TY - JOUR A1 - Steglich, Patrick A1 - Paul, Martin A1 - Mai, C. A1 - Böhme, A. A1 - Bondarenko, S. A1 - Weller, Michael G. A1 - Mai, A. T1 - A monolithically integrated microfluidic channel in a silicon-based photonic-integrated-circuit technology for biochemical sensing N2 - In this work, a cost-effective optofluidic system is proposed and preliminary experimental results are presented. A microfluidic channel monolithically integrated into a photonic integrated circuit technology is used in conjunction with a cyclic olefin copolymer (COC) substrate to provide fluidic in- and output ports. We report on initial experimental results as well as on the simple and cost-effective fabrication of this optofluidic system by means of micro-milling. KW - Biosensors KW - Biophotonics KW - Optical sensors KW - Photonic sensors KW - Ring resonators KW - Silicon photonics KW - Lab-on-a-chip KW - Microfluidics KW - Chip KW - Biochip PY - 2021 DO - https://doi.org/10.1117/12.2588791 VL - 11772 SP - 1 EP - 5 PB - SPIE AN - OPUS4-53559 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Fünning, Tabea A1 - Peczek, Anna A1 - Kroh, Aleksandra A1 - Mai, Christian A1 - Paul, Martin A1 - Thomsen, Florian A1 - Tannenberg, Robert A1 - Schumann, Christoph A1 - Weller, Michael G. A1 - Mai, Andreas A1 - Steglich, Patrick C. ED - Lieberman, Robert A. ED - Baldini, Francesco ED - Homola, Jiri T1 - Optimization of local backside released micro-ring resonators for sensing applications using silicon photonic integrated circuits in a SOI technology N2 - Photonic micro-ring resonators (MRR) are widely studied for their high sensitivity across applications like environmental monitoring, healthcare, and chemical analysis. Their evanescent field sensing requires partially unembedded waveguides compatible with CMOS processing. Our approach uses local backside etching with an additional buried oxide (BOX) etch to release waveguides while preserving the back-end of line (BEOL) structure, enabling spatial separation of the sensing area and electronics. The BOX etch critically affects sensor performance, as waveguide surface roughness can alter MRR properties and coupling. We analyzed MRR design variations, comparing wet and dry etching techniques for their effects on optical performance across rib and strip waveguides in quasi-TE and quasi-TM modes. Wafer-level measurements show that backside-released MRR achieve high extinction ratios with slightly reduced quality factors, advancing high-sensitivity photonic sensors. T2 - SPIE Optics + Optoelectronics 2025 CY - Prague, Czech Republic DA - 23.05.2025 KW - Photonic sensors KW - Micro-ring resonator (MRR) KW - Silicon on insulator (SOI) KW - CMOS KW - Local backside etching PY - 2025 SN - 978-1-5106-8851-3 DO - https://doi.org/10.1117/12.3056481 VL - 13527 SP - 1 EP - 8 PB - SPIE CY - Bellingham, WA , USA AN - OPUS4-63585 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Tannenberg, Robert A1 - Paul, Martin A1 - Fünning, Tabea A1 - Schuhmann, Christoph A1 - Weller, Michael G. A1 - Steglich, Patrick T1 - Multichannel real-time detection of biomarkers with highly miniaturized photonic microchips N2 - The development of novel photonic integrated microchips (PIC) is a promising approach to allow for the convenient detection of key biomarkers in complex matrices through multichannel real-time analysis in a highly compact package. This study reports the successful development and application of a backside released CMOS chip designed for the multichannel real-time detection of biomarkers. Operating at the C-band at approx. 1550 nm, the microchip features three dedicated detection sensors in addition to a reference sensor, enabling simultaneous analysis of multiple biomarkers. The compact and highly miniaturized design of this microchip, with a footprint of just 1 mm², positions it as promising candidate for point-of-care diagnostics and personalized medicine applications. This technology opens a path to transform biomarker detection across various medical fields, offering rapid, reliable, and cost-effective diagnostic solutions. In conclusion, the presented multichannel photonic microchips signify a substantial leap forward in real-time biomarker detection, providing a highly capable platform for future research and clinical applications. T2 - SPIE Optics + Optoelectronics 2025 CY - Prague, Czech Republic DA - 07.04.2025 KW - Photonic integrated circuit KW - Ring resonator KW - Real-time detection KW - Multiplexing KW - Semiconductor KW - CMOS KW - C-reactive protein KW - CRP KW - Biomarker PY - 2025 SN - 978-1-5106-8850-6 DO - https://doi.org/10.1117/12.3056453 VL - 13527 SP - 1 EP - 6 PB - SPIE CY - Prague, Czech Republic AN - OPUS4-63478 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Steglich, Patrick T1 - Towards monolithic integration of polymer-based electro-optical devices in silicon photonic integrated circuits using a 250 nm SOI technology N2 - Silicon-based photonic integrated circuits (PICs) in complementary metal oxide semiconductor (CMOS) technology are essential for next-generation communication systems and neuromorphic computing. However, silicon does not have efficient electro-optical (EO) effects. Since silicon limits the performance of current photonic devices, more advanced materials such as nonlinear optical polymers are needed to exploit the full potential of PICs. As a preliminary proof of concept, we demonstrate the quadratic EO effect and the electric field-induced EO effect using a Mach-Zehnder interferometer in conjunction with a co-integrated Ge photodiode. Our concept of monolithic integration could pave the way for next-generation PICs. T2 - SPIE Optics + Optoelectronics 2025 CY - Prague, Czech Republic DA - 05.06.2025 KW - CMOS KW - Silicon-based photonic integrated circuits KW - Mach-Zehnder interferometer KW - Ge-photodiode PY - 2025 UR - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/13530/135300R/Towards-monolithic-integration-of-polymer-based-electro-optical-devices-in/10.1117/12.3056280.short DO - https://doi.org/10.1117/12.3056280 AN - OPUS4-63569 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Steglich, Patrick A1 - Paul, Martin A1 - Fünning, Tabea A1 - Schumann, Christoph A1 - Mai, Christian A1 - Tannenberg, Robert A1 - Mai, Andreas ED - Cheben, Pavel ED - Čtyroký, Jiří ED - Molina-Fernández, Iñigo T1 - Towards monolithic integration of polymer-based electro-optical devices in silicon photonic integrated circuits using a 250nm SOI technology N2 - Photonic micro-ring resonators (MRR) are widely studied for their high sensitivity across applications like environmental monitoring, healthcare, and chemical analysis. Their evanescent field sensing requires partially unembedded waveguides compatible with CMOS processing. Our approach uses local backside etching with an additional buried oxide (BOX) etch to release waveguides while preserving the back-end of line (BEOL) structure, enabling spatial separation of the sensing area and electronics. The BOX etch critically affects sensor performance, as waveguide surface roughness can alter MRR properties and coupling. We analyzed MRR design variations, comparing wet and dry etching techniques for their effects on optical performance across rib and strip waveguides in quasi-TE and quasi-TM modes. Wafer-level measurements show that backside-released MRR achieve high extinction ratios with slightly reduced quality factors, advancing high-sensitivity photonic sensors. T2 - SPIE Optics + Optoelectronics 2025 CY - Prague, Czech Republic DA - 05.06.2025 KW - Photonic sensors KW - Micro-ring resonator (MRR) KW - Silicon on insulator (SOI) KW - CMOS KW - Local backside etching (LBE) PY - 2025 DO - https://doi.org/10.1117/12.3056280 VL - 13530 SP - 1 EP - 8 PB - SPIE CY - Bellingham, WA , USA AN - OPUS4-63587 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -