TY - JOUR A1 - Paatsch, Wolfgang A1 - Kautek, Wolfgang A1 - Krüger, Jörg T1 - Structuring and Plating of Materials with Ultrashort Laser Pulses PY - 2000 SN - 0016-4232 VL - 91 IS - 5 SP - 1271 EP - 1275 PB - Leuze CY - Saulgau, Württ. AN - OPUS4-6000 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Ultrashort Pulse Laser Interaction with Dielectrics and Polymers N2 - Abstract Femtosecond laser micromachining has excited vivid attention in various industri- al fields and in medicine owing to the advantages of ultrashort laser pulses compared to long-pulse treatment.These are mainly the reduction of the laser fluence needed to induce ablation and the improvement of the contour sharpness of the laser-generated structures. Recently,special attention was paid to femtosecond laser experiments on nonabsorbing in- organic dielectrics.This is due to the fact that optical damage in dielectric optical elements limits the performance of high-power laser systems.Despite the fact that a large variety of organic polymers can be machined with excimer lasers successfully,the involvement of thermal processes can lead to an unsatisfactory quality of the structures.Ultrashort,fs-laser pulses might be an alternative for the treatment of polymers.Therefore,femtosecond laser machining investigations of dielectrics and polymers are reviewed in this paper.Similarities and differences of the ablation behavior of both material classes are discussed.The influ- ence of the bandgap on the ablation threshold in dependence on the pulse duration,the en- hancement of the machining precision with a shortening of the pulse duration,incubation phenomena,and morphological features appearing on the surface after femtosecond laser treatment are mentioned.Possible applications,e.g.,in medicine and biosensors,are de- scribed. KW - Dielectrics KW - Femtosecond laser KW - Micromachining KW - Ablation KW - Polymers PY - 2004 SN - 3-540-40471-6 N1 - Serientitel: Advances in polymer science – Series title: Advances in polymer science IS - 168 SP - 247 EP - 289 PB - Springer CY - Berlin AN - OPUS4-3262 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Hertwig, Andreas A1 - Martin, Sven A1 - Krüger, Jörg A1 - Spielmann, C. A1 - Lenner, M. A1 - Kautek, Wolfgang ED - Dausinger, F. ED - Lichtner, F. ED - Lubatschowski, H. T1 - Primary hazards and reliability of protective materials N2 - Femtosecond laser pulses are close to industrial use. The advantages of ultrashort laser pulses for micromachining applications especially in the case of dielectric and biological samples down to pulse durations of 5 fs have been established. The current international standards of laser safety are primarily concerned with CW and pulsed lasers down to the nanosecond range. Therefore, human tissue and laser-protection equipment was investigated with respect to its resistance and protection performance for femtosecond laser illumination down to 30 fs. This included filter glasses for laser protection eyewear, polymer and textile materials used in curtains and guards. Bulk absorber filters can provide enough protection against laser radiation, give a sufficiently broad absorption spectrum. Materials are damaged more easily by femtosecond laser radiation. The need for sufficient spectral broadness as well as the different damage thresholds have to be included in international laser safety standards. This work should trigger the development of novel eye-protection devices that are lighter and ergonomically more acceptable than present commercial models. KW - Lasersicherheit KW - Kurzpulslaser KW - Femtosekunden KW - Lasertechnik KW - Materialbearbeitung PY - 2004 SN - 3-540-20114-9 DO - https://doi.org/10.1007/b96440 SN - 0303-4216 N1 - Serientitel: Topics in applied physics – Series title: Topics in applied physics IS - 96 SP - 287 EP - 307 PB - Springer CY - Berlin AN - OPUS4-4661 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kautek, Wolfgang A1 - Pentzien, Simone A1 - Röllig, Mathias A1 - Rudolph, Pascale A1 - Krüger, Jörg A1 - Maywald-Pitellos, C. A1 - Bansa, H. A1 - Grösswang, H. A1 - König, E. T1 - Near-UV laser interaction with contaminants and pigments on parchment: laser cleaning diagnostics by SE-microscopy, VIS-, and IR-spectroscopy PY - 2000 SN - 1296-2074 SN - 1778-3674 VL - 1 IS - sup.1 PB - Elsevier CY - Paris AN - OPUS4-5981 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Baudach, Steffen A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Femtosecond Laser Processing of Soft Materials KW - Femtosecond pulse laser KW - Laser processing KW - Polymer ablation KW - Nanostructures PY - 2001 SN - 0387-0200 VL - 29 IS - 11 SP - 705 EP - 709 PB - Gakkai CY - Suita AN - OPUS4-6006 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Bonse, Jörn A1 - Baudach, Steffen A1 - Krüger, Jörg A1 - Kautek, Wolfgang ED - Exarhos, G. T1 - Femtosecond laser damage in dielectric coatings N2 - Multi-shot investigations of Ti:sapphire laser (wavelength (lambda) approximately equals 800 nm) induced damage were performed in three different laboratories (BAM, Berlin; LZH, Hannover; UNM, Albuquerque). The ablation behavior of a high reflecting mirror consisting of alternating (lambda) /4- layers of Ta2O5 and SiO2 was studied. Fused silica served as substrate. The influence of the pulse duration ((tau) equals 13 - 130 fs), the pulse number (30 - (infinity) ) and the repetition rate (10 Hz - 100 MHz) on the damage threshold will be discussed. T2 - 32nd Annual Boulder Damage Symposium CY - Boulder, CO, USA DA - 2000-10-16 PY - 2001 SN - 0-8194-4036-1 DO - https://doi.org/10.1117/12.425056 SN - 1605-7422 N1 - Serientitel: SPIE proceedings series – Series title: SPIE proceedings series IS - 4347 SP - 24 EP - 34 PB - International Society for Optical Engineering (SPIE) CY - Bellingham, Wash. AN - OPUS4-6013 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Kautek, Wolfgang A1 - Pentzien, Simone A1 - Rudolph, Pascale A1 - Krüger, Jörg A1 - Maywald-Pitellos, C. A1 - Bansa, H. A1 - Grösswang, H. A1 - König, W. ED - Fotakis, C. T1 - Near-Ultraviolet Pulsed Laser Interaction with Contaminants and Pigments on Parchment: Spectroscopic Diagnostics for Laser Cleaning Safety T2 - 5th International Conference on Optics within Life Sciences CY - H¯erakleion, Greece DA - 1998-01-01 PY - 2000 SN - 3-540-66648-6 N1 - Serientitel: Optics within life sciences – Series title: Optics within life sciences IS - 5 SP - 100 EP - 107 PB - Springer CY - Berlin AN - OPUS4-6189 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Martin, Sven A1 - Hertwig, Andreas A1 - Lenzner, Matthias A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Spot-size dependence of the ablation threshold in dielectrics for femtosecond laser pulses N2 - The multi-pulse ablation threshold of barium borosilicate glass was measured using 30-fs pulses of a high repetition rate (1 kHz) laser system. The threshold fluence was found to decrease with increasing beam radius ranging from 20 to 400 m. Two existing models are applied by considering thermal accumulation and point defects, respectively . PY - 2003 DO - https://doi.org/10.1007/s00339-003-2213-6 SN - 0947-8396 VL - 77 IS - 7 SP - 883 EP - 884 PB - Springer CY - Berlin AN - OPUS4-6317 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Meja, P. A1 - Autric, M. A1 - Kautek, Wolfgang T1 - Femtosecond pulse laser ablation of anodic oxide coatings on aluminium alloys with on-line acoustic observation N2 - The 125-fs laser ablation behaviour (800 nm) of aluminium and anodic oxide coatings on an AlMgSi1 alloy was investigated. The multi-pulse ablation threshold of aluminium at 1.2 J cm-2 was less than that of the oxides of 2–3 J cm-2. Aluminium exhibited a single pulse modification (melting) threshold of 0.3 J cm-2. These values derived from an evaluation of the crater geometry coincided with on-line acoustic measurements. The detected microphone voltage amplitude increased linearly with the laser fluence. The morphology of the ablation craters on aluminium indicated melt formation and displacement of a homogeneous melt phase due to the recoil action of the expanding metal vapour. The laser-processed ceramic oxide phases, on the other hand, showed a spongy resolidified melt layer, which denotes a collocated in-depth formation both of a melt and a gas phase. These phenomena are discussed in terms of the relative dominance of penetration depth of laser light and heat affected zones in the investigated materials with strongly varying optical and thermodynamical properties. KW - Laser ablation KW - Acoustic measurement KW - Microphone KW - Aluminium KW - Aluminium oxide PY - 2002 SN - 0169-4332 SN - 1873-5584 VL - 186 IS - 1-4 SP - 374 EP - 380 PB - North-Holland CY - Amsterdam AN - OPUS4-6324 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Baudach, Steffen A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Lenzner, Matthias T1 - Femtosecond laser ablation of silicon-modification thresholds and morphology N2 - We investigated the initial modification and ablation of crystalline silicon with single and multiple Ti:sapphire laser pulses of 5 to 400 fs duration. In accordance with earlier established models, we found the phenomena amorphization, melting, re-crystallization, nucleated vaporization, and ablation to occur with increasing laser fluence down to the shortest pulse durations. We noticed new morphological features (bubbles) as well as familiar ones (ripples, columns). A nearly constant ablation threshold fluence on the order of 0.2 J/cm2 for all pulse durations and multiple-pulse irradiation was observed. For a duration of ,100 fs, significant incubation can be observed, whereas for 5 fs pulses, the ablation threshold does not depend on the pulse number within the experimental error. For micromachining of silicon, a pulse duration of less than 500 fs is not advantageous. PY - 2002 DO - https://doi.org/10.1007/s003390100893 SN - 0947-8396 VL - 74 IS - 1 SP - 19 EP - 25 PB - Springer CY - Berlin AN - OPUS4-6328 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Jeschke, H.O. A1 - Garcia, M.E. A1 - Lenzner, Matthias A1 - Bonse, Jörn A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Laser ablation thresholds of silicon for different pulse durations: theory and experiment N2 - The ultrafast laser ablation of silicon has been investigated experimentally and theoretically. The theoretical description is based on molecular dynamics (MD) simulations combined with a microscopic electronic model. We determine the thresholds of melting and ablation for two different pulse durations =20 and 500 fs. Experiments have been performed using 100 Ti:Sap-phire laser pulses per spot in air environment. The ablation thresholds were determined for pulses with a duration of 25 and 400 fs, respectively. Good agreement is obtained between theory and experiment. KW - Laser ablation KW - Pulse duration KW - Threshold of silicon PY - 2002 DO - https://doi.org/10.1016/S0169-4332(02)00458-0 SN - 0169-4332 SN - 1873-5584 VL - 197-198 SP - 839 EP - 844 PB - North-Holland CY - Amsterdam AN - OPUS4-6314 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Mero, M. A1 - Clapp, B. A1 - Jasapara, J.C. A1 - Rudolph, W. A1 - Ristau, D. A1 - Starke, K. A1 - Krüger, Jörg A1 - Martin, Sven A1 - Kautek, Wolfgang T1 - On the damage behavior of dielectric films when illuminated with multiple femtosecond laser pulses N2 - The physical effects reducing the damage threshold of dielectric films when exposed to multiple femtosecond pulses are investigated. The measured temperature increase of a Ta2O5 film scales exponentially with the pulse fluence. A polarized luminescence signal is observed that depends quadratically on the pulse fluence and is attributed to twophoton excitation of self-trapped excitons that form after band-to-band excitation. The damage fluence decreases with increasing pulse number, but is independent of the repetition rate from 1 Hz to 1 kHz at a constant pulse number. The repetition rate dependence of the breakdown threshold is also measured for TiO2 , HfO2, Al2O3, and SiO2 films. A theoretical model is presented that explains these findings. KW - Laser-induced damage KW - Laser materials KW - Ultrafast phenomena KW - Coatings PY - 2005 DO - https://doi.org/10.1117/1.1905343 SN - 0892-354X VL - 44 IS - 5 SP - 051107-1-051107-7 PB - Dekker CY - New York, NY AN - OPUS4-7406 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kautek, Wolfgang A1 - Rudolph, Pascale A1 - Daminelli-Widany, Grazia A1 - Krüger, Jörg T1 - Physico-chemical aspects of femtosecond-pulse-laser-induced surface nanostructures N2 - Near-ablation threshold investigations focusing on the generation of periodic nanostructures and their correlation with physico-chemical properties of the solid phase such as e.g., the material-dependent surface energy, were conducted. Molecular dynamic modelling in the sub-picosecond time domain was used to consider ultrafast opto-electronic processes triggering surface reorganization reactions. Fluid containment of solid interfaces showed strong influence on the resulting micro- and nanostructures due to its drastic reduction of the surface energy. The phenomena are discussed in respect to the minimization of the surface free energy in dependence of material composition and interfacial structure. PY - 2005 DO - https://doi.org/10.1007/s00339-005-3211-7 SN - 0947-8396 VL - 81 SP - 65 EP - 70 PB - Springer CY - Berlin AN - OPUS4-7403 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Martin, Sven A1 - Mädebach, Heinrich A1 - Urech, L. A1 - Lippert, T. A1 - Wokaun, A. A1 - Kautek, Wolfgang T1 - Femto- and nanosecond laser treatment of doped polymethylmethacrylate N2 - Femto- and nanosecond laser ablation of polymethylmethacrylate (PMMA) and PMMA doped with a linear absorber was investigated in the infrared spectral region. Ablation thresholds were determined and incubation phenomena were identified. The ‘degree’ of incubation was calculated employing a phenomenological model. The influence of the pulse duration on the machining quality of the polymers was examined. The presence of an absorbing chromophore is not a prerequisite for a controllable fs-laser structuring in contrast to the ns-treatment. Surface swelling always accompanied ablation. KW - Laser ablation KW - Laser beam machining KW - Doping thin films KW - Polymers-radiation effects PY - 2005 DO - https://doi.org/10.1016/j.apsusc.2005.01.078 SN - 0169-4332 SN - 1873-5584 VL - 247 SP - 406 EP - 411 PB - North-Holland CY - Amsterdam AN - OPUS4-7470 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Kautek, Wolfgang A1 - Hertwig, Andreas A1 - Martin, Sven A1 - Krüger, Jörg A1 - Lenzner, Matthias A1 - Spielmann, C. A1 - Lenner, M. A1 - Bunte, J. A1 - Puester, T. A1 - Burmester, T. A1 - Fiedler, A. A1 - Heberer, E. A1 - Brose, M. A1 - Stingl, A. A1 - Kiehl, P. A1 - Hönigsmann, H. A1 - Trautinger, F. A1 - Grabner, G. T1 - Safety in Femtosecond Laser Technology - Recent Results of a European Research Project (406) T2 - International Laser Safety Conference 2003 ; ILSC 2003 CY - Jacksonville, FL, USA DA - 2003-03-10 PY - 2003 SN - 0-912035-38-2 SP - 1(?) EP - 10(?) PB - Laser Institute of America CY - Orlando, Fla. AN - OPUS4-2259 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Daminelli-Widany, Grazia A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Femtosecond laser interaction with silicon under water confinement N2 - Femtosecond laser interaction with silicon was investigated in water and in air, with 130-fs laser pulses at 800 nm wavelength. Under water confinement, higher modification thresholds, lower ablation depths and similar incubation factors were found in comparison to the dry experiment. Morphological features of the laser-induced cavities also differed. In contrast to air experiments, debris redeposition was negligible, while the ablated material remained suspended in the water layer phase. Underwater cavities obtained at high fluences and high number of pulses per spot showed anomalous profiles, consistent with a strong spatial deformation of the laser beam coupled into the target. Ripples formed at the edges of the modified area showed varying spacings: f100 and f700 nm for water and air experiments, respectively. Differences to the air experiment were related to a complex combination of fluence-dependent non-linear effects occurring in the water layer and to pulse-number-dependent shielding effects induced by cavitation bubbles and suspended ablated material. KW - Laser ablation KW - Silicon KW - Solid electrolyte interface KW - Water PY - 2004 DO - https://doi.org/10.1016/j.tsf.2004.04.043 SN - 0040-6090 VL - 467 IS - 1-2 SP - 334 EP - 341 PB - Elsevier CY - Amsterdam AN - OPUS4-4008 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krivenko, A.G. A1 - Kautek, Wolfgang A1 - Krüger, Jörg A1 - Benderskii, V.A. T1 - Subpicosecond Emission from Mercury and Silver into Electrolyte Solution: An Experimental Study PY - 1997 SN - 0038-5387 SN - 1023-1935 VL - 33 IS - 4 SP - 394 EP - 400 PB - MAIK Nauka/Interperiodica Publ. CY - Moscow AN - OPUS4-11781 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krivenko, A.G. A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Benderskii, V.A. T1 - Subpicosecond-Pulse-Laser-Induced Electron Emission from Mercury and Silver into Aqueous Electrolytes PY - 1995 SN - 0005-9021 VL - 99 IS - 12 SP - 1489 EP - 1494 PB - Wiley-VCH Verl. CY - Weinheim AN - OPUS4-11782 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Kautek, Wolfgang A1 - Pentzien, Simone A1 - Krüger, Jörg A1 - König, E. ED - Kautek, W. ED - König, E. T1 - Laser cleaning of ancient parchments T2 - LACONA I CY - Heraklion, Crete, Greece DA - 1995-10-04 PY - 1997 SN - 3-901025-68-5 VL - 18 SP - 69 EP - 78 PB - Mayer CY - Klosterneuburg AN - OPUS4-11784 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Kautek, Wolfgang A1 - Krüger, Jörg ED - Beyer, E. T1 - Femtosecond pulse laser ablation of metallic, semiconducting, ceramic, and biological materials N2 - Production of holes and grooves of < 30 micrometers diameter with high aspect ratio value is a delicate task either for mechanical tools, or for conventional nanosecond pulse lasers like e.g. pulsed Nd:YAG or excimer lasers. They later tend to cause microcracks extending from an annular melting zone, or substantial disruption, respectively. Experimental results are presented which demonstrate that the development of intense ultrashort pulse laser systems (>> 1012 W cm-2, (tau) < 1 ps) opens up possibilities for materials processing by cold plasma generation and ablation of metals, semiconductors, ceramics, composites, and biological materials. A femtosecond and a nanosecond dye laser with pulse durations of 300 fs (< 200 (mu) J) and 7 ns (< 10 mJ), and center wavelengths at 612 and 600 nm, respectively, both focused on an area of the order of 10-5 cm2, have been applied either to absorbing substrates, like polycrystalline gold, silicon (111), aluminum nitride ceramics, or transparent materials, like synthetic and human dental hydroxyapatite composites, bone material, and human cornea transplants. The fs-laser generates its own absorption in transparent materials by a multiphoton absorption process, and thus forces the absorption of visible radiation. Because the time is too short (< ps) for significant transport of mass and energy, the beam interaction generally results in the formation of a thin plasma layer of approximately solid state density. Only after the end of the subpicosecond laser pulse, it expands rapidly away from the surface without any light absorption and further plasma heating. Therefore, energy transfer (heat and impulse) to the target material, and thermal and mechanical disruption are minimized. In contrast to heat- affected zones (HAZ's) generated by conventional nanosecond pulse lasers of the order of 1 - 10 micrometers , HAZ's of less than 0.02 micrometers were observed. T2 - Conference on Production Line Processes ; Conference on Process Control and Modeling ; Conference on Novel Applications CY - Vienna, Austria DA - 1994-04-05 PY - 1994 SN - 0-8194-1508-1 DO - https://doi.org/10.1117/12.184768 SN - 1605-7422 N1 - Serientitel: SPIE proceedings series – Series title: SPIE proceedings series IS - 2207 SP - 600 EP - 611 PB - SPIE--the International Society for Optical Engineering CY - Bellingham, Wash. AN - OPUS4-11892 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Lenzner, M. A1 - Sartania, S. A1 - Spielmann, C. A1 - Krausz, F. ED - Dubowski, J. T1 - Structuring of dielectric and metallic materials with ultrashort laser pulses between 20 fs and 3 ps N2 - Laser-micromachining of barium aluminum borosilicate glass, fused silica and stainless steel has been extended down to a pulse duration of 20 fs generated by a Ti:sapphire laser system at a wavelength of 0.8 micrometer. A systematic study shows that, below 100 fs, an enhanced precision and a substantial decrease of the ablation threshold fluence in comparison to pulse laser processing with pulses in the picosecond and nanosecond range could be achieved. The physical mechanism and the technical relevance of this novel microtechnology is discussed. T2 - Conference CY - San José, CA, USA DA - 1997-02-10 KW - Ablation KW - Laser processing KW - Micromachining KW - Structuring KW - Femtosecond pulse laser KW - Glass KW - Silica KW - Steel PY - 1997 SN - 0-8194-2402-1 DO - https://doi.org/10.1117/12.273740 SN - 1605-7422 N1 - Serientitel: SPIE proceedings series – Series title: SPIE proceedings series IS - 2991 SP - 40 EP - 47 PB - SPIE CY - Bellingham, Wash. AN - OPUS4-11893 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Gruber, D. A1 - Husinsky, W. A1 - Grabner, G. A1 - Baumgartner, I. A1 - Scholman, J. A1 - Krüger, Jörg A1 - Kautek, Wolfgang ED - Waidelich, W. T1 - Nano- and Femtosecond-Laser Processing of Human Donor Corneal-Transplants and Lenticules for Corneal Surgery T2 - 12. Internationaler Kongress Laser 95 CY - Munich, Germany DA - 1995-06-01 PY - 1996 SN - 3-540-61316-1 SP - 397 EP - 400 PB - Springer CY - Berlin AN - OPUS4-11895 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Staub, M. A1 - Scherer, G.G. ED - Waidelich, W. T1 - Femtosecond-pulse laser micromachining of metal layer composites T2 - 12. Internationalen Kongresses Laser 95 CY - Berlin, Germany DA - 1996-01-01 PY - 1996 SN - 3-540-61316-1 SP - 966 EP - 969 PB - Springer CY - Berlin AN - OPUS4-11958 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - von Woedtke, T. A1 - Abel, P. A1 - Schröder, K. A1 - Schwock, A. A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Biosensor-Membranen mit "Analyt-Fenster" T2 - 8. Internationale Messe mit Kongreß für Sensoren, Meßaufnehmer & Systeme ; 8th International Fair with Congress for Sensors, Transducers & Systems CY - Nürnberg, Deutschland DA - 1997-05-13 PY - 1997 VL - 2 SP - 101 EP - 106 PB - ACS Organisations GmbH CY - Wunstorf AN - OPUS4-11959 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Niino, Hiroyuki A1 - Krüger, Jörg A1 - Kautek, Wolfgang ED - Dubowski, J. ED - Dyer, P. T1 - Photochemical surface modification of polyurethane films with biomaterial by excimer laser processing T2 - 3rd Three-Day Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing, LAMOM ; LASE ; Photonics West CY - San José, CA, USA DA - 1998-01-26 KW - Laser irradiation surface effects KW - Surface and interface chemistry of polymers KW - Photochemical reactions of biomolecules KW - Biochemical reaction mechanisms and kinetics PY - 1998 SN - 0-8194-2713-6 SN - 1605-7422 N1 - Serientitel: SPIE proceedings series – Series title: SPIE proceedings series IS - 3274 SP - 128 EP - 132 PB - SPIE CY - Bellingham, Wash. AN - OPUS4-12040 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Boeck, T. A1 - Schmidt, K. A1 - Lorenz, M. A1 - Rosenfeld, A. A1 - Rudolph, Pascale A1 - Krüger, Jörg A1 - Kautek, Wolfgang ED - Gobrecht, J. T1 - Ultra-short pulse laser seeding techniques for silicon crystallite growth on amorphous substrates T2 - QUANTSOL 99 CY - Wildhaus, Switzerland DA - 1999-03-14 PY - 1999 SP - 1(?) EP - 3(?) AN - OPUS4-12041 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Lenzner, M. A1 - Sartania, S. A1 - Spielmann, C. A1 - Krausz, F. A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Nanometer precision material ablation and optical breakdown with sub-10 fs pulses T2 - 11th International Conference on Ultrafast Phenomena CY - Garmisch-Partenkirchen, Germany DA - 1998-07-12 PY - 1998 SN - 3-540-65430-5 SN - 0172-6218 N1 - Serientitel: Springer Series in chemical physics – Series title: Springer Series in chemical physics IS - 63 SP - 313 EP - 315 PB - Springer CY - Heidelberg AN - OPUS4-12042 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Lenzner, M. A1 - Sartania, S. A1 - Spielmann, C. A1 - Krausz, F. A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Optical Damage of Dielectrics down to 5 fs T2 - 17th Conference on Lasers and Electro-Optics (CLEO) CY - Baltimore, MD, USA DA - 1997-05-18 PY - 1997 SN - 1-557-52498-X IS - 11 SP - 218 EP - 219 PB - Optical Society of America CY - Washington, DC AN - OPUS4-12043 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Hertwig, Andreas A1 - Martin, Sven A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Interaction area dependence of the ablation threshold of ion-doped glass N2 - The laser ablation behaviour of ion-doped glass filter materials under irradiation with femtosecond laser pulses was investigated with respect to spot size and repetition rate. The damage threshold fluence of Schott BG18 depends on the size of the irradiated area. The effect is discussed in terms of a defect-site model. KW - Femtosecond KW - Laser KW - Materials processing KW - Ablation KW - Threshold KW - Glass PY - 2004 DO - https://doi.org/10.1016/j.tsf.2003.11.131 SN - 0040-6090 VL - 453-454 SP - 527 EP - 530 PB - Elsevier CY - Amsterdam AN - OPUS4-11046 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Hertwig, Andreas A1 - Martin, Sven A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Surface damage and color centers generated by femtosecond pulses in borosilicate glass and silica N2 - Color center generation by femtosecond laser pulses (30 fs) is observed in a fluence range below the damage threshold in an alkali-free barium borosilicate (BBS) glass, and in a thin layer of SiO2 on a fused silica substrate. The color centers are characterized spectroscopically. The optical density of the color centers in BBS glass is by two orders of magnitude higher than that in silica. A healing process with a time constant of about 30 h can be found. PY - 2004 UR - http://www.sciencedirect.com/science/journal/0926860X DO - https://doi.org/10.1007/s00339-004-2634-x SN - 0947-8396 VL - 79 SP - 1075 EP - 1077 PB - Springer CY - Berlin AN - OPUS4-11047 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Femtosecond-pulse visible laser processing of transparent materials N2 - High-power lasers in industrial and R & D applications raise the general problem of reliability and degradation of optical components. A systematic study of nonlinear interaction of various transparent dielectric materials as e.g. glasses, fused silica, and polymers, with laser-pulses in the intensity range of up to 1013 W cm-2 is presented. On the other hand, femtosecond-pulse laser processing in the visible spectral range (300 fs; 620 nm, ~ 2 eV) allows precise microstructuring of transparent dielectrics without disruption of the remnant material. Damage and ablation threshold fluences occur above 1.2 J cm-2 at both silicate glasses and fused silica. Two different photon absorption mechanisms have been observed. The first occurs during the initial laser pulses in the incubation range. There, multiphoton absorption results in moderate energy volume densities. These are sufficient to generate morphological changes and optically active defect sites (colour centres) which provide a much higher absorptivity relevant for the second mechanism. It results in gasification without participation of melt. PY - 1996 SN - 0169-4332 SN - 1873-5584 VL - 96-98 SP - 430 EP - 438 PB - North-Holland CY - Amsterdam AN - OPUS4-11509 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - v. Woedtke, T. A1 - Abel, P. A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Subpicosecond-pulse laser microstructuring for enhanced reproducibility of biosensors N2 - Curved substrates can be micro-structured by laser ablation, which is not possible with standard lithographic methods. The novel femtosecond-pulse laser technique allows the production of defined and reproducible micro-perforations of originally analyte-impermeable membranes. The trans-membrane analyte flux can be controlled both by the variation of the laser focus diameter resulting in different areas of single perforations, and the number of perforations in arrays on small membrane areas. This leads to a higher degree of variability as well as reproducibility of the diffusion qualities of sensor membranes, and marks the main innovation with this technique compared to the hand-made mechanical perforation by specially grinded needles used up to now. Touchless micro-perforation of small membrane areas with negligible heat damage of the structures adjacent to the perforation allows the application of ‘analyte door’ membranes directly onto curved surfaces of miniaturized needle-sensors assigned for in vivo glucose monitoring, for the first time. KW - Biosensor KW - Glucose KW - Membrane perforation KW - Subpicosecond laser ablation KW - Reproducibility PY - 1997 DO - https://doi.org/10.1016/S0925-4005(97)80330-9 SN - 0925-4005 SN - 1873-3077 VL - 42 IS - 3 SP - 151 EP - 156 PB - Elsevier CY - Amsterdam [u.a.] AN - OPUS4-11513 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kautek, Wolfgang A1 - Pentzien, Simone A1 - Rudolph, Pascale A1 - Krüger, Jörg A1 - König, E. T1 - Laser interaction with coated collagen und cellulose fibre composites: fundamentals of laser cleaning of ancient parchment manuscripts and paper N2 - Laser cleaning of delicate biological composite materials such as ancient parchment manuscripts from the 15th and 16th century and printed paper from the 19th century is demonstrated with an ultraviolet excimer pulsed laser at 308 nm. Laser fluence levels must stay below the ablation and destruction threshold of the parchment or paper substrate, and have to surpass the threshold of the contaminant matter. Foreign layers to be removed must exhibit a higher optical density than the artifact substrates. Synthetic carbonaceous dirt modelled by water-soluble black crayons showed a characteristically weak featureless laser-induced plasma spectroscopy spectrum near the noise limit. It turned out that laser-induced plasma spectroscopy is of limited use in monitoring halting points (or etch-stops) because it relies on the destruction not only of the laterally inhomogenously distributed contaminant but also of pigment phases on a microscopically rough parchment substrate. Laser-induced fluorescence spectroscopy, however, promises to be a valuable non-destructive testing technique for etch-stop monitoring. KW - Laser KW - Parchment KW - Papery KW - Spectroscopy KW - Laser cleaning PY - 1998 SN - 0169-4332 SN - 1873-5584 VL - 127-129 SP - 746 EP - 754 PB - North-Holland CY - Amsterdam AN - OPUS4-11516 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kautek, Wolfgang A1 - Krüger, Jörg A1 - Lenzner, M. A1 - Sartania, S. A1 - Spielmann, Ch. A1 - Krausz, F. T1 - Laser ablation of dielectrics with pulse durations between 20 fs and 3 ps PY - 1996 SN - 0003-6951 SN - 1077-3118 VL - 69 IS - 21 SP - 3146 EP - 3148 PB - American Institute of Physics CY - Melville, NY AN - OPUS4-11496 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Lenzner, Matthias A1 - Martin, Sven A1 - Lenner, M. A1 - Spielmann, Ch. A1 - Fiedler, A. A1 - Kautek, Wolfgang T1 - Single- and multi-pulse femtosecond laser ablation of optical filter materials N2 - Ablation experiments employing Ti:sapphire laser pulses with durations from 30 to 340 fs (centre wavelength 800 nm, repetition rate 1 kHz) were performed in air. Absorbing filters (Schott BG18 and BG36) served as targets. The direct focusing technique was used under single- and multi-pulse irradiation conditions. Ablation threshold fluences were determined from a semi-logarithmic plot of the ablation crater diameter versus laser fluence. The threshold fluence decreases for a shorter pulse duration and an increasing number of pulses. The multi-pulse ablation threshold fluences are similar to those of undoped glass material (~1 J cm-2). That means that the multi-pulse ablation threshold is independent on the doping level of the filters. For more than 100 pulses per spot and all pulse durations applied, the threshold fluence is practically constant. This leads to technically relevant ablation threshold values. KW - Damage KW - Femtosecond laser ablation KW - Filter KW - Incubation KW - Laser safety KW - Threshold PY - 2003 DO - https://doi.org/10.1016/S0169-4332(02)01389-2 SN - 0169-4332 SN - 1873-5584 VL - 208-209 SP - 233 EP - 237 PB - North-Holland CY - Amsterdam AN - OPUS4-11545 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Martin, Sven A1 - Krüger, Jörg A1 - Hertwig, Andreas A1 - Fiedler, A. A1 - Kautek, Wolfgang T1 - Femtosecond laser interaction with protection materials N2 - Textile, aluminium and polyethylene used as components in laser protection curtains were investigated with respect to their ablation behaviour. Employing 33-fs pulses (800 nm wavelength, 1 kHz repetition rate), ex situ geometrical measurements of the ablation cavities and in situ acoustic investigations with a microphone were performed to determine the ablation thresholds in the single- and multi-pulse cases. The acoustical method proved advantageous for complex surface morphologies and/or single laser pulse interactions. Incubation phenomena can be observed for all the materials studied. Technically relevant multi-pulse ablation thresholds are presented and are compared with the single-pulse (1-on-1) irradiation. KW - Damage KW - Femtosecond laser ablation KW - Laser safety KW - Threshold KW - Aluminium KW - Textile PY - 2003 DO - https://doi.org/10.1016/S0169-4332(02)01392-2 SN - 0169-4332 SN - 1873-5584 VL - 208-209 SP - 333 EP - 339 PB - North-Holland CY - Amsterdam AN - OPUS4-11546 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Lenzner, Matthias A1 - Krüger, Jörg A1 - Sartania, S. A1 - Cheng, Z. A1 - Spielmann, Ch. A1 - Mourou, G. A1 - Kautek, Wolfgang A1 - Krausz, F. T1 - Femtosecond Optical Breakdown in Dielectrics N2 - We report measurements of the optical breakdown threshold and ablation depth in dielectrics with different band gaps for laser pulse durations ranging from 5 ps to 5 fs at a carrier wavelength of 780 nm. For tau <100 fs, the dominant channel for free electron generation is found to be either impact or multiphoton ionization (MPI) depending on the size of the band gap. The observed MPI rates are substantially lower than those predicted by the Keldysh theory. We demonstrate that sub-10-fs laser pulses open up the way to reversible nonperturbative nonlinear optics (at intensities greater than 1014 W/cm2 slightly below damage threshold) and to nanometer-precision laser ablation (slightly above threshold) in dielectric materials. PY - 1998 SN - 0031-9007 SN - 1079-7114 VL - 80 IS - 18 SP - 4076 EP - 4079 PB - American Physical Society CY - Ridge, NY AN - OPUS4-11518 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Femtosecond pulse visible laser processing of fibre composite materials N2 - A first investigation on the ablation of composite materials like carbon and silicon-carbide reinforced alumo- and borosilicate glasses by 300 fs laser pulses (620 nm) in comparison to experiments with 17 ns pulse excimer laser (308 nm) treatment is presented. In all composites, femtosecond laser scans with a fluence of less than 2 J cm-2 produce well defined cuts with smooth side walls in contrast to the nanosecond laser result where extremely incongruent ablation is observed. Visible lasers should not be applicable because SiC and the glasses are practically transparent. Visible subpicosecond pulses of high intensity in the TW cm-2 range allow multi-photon absorption accompanied by incubation phenomena. The morphology of the groove edges reveal the contrasting ablation thresholds and rates of the fibre and glass materials. The ablation thresholds of the transparent components, i.e. the glass matrices and SiC, are about one order of magnitude greater than that of carbon which is ~ 0.15 J cm-2. Incubation effects are important for the absorption mechanisms in the transparent materials. When a critical number of pulses has not been reached at the SiC-glass composites, only the glass is preferentially ablated, and the fibres remain intact. This is in contrast to the C-glass composites where the ablation behaviour is opposite. PY - 1996 SN - 0169-4332 SN - 1873-5584 VL - 106 SP - 383 EP - 389 PB - North-Holland CY - Amsterdam AN - OPUS4-11506 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bunte, J. A1 - Barcikowski, S. A1 - Burmester, T. A1 - Püster, T. A1 - Hertwig, Andreas A1 - Kautek, Wolfgang A1 - Krüger, Jörg A1 - Martin, Sven A1 - Spielmann, C. A1 - Lenner, M. A1 - Brose, M. T1 - Sicherer Umgang mit Ultrakurzpuls-Lasern, Teil 1: Primäre Gefährdungen PY - 2005 SN - 0945-8875 IS - 2 SP - 6 EP - 11 PB - Magazin-Verl. CY - Bad Nenndorf AN - OPUS4-11001 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bunte, J. A1 - Barcikowski, S. A1 - Burmester, T. A1 - Püster, T. A1 - Hertwig, Andreas A1 - Kautek, Wolfgang A1 - Krüger, Jörg A1 - Martin, Sven A1 - Spielmann, C. A1 - Lenner, M. A1 - Brose, M. T1 - Sicherer Umgang mit Ultrakurzpuls-Lasern, Teil 2: Sekundäre Gefährdungen PY - 2005 SN - 0945-8875 IS - 4 SP - 13 EP - 18 PB - Magazin-Verl. CY - Bad Nenndorf AN - OPUS4-11002 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Hertwig, Andreas A1 - Martin, S. A1 - Kautek, Wolfgang A1 - Krüger, Jörg ED - Maruray, L. T1 - Ultra-short Pulse Laser Safety - a Challenge to Materials Science N2 - In this paper, safety-related experiments with ultra-short laser pulses (down to 30 fs) on various components (goggles, curtains) for laser protection are presented. The damage and failure behaviour of protective devices has been investigated dependent on practical conditions such as pulse duration, laser .uence, pulse number, and repetition rate. The e.ects of laser-irradiation on materials can be roughly divided into transient ones like laserinduced transmission (LIT) or short-lived colour centres and permanent damages like the stable colour centres and ablation. The former e.ects are particularly important for transparent devices like laser goggles. To obtain a complete overview on laser safety issues and the prevention of failure there are two important .elds of investigation: 1. the e.ects of laser radiation on human eyes and skin, and 2. on the possible protection materials. Both .elds have been addressed during the recently .nished German project SAFEST (safety aspects in femtosecond technology). The amount of safety data available in the ultrashort pulse region has been increased remarkably. This allows for a re-evaluation of known laser protection materials for this region of pulse durations and for the evaluation of new designs that promise high protection levels while being light-weight and convenient to use. T2 - Optical design and engineering II CY - Jena, Germany DA - 2005-09-13 PY - 2005 N1 - Serientitel: Proceedings of SPIE – Series title: Proceedings of SPIE IS - 5962 SP - 59622J-1 - 59622J-10 PB - SPIE CY - Bellingham AN - OPUS4-11593 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Rudolph, Pascale A1 - Pentzien, Simone A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - König, E. T1 - Laserreinigung von Pergament und Papier PY - 1998 SN - 0933-4017 IS - 6 SP - 396 EP - 402 PB - Callwey CY - München AN - OPUS4-11598 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Sorg, N. A1 - Reif, J. A1 - Kautek, Wolfgang T1 - In situ second harmonic generation measurements during the electrodeposition of Ni on n-Si(111) PY - 1993 SN - 0169-4332 SN - 1873-5584 VL - 69 SP - 388 EP - 392 PB - North-Holland CY - Amsterdam AN - OPUS4-11657 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Sorg, N. A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - SHG Measurements of n-Si(111)/aqueous Solution Interfaces PY - 1993 SN - 0005-9021 VL - 97 IS - 3 SP - 402 EP - 406 PB - Wiley-VCH Verl. CY - Weinheim AN - OPUS4-11658 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kautek, Wolfgang A1 - Mitterer, S. A1 - Krüger, Jörg A1 - Husinsky, W. A1 - Grabner, G. T1 - Femtosecond-Pulse Laser Ablation of Human Corneas N2 - A femtosecond pulse laser in the visible spectral region shows promise as a potentially new powerful corneal sculpting tool. It combines the clinical and technical advantages of visible wavelengths with the high ablation quality observed with nanosecond-pulse excimer lasers at 193 nm. A femtosecond and a nanosecond dye laser with pulse durations of 300 fs and 7 ns, and centre wavelengths at 615 nm and 600 nm, respectively, both focused to an area of the order of 10–5 cm2, have been applied to human corneal ablation. Nanosecond laser pulses caused substantial tissue disruption within a 30–100 m range from the excision edge at all fluences above the ablation threshold of F th60 J cm–2 (I th9 GW cm–2). Completely different excisions are produced by the femtosecond-pulse laser: high quality ablations of the Bowman membrane and the stroma tissue characterised by damage zones of less than 0.5 m were observed at all fluences above ablation threshold of F th1 J cm–2 or I th3 TW cm–2 (3×1012 W cm–2). The transparent cornea material can be forced to absorb ultrashort pulses of extremely high intensity. The fs laser generates its own absorption by a multiphoton absorption process. PY - 1994 DO - https://doi.org/10.1007/BF00332446 SN - 0947-8396 VL - 58 IS - 5 SP - 513 EP - 518 PB - Springer CY - Berlin AN - OPUS4-11659 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kautek, Wolfgang A1 - Sorg, N. A1 - Krüger, Jörg T1 - Femtosecond pulse laser second harmonic generation on semiconductor electrodes KW - Femtosecond pulse laser KW - Second harmonic generation (SHG) KW - Electrochemistry KW - Semiconductor electrode KW - Silicon KW - Silicon oxide KW - Oxide growth PY - 1994 SN - 0013-4686 SN - 1873-3859 VL - 39 IS - 8/9 SP - 1245 EP - 1249 PB - Elsevier Science CY - Kidlington AN - OPUS4-11660 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Kautek, Wolfgang A1 - Krüger, Jörg ED - Brieger, M. T1 - Femtosecond-pulse laser microstructuring of semiconducting materials T2 - 1st International Symposium on Semiconductor Processing and Characterization with Lasers - Applications in Photovoltaics CY - Stuttgart, Germany DA - 1994-04-18 KW - Femtosecond-Pulse Laser KW - Subpicosecond-Pulse Laser KW - Laser-Ablation KW - Multi-Photon Absorption KW - Microstructuring KW - Dry Etching KW - Semiconductors KW - Silicon PY - 1995 SN - 0-87849-683-1 SN - 0255-5476 N1 - Serientitel: Materials science forum – Series title: Materials science forum IS - 173/174 SP - 17 EP - 22 PB - Trans Tech Publ. CY - Aedermannsdorf AN - OPUS4-11671 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Kautek, Wolfgang A1 - Sorg, N. A1 - Krüger, Jörg ED - Brieger, M. T1 - Optical second-harmonic generation (SHG) on semiconductor electrodes by means of femtosecond and nanosecond-pulse lasers N2 - In situ optical second-harmonic generation (SHG) on centrosymmetric crystalline semiconductor electrodes opens up a new field of in situ investigations of hurried solid state interfaces and metal front contacts relevant to electronic and photovoltaic devices, which are rarely accessible by other methods. Photoelectrochemical nanosecond- and femtosecond-pulse laser investigations of silicon (111) electrodes show that in situ SHG is feasible in such complex interfacial systems. In a p-p polarization configuration, the azimuthal dependence of the SHG from oxide-covered and bare n-Si (111) electrodes, with and without Ni contact deposits, have been studied. Etching and regrowth of silicon oxides as well as burried interfacial electric field distributions were monitored. In situ SHG is shown to be extremely sensitive to trapped interfacial charge, crystal misorientations and surface step arrays. An advantage of femtosecond-pulses is the fact that illumination fluences that are well below the damage threshold, but still with sufficient power density, can be applied. (Author) T2 - 1st International Symposium on Semiconductor Processing and Characterization with Lasers - Applications in Photovoltaics CY - Stuttgart, Germany DA - 1994-04-18 KW - Femtosecond-Pulse Laser KW - Sub-Picosecond-Pulse Laser KW - Semiconductors KW - Silicon KW - Second-Harmonic Generation KW - SHG KW - Nonlinear Electroreflectance KW - Etch Process KW - Oxide KW - Interfacial Electronic States KW - Fermi-Level Pinning KW - MOS Diode PY - 1995 SN - 0-87849-683-1 DO - https://doi.org/10.4028/www.scientific.net/MSF.173-174.285 SN - 0255-5476 N1 - Serientitel: Materials science forum – Series title: Materials science forum IS - 173/174 SP - 285 EP - 290 PB - Trans Tech Publ. CY - Aedermannsdorf AN - OPUS4-11672 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Mäder, M. A1 - Holle, H. A1 - Schreiner, M. A1 - Pentzien, Simone A1 - Krüger, Jörg A1 - Kautek, Wolfgang ED - Johann Nimmrichter, ED - Kautek, Wolfgang ED - Manfred Schreiner, T1 - Traditional and laser cleaning methods of historic picture post cards T2 - LACONA VI CY - Vienna, Austria DA - 2005-09-21 KW - Laser KW - Cleaning KW - Picture Post Card PY - 2007 SN - 978-3-540-72129-1 SN - 0930-8989 N1 - Serientitel: Springer proceedings in physics – Series title: Springer proceedings in physics IS - 116 SP - 281 EP - 286 PB - Springer CY - Berlin AN - OPUS4-16378 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Wrobel, Jerzy A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Ultrashort-pulse laser ablation of indium phosphide in air N2 - Ablation of indium phosphide wafers in air was performed with low repetition rate ultrashort laser pulses (130 fs, 10 Hz) of 800 nm wavelength. The relationships between the dimensions of the craters and the ablation parameters were analyzed. The ablation threshold fluence depends on the number of pulses applied to the same spot. The single-pulse ablation threshold value was estimated to be fth(1)=0.16 J/cm2. The dependence of the threshold fluence on the number of laser pulses indicates an incubation effect. Morphological and chemical changes of the ablated regions were characterized by means of scanning electron microscopy and Auger electron spectroscopy. PY - 2001 DO - https://doi.org/10.1007/s003390000596 SN - 0947-8396 VL - 72 IS - 1 SP - 89 EP - 94 PB - Springer CY - Berlin AN - OPUS4-1068 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Baudach, Steffen A1 - Kautek, Wolfgang A1 - Krüger, Jörg A1 - Welsch, E. T1 - Femtosecond laser damage of a high reflecting mirror N2 - Multiple pulse investigations of 130-fs Ti:sapphire laser-induced damage of a high reflecting mirror consisting of alternating ?/4-layers of Ta2O5 and SiO2 and a single 500-nm Ta2O5 film were performed. In both cases, fused silica served as the substrate. For a fixed number of 1000 laser pulses per spot, a decrease in the damage threshold fluence of the mirror by a factor of two was observed by changing the repetition rate from 10 Hz to 1 kHz. A single 500-nm Ta2O5 film shows higher damage resistance compared to the mirror. The mirror and the Ta2O5 film samples were partially coated with a 300-nm-thick aluminium layer. The aluminium coating does not influence the damage threshold of the dielectrics underneath. KW - Aluminium KW - Laser ablation KW - Optical coatings KW - Silicon oxide PY - 2002 DO - https://doi.org/10.1016/S0040-6090(02)00074-3 SN - 0040-6090 IS - 408 SP - 297 EP - 301 PB - Elsevier CY - Amsterdam AN - OPUS4-1382 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Krüger, Jörg A1 - Lenzner, Matthias A1 - Martin, Sven A1 - Lenner, M. A1 - Spielmann, C. A1 - Fiedler, A. A1 - Kautek, Wolfgang ED - Phipps, C. R. T1 - Femtosecond laser induced damage in absorbing filters used for laser protection N2 - Damage experiments of absorbing filters (Schott BG18 and BG36) were performed with Ti:sapphire laser pulses with durations from 30 fs to 340 fs (800 nm, 1 kHz) in air. The direct focusing technique was employed under single- and multi-pulse irradiation conditions. Ablation threshold fluences were determined from a semi-logarithmic plot of the ablation crater diameter vs. laser fluence. The damage threshold fluence decreases for shorter pulse durations. In the investigated pulse duration range, the measured multi-pulse ablation threshold fluences are practically similar to those of undoped glass material (~1 Jcm-2). That means that the multi-pulse ablation threshold is independent on the doping level of the filters. For more than 100 pulses per spot and all pulse durations applied, the threshold fluence saturates. This leads to technically relevant damage threshold values in the femtosecond laser pulse duration domain. T2 - 4th SPIE's International Conference on High-Power Laser Ablation CY - Taos, NM, USA DA - 2002-04-22 KW - Ablation KW - Damage KW - Eye protection KW - Femtosecond pulse laser KW - Incubation KW - Laser safety KW - Threshold fluence PY - 2002 SN - 0-8194-4524-X DO - https://doi.org/10.1117/12.482109 SN - 1605-7422 N1 - Serientitel: SPIE proceedings series – Series title: SPIE proceedings series VL - 1 IS - 4760 SP - 398 EP - 405 PB - SPIE CY - Bellingham, Wash. AN - OPUS4-1550 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Kautek, Wolfgang A1 - Daminelli-Widany, Grazia A1 - Meja, P. A1 - Cortona, Anna A1 - Krüger, Jörg A1 - Autric, M. ED - Phipps, C. R. T1 - Femtosecond and nanosecond laser removal of anodic oxide layers from aluminium T2 - 4th SPIE's International Conference on High-Power Laser Ablation CY - Taos, NM, USA DA - 2002-04-22 KW - Laser ablation KW - Laser spallation KW - Microphone KW - Acoustical measurement KW - Aluminium oxide PY - 2002 SN - 0-8194-4524-X SN - 1605-7422 N1 - Serientitel: SPIE proceedings series – Series title: SPIE proceedings series IS - 4760 SP - 239 EP - 246 PB - SPIE CY - Bellingham, Wash. AN - OPUS4-1551 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Kautek, Wolfgang A1 - Daminelli-Widany, Grazia A1 - Krüger, Jörg T1 - Femtosecond and Nanosecond Pulse Laser Electrochemistry of Aluminium Alloys T2 - 53th Annual meeting of the International Society of Electrochemistry CY - Düsseldorf, Germany DA - 2002-09-15 PY - 2002 SP - 1(?) PB - DECHEMA CY - Frankfurt a.M. AN - OPUS4-1586 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Kautek, Wolfgang A1 - Krüger, Jörg A1 - Lenzner, Matthias A1 - Martin, Sven A1 - Lenner, M. A1 - Spielmann, C. A1 - Fiedler, A. ED - Meunier, M. T1 - Single- and multi-pulse femtosecond laser ablation of optical filter materials N2 - Commercially available absorption filters (Schott BG18 and BG36) were investigated with respect to their single- and multi-pulse ablation threshold using laser pulses from a Ti:Sapphire laser in the range between 30 and 340 fs. It could be observed, that the threshold fluence decreases for shorter pulse durations. The similarity of the measured multi-pulse threshold fluences with those of undoped glass material (around 1 J/cm^2 for a pulse duration of 30 fs) suggests that, for very short pulses, the threshold is independent on the doping level and therefore, linear absorption does not significantly contribute to laser-induced damage. For >100 pulses per spot and all pulse durations applied, the threshold fluences saturate. This independence on the number of applied pulses leads to technically relevant damage threshold values. T2 - Symposium D - European Materials Research Society CY - Strasbourg, France DA - 2002-06-18 PY - 2002 UR - http://www.emrs-strasbourg.com/files/pdf/2002_SPRING/02_Prog_Dv2.pdf N1 - Serientitel: Applied surface science – Series title: Applied surface science VL - 208/209.2003,1 IS - 1 SP - 1(?) PB - Elsevier CY - Amsterdam AN - OPUS4-1588 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Kautek, Wolfgang A1 - Martin, Sven A1 - Krüger, Jörg A1 - Lenzner, Matthias A1 - Fiedler, A. ED - Meunier, M. T1 - Femtosecond laser multi-pulse interaction with optical filters and fabrics N2 - Optical filters and fabrics are important parts of laser safety equipment such as goggles and curtains. A choice of these materials with varying absorption spectra is investigated with respect to their resistance to Ti:sapphire femtosecond laser radiation (800 nm wavelength, 1 kHz repetition rate). Pulse durations down to 30 fs and multiple-pulse irradiation conditions are employed to evaluate technically relevant damage thresholds. The ablation threshold fluences of the absorbing filters are comparable to those observed for transparent materials with 30-fs-pulses. These investigations together with scanning electron microscopy of the surface morphology after laser treatment provide insight into the interaction mechanism of the short pulses with the materials. T2 - Symposium D - European Materials Research Society CY - Strasbourg, France DA - 2002-06-18 PY - 2002 UR - http://www.emrs-strasbourg.com/files/pdf/2002_SPRING/02_Prog_Dv2.pdf N1 - Serientitel: Applied surface science – Series title: Applied surface science VL - 208/209.2003,1 IS - 1 SP - 1(?) PB - Elsevier CY - Amsterdam AN - OPUS4-1730 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Kautek, Wolfgang A1 - Daminelli-Widany, Grazia A1 - Krüger, Jörg ED - Meunier, M. T1 - Ultrashort pulse laser interaction with anodic metal oxide layers in electrolyte contact N2 - The removal and accelerated corrosion monitoring of metal coating systems is of general interest in materials science and engineering technology. The femtosecond and nanosecond laser ablation and delamination at 800 nm and 532 nm, respectively, of anodic oxide layers on aluminium alloys in electrolyte contact were investigated. Laser-induced modifications of the oxide layer resulted in an ionic contact between electrolyte and metal, which produced a current transient and thus allowed the in-situ electrochemical monitoring of the modification. Oxide coatings with different optical properties, almost transparent and opaque, were examined. The transparent anodic oxides showed contrasting ablation mechanisms in the nanosecond and femtosecond pulse duration regime: nanosecond pulses caused spallation, whereas femtosecond treatment led to ablation. Current signals measured in the transparent film were consistent with light absorption below the metal-oxide interface and with film spallation. Irradiation of the opaque coating yielded ionic current transients within the so-called shock-affected-zone of the oxide layer. This investigation provided insight into the role of the penetration depth of light and the heat-affected zone, the extent of the shock-affected zone, and the defect formation in the coating and at the solid-solid interface between metal and oxide. T2 - Symposium D - European Materials Research Society CY - Strasbourg, France DA - 2002-06-18 PY - 2002 UR - http://www.emrs-strasbourg.com/files/pdf/2002_SPRING/02_Prog_Dv2.pdf N1 - Serientitel: Applied surface science – Series title: Applied surface science VL - 208/209.2003,1 IS - 1 SP - 1(?) PB - Elsevier CY - Amsterdam AN - OPUS4-1731 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - The Femtosecond Pulse Laser: a New Tool for Micromachining KW - Femtosekundenlaser KW - Mikrobearbeitung PY - 1999 SN - 1054-660X SN - 1531-8494 IS - 9,1 SP - 30 EP - 40 PB - MAIK Nauka/Interperiodica Publ. CY - Moscow AN - OPUS4-712 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kautek, Wolfgang A1 - Rudolph, Pascale A1 - Krüger, Jörg A1 - Rosenfeld, A. A1 - Lorenz, M. A1 - Ashkenasi, D. T1 - Morphological and mechanical investigations of bariumalumoborosilicate glass surfaces processed with 700-fs laser pulses N2 - We present surface micro-modifications of bariumalumoborosilicate glasses with a high transformation temperature near 700 °C. Laser processing of the glass substrate was realized by using ultra-short laser pulses at 800 nm. The morphological conversion of the laser-treated surfaces was characterized by scanning force microscopy and nano-indentation. A hardness increase by at least a factor of six on the laser ablation crater edge relative to illuminated non- ablated areas shows that the material in the crater walls underwent drastic morphological and mechanical changes. In this heat- and shock-affected zone, the material became more elastic as a result of increased stress. T2 - 5th International Conference on Laser Ablation ; COLA '99 CY - Göttingen, Germany DA - 1999-07-19 KW - Bariumalumoborosilicate glass surfaces PY - 1999 DO - https://doi.org/10.1007/s003390051523 SN - 0947-8396 VL - 69 IS - 7 SP - S759 EP - S761 PB - Springer CY - Berlin AN - OPUS4-775 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Newesely, H. T1 - Femtosecond-pulse laser ablation of dental hydroxyapatite and single-crystalline fluoroapatite N2 - Laser microdrilling of healthy human enamel and dentine using 300 fs pulses at a wavelength of 615 nm and 3 Hz repetition rate leads to an enhanced structuring quality in comparison with nanosecond-laser results. Microcracking and damage to neighboring tissue can be reduced. Ablation threshold fluences for 100 laser pulses of 0.3 J cm-2 (human dentine), 0.6 J cm-2 (human enamel) and 0.8 J cm-2 (single crystalline fluoroapatite) could be determined. Ablation depths per pulse below 1 7m were observed. T2 - 5th International Conference on Laser Ablation ; COLA '99 CY - Göttingen, Germany DA - 1999-07-19 PY - 1999 DO - https://doi.org/10.1007/s003390051426 SN - 0947-8396 VL - 69 IS - 7 SP - S403 EP - S407 PB - Springer CY - Berlin AN - OPUS4-779 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Bonse, Jörn A1 - Baudach, Steffen A1 - Krüger, Jörg A1 - Kautek, Wolfgang ED - Phipps, C. T1 - Femtosecond laser micromachining of technical materials N2 - Micromachining experiments were performed with Ti:sapphire laser pulses (130 fs - 150 fs, 800 nm, approximately 10 Hz) in air. Employing the direct focusing technique, highly absorbing titanium nitride (TiN) and weakly absorbing polyimide (PI) and polymethylmethacrylate (PMMA) served as target materials. The lateral and vertical precision of the laser ablation and morphological features were characterized by scanning force (SFM), scanning electron (SEM) and optical microscopy. For TiN, incubation can be observed, i.e. the single-pulse surface damage threshold (0.26 J/cm2) is by a factor of two greater than the threshold for 100 pulses. Ablation rates below 10 nm per pulse can be achieved. The evolution of sub-wavelength ripples is presented in dependence on pulse number and laser fluence, respectively. The incubation behavior of the polymers can be described by an accumulation model as for TiN. Experiments on PI with varying focal lengths result in the same modification thresholds. Different polarization states of light (linear, circular) lead to a variation of the ablation rate and to various morphological patterns in the ablation craters (wavelength ripples, cones). Swelling of PMMA occurred at fluences below the ablation threshold. T2 - 3rd SPIE's International Conference on High-Power Laser Ablation CY - Santa Fe, NM, USA DA - 24.04.2000 KW - Ablation KW - Femtosecond pulse laser KW - Laser processing KW - Micromachining KW - Polymer KW - Titanium nitride KW - Ripples PY - 2000 SN - 0-8194-3700-X DO - https://doi.org/10.1117/12.407346 SN - 1605-7422 N1 - Serientitel: SPIE proceedings series – Series title: SPIE proceedings series IS - 4065 SP - 161 EP - 172 PB - SPIE CY - Bellingham, Wash. AN - OPUS4-967 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Rudolph, Pascale A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Mikrostrukturierung von Glas zur Erzeugung kristalliner Si-Schichten PY - 2000 IS - 12 SP - 7 EP - 36 PB - VDI-Verl. CY - Düsseldorf AN - OPUS4-985 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Lenzner, M. A1 - Sartania, S. A1 - Spielmann, C. A1 - Krausz, F. T1 - Laser micromachining of barium aluminium borosilicate glass with pulse durations between 20 fs and 3 ps N2 - Laser-micromachining of high-tech glass has been extended down to a pulse duration of 20 fs generated by a Ti sapphire laser system at a wavelength of 780 nm. A systematic electronmicroscopic study shows that, below 100 fs, an extreme precision and a substantial decrease of the ablation threshold fluence with respect to pulse laser processing with pulses in the picosecond and nanosecond range could be achieved. The technical relevance of this novel microtechnology is discussed. The morphology of the ablated areas is not determined by thermal processes, i.e. the heat affected zone. It is controlled by non-linear optical coupling effects. Multi-photon absorption becomes highly efficient below laser pulse durations of 100 fs so that light penetration is minimized and ablation cavities become smooth. At longer pulse durations, a higher light penetration due to a lower number of non-linearly absorbed photons allows mechanical relaxation processes in the glass material leading to roughening. KW - Laser micromachining KW - Subpicosecond laser ablation KW - Barium aluminium borosilicate glass PY - 1998 DO - https://doi.org/10.1016/S0169-4332(97)00763-0 SN - 0169-4332 SN - 1873-5584 IS - 127-129 SP - 892 EP - 898 PB - North-Holland CY - Amsterdam AN - OPUS4-887 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Niino, H. T1 - Biomaterial immobilization on polyurethane films by XeCl excimer laser processing N2 - Zusammenfassung The surface chemical modification of polyurethane (PU) films was performed by an UV laser-induced chemical reaction in a polysaccharide solution. This process may be applicable as hydrophilic packaging of implantable medical devices and in vivo sensors. When a PU film in contact with an aqueous alginic acid (AAC) solution was irradiated with a XeCl laser, the PU film turned hydrophilic. Contact angles of water on the film were reduced from 110° to 60°. Since light absorption of the AAC solution at 308 nm was negligibly small, reactive sites were generated solely on the PU surface. There, AAC could be immobilized by chemical bonds thus allowing for a nanometer-scaled grafting of this biomolecule. The mechanism was investigated by surface analyses with Fourier-transform infrared spectroscopy (FT-IR), dye staining, ultraviolet-visible (UV-VIS) spectroscopy, and scanning electron microscopy (SEM) techniques. A one-photon photochemical process could beidentified. PY - 2001 DO - https://doi.org/10.1007/s003390000617 SN - 0947-8396 VL - 72 IS - 1 SP - 53 EP - 57 PB - Springer CY - Berlin AN - OPUS4-926 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Bonse, Jörn A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Wrobel, J. M. T1 - Femtosecond pulse laser machining of InP wafers N2 - Ablation of indium phosphide wafers in air was performed with 130 fs laser pulses at a wavelength of 800 nm at a low repetition rate of 10 Hz. In order to evaluate the role of the incubation effects, the relationship between the number of laser pulses used for the ablation and the threshold fluence was studied. Particular attention was paid to the chemical composition, surface morphology and structural variations of the ablated area. T2 - 5th Laser Applications in Microelectronics and Optoelectronics Manufacturing Conference (LAMOM) CY - San José, CA, USA DA - 240.01.2000 KW - Femtosecond laser ablation KW - Indium phosphide KW - Auger electron spectroscopy PY - 2000 SN - 0-8194-3550-3 SN - 1605-7422 N1 - Serientitel: SPIE proceedings series – Series title: SPIE proceedings series IS - 3933 SP - 280 EP - 287 PB - SPIE CY - Bellingham, Wash. AN - OPUS4-937 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Krüger, Jörg A1 - Bonse, Jörn A1 - Baudach, Steffen A1 - Kautek, Wolfgang A1 - Lenzner, M. A1 - Wrobel, J. M. T1 - Femtosecond-Pulse Laser Machining of Semiconducting Materials N2 - Summary form only given. Machining investigations of crystalline silicon have been performed with laser pulses at a wavelength of 780 nm in the range between 5 fs and 400 fs. Applying 100 pulses per spot, surface damage thresholds were determined by the measurement of the damage diameter. In this pulse duration regime, the threshold fluences were nearly constant. Single-pulse investigations with 5 fs pulses yielded a value of about 0.15 J cm-2 identical to the multi-pulse experiment. This is in contradiction to the behaviour of dielectrics where incubation effects alter the optical properties down to the 5 fs pulse regime. Employing laser pulses with a duration of 130 fs at a wavelength of 800 nm, single-pulse ablation thresholds of 0.23 J cm-2 and 0.16 J cm-2 were determined for Si and InP in air, respectively. The threshold fluence was calculated from the linear relation between the square of the diameters versus the logarithm of the laser fluences. T2 - CLEO/Europe 2000 ; Conference on Lasers and Electro-Optics Europe ; Conférence Européenne sur les Lasers et l'Electro-Optique ; CLEO/Europe-IQEC CY - Nice, France DA - 2000-09-10 PY - 2000 SN - 0-7803-6319-1 DO - https://doi.org/10.1109/CLEOE.2000.910410 PB - IEEE Service Center CY - Piscataway, NJ AN - OPUS4-958 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kautek, Wolfgang A1 - Pentzien, Simone A1 - Conradi, Andrea A1 - Krüger, Jörg A1 - Brzezinka, Klaus-Werner T1 - Pulsed-laser deposition and boron-blending of diamond-like carbon (DLC) thin films KW - Pulslaser KW - Bor KW - Dünnfilmtechnologie KW - Dünnfilm, diamantartig PY - 1996 SN - 0169-4332 SN - 1873-5584 VL - 106 SP - 158 EP - 165 PB - North-Holland CY - Amsterdam AN - OPUS4-630 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Krüger, Jörg A1 - Kautek, Wolfgang ED - Dubowski, J. T1 - Femtosecond-pulse laser processing of metallic and semiconducting thin films KW - Femtosekundenpulslaser KW - Pulslaser KW - Dünnschicht, metallisch KW - Dünnschicht, halbleitend KW - Ablation PY - 1995 SN - 0-8194-1750-5 SN - 1605-7422 N1 - Serientitel: SPIE proceedings series – Series title: SPIE proceedings series IS - 2403 SP - 436 EP - 447 PB - SPIE CY - Bellingham, Wash. AN - OPUS4-637 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Rudolph, Pascale A1 - Krüger, Jörg A1 - Baudach, Steffen A1 - Kautek, Wolfgang T1 - Femtosecond pulse laser processing of TiN on silicon N2 - Ultrashort pulse laser microstructuring (pulse duration 130 fs, wavelength 800 nm, repetition rate 2 Hz) of titanium nitride (TiN) films on silicon substrates was performed in air using the direct focusing technique. The lateral and vertical precision of laser ablation was evaluated. The TiN ablation threshold changed with the number of pulses applied to the surface due to an incubation effect. An ablation depth per pulse below the penetration depth of light was observed. Columnar structures were formed in the silicon substrate after drilling through the TiN layer. KW - Femtosecond laser ablation KW - Titanium nitride KW - Silicon KW - Optical properties PY - 2000 DO - https://doi.org/10.1016/S0169-4332(99)00481-X SN - 0169-4332 SN - 1873-5584 VL - 154-155 SP - 659 EP - 663 PB - North-Holland CY - Amsterdam AN - OPUS4-802 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Baudach, Steffen A1 - Bonse, Jörn A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Ultrashort pulse laser ablation of polycarbonate and polymethylmethacrylate N2 - Ablation experiments with ultrashort laser pulses (pulse duration 150 fs, wavelength 800 nm) on polymers (PC, PMMA) relevant for biomedical technology have been performed in air. The lateral and vertical machining precision was evaluated by optical, atomic force and scanning electron microscopy. The ablation threshold reaches values in the range of 0.5–2.5 J/cm2 and depends significantly on the number of laser pulses applied to the same spot. The hole diameters are influenced by the laser fluence and the number of laser pulses. The relation between the ablation threshold and the number of laser pulses applied to the same spot is described in accordance with an incubation model. KW - Femtosecond laser ablation KW - Polymer KW - Polycarbonate KW - Polymethylmethacrylate PY - 2000 DO - https://doi.org/10.1016/S0169-4332(99)00474-2 SN - 0169-4332 SN - 1873-5584 VL - 154-155 SP - 555 EP - 560 PB - North-Holland CY - Amsterdam AN - OPUS4-803 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Lenzner, M. A1 - Krausz, F. T1 - Precision laser ablation of dielectrics in the 10-fs regime N2 - Zusammenfassung Laser pulses in the 10-fs domain provide a quality of micromachining of fused silica and borosilicate glass that is unobtainable with longer pulses in the range of several 100 femtoseconds up to picoseconds. The shortening of the pulses reduces the statistical behavior of the material removal and the ablation process thus attains a more deterministic and reproducible character. The improved reproducibility of ablation is accompanied by significantly smoother morphology. This offers the potential for lateral and vertical machining precision of the order of 100 nm and 10 nm, respectively. KW - Laser ablation PY - 1999 DO - https://doi.org/10.1007/s003390050906 SN - 0947-8396 VL - 68 IS - 3 SP - 369 EP - 371 PB - Springer CY - Berlin AN - OPUS4-825 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Krivenko, A.G. A1 - Benderskii, V.A. T1 - Gigantic Hydrogen-Ion Discharge Currents Initiated by a Subpicosecond Laser PY - 1998 SN - 0038-5387 SN - 1023-1935 VL - 34 IS - 10 SP - 1068 EP - 1075 PB - MAIK Nauka/Interperiodica Publ. CY - Moscow AN - OPUS4-826 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Lenzner, M. A1 - Krausz, F. T1 - Incubation of laser ablation in fused silica with 5-fs pulses N2 - Zusammenfassung The threshold fluences for laser-induced damage of fused silica with single 5-fs pulses from a Ti:sapphire laser system were determined by extrapolating the ablated volume to zero. These thresholds are about 4 times as high as the values previously obtained from multi-shot experiments. This result is interpreted in terms of an irreversible modification of the original material below the single-shot threshold (incubation). KW - Laser PY - 1999 DO - https://doi.org/10.1007/s003390051034 SN - 0947-8396 VL - 69 IS - 4 SP - 465 EP - 466 PB - Springer CY - Berlin AN - OPUS4-799 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Kautek, Wolfgang A1 - Lenzner, M. A1 - Krausz, F. T1 - Photoablation with sub-10 fs laser pulses N2 - Ablation experiments in several glasses with single and multishot irradiation by laser pulses in the 10-fs pulse duration domain are presented; physical and technological implications are discussed. We demonstrate that these short pulses offer the potential for lateral and vertical machining precision of the order of 100 nm. KW - Ablation KW - Laser pulses KW - Femtosecond pulses PY - 2000 DO - https://doi.org/10.1016/S0169-4332(99)00432-8 SN - 0169-4332 SN - 1873-5584 VL - 154-155 SP - 11 EP - 16 PB - North-Holland CY - Amsterdam AN - OPUS4-800 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Rudolph, Pascale A1 - Bonse, Jörn A1 - Krüger, Jörg A1 - Kautek, Wolfgang T1 - Femtosecond- and nanosecond-pulse laser ablation of bariumalumoborosilicate glass N2 - Laser ablation with femtosecond pulses (130 fs, wavelength 800 nm, repetition rate 2 Hz) was compared with nanosecond-pulse ablation (10 ns, wavelength 266 nm, repetition rate 2.5 Hz) of bariumalumoborosilicate glass in air using the direct focusing technique. Different ablation thresholds and heat-affected zones were observed. The lateral and vertical machining precision was evaluated. Single nanosecond laser pulses in the far UV resulted in a bubble or a circular hole in the centre of the illuminated spot, depending on the applied fluence. The ablation behaviour in the case of near-IR femtosecond pulses contrasted to this. Bubble formation was not detected. It needed repeated pulses at the same spot to modify the surface until material removal could be observed (incubation). Cavity dimensions of less than the beam diameter were achieved in this case. T2 - 5th International Conference on Laser Ablation ; COLA '99 CY - Göttingen, Germany DA - 1998-07-19 KW - Laser ablation KW - Bariumalumoborosilicate glass PY - 1999 DO - https://doi.org/10.1007/s003390051524 SN - 0947-8396 VL - 69 IS - 7 SP - S763 EP - S766 PB - Springer CY - Berlin AN - OPUS4-801 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -