TY - JOUR A1 - Sturm, Heinz A1 - Schröter, Maria-Astrid A1 - Weimann, Christiane T1 - Imaging method for vibrating scanning force microscopy cantilevers for the analysis of mode shapes and nonlinear harmonic motion N2 - A specially designed scanning force microscope (SFM, atomic force microscope – AFM) was incorporated into the chamber of a commercial scanning electron microscope (SEM) to investigate vibrating SFM cantilevers at their resonance. Inherently, the spatial resolution of electron microscopy is higher than that of optical methods. In this paper we present vibration modes (eigenmodes) of two different SFM cantilevers. Their nonlinear behavior is also explored in order to depict their 2nd harmonics (twice the fundamental frequency). Imaging of the local vibration is performed by measuring the frequency- and phase-selective responses of the SE signal at different X and Y positions of the scanned electron beam. KW - Electron microscopy KW - Scanning force microscopy KW - Motion detection KW - Cantilever KW - Eigenmode KW - Harmonic KW - Nonlinearity KW - Harmonix cantilever PY - 2012 DO - https://doi.org/10.1016/j.mee.2012.07.088 SN - 0167-9317 SN - 1873-5568 VL - 98 SP - 492 EP - 496 PB - Elsevier Science CY - Amsterdam, Netherlands AN - OPUS4-26431 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Schröter, Maria-Astrid A1 - Holschneider, M. A1 - Sturm, Heinz T1 - Analytical and numerical analysis of imaging mechanism of dynamic scanning electron microscopy N2 - The direct observation of small oscillating structures with the help of a scanning electron beam is a new approach to study the vibrational dynamics of cantilevers and microelectromechanical systems. In the scanning electron microscope, the conventional signal of secondary electrons (SE, dc part) is separated from the signal response of the SE detector, which is correlated to the respective excitation frequency for vibration by means of a lock-in amplifier. The dynamic response is separated either into images of amplitude and phase shift or into real and imaginary parts. Spatial resolution is limited to the diameter of the electron beam. The sensitivity limit to vibrational motion is estimated to be sub-nanometer for high integration times. Due to complex imaging mechanisms, a theoretical model was developed for the interpretation of the obtained measurements, relating cantilever shapes to interaction processes consisting of incident electron beam, electron–lever interaction, emitted electrons and detector response. Conclusions drawn from this new model are compared with numerical results based on the Euler–Bernoulli equation. KW - Electron microscopy KW - Scanning force microscopy KW - Cantilever motion KW - Modes KW - Harmonics KW - Mathematical model KW - Imaging theory PY - 2012 DO - https://doi.org/10.1088/0957-4484/23/43/435501 SN - 0957-4484 SN - 1361-6528 VL - 23 IS - 43 SP - 1 EP - 10 PB - IOP Publishing Ltd. CY - Bristol AN - OPUS4-27642 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -