TY - CONF A1 - Rosu, Dana Maria A1 - Hertwig, Andreas A1 - Beck, Uwe A1 - Mäntynen, H. A1 - Manoocheri, F. A1 - Rattmann, G. A1 - Schellenberger, M. A1 - Petric, P. T1 - Optical Characterization of Highly Inhomogeneous Thin Films T2 - E-MRS 2013 Spring Meeting T2 - E-MRS 2013 Spring Meeting CY - Strasbourg, France DA - 2013-05-27 PY - 2013 AN - OPUS4-28805 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -