TY - JOUR A1 - Zier, M. A1 - Reinholz, Uwe A1 - Riesemeier, Heinrich A1 - Radtke, Martin A1 - Munnik, F. T1 - Accurate stopping power determination of 15N ions for hydrogen depth profiling by a combination of ion beams and synchrotron radiation JF - Nuclear instruments and methods in physics research B N2 - Hydrogen analysis is of particular importance in thin film technology and it is often necessary to obtain a depth profile. The method with the best depth resolution is NRA using the 6385 keV resonance of the 1H(15N,αγ)12C nuclear reaction. The correct quantification of the depth and concentration scales in the measured hydrogen profiles relies on accurate stopping power values. We present a method to deduce these values from a combination of two techniques: NRA and X-ray reflectometry (XRR). This method is applied to the determination of the stopping power of ~6.4 MeV 15N ions in H-containing amorphous Si-layers (a-Si:H). Density-independent stopping powers at different H concentrations are determined by combining the results from NRA and XRR with an overall uncertainty of 3.3%, showing good agreement with SRIM values. This work shows exemplary the methodology for future evaluation of stopping powers for quality assurance in NRA. KW - Nuclear reaction analysis KW - Hydrogen depth profiling KW - Stopping cross section KW - Linear energy transfer KW - Synchrotron radiation KW - XRR PY - 2012 DO - https://doi.org/10.1016/j.nimb.2011.07.027 SN - 0168-583X SN - 1872-9584 VL - 273 SP - 18 EP - 21 PB - Elsevier CY - Amsterdam AN - OPUS4-25722 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Zier, M. A1 - Reinholz, Uwe A1 - Riesemeier, Heinrich A1 - Radtke, Martin A1 - Munnik, F. T1 - Ions and X-rays: Unique partners for accurate stopping power determination of 15N ions in Si for hydrogen depth profiling T2 - Workshop Ionenstrahlphysik T2 - Workshop Ionenstrahlphysik CY - Dresden, Germany DA - 2010-03-29 PY - 2010 AN - OPUS4-20920 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Zier, M. A1 - Reinholz, Uwe A1 - Riesemeier, Heinrich A1 - Radtke, Martin A1 - Munnik, F. A1 - Möller, W. T1 - Ions and X-rays: Unique Partners for Accurate Stopping Power Determination of 15N Ions in Si for Hydrogen Depth Profiling T2 - Deutsche Tagung für Forschung mit Synchrotronstrahlung, Neutronen und Ionenstrahlen, SNI 2010 T2 - Deutsche Tagung für Forschung mit Synchrotronstrahlung, Neutronen und Ionenstrahlen, SNI 2010 CY - Berlin, Germany DA - 2010-02-24 PY - 2010 AN - OPUS4-20099 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Zier, M. A1 - Munnik, F. A1 - Reinholz, Uwe A1 - Riesemeier, Heinrich A1 - Radtke, Martin T1 - Accurate stopping power determination of 15N ions hydrogen depth profiling by a unique combination of ion beams and synchrotron radiation T2 - 20th International Conference on Ion Beam Analysis T2 - 20th International Conference on Ion Beam Analysis CY - Itapema, Brazil DA - 2011-04-10 PY - 2011 AN - OPUS4-23607 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -