TY - JOUR A1 - Naghib-zadeh, H. A1 - Oder, Gabriele A1 - Hesse, J. A1 - Reimann, T. A1 - Töpfer, J. A1 - Rabe, Torsten T1 - Effect of oxygen partial pressure on co-firing behavior and magnetic properties of LTCC modules with integrated NiCuZn ferrite layers N2 - Low-κ dielectric LTCC was developed, to realize successful co-firing with NiCuZn ferrite tapes. A critical high-temperature process in the production of highly integrated LTCC modules is the migration of silver from inner conductors into the LTCC glass phase. Intensive silver migration causes strong deformation of LTCC multilayers during firing in air. Silver migration into the LTCC glass phase depends on oxygen content of the sintering atmosphere and can be minimized by sintering in nitrogen atmosphere. However, partial decomposition of NiCuZn-ferrite and formation of cuprite was observed during sintering in nitrogen and, consequently, the permeability of the ferrite decreases. As shown by a combined XRD/thermogravimetric study the co-firing of LTCC modules with silver metallization and integrated ferrite layer demands precise adjustment of oxygen partial pressure. KW - Ferrite KW - Silver diffusion KW - Co-firing KW - LTCC PY - 2016 U6 - https://doi.org/10.1007/s10832-016-0043-0 SN - 1385-3449 SN - 1573-8663 VL - 37 IS - 1-4 SP - 100 EP - 109 PB - Springer Science+Business Media CY - New York AN - OPUS4-38603 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Hesse, J. A1 - Naghib-zadeh, H. A1 - Rabe, Torsten A1 - Töpfer, J. T1 - Integration of additive-free Ni–Cu–Zn ferrite layers into LTCC multilayer modules N2 - The sintering behavior of sub-micron Ni0.30Cu0.20Zn0.52Fe1.98O3.99 ferrite with and without Bi2O3 addition was studied. Ferrites with 0.5 wt% Bi2O3 exhibit enhanced shrinkage at T < 900 °C with significant grain growth. Additive-free ferrite powders also sinter to high density at 900 °C, however, grain growth is very limited. Both ferrites exhibit a permeability of µ = 400–450. Multilayers consisting of ferrite and low-k dielectric LTCC layers were prepared by co-firing at 900–915 °C. The shrinkage and thermal expansion characteristics of ferrite and LTCC tapes are similar. However, the permeability of integrated ferrite layers, made from ferrite tapes with Bi2O3 additive, significantly drops after co-firing with LTCC layers compared to separately fired monolithic ferrite multilayers. Contrarily, the permeability of integrated, Bi2O3-free ferrite layers, co-fired with dielectric tapes, is identical to that of monolithic ferrite multilayers. This finding is an important step toward ferrite integration into complex LTCC multilayer architectures. KW - LTCC KW - Ferrite integration KW - Multilayer KW - Sintering PY - 2016 U6 - https://doi.org/10.1016/j.jeurceramsoc.2016.02.016 SN - 0955-2219 VL - 36 IS - 8 SP - 1931 EP - 1937 PB - Elsevier Ltd. CY - Oxford, UK AN - OPUS4-36001 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -