TY - JOUR A1 - Alvisi, M. A1 - Blome, M. A1 - Griepentrog, Michael A1 - Hodoroaba, Vasile-Dan A1 - Karduck, P. A1 - Mostert, M. A1 - Nacucchi, M. A1 - Procop, Mathias A1 - Rohde, M. A1 - Scholze, F. A1 - Statham, P. A1 - Terborg, R. A1 - Thiot, J.-F. T1 - The Determination of the Efficiency of Energy Dispersive X-Ray Spectrometers by a New Reference Material JF - Microscopy and microanalysis N2 - A calibration procedure for the detection efficiency of energy dispersive X-ray spectrometers (EDS) used in combination with scanning electron microscopy (SEM) for standardless electron probe microanalysis (EPMA) is presented. The procedure is based on the comparison of X-ray spectra from a reference material (RM) measured with the EDS to be calibrated and a reference EDS. The RM is certified by the line intensities in the X-ray spectrum recorded with a reference EDS and by its composition. The calibration of the reference EDS is performed using synchrotron radiation at the radiometry laboratory of the Physikalisch-Technische Bundesanstalt. Measurement of RM spectra and comparison of the specified line intensities enables a rapid efficiency calibration on most SEMs. The article reports on studies to prepare such a RM and on EDS calibration and proposes a methodology that could be implemented in current spectrometer software to enable the calibration with a minimum of operator assistance. KW - Energy dispersive X-ray spectrometry KW - Standardless analysis KW - X-ray detectors KW - Detection efficiency KW - Spectrometer calibration PY - 2006 DO - https://doi.org/10.1017/S1431927606060557 SN - 1431-9276 SN - 1435-8115 VL - 12 IS - 5 SP - 406 EP - 415 PB - Cambridge University Press CY - New York, NY AN - OPUS4-13135 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -