TY - CONF A1 - Beck, Uwe A1 - Hiratsuka, M. A1 - Spindler, Ch. A1 - Ohtake, N. A1 - Hertwig, Andreas A1 - Becker, J. A1 - Gäbler, J. A1 - Neubert, Th. A1 - Vergöhl, M. A1 - Winkler, J. A1 - Eypert, C. T1 - Interlaboratory comparison: optical property classification of carbon-based films by ellipsometry N2 - The paper addresses the “INTERLABORATORY COMPARISON: OPTICAL PROPERTY CLASSIFICATION OF CARBON-BASED FILMS BY ELLIPSOMETRY” and the following points are discussed in more detail: Established classification for mechanical properties, Complementary classification for optical properties, Ellipsometry for determination of optical constants n-k plane as material fingerprint, Samples, participants & set-ups (samples: Japan, participants: Japan, Germany, France, set-ups: Japan, Germany, USA) and Results of interlaboratory comparison: thickness, n & k. T2 - ISO TC 107 Meeting Tokyo CY - Tokio, Japan DA - 17.01 2017 KW - Interlaboratory Comparison KW - Optical Property KW - Carbon-based Films KW - Ellipsometry PY - 2017 AN - OPUS4-39028 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -