TY - JOUR A1 - Beck, Uwe A1 - Hertwig, Andreas A1 - Männ, Marion T1 - Ellipsometry and Standardization: Validation of Models - Key Issue for Reference Coatings and Non-ideal Samples N2 - Standardisation of ellipsometry is mainly based on three documents: pioneering work at NIST [1] on film standards, a publicly available specification and stan-dard testing procedure [2] for real-world samples by BAM and a standard specification for integrated metrology by SEMI [3]. Other activities refer to inter-laboratory comparisons for selected layer/substrate systems and analytical methods including ellipsometry [4] and the development of combined standards for thickness d and step height h [5]. Generally, precision of ellipsmetry in terms of raw data Ψ and Δ meets the major demands for all ellipsometric principles (RPE, RAE, PME, RCE, NE). As a result, fingerprint capabilty is al-most perfect for various layer/substrate systems. However, this is not true for accuracy in terms of physical quantities such as thickness d, optical (n, k) and dielectric constans (ε1, ε2,) as modelling is required. Hence, the layer/substrate and material dependent validation of models is nowadays a key issue. In contrast to the sub-nanometer sensi-tivity in vertical direction, the effective lateral resolution of almost all ellipso-metric principles except for imaging null ellipsometry is rather poor, usually be-yond 100 µm. Hence, nanometer-scaled homogeneity testing and the measurement of micro- and nanopatterned structures is not feasible by standard configurations. KW - Ellipsometry KW - Standardisation KW - Reference Coatings KW - Non-ideal samples KW - Validation of models PY - 2008 IS - 2 SP - 6 EP - 7 AN - OPUS4-18673 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Rybachuk, Maksym A1 - Hertwig, Andreas A1 - Weise, Matthias A1 - Sahre, Mario A1 - Männ, Marion A1 - Beck, Uwe A1 - Bell, J. M. T1 - Near infrared optical materials from polymeric amorphous carbon synthesized by collisional plasma process N2 - The synthesis of polymerlike amorphous carbon (a-C:H) thin-films by microwave excited collisional hydrocarbon plasma process is reported. Stable and highly aromatic a-C:H were obtained containing significant inclusions of poly(p-phenylene vinylene) (PPV). PPV confers universal optoelectronic properties to the synthesized material. That is a-C:H with tailor-made refractive index are capable of becoming absorption-free in visible (red)-near infrared wavelength range. Production of large aromatic hydrocarbon including phenyl clusters and/or particles is attributed to enhanced coagulation of elemental plasma species under collisional plasma conditions. Detailed structural and morphological changes that occur in a-C:H during the plasma synthesis are also described. KW - Kohlenstoffschichten KW - Plasmachemie KW - PA-CVD KW - Amorphous state KW - Carbon KW - Coagulation KW - Hydrogen KW - Optical materials KW - Plasma collision processes KW - Plasma deposition KW - Refractive index KW - Thin films PY - 2010 DO - https://doi.org/10.1063/1.3431292 SN - 0003-6951 SN - 1077-3118 VL - 96 IS - 21 SP - 211909-1 - 211909-3 PB - American Institute of Physics CY - Melville, NY AN - OPUS4-21365 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Männ, Marion ED - Fried, M. T1 - Ellipsometry and Standardisation - A Publicly Available Specification (PAS) for Ellipsometry, Measurement of Reference Coatings and Non-ideal Samples T2 - 3rd International Conference on Spectroscopic Ellipsometry CY - Vienna, Austria DA - 2003-07-06 PY - 2003 SN - 0040-6090 VL - 455-456 SP - 1(?) PB - Elsevier CY - Amsterdam AN - OPUS4-2598 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Baudach, Steffen A1 - Männ, Marion T1 - Spektroskopische Ellipsometrie - Referenzverfahren für die Qualitätssicherung T2 - 2. Workshop Ellipsometrie CY - Berlin, Deutschland DA - 2002-02-18 PY - 2002 AN - OPUS4-2280 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Cobet, C. A1 - Wollschläger, Nicole A1 - Esser, N. A1 - Richter, W. A1 - Baudach, Steffen A1 - Beck, Uwe A1 - Männ, Marion A1 - Brunn, S. A1 - Gruska, B. A1 - Richter, U. T1 - VUV-XUV-Ellipsometrie mit Synchrotronstrahlung T2 - 2. Workshop Ellipsometrie CY - Berlin, Deutschland DA - 2002-02-18 PY - 2002 AN - OPUS4-2282 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - RPRT A1 - Beck, Uwe A1 - Urban, Ingrid A1 - Männ, Marion T1 - Dekorative PVD-Schichten - Grundlegende Eigenschaften und Verhalten - Teilvorhaben Analyse - Förderkennzeichen BMFT 13 N 5836 KW - PVD-Verfahren KW - Oberflächeneigenschaften PY - 1994 SP - 1 EP - 118 PB - Bundesanstalt für Materialforschung und -prüfung CY - Berlin AN - OPUS4-25477 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Beck, Uwe A1 - Griepentrog, Michael A1 - Dück, Alexander A1 - Männ, Marion A1 - Sahre, Mario T1 - Certified reference material BAM-L100 Ti/Al multilayer on 100Cr6 steel PY - 2004 UR - http://www.rm-certificates.bam.de/de/rm-certificates_media/rm_cert_layer_and_surface/bam_l100repe.pdf SP - 1 EP - 23 PB - Bundesanstalt für Materialforschung und -prüfung CY - Berlin AN - OPUS4-25406 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Beck, Uwe A1 - Hertwig, Andreas A1 - Männ, Marion T1 - Certified reference material BAM-L101 TiO2/SiO2 multilayer on BK7 glass PY - 2005 UR - http://www.rm-certificates.bam.de/de/rm-certificates_media/rm_cert_layer_and_surface/bam_l101repe.pdf SP - 1 EP - 22 PB - Bundesanstalt für Materialforschung und -prüfung CY - Berlin AN - OPUS4-25407 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Beck, Uwe A1 - Griepentrog, Michael A1 - Dück, Alexander A1 - Männ, Marion A1 - Sahre, Mario T1 - Certified reference material BAM-L102 TiN single layer on 100Cr6 steel PY - 2004 UR - http://www.rm-certificates.bam.de/de/rm-certificates_media/rm_cert_layer_and_surface/bam_l102repe.pdf SP - 1 EP - 24 PB - Bundesanstalt für Materialforschung und -prüfung CY - Berlin AN - OPUS4-25408 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Beck, Uwe A1 - Griepentrog, Michael A1 - Dück, Alexander A1 - Männ, Marion A1 - Sahre, Mario T1 - Certified reference material BAM-L103 VN single layer on 100Cr6 steel PY - 2004 UR - http://www.rm-certificates.bam.de/de/rm-certificates_media/rm_cert_layer_and_surface/bam_l103repe.pdf SP - 1 EP - 22 PB - Bundesanstalt für Materialforschung und -prüfung CY - Berlin AN - OPUS4-25409 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Beck, Uwe A1 - Griepentrog, Michael A1 - Dück, Alexander A1 - Männ, Marion A1 - Sahre, Mario T1 - Certified reference material BAM-L104 TiC single layer on 100Cr6 steel PY - 2004 UR - http://www.rm-certificates.bam.de/de/rm-certificates_media/rm_cert_layer_and_surface/bam_l104repe.pdf SP - 1 EP - 22 PB - Bundesanstalt für Materialforschung und -prüfung CY - Berlin AN - OPUS4-25410 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Beck, Uwe A1 - Griepentrog, Michael A1 - Dück, Alexander A1 - Männ, Marion A1 - Sahre, Mario T1 - Certified reference material BAM-L105 VC single layer on 100Cr6 steel PY - 2004 UR - http://www.rm-certificates.bam.de/de/rm-certificates_media/rm_cert_layer_and_surface/bam_l105repe.pdf SP - 1 EP - 22 PB - Bundesanstalt für Materialforschung und -prüfung CY - Berlin AN - OPUS4-25411 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Beck, Uwe A1 - Wirth, Thomas A1 - Sahre, Mario A1 - Männ, Marion A1 - Gamer, Nadja A1 - Hoffmann, V. A1 - Hentschel, R. A1 - Brauneck, U. A1 - Mollenhauer, R. ED - Berg, S. T1 - Reference coatings for gdoes depth profiling - Preliminary results of a VAMAS project T2 - 7th International Conference on Plasma Surface Engineering (PSE 2000) CY - Garmisch-Partenkirchen, Germany DA - 2000-09-17 PY - 2000 SN - 0257-8972 IS - 142-144 PB - Elsevier CY - Amsterdam AN - OPUS4-970 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Beck, Uwe A1 - Reiners, Georg A1 - Männ, Marion A1 - Netzband, Olivia T1 - Schichtdickenbestimmung aus Quer- und Schrägschliffen von Schichtsystemen durch Einbettung von Testkörpern und Referenzmaßstäben KW - Schichtdicke KW - Dünnschichtsystem KW - Schliff KW - Testkörper PY - 1995 SN - 0032-678X VL - 32 IS - 8 SP - 388 EP - 403 PB - Hanser CY - München AN - OPUS4-618 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Beck, Uwe A1 - Reiners, Georg A1 - Männ, Marion A1 - Netzband, Olivia T1 - Determining the thickness of layers in cross and angled cross sections of coating systems using embedded test bodies and reference measures KW - Schichtdicke KW - Dünnschichtsystem KW - Schliff KW - Testkörper PY - 1995 SN - 0032-678X VL - 32 IS - 8 SP - 388 EP - 403 PB - Hanser CY - München AN - OPUS4-619 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -