TY - JOUR A1 - Kautek, Wolfgang A1 - Rudolph, Pascale A1 - Daminelli-Widany, Grazia A1 - Krüger, Jörg T1 - Physico-chemical aspects of femtosecond-pulse-laser-induced surface nanostructures N2 - Near-ablation threshold investigations focusing on the generation of periodic nanostructures and their correlation with physico-chemical properties of the solid phase such as e.g., the material-dependent surface energy, were conducted. Molecular dynamic modelling in the sub-picosecond time domain was used to consider ultrafast opto-electronic processes triggering surface reorganization reactions. Fluid containment of solid interfaces showed strong influence on the resulting micro- and nanostructures due to its drastic reduction of the surface energy. The phenomena are discussed in respect to the minimization of the surface free energy in dependence of material composition and interfacial structure. PY - 2005 DO - https://doi.org/10.1007/s00339-005-3211-7 SN - 0947-8396 VL - 81 SP - 65 EP - 70 PB - Springer CY - Berlin AN - OPUS4-7403 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Martin, Sven A1 - Mädebach, Heinrich A1 - Urech, L. A1 - Lippert, T. A1 - Wokaun, A. A1 - Kautek, Wolfgang T1 - Femto- and nanosecond laser treatment of doped polymethylmethacrylate N2 - Femto- and nanosecond laser ablation of polymethylmethacrylate (PMMA) and PMMA doped with a linear absorber was investigated in the infrared spectral region. Ablation thresholds were determined and incubation phenomena were identified. The ‘degree’ of incubation was calculated employing a phenomenological model. The influence of the pulse duration on the machining quality of the polymers was examined. The presence of an absorbing chromophore is not a prerequisite for a controllable fs-laser structuring in contrast to the ns-treatment. Surface swelling always accompanied ablation. KW - Laser ablation KW - Laser beam machining KW - Doping thin films KW - Polymers-radiation effects PY - 2005 DO - https://doi.org/10.1016/j.apsusc.2005.01.078 SN - 0169-4332 SN - 1873-5584 VL - 247 SP - 406 EP - 411 PB - North-Holland CY - Amsterdam AN - OPUS4-7470 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Starke, K. A1 - Ristau, D. A1 - Martin, Sven A1 - Hertwig, Andreas A1 - Krüger, Jörg A1 - Allenspacher, P. A1 - Riede, W. A1 - Meister, S. A1 - Theiss, C. A1 - Sabbah, A. A1 - Rudolph, W. A1 - Raab, V. A1 - Grigonis, R. A1 - Rakickas, T. A1 - Sirutkaitis, V. ED - Exarhos, G. J. T1 - Results of a round-robin experiment in multiple-pulse LIDT measurement with ultrashort pulses T2 - 35th Annual Boulder Damage Symposium ; 35th Annual Symposium on Optical Materials for High-Power Lasers CY - Boulder, CO, USA DA - 2003-09-22 KW - Multiple-pulse damage KW - ISO 11254-2 KW - S on 1-LIDT KW - Round-robin experiment KW - CHOCLAB PY - 2004 SN - 0-8194-5163-0 DO - https://doi.org/10.1117/12.525135 SN - 0038-7355 N1 - Serientitel: Proceedings of SPIE – Series title: Proceedings of SPIE IS - 5273 SP - 388 EP - 395 PB - SPIE, the International Society for Optical Engineering CY - Bellingham, Wash. AN - OPUS4-4948 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Kautek, Wolfgang A1 - Hertwig, Andreas A1 - Martin, Sven A1 - Krüger, Jörg A1 - Lenzner, Matthias A1 - Spielmann, C. A1 - Lenner, M. A1 - Bunte, J. A1 - Puester, T. A1 - Burmester, T. A1 - Fiedler, A. A1 - Heberer, E. A1 - Brose, M. A1 - Stingl, A. A1 - Kiehl, P. A1 - Hönigsmann, H. A1 - Trautinger, F. A1 - Grabner, G. T1 - Safety in Femtosecond Laser Technology - Recent Results of a European Research Project (406) T2 - International Laser Safety Conference 2003 ; ILSC 2003 CY - Jacksonville, FL, USA DA - 2003-03-10 PY - 2003 SN - 0-912035-38-2 SP - 1(?) EP - 10(?) PB - Laser Institute of America CY - Orlando, Fla. AN - OPUS4-2259 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Daminelli-Widany, Grazia A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Femtosecond laser interaction with silicon under water confinement N2 - Femtosecond laser interaction with silicon was investigated in water and in air, with 130-fs laser pulses at 800 nm wavelength. Under water confinement, higher modification thresholds, lower ablation depths and similar incubation factors were found in comparison to the dry experiment. Morphological features of the laser-induced cavities also differed. In contrast to air experiments, debris redeposition was negligible, while the ablated material remained suspended in the water layer phase. Underwater cavities obtained at high fluences and high number of pulses per spot showed anomalous profiles, consistent with a strong spatial deformation of the laser beam coupled into the target. Ripples formed at the edges of the modified area showed varying spacings: f100 and f700 nm for water and air experiments, respectively. Differences to the air experiment were related to a complex combination of fluence-dependent non-linear effects occurring in the water layer and to pulse-number-dependent shielding effects induced by cavitation bubbles and suspended ablated material. KW - Laser ablation KW - Silicon KW - Solid electrolyte interface KW - Water PY - 2004 DO - https://doi.org/10.1016/j.tsf.2004.04.043 SN - 0040-6090 VL - 467 IS - 1-2 SP - 334 EP - 341 PB - Elsevier CY - Amsterdam AN - OPUS4-4008 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Krüger, Jörg T1 - Femto- and Nanosecond Laser Treatment of Doped Polymethylmethacrylate T2 - E-MRS 2004 Spring Meeting CY - Strasbourg, France DA - 2004-08-24 PY - 2004 AN - OPUS4-4145 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Krüger, Jörg T1 - Results of a round-robin experiment in multiple-pulse LIDT measurment with ultrashort pulses T2 - Boulder Damage Symposium CY - Boulder, CO, USA DA - 2003-09-22 PY - 2003 AN - OPUS4-5016 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krivenko, A.G. A1 - Kautek, Wolfgang A1 - Krüger, Jörg A1 - Benderskii, V.A. T1 - Subpicosecond Emission from Mercury and Silver into Electrolyte Solution: An Experimental Study PY - 1997 SN - 0038-5387 SN - 1023-1935 VL - 33 IS - 4 SP - 394 EP - 400 PB - MAIK Nauka/Interperiodica Publ. CY - Moscow AN - OPUS4-11781 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krivenko, A.G. A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Benderskii, V.A. T1 - Subpicosecond-Pulse-Laser-Induced Electron Emission from Mercury and Silver into Aqueous Electrolytes PY - 1995 SN - 0005-9021 VL - 99 IS - 12 SP - 1489 EP - 1494 PB - Wiley-VCH Verl. CY - Weinheim AN - OPUS4-11782 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Kautek, Wolfgang A1 - Pentzien, Simone A1 - Krüger, Jörg A1 - König, E. ED - Kautek, W. ED - König, E. T1 - Laser cleaning of ancient parchments T2 - LACONA I CY - Heraklion, Crete, Greece DA - 1995-10-04 PY - 1997 SN - 3-901025-68-5 VL - 18 SP - 69 EP - 78 PB - Mayer CY - Klosterneuburg AN - OPUS4-11784 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Kautek, Wolfgang A1 - Krüger, Jörg ED - Beyer, E. T1 - Femtosecond pulse laser ablation of metallic, semiconducting, ceramic, and biological materials N2 - Production of holes and grooves of < 30 micrometers diameter with high aspect ratio value is a delicate task either for mechanical tools, or for conventional nanosecond pulse lasers like e.g. pulsed Nd:YAG or excimer lasers. They later tend to cause microcracks extending from an annular melting zone, or substantial disruption, respectively. Experimental results are presented which demonstrate that the development of intense ultrashort pulse laser systems (>> 1012 W cm-2, (tau) < 1 ps) opens up possibilities for materials processing by cold plasma generation and ablation of metals, semiconductors, ceramics, composites, and biological materials. A femtosecond and a nanosecond dye laser with pulse durations of 300 fs (< 200 (mu) J) and 7 ns (< 10 mJ), and center wavelengths at 612 and 600 nm, respectively, both focused on an area of the order of 10-5 cm2, have been applied either to absorbing substrates, like polycrystalline gold, silicon (111), aluminum nitride ceramics, or transparent materials, like synthetic and human dental hydroxyapatite composites, bone material, and human cornea transplants. The fs-laser generates its own absorption in transparent materials by a multiphoton absorption process, and thus forces the absorption of visible radiation. Because the time is too short (< ps) for significant transport of mass and energy, the beam interaction generally results in the formation of a thin plasma layer of approximately solid state density. Only after the end of the subpicosecond laser pulse, it expands rapidly away from the surface without any light absorption and further plasma heating. Therefore, energy transfer (heat and impulse) to the target material, and thermal and mechanical disruption are minimized. In contrast to heat- affected zones (HAZ's) generated by conventional nanosecond pulse lasers of the order of 1 - 10 micrometers , HAZ's of less than 0.02 micrometers were observed. T2 - Conference on Production Line Processes ; Conference on Process Control and Modeling ; Conference on Novel Applications CY - Vienna, Austria DA - 1994-04-05 PY - 1994 SN - 0-8194-1508-1 DO - https://doi.org/10.1117/12.184768 SN - 1605-7422 N1 - Serientitel: SPIE proceedings series – Series title: SPIE proceedings series IS - 2207 SP - 600 EP - 611 PB - SPIE--the International Society for Optical Engineering CY - Bellingham, Wash. AN - OPUS4-11892 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Lenzner, M. A1 - Sartania, S. A1 - Spielmann, C. A1 - Krausz, F. ED - Dubowski, J. T1 - Structuring of dielectric and metallic materials with ultrashort laser pulses between 20 fs and 3 ps N2 - Laser-micromachining of barium aluminum borosilicate glass, fused silica and stainless steel has been extended down to a pulse duration of 20 fs generated by a Ti:sapphire laser system at a wavelength of 0.8 micrometer. A systematic study shows that, below 100 fs, an enhanced precision and a substantial decrease of the ablation threshold fluence in comparison to pulse laser processing with pulses in the picosecond and nanosecond range could be achieved. The physical mechanism and the technical relevance of this novel microtechnology is discussed. T2 - Conference CY - San José, CA, USA DA - 1997-02-10 KW - Ablation KW - Laser processing KW - Micromachining KW - Structuring KW - Femtosecond pulse laser KW - Glass KW - Silica KW - Steel PY - 1997 SN - 0-8194-2402-1 DO - https://doi.org/10.1117/12.273740 SN - 1605-7422 N1 - Serientitel: SPIE proceedings series – Series title: SPIE proceedings series IS - 2991 SP - 40 EP - 47 PB - SPIE CY - Bellingham, Wash. AN - OPUS4-11893 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Gruber, D. A1 - Husinsky, W. A1 - Grabner, G. A1 - Baumgartner, I. A1 - Scholman, J. A1 - Krüger, Jörg A1 - Kautek, Wolfgang ED - Waidelich, W. T1 - Nano- and Femtosecond-Laser Processing of Human Donor Corneal-Transplants and Lenticules for Corneal Surgery T2 - 12. Internationaler Kongress Laser 95 CY - Munich, Germany DA - 1995-06-01 PY - 1996 SN - 3-540-61316-1 SP - 397 EP - 400 PB - Springer CY - Berlin AN - OPUS4-11895 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Daminelli-Widany, Grazia A1 - Pentzien, Simone A1 - Hertwig, Andreas A1 - Krüger, Jörg T1 - Influence of film thickness on laser ablation of hydrogenated amorphous carbon films N2 - Single-pulse damage thresholds of hydrogenated amorphous carbon (a-C:H) films were measured for 8-ns laser pulses at 532-nm wavelength. Layer thicknesses from below the optical penetration depth to above the thermal diffusion length (60 nm–13 µm) were examined. After correction of the damage-threshold values for the fraction of energy effectively absorbed by the material, the damage threshold was found to increase linearly with the layer thickness, also for film thicknesses below the optical penetration depth of a-C:H. The threshold fluence reached the bulk value for a layer thickness equal to the thermal diffusion length. The thermal diffusion coefficient was obtained from fitting the experimental data. Several phenomena like graphitization, blistering, exfoliation, and ablation were observed for different fluence regimes and film thicknesses. PY - 2006 DO - https://doi.org/10.1007/s00339-005-3460-5 SN - 0340-3793 VL - 83 IS - 1 SP - 89 EP - 94 PB - Springer CY - Berlin AN - OPUS4-12022 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Krüger, Simone A1 - Schulze, Rolf-Dieter A1 - Brademann-Jock, Kerstin A1 - Friedrich, Jörg Florian ED - Pershin, L. T1 - Introduction of irregularities into plasma polymers by radiative and auto-oxidative processes T2 - 17th International Symposium on Plasma Chemistry (ISPC-17) CY - Toronto, Canada DA - 2005-08-07 PY - 2005 SP - 1(?) EP - 6(?) CY - Toronto AN - OPUS4-11943 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Staub, M. A1 - Scherer, G.G. ED - Waidelich, W. T1 - Femtosecond-pulse laser micromachining of metal layer composites T2 - 12. Internationalen Kongresses Laser 95 CY - Berlin, Germany DA - 1996-01-01 PY - 1996 SN - 3-540-61316-1 SP - 966 EP - 969 PB - Springer CY - Berlin AN - OPUS4-11958 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - von Woedtke, T. A1 - Abel, P. A1 - Schröder, K. A1 - Schwock, A. A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Biosensor-Membranen mit "Analyt-Fenster" T2 - 8. Internationale Messe mit Kongreß für Sensoren, Meßaufnehmer & Systeme ; 8th International Fair with Congress for Sensors, Transducers & Systems CY - Nürnberg, Deutschland DA - 1997-05-13 PY - 1997 VL - 2 SP - 101 EP - 106 PB - ACS Organisations GmbH CY - Wunstorf AN - OPUS4-11959 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Niino, Hiroyuki A1 - Krüger, Jörg A1 - Kautek, Wolfgang ED - Dubowski, J. ED - Dyer, P. T1 - Photochemical surface modification of polyurethane films with biomaterial by excimer laser processing T2 - 3rd Three-Day Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing, LAMOM ; LASE ; Photonics West CY - San José, CA, USA DA - 1998-01-26 KW - Laser irradiation surface effects KW - Surface and interface chemistry of polymers KW - Photochemical reactions of biomolecules KW - Biochemical reaction mechanisms and kinetics PY - 1998 SN - 0-8194-2713-6 SN - 1605-7422 N1 - Serientitel: SPIE proceedings series – Series title: SPIE proceedings series IS - 3274 SP - 128 EP - 132 PB - SPIE CY - Bellingham, Wash. AN - OPUS4-12040 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Boeck, T. A1 - Schmidt, K. A1 - Lorenz, M. A1 - Rosenfeld, A. A1 - Rudolph, Pascale A1 - Krüger, Jörg A1 - Kautek, Wolfgang ED - Gobrecht, J. T1 - Ultra-short pulse laser seeding techniques for silicon crystallite growth on amorphous substrates T2 - QUANTSOL 99 CY - Wildhaus, Switzerland DA - 1999-03-14 PY - 1999 SP - 1(?) EP - 3(?) AN - OPUS4-12041 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Lenzner, M. A1 - Sartania, S. A1 - Spielmann, C. A1 - Krausz, F. A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Nanometer precision material ablation and optical breakdown with sub-10 fs pulses T2 - 11th International Conference on Ultrafast Phenomena CY - Garmisch-Partenkirchen, Germany DA - 1998-07-12 PY - 1998 SN - 3-540-65430-5 SN - 0172-6218 N1 - Serientitel: Springer Series in chemical physics – Series title: Springer Series in chemical physics IS - 63 SP - 313 EP - 315 PB - Springer CY - Heidelberg AN - OPUS4-12042 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Lenzner, M. A1 - Sartania, S. A1 - Spielmann, C. A1 - Krausz, F. A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Optical Damage of Dielectrics down to 5 fs T2 - 17th Conference on Lasers and Electro-Optics (CLEO) CY - Baltimore, MD, USA DA - 1997-05-18 PY - 1997 SN - 1-557-52498-X IS - 11 SP - 218 EP - 219 PB - Optical Society of America CY - Washington, DC AN - OPUS4-12043 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Krüger, Jörg T1 - Sicherheitsaspekte bei der Nutzung von Laserstrahlung T2 - 11. Salzburger Ophthalmologisches Symposium CY - Salzburg, Austria DA - 2006-04-07 PY - 2006 AN - OPUS4-12203 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Krüger, Jörg T1 - Femtosecond laser-induced damage of gold films T2 - E-MRS 2006 Spring Meeting, Symposium H CY - Nice, France DA - 2006-05-29 PY - 2006 AN - OPUS4-12252 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Krüger, Jörg T1 - Ultrakurze Laserimpulse in der Mikromaterialbearbeitung T2 - Tag der Technik, Fachhochschule für Technik und Wirtschaft (FHTW) CY - Berlin, Germany DA - 2006-05-19 PY - 2006 AN - OPUS4-12305 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Urech, L. A1 - Lippert, T. A1 - Wokaun, A. A1 - Martin, Sven A1 - Mädebach, Heinrich A1 - Krüger, Jörg T1 - Removal of doped poly(methylmetacrylate) from tungsten and titanium substrates by femto- and nanosecond laser cleaning N2 - The influence of different laser pulse lengths on the removal of a polymer layer from metal substrates was investigated. As model systems, doped poly(methylmetacrylate) (PMMA) on titanium and tungsten substrates were selected. The ablation threshold and irradiation spot morphology of titanium and tungsten were compared for femtosecond (fs) and nanosecond (ns) laser irradiation and different pulse numbers. Nanosecond laser treatment resulted in a non-homogeneous surface morphology for both titanium and tungsten substrates. Femtosecond irradiation of tungsten revealed a homogeneous ablation spot with little changes in the surface morphology. For titanium, the formation of columnar structures within the irradiation spot was observed. Two different dopant concentrations were used for PMMA to achieve an equal linear absorption coefficient for the femto- and nanosecond laser wavelengths of 790 and 1064 nm. The best results were achieved for the removal of doped PMMA by femtosecond laser irradiation, where only a minimal modification of the metal surface was detected. In the case of nanosecond laser exposure, a pronounced change of the structure was observed, suggesting that damage-free cleaning of the selected metal may only be possible using femtosecond laser pulses. Different experimental parameters, such as laser fluence, pulse repetition rate and sample speed were also investigated to optimize the cleaning quality of doped PMMA from tungsten substrates with femtosecond laser pulses. KW - Poly(methylmetacrylate) KW - Laser treatment KW - Tungsten KW - Titanium KW - Femtosecond PY - 2006 DO - https://doi.org/10.1016/j.apsusc.2005.07.109 SN - 0169-4332 SN - 1873-5584 VL - 252 IS - 13 SP - 4754 EP - 4758 PB - North-Holland CY - Amsterdam AN - OPUS4-12368 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Simone A1 - Schulze, Rolf-Dieter A1 - Brademann-Jock, Kerstin A1 - Swaraj, Sufal A1 - Friedrich, Jörg Florian T1 - Charakterisierung von Plasmapolymeren mittels Thermolumineszenzmessungen N2 - Dünne, mit einem gepulsten Plasma hergestellte Polymerschichten wurden untersucht. Diese Plasmapolymere sollten eine chemisch besser definierte Struktur haben, weil der Anteil an rein chemisch polymerisiertem Produkt während der Plasma-aus-Zeit steigen sollte, während der Anteil an Schichtbildung, der innerhalb der kurzen Plasmapulse durch Monomerfragmentierung und statistische Polyrekombination erzeugt wird, zurückgedrängt wird. Der Monomerfragmentierungsprozeß ist im kontinuierlich brennenden Plasma (cw-Mode) demgegenüber der Hauptprozeß. Neben der Anwendung der klassischen Element- und Bindungsanalysentechnik XPS (X-ray Photoelectron Spectroscopy) wurden hier die Schichten auch mittels Thermolumineszenz untersucht. Defekte und Strukturanomalitäten in Polymeren sollten mit dieser Methode charakterisiert werden können. Untersuchungsobjekte waren funktionalgruppentragende Plasmapolymerschichten, die biosensorische oder biokompatible Funktionen besitzen oder als Haftvermittler in Metall-Polymercompositen eingesetzt werden. Translated Abstract Characterization of Plasmapolymers by Thermoluminescence Thin plasma polymer films were deposited using the pulsed plasma (pp) mode. These plasma polymers should possess a more chemically regular structure because of the lower monomer fragmentation during the short plasma pulses and the chemical chain propagation during the plasma-less periods than those produced by the conventional continuous-wave (cw) mode. In addition to the use of the classic thin film characterization method XPS the method of thermoluminescence was applied to characterize defects and structural specifics in the polymer films produced by pp or cw-plasma mode. The thermoluminescence method was applied to functional groups-carrying plasma polymer layers, which are used in medical technology for forming biocompatible and bioactive coatings or in metal-polymer composites as adhesion-promoting interlayers. KW - Plasmapolymere KW - Thermolumineszenz KW - X-ray PY - 2006 DO - https://doi.org/10.1002/vipr.200600287 SN - 0947-076X SN - 1522-2454 VL - 18 IS - 3 SP - 32 EP - 37 PB - Wiley-VCH Verl. CY - Weinheim AN - OPUS4-12514 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Simone A1 - Schulze, Rolf-Dieter A1 - Brademann-Jock, Kerstin A1 - Swaraj, Sufal A1 - Friedrich, Jörg Florian T1 - Characterisation of plasma polymers by thermoluminescence N2 - Thin plasma polymer films were deposited using the pulsed plasma mode. These plasma polymers should possess a more regular structure than those produced by the conventional continuous-wave (cw) mode, because of lower monomer fragmentation caused by the plasma pulses and the chemical chain propagation during the plasmaless (free!) periods. The thermoluminescence method was applied to functional groups carrying plasma polymer layers which are used in medical technology. Examples are formation of biocompatible, biosensoric and bioactive coatings or in metal polymer composites such as adhesion-promoting interlayers. In addition to the use of the conventional X-ray Photoelectron Spectroscopy for thin film characterization, the new method of thermoluminescence was applied to characterize undesired defects and structural specifics produced in the polymer films by pp or cw plasma mode. The main areas of focus were oxygen-containing groups produced by post-plasma oxygen introduction via auto-oxidation, oxidation of implemented unsaturations and trapped radical sites known as typical irregular structures in plasma polymers. KW - Plasma polymers KW - Thermoluminescence KW - Structure KW - Defects KW - Pulsed plasma KW - Continuous-wave plasma PY - 2006 DO - https://doi.org/10.1016/j.surfcoat.2005.12.003 SN - 0257-8972 VL - 201 IS - 3-4 SP - 543 EP - 552 PB - Elsevier Science CY - Lausanne AN - OPUS4-12818 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Hertwig, Andreas A1 - Martin, Sven A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Interaction area dependence of the ablation threshold of ion-doped glass N2 - The laser ablation behaviour of ion-doped glass filter materials under irradiation with femtosecond laser pulses was investigated with respect to spot size and repetition rate. The damage threshold fluence of Schott BG18 depends on the size of the irradiated area. The effect is discussed in terms of a defect-site model. KW - Femtosecond KW - Laser KW - Materials processing KW - Ablation KW - Threshold KW - Glass PY - 2004 DO - https://doi.org/10.1016/j.tsf.2003.11.131 SN - 0040-6090 VL - 453-454 SP - 527 EP - 530 PB - Elsevier CY - Amsterdam AN - OPUS4-11046 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Hertwig, Andreas A1 - Martin, Sven A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Surface damage and color centers generated by femtosecond pulses in borosilicate glass and silica N2 - Color center generation by femtosecond laser pulses (30 fs) is observed in a fluence range below the damage threshold in an alkali-free barium borosilicate (BBS) glass, and in a thin layer of SiO2 on a fused silica substrate. The color centers are characterized spectroscopically. The optical density of the color centers in BBS glass is by two orders of magnitude higher than that in silica. A healing process with a time constant of about 30 h can be found. PY - 2004 UR - http://www.sciencedirect.com/science/journal/0926860X DO - https://doi.org/10.1007/s00339-004-2634-x SN - 0947-8396 VL - 79 SP - 1075 EP - 1077 PB - Springer CY - Berlin AN - OPUS4-11047 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Femtosecond-pulse visible laser processing of transparent materials N2 - High-power lasers in industrial and R & D applications raise the general problem of reliability and degradation of optical components. A systematic study of nonlinear interaction of various transparent dielectric materials as e.g. glasses, fused silica, and polymers, with laser-pulses in the intensity range of up to 1013 W cm-2 is presented. On the other hand, femtosecond-pulse laser processing in the visible spectral range (300 fs; 620 nm, ~ 2 eV) allows precise microstructuring of transparent dielectrics without disruption of the remnant material. Damage and ablation threshold fluences occur above 1.2 J cm-2 at both silicate glasses and fused silica. Two different photon absorption mechanisms have been observed. The first occurs during the initial laser pulses in the incubation range. There, multiphoton absorption results in moderate energy volume densities. These are sufficient to generate morphological changes and optically active defect sites (colour centres) which provide a much higher absorptivity relevant for the second mechanism. It results in gasification without participation of melt. PY - 1996 SN - 0169-4332 SN - 1873-5584 VL - 96-98 SP - 430 EP - 438 PB - North-Holland CY - Amsterdam AN - OPUS4-11509 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - v. Woedtke, T. A1 - Abel, P. A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Subpicosecond-pulse laser microstructuring for enhanced reproducibility of biosensors N2 - Curved substrates can be micro-structured by laser ablation, which is not possible with standard lithographic methods. The novel femtosecond-pulse laser technique allows the production of defined and reproducible micro-perforations of originally analyte-impermeable membranes. The trans-membrane analyte flux can be controlled both by the variation of the laser focus diameter resulting in different areas of single perforations, and the number of perforations in arrays on small membrane areas. This leads to a higher degree of variability as well as reproducibility of the diffusion qualities of sensor membranes, and marks the main innovation with this technique compared to the hand-made mechanical perforation by specially grinded needles used up to now. Touchless micro-perforation of small membrane areas with negligible heat damage of the structures adjacent to the perforation allows the application of ‘analyte door’ membranes directly onto curved surfaces of miniaturized needle-sensors assigned for in vivo glucose monitoring, for the first time. KW - Biosensor KW - Glucose KW - Membrane perforation KW - Subpicosecond laser ablation KW - Reproducibility PY - 1997 DO - https://doi.org/10.1016/S0925-4005(97)80330-9 SN - 0925-4005 SN - 1873-3077 VL - 42 IS - 3 SP - 151 EP - 156 PB - Elsevier CY - Amsterdam [u.a.] AN - OPUS4-11513 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kautek, Wolfgang A1 - Pentzien, Simone A1 - Rudolph, Pascale A1 - Krüger, Jörg A1 - König, E. T1 - Laser interaction with coated collagen und cellulose fibre composites: fundamentals of laser cleaning of ancient parchment manuscripts and paper N2 - Laser cleaning of delicate biological composite materials such as ancient parchment manuscripts from the 15th and 16th century and printed paper from the 19th century is demonstrated with an ultraviolet excimer pulsed laser at 308 nm. Laser fluence levels must stay below the ablation and destruction threshold of the parchment or paper substrate, and have to surpass the threshold of the contaminant matter. Foreign layers to be removed must exhibit a higher optical density than the artifact substrates. Synthetic carbonaceous dirt modelled by water-soluble black crayons showed a characteristically weak featureless laser-induced plasma spectroscopy spectrum near the noise limit. It turned out that laser-induced plasma spectroscopy is of limited use in monitoring halting points (or etch-stops) because it relies on the destruction not only of the laterally inhomogenously distributed contaminant but also of pigment phases on a microscopically rough parchment substrate. Laser-induced fluorescence spectroscopy, however, promises to be a valuable non-destructive testing technique for etch-stop monitoring. KW - Laser KW - Parchment KW - Papery KW - Spectroscopy KW - Laser cleaning PY - 1998 SN - 0169-4332 SN - 1873-5584 VL - 127-129 SP - 746 EP - 754 PB - North-Holland CY - Amsterdam AN - OPUS4-11516 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kautek, Wolfgang A1 - Krüger, Jörg A1 - Lenzner, M. A1 - Sartania, S. A1 - Spielmann, Ch. A1 - Krausz, F. T1 - Laser ablation of dielectrics with pulse durations between 20 fs and 3 ps PY - 1996 SN - 0003-6951 SN - 1077-3118 VL - 69 IS - 21 SP - 3146 EP - 3148 PB - American Institute of Physics CY - Melville, NY AN - OPUS4-11496 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Lenzner, Matthias A1 - Martin, Sven A1 - Lenner, M. A1 - Spielmann, Ch. A1 - Fiedler, A. A1 - Kautek, Wolfgang T1 - Single- and multi-pulse femtosecond laser ablation of optical filter materials N2 - Ablation experiments employing Ti:sapphire laser pulses with durations from 30 to 340 fs (centre wavelength 800 nm, repetition rate 1 kHz) were performed in air. Absorbing filters (Schott BG18 and BG36) served as targets. The direct focusing technique was used under single- and multi-pulse irradiation conditions. Ablation threshold fluences were determined from a semi-logarithmic plot of the ablation crater diameter versus laser fluence. The threshold fluence decreases for a shorter pulse duration and an increasing number of pulses. The multi-pulse ablation threshold fluences are similar to those of undoped glass material (~1 J cm-2). That means that the multi-pulse ablation threshold is independent on the doping level of the filters. For more than 100 pulses per spot and all pulse durations applied, the threshold fluence is practically constant. This leads to technically relevant ablation threshold values. KW - Damage KW - Femtosecond laser ablation KW - Filter KW - Incubation KW - Laser safety KW - Threshold PY - 2003 DO - https://doi.org/10.1016/S0169-4332(02)01389-2 SN - 0169-4332 SN - 1873-5584 VL - 208-209 SP - 233 EP - 237 PB - North-Holland CY - Amsterdam AN - OPUS4-11545 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Martin, Sven A1 - Krüger, Jörg A1 - Hertwig, Andreas A1 - Fiedler, A. A1 - Kautek, Wolfgang T1 - Femtosecond laser interaction with protection materials N2 - Textile, aluminium and polyethylene used as components in laser protection curtains were investigated with respect to their ablation behaviour. Employing 33-fs pulses (800 nm wavelength, 1 kHz repetition rate), ex situ geometrical measurements of the ablation cavities and in situ acoustic investigations with a microphone were performed to determine the ablation thresholds in the single- and multi-pulse cases. The acoustical method proved advantageous for complex surface morphologies and/or single laser pulse interactions. Incubation phenomena can be observed for all the materials studied. Technically relevant multi-pulse ablation thresholds are presented and are compared with the single-pulse (1-on-1) irradiation. KW - Damage KW - Femtosecond laser ablation KW - Laser safety KW - Threshold KW - Aluminium KW - Textile PY - 2003 DO - https://doi.org/10.1016/S0169-4332(02)01392-2 SN - 0169-4332 SN - 1873-5584 VL - 208-209 SP - 333 EP - 339 PB - North-Holland CY - Amsterdam AN - OPUS4-11546 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Lenzner, Matthias A1 - Krüger, Jörg A1 - Sartania, S. A1 - Cheng, Z. A1 - Spielmann, Ch. A1 - Mourou, G. A1 - Kautek, Wolfgang A1 - Krausz, F. T1 - Femtosecond Optical Breakdown in Dielectrics N2 - We report measurements of the optical breakdown threshold and ablation depth in dielectrics with different band gaps for laser pulse durations ranging from 5 ps to 5 fs at a carrier wavelength of 780 nm. For tau <100 fs, the dominant channel for free electron generation is found to be either impact or multiphoton ionization (MPI) depending on the size of the band gap. The observed MPI rates are substantially lower than those predicted by the Keldysh theory. We demonstrate that sub-10-fs laser pulses open up the way to reversible nonperturbative nonlinear optics (at intensities greater than 1014 W/cm2 slightly below damage threshold) and to nanometer-precision laser ablation (slightly above threshold) in dielectric materials. PY - 1998 SN - 0031-9007 SN - 1079-7114 VL - 80 IS - 18 SP - 4076 EP - 4079 PB - American Physical Society CY - Ridge, NY AN - OPUS4-11518 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Femtosecond pulse visible laser processing of fibre composite materials N2 - A first investigation on the ablation of composite materials like carbon and silicon-carbide reinforced alumo- and borosilicate glasses by 300 fs laser pulses (620 nm) in comparison to experiments with 17 ns pulse excimer laser (308 nm) treatment is presented. In all composites, femtosecond laser scans with a fluence of less than 2 J cm-2 produce well defined cuts with smooth side walls in contrast to the nanosecond laser result where extremely incongruent ablation is observed. Visible lasers should not be applicable because SiC and the glasses are practically transparent. Visible subpicosecond pulses of high intensity in the TW cm-2 range allow multi-photon absorption accompanied by incubation phenomena. The morphology of the groove edges reveal the contrasting ablation thresholds and rates of the fibre and glass materials. The ablation thresholds of the transparent components, i.e. the glass matrices and SiC, are about one order of magnitude greater than that of carbon which is ~ 0.15 J cm-2. Incubation effects are important for the absorption mechanisms in the transparent materials. When a critical number of pulses has not been reached at the SiC-glass composites, only the glass is preferentially ablated, and the fibres remain intact. This is in contrast to the C-glass composites where the ablation behaviour is opposite. PY - 1996 SN - 0169-4332 SN - 1873-5584 VL - 106 SP - 383 EP - 389 PB - North-Holland CY - Amsterdam AN - OPUS4-11506 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bunte, J. A1 - Barcikowski, S. A1 - Burmester, T. A1 - Püster, T. A1 - Hertwig, Andreas A1 - Kautek, Wolfgang A1 - Krüger, Jörg A1 - Martin, Sven A1 - Spielmann, C. A1 - Lenner, M. A1 - Brose, M. T1 - Sicherer Umgang mit Ultrakurzpuls-Lasern, Teil 1: Primäre Gefährdungen PY - 2005 SN - 0945-8875 IS - 2 SP - 6 EP - 11 PB - Magazin-Verl. CY - Bad Nenndorf AN - OPUS4-11001 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bunte, J. A1 - Barcikowski, S. A1 - Burmester, T. A1 - Püster, T. A1 - Hertwig, Andreas A1 - Kautek, Wolfgang A1 - Krüger, Jörg A1 - Martin, Sven A1 - Spielmann, C. A1 - Lenner, M. A1 - Brose, M. T1 - Sicherer Umgang mit Ultrakurzpuls-Lasern, Teil 2: Sekundäre Gefährdungen PY - 2005 SN - 0945-8875 IS - 4 SP - 13 EP - 18 PB - Magazin-Verl. CY - Bad Nenndorf AN - OPUS4-11002 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Krüger, Jörg T1 - Mikromaterialbearbeitung mit ultrakurzen Laserimpulsen: Vorzüge, Probleme, Sicherheitsaspekte T2 - Seminar "Laser in der Feinbearbeitung" CY - Teltow, Germany DA - 2005-10-22 PY - 2005 AN - OPUS4-10950 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Hertwig, Andreas A1 - Martin, S. A1 - Kautek, Wolfgang A1 - Krüger, Jörg ED - Maruray, L. T1 - Ultra-short Pulse Laser Safety - a Challenge to Materials Science N2 - In this paper, safety-related experiments with ultra-short laser pulses (down to 30 fs) on various components (goggles, curtains) for laser protection are presented. The damage and failure behaviour of protective devices has been investigated dependent on practical conditions such as pulse duration, laser .uence, pulse number, and repetition rate. The e.ects of laser-irradiation on materials can be roughly divided into transient ones like laserinduced transmission (LIT) or short-lived colour centres and permanent damages like the stable colour centres and ablation. The former e.ects are particularly important for transparent devices like laser goggles. To obtain a complete overview on laser safety issues and the prevention of failure there are two important .elds of investigation: 1. the e.ects of laser radiation on human eyes and skin, and 2. on the possible protection materials. Both .elds have been addressed during the recently .nished German project SAFEST (safety aspects in femtosecond technology). The amount of safety data available in the ultrashort pulse region has been increased remarkably. This allows for a re-evaluation of known laser protection materials for this region of pulse durations and for the evaluation of new designs that promise high protection levels while being light-weight and convenient to use. T2 - Optical design and engineering II CY - Jena, Germany DA - 2005-09-13 PY - 2005 N1 - Serientitel: Proceedings of SPIE – Series title: Proceedings of SPIE IS - 5962 SP - 59622J-1 - 59622J-10 PB - SPIE CY - Bellingham AN - OPUS4-11593 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Rudolph, Pascale A1 - Pentzien, Simone A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - König, E. T1 - Laserreinigung von Pergament und Papier PY - 1998 SN - 0933-4017 IS - 6 SP - 396 EP - 402 PB - Callwey CY - München AN - OPUS4-11598 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Sorg, N. A1 - Reif, J. A1 - Kautek, Wolfgang T1 - In situ second harmonic generation measurements during the electrodeposition of Ni on n-Si(111) PY - 1993 SN - 0169-4332 SN - 1873-5584 VL - 69 SP - 388 EP - 392 PB - North-Holland CY - Amsterdam AN - OPUS4-11657 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Sorg, N. A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - SHG Measurements of n-Si(111)/aqueous Solution Interfaces PY - 1993 SN - 0005-9021 VL - 97 IS - 3 SP - 402 EP - 406 PB - Wiley-VCH Verl. CY - Weinheim AN - OPUS4-11658 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kautek, Wolfgang A1 - Mitterer, S. A1 - Krüger, Jörg A1 - Husinsky, W. A1 - Grabner, G. T1 - Femtosecond-Pulse Laser Ablation of Human Corneas N2 - A femtosecond pulse laser in the visible spectral region shows promise as a potentially new powerful corneal sculpting tool. It combines the clinical and technical advantages of visible wavelengths with the high ablation quality observed with nanosecond-pulse excimer lasers at 193 nm. A femtosecond and a nanosecond dye laser with pulse durations of 300 fs and 7 ns, and centre wavelengths at 615 nm and 600 nm, respectively, both focused to an area of the order of 10–5 cm2, have been applied to human corneal ablation. Nanosecond laser pulses caused substantial tissue disruption within a 30–100 m range from the excision edge at all fluences above the ablation threshold of F th60 J cm–2 (I th9 GW cm–2). Completely different excisions are produced by the femtosecond-pulse laser: high quality ablations of the Bowman membrane and the stroma tissue characterised by damage zones of less than 0.5 m were observed at all fluences above ablation threshold of F th1 J cm–2 or I th3 TW cm–2 (3×1012 W cm–2). The transparent cornea material can be forced to absorb ultrashort pulses of extremely high intensity. The fs laser generates its own absorption by a multiphoton absorption process. PY - 1994 DO - https://doi.org/10.1007/BF00332446 SN - 0947-8396 VL - 58 IS - 5 SP - 513 EP - 518 PB - Springer CY - Berlin AN - OPUS4-11659 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kautek, Wolfgang A1 - Sorg, N. A1 - Krüger, Jörg T1 - Femtosecond pulse laser second harmonic generation on semiconductor electrodes KW - Femtosecond pulse laser KW - Second harmonic generation (SHG) KW - Electrochemistry KW - Semiconductor electrode KW - Silicon KW - Silicon oxide KW - Oxide growth PY - 1994 SN - 0013-4686 SN - 1873-3859 VL - 39 IS - 8/9 SP - 1245 EP - 1249 PB - Elsevier Science CY - Kidlington AN - OPUS4-11660 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Kautek, Wolfgang A1 - Krüger, Jörg ED - Brieger, M. T1 - Femtosecond-pulse laser microstructuring of semiconducting materials T2 - 1st International Symposium on Semiconductor Processing and Characterization with Lasers - Applications in Photovoltaics CY - Stuttgart, Germany DA - 1994-04-18 KW - Femtosecond-Pulse Laser KW - Subpicosecond-Pulse Laser KW - Laser-Ablation KW - Multi-Photon Absorption KW - Microstructuring KW - Dry Etching KW - Semiconductors KW - Silicon PY - 1995 SN - 0-87849-683-1 SN - 0255-5476 N1 - Serientitel: Materials science forum – Series title: Materials science forum IS - 173/174 SP - 17 EP - 22 PB - Trans Tech Publ. CY - Aedermannsdorf AN - OPUS4-11671 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Kautek, Wolfgang A1 - Sorg, N. A1 - Krüger, Jörg ED - Brieger, M. T1 - Optical second-harmonic generation (SHG) on semiconductor electrodes by means of femtosecond and nanosecond-pulse lasers N2 - In situ optical second-harmonic generation (SHG) on centrosymmetric crystalline semiconductor electrodes opens up a new field of in situ investigations of hurried solid state interfaces and metal front contacts relevant to electronic and photovoltaic devices, which are rarely accessible by other methods. Photoelectrochemical nanosecond- and femtosecond-pulse laser investigations of silicon (111) electrodes show that in situ SHG is feasible in such complex interfacial systems. In a p-p polarization configuration, the azimuthal dependence of the SHG from oxide-covered and bare n-Si (111) electrodes, with and without Ni contact deposits, have been studied. Etching and regrowth of silicon oxides as well as burried interfacial electric field distributions were monitored. In situ SHG is shown to be extremely sensitive to trapped interfacial charge, crystal misorientations and surface step arrays. An advantage of femtosecond-pulses is the fact that illumination fluences that are well below the damage threshold, but still with sufficient power density, can be applied. (Author) T2 - 1st International Symposium on Semiconductor Processing and Characterization with Lasers - Applications in Photovoltaics CY - Stuttgart, Germany DA - 1994-04-18 KW - Femtosecond-Pulse Laser KW - Sub-Picosecond-Pulse Laser KW - Semiconductors KW - Silicon KW - Second-Harmonic Generation KW - SHG KW - Nonlinear Electroreflectance KW - Etch Process KW - Oxide KW - Interfacial Electronic States KW - Fermi-Level Pinning KW - MOS Diode PY - 1995 SN - 0-87849-683-1 DO - https://doi.org/10.4028/www.scientific.net/MSF.173-174.285 SN - 0255-5476 N1 - Serientitel: Materials science forum – Series title: Materials science forum IS - 173/174 SP - 285 EP - 290 PB - Trans Tech Publ. CY - Aedermannsdorf AN - OPUS4-11672 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Krüger, Jörg T1 - Short pulse laser processing: safety aspects T2 - Bereichsseminar A - Max Born Institut Berlin CY - Berlin, Germany DA - 2006-11-30 PY - 2006 AN - OPUS4-13779 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Krüger, Jörg T1 - Sicherheit in der Anwendung der Femtosekunden-Lasertechnologie T2 - Mitgliederversammlung Laserverbund Berlin/Brandenburg CY - Berlin, Germany DA - 2007-01-18 PY - 2007 AN - OPUS4-14455 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -