheijen, M. A1 - Tamminga, Y. A1 - Jeynes, C. A1 - Bailey, P. A1 - Biswas, S. A1 - Falke, U. A1 - Nguyen, N.V. A1 - Chandler-Horowitz, D. A1 - Ehrstein, J.R. A1 - Muller, D. A1 - Dura, J.A. T1 - Ultra-thin SiO2 on Si, Part V: Results of a CCQM Pilot Study of Thickness Measurements KW - SiO2 KW - Thin films KW - Thickness KW - XPS KW - Ellipsometry KW - TEM PY - 2003 SN - 1473-2734 SP - 57 pages AN - OPUS4-4118 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Burlet, H. A1 - McColvin, G. A1 - Henderson, M. B. A1 - Garcia, J. C. A1 - Peteves, S. A1 - Klingelhöffer, Hellmuth A1 - Maldini, M. A1 - Klotz, U. E. A1 - Luthi, T. A1 - Wilcock, I. M. ED - Strang, A. T1 - Microstructural and Mechanical Performance Assessment of Diffusion Bonded Bimetallic Model Discs T2 - 6th International Charles Parsons Turbine Conference CY - Dublin, Ireland DA - 2003-09-16 PY - 2003 SN - 1-904350-20-8 SN - 1366-5510 N1 - Serientitel: Book / The Institute of Materials, Minerals and Mining – Series title: Book / The Institute of Materials, Minerals and Mining IS - 800 SP - 735 EP - 748 PB - Maney CY - London AN - OPUS4-2823 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Beygi Narsabadi, Hossein A1 - Vafaeenezhad, H. A1 - Klotz, U.E. A1 - Tiberto, D. A1 - Hosseinabadi, F. A1 - Mishurova, Tatiana A1 - Bruno, Giovanni A1 - Skrotzki, Birgit T1 - XCT-assisted micromechanical modeling of the effect of pores on the plastic deformation and mechanical characteristics of PBF-LB/M-produced copper alloys N2 - Due to the low absorption of fiber laser by copper particles, the laser-based powder bed fusion (PBF-LB/M) processing of copper components is accompanied by the development of different types of porosities within the printed samples. This research aims to assess the consequences of various process-induced pores on the me chanical characteristics and deformation of PBF-LB/M-produced copper alloys. Several copper alloys were processed using metal-coated particles and varied laser intensities, yielding samples with different types and amounts of porosities. For instance, CuCrZr alloys processed at 325 J/mm³ and 257 J/mm³ had 0.009 % and 1.117 % porosities, dominated by keyhole and lack-of-fusion pores, respectively. Moreover, PBF-LB/M pro cessing of Cr- and Nb-coated CuNi3SiCr particles accompanied by the generation of 0.004 % and 1.861 % porosities within the samples, predominantly featuring metallurgical and oxidation pores, respectively. Compression and nanoindentation tests revealed that the CuNi3SiCr alloy exhibited superior mechanical properties compared to the CuCrZr sample (nanoindentation hardness values 2.2 GPa and 1.4 GPa, respectively), while the presence of lack-of-fusion pores notably diminished their mechanical performance. X-ray computed tomography (XCT) reconstruction slices and scanning electron microscopy (SEM) images were then used for developing the representative volume elements (RVEs) based micromechanical models. The micromechanical simulations established a structure-property correlation that can simulate the compressive deformation and mechanical characteristics of PBF-LB/M-produced copper alloys as a function of their incorporated pore characteristics. Due to the closure of the pores at the first stages of deformation, samples with minimal keyhole and metallurgical porosities exhibited homogeneous plastic deformation. On the other side, based on the JohnsonCook model, strain concentration and crack propagation around the lack-of-fusion pores lead to damage initi ation in the printed samples at a strain level of 5 % KW - X-ray Computed tomography KW - Defects KW - Copper alloys KW - PBF-LB/M KW - Micromechanics PY - 2025 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-624004 DO - https://doi.org/10.1016/j.msea.2025.147836 SN - 0921-5093 VL - 924 PB - Elsevier B.V. AN - OPUS4-62400 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -