TY - JOUR A1 - Hodoroaba, Vasile-Dan A1 - Jenett, H. A1 - Ai, X. A1 - Iga, I. A1 - Tao, L.M. T1 - Low-energy BO and BO2 emission from H2BO3 sputtered in a low-pressure high-frequency SNMS plasma N2 - Background corrected secondary neutral energy spectra derived from Cu powder pellets with H3BO3, MgO, Al2O3, TiO2, Y2O3 and ZrO2, show energy distributions being more or less typical for collision cascades in the cases of the metal ions M+, of O+ at energies >5 eV above the ion generation potential, and of the molecules Cu2+, AlO+, TiO+, YO+ and ZrO+, whereas the larger parts of the energy distributions of BO+and BO2+exhibit a similar shape as the Ar+plasma gas ions. From this, and from the background of the low decomposition and melting temperatures of H3BO3 and B2O3, respectively, we conclude that the detected BO and BO2 molecules have been emitted with thermal energies in processes implying lower energies than collision cascades. Evidence was found that the same holds for HBO2 and H2BO2. In order to obtain relative correction factors for MO+ molecular ion intensities, electron impact ionization cross sections have been calculated for the light MO molecules using the binary-encounter Bethe (BEB) formula, and for the respective metal M atoms by means of the semiempirical Lotz formula. For the heavy MO molecules YO and ZrO, cross sections have been estimated using the Thomson formula. The comparison of corrected relative MO/M and M/Cu intensities yields evidence that thermal (H)BOx emission amounts to the same order of magnitude as B emission from collision cascades, and that this situation is comparable to the high yield of MO molecules emitted in collision cascades from oxides with high M masses. Since the normal energy window of an HF-plasma secondary neutral mass spectrometer does not accept particles with originally thermal energies, it is concluded that these findings are relevant for quantification. PY - 1999 DO - https://doi.org/10.1016/S0168-583X(99)00291-8 SN - 0168-583X SN - 1872-9584 VL - 155 IS - 1-2 SP - 13 EP - 24 PB - Elsevier CY - Amsterdam AN - OPUS4-832 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Hodoroaba, Vasile-Dan A1 - Jenett, H. T1 - Energy spectroscopy studies of sputtered particles in an HF-plasma KW - Energy spectroscopy KW - Sputtered particles KW - HF-plasma KW - Tertiary ions KW - Conductive and non-conductive powders PY - 1998 SN - 1453-0759 SP - 23 EP - 36 PB - Editura Univ. Al. I. Cuza CY - Iaşi AN - OPUS4-771 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Hodoroaba, Vasile-Dan A1 - Unger, Wolfgang A1 - Jenett, H. A1 - Hoffmann, V. A1 - Hagenhoff, B. A1 - Kayser, S. A1 - Wetzig, K. T1 - Depth profiling of electrically non-conductive layered samples by RF-GDOES and HFM plasma SNMS N2 - The work is intended to compare the capabilities of two similar depth profiling techniques to analyse electrically non-conductive samples. In order to get a better evaluation of the depth resolution, various multilayer sandwiches, such as SiO2/TiO2 and Si3N4/SiO2 deposited on glass substrates have been investigated. Optimised depth profiles are presented for both methods, glow discharge optical emission spectrometry (GDOES) and radiofrequency mode (known as “HFM” in the SNMS literature) of plasma secondary neutral mass spectrometry (SNMS). The optimisation procedure, necessary to get the best set of plasma parameters, which result in the optimal depth resolution, is also described for one selected sample. Additionally, sputtering crater profilometry was carried out in order to check out the flatness of the sputtered crater. The influence of the thickness of the sample substrate on the sputtering rate is discussed. Finally, advantages and disadvantages of the use of these two depth profiling methods, especially for the non-conductive samples, are concluded from this comparative study. Time-of-flight secondary ion mass spectrometry (ToF-SIMS) analysis of a cross-sectioned sample was carried out in order to get supplementary information. KW - rf-Glow discharge KW - HFM plasma SNMS KW - Non-conductive layered samples KW - Depth resolution KW - Crater shape KW - ToF-SIMS PY - 2001 DO - https://doi.org/10.1016/S0169-4332(01)00259-8 SN - 0169-4332 SN - 1873-5584 VL - 179 IS - 1-4 SP - 30 EP - 37 PB - North-Holland CY - Amsterdam AN - OPUS4-6882 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -