TY - JOUR A1 - Procop, Mathias T1 - EDXTOOLS - Computer Programmes for the Determination of Critical EDX Spectrometer Parameters N2 - Quality assurance according to ISO or EN norms entails a periodical check of critical instrumental parameters. Not yet all commercial software purchased with instruments supports the related measurements and their fast evaluation. EDXTOOLS consist of a programme library which complements the existing software for electron excited energy dispersive X-ray spectrometry (EDS) in this respect. EDXTOOLS can be used to check the detection efficiency by the evaluation of the L/K intensity ratio in a copper or nickel spectrum or by the calculation of the thickness of absorbing detector layers from experiments, which can be performed on any scanning electron microscope. Moreover, measured spectra can be modified by the transmission curve of absorbing media to estimate their influence on the result of quantitative analysis. EDXTOOLS allow the determination of the signal to background ratio from an Fe-55 spectrum and the fitting of measured FWHM's of K-lines to find the resolution curve DE = Ö{DE 2el + DE 2det}. They are completed by the possibility of calculating EDX spectra for the K-lines of light elements and to compare the resulting spectra for different formulae, physical data tables, and detector parameters chosen for the calculation. EDXTOOLS are written in MATLAB®, a wide spread interpreter language. This has the advantage that the programmes are readable text files. A user can check each computational step and modify it. The installation of MATLAB® and its optimization toolbox is necessary to work with EDXTOOLS. KW - X-ray spectrometry KW - EDS KW - Quantitative analysis KW - Computer programmes PY - 2000 DO - https://doi.org/10.1007/s006040050104 SN - 0026-3672 SN - 1436-5073 VL - 132 IS - 2-4 SP - 527 EP - 530 PB - Springer CY - Wien AN - OPUS4-6837 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Procop, Mathias T1 - Measurement of X-Ray Emission Efficiencies for K-Lines KW - X-ray spectrometry KW - X-ray emission KW - X-ray yield KW - Electron probe microanalysis KW - EMPA KW - Standardless analysis PY - 2004 DO - https://doi.org/10.1017/S1431927604040139 SN - 1431-9276 SN - 1435-8115 VL - 10 IS - 4 SP - 481 EP - 490 PB - Cambridge University Press CY - New York, NY AN - OPUS4-6838 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - RPRT A1 - Procop, Mathias T1 - Röntgenspektroskopie am Rasterelektronenmikroskop PY - 2001 SP - 1 EP - 26 AN - OPUS4-6834 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Wandel, K. A1 - Procop, Mathias A1 - Richter, U. A1 - Wolf, R. T1 - The influence of the storage time and the deposition of SiO2 on the properties of H2SO4 etched (In,Ga) As surface layers investigated by XPS and ellipsometry PY - 1993 SN - 0268-1242 SN - 1361-6641 VL - 8 SP - 1438 EP - 1444 PB - IOP Publ. CY - Bristol AN - OPUS4-7087 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Gruska, B. A1 - Wandel, K. A1 - Procop, Mathias ED - Lengeler, B. T1 - The InGaAs/SiO2 interface investigated by angle resolved XPS and ellipsometry T2 - 4th International Conference on the Formation of Semiconductor Interfaces (ICFSI) CY - Jülich, Germany DA - 1993-06-14 PY - 1993 SN - 981-021559-2 VL - 4 SP - 373 EP - 376 PB - World Scientific CY - Singapore AN - OPUS4-7088 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Procop, Mathias A1 - Röder, A. T1 - An interlaboratory comparison of energy dispersive X-ray microanalysis (EDX) of titanium and zirkonium nitrides N2 - The results of an interlaboratory comparison of energy dispersive X-ray microanalysis of TiN0.84 and ZrN were presented. The microprobe group of the German Physical Society (DPG) and the Federal Institute for Materials Research and Testing (BAM) had initiated the interlaboratory comparison. The primary aim was to test modern EDX systems equipped with ultrathin windows concerning the accuracy and reliability of the analysis of compounds containing light elements. The participants from 23 laboratories performed the analysis at different primary energies, in the standard-less mode as well as on the base of own standards, and considering Ti-K or Ti-L in case of TiN0.84. The results show a slight overestimation of the nitrogen content and a large standard deviation from the mean value. Reasons for the scattering of the results are discussed. T2 - 8th Symposium on Solid State Analysis DA - 1995-07-03 KW - Titanium nitride KW - Zirconium nitride KW - EDX KW - X-rays KW - Microanalysis PY - 1997 DO - https://doi.org/10.1007/BF01246159 SN - 0026-3672 SN - 1436-5073 VL - 125 IS - 1-4 SP - 33 EP - 39 PB - Springer CY - Wien AN - OPUS4-7089 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Procop, Mathias A1 - Hübner, Wolfgang A1 - Wäsche, Rolf A1 - Nieland, S. A1 - Ehrmann, O. T1 - Fast Elemental Mapping in Materials Science KW - Electron probe microanalysis KW - EPMA KW - Energy dispersive X-ray spectroscopy KW - EDS KW - Elemental mapping PY - 2002 UR - http://www.microscopy-analysis.com/sites/default/files/magazine_pdfs/mag%20179_2002_Jan_Procop_1.pdf SN - 0958-1952 IS - January SP - 5 EP - 6 PB - Rolston Gordon Comm. CY - Bookham, Surrey AN - OPUS4-7091 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Procop, Mathias T1 - XPS data for sputter-cleaned In0.53Ga0.47As, GaAs, and InAs surfaces PY - 1992 UR - http://www.sciencedirect.com/science?_ob=PublicationURL&_tockey=%23TOC%235251%231992%23999409998%23276008%23FLP%23&_cdi=5251&_pubType=J&_auth=y&_acct=C000049503&_version=1&_urlVersion=0&_userid=963821&md5=dc56897f6b3c86cf4d7ea713dee69341 SN - 0368-2048 SN - 1873-2526 VL - 59 SP - R1 EP - R10 PB - Elsevier CY - Amsterdam AN - OPUS4-7092 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Procop, Mathias T1 - Über Probleme bei der EDX-Analyse im Energiebereich unterhalb 1 keV T2 - 27. Kolloquium des Arbeitskreises für Elektronenmikroskopische Direktabbildung und Analyse von Oberflächen (EDO) CY - Saarbrücken, Deutschland DA - 1994-10-04 KW - X-ray spectrometry KW - EDX KW - X-ray analysis KW - Quantitative analysis PY - 1994 SN - 0340-3815 VL - 27 SP - 1 EP - 5 PB - Ehrenwerth CY - Münster, Westf. AN - OPUS4-7093 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Procop, Mathias T1 - Energy dispersive X-ray microanalysis at low energies KW - Microanalysis KW - X-ray spectrometry KW - Energy dispersive spectrometry KW - EDS KW - X-ray detectors PY - 1998 SN - 0958-1952 IS - March SP - 9 EP - 10 PB - Rolston Gordon Comm. CY - Bookham, Surrey AN - OPUS4-7094 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Procop, Mathias A1 - Wandel, K. A1 - Verucchi, R. T1 - Ex-situ XPS-investigation of the interface between PE-CVD SiO2 and wet chemically etched MO-CVD epitaxial layers of In0.53Ga0.47As PY - 1995 SN - 0937-0633 VL - 353 SP - 647 EP - 654 PB - Springer CY - Berlin AN - OPUS4-7095 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Procop, Mathias A1 - Wandel, K. T1 - Photoelectron spectroscopic and ellipsometric investigation of In0.53Ga0.47As surfaces after wet chemical etching PY - 1993 SN - 0937-0633 VL - 364 SP - 23 EP - 28 PB - Springer CY - Berlin AN - OPUS4-7096 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -