TY - JOUR A1 - Weinel, Kristina A1 - Hahn, Marc Benjamin A1 - Lubk, Axel A1 - González Martínez, Ignacio Guillermo A1 - Büchner, Bernd A1 - Agudo Jácome, Leonardo T1 - Nanoparticle Synthesis by Precursor Irradiation with Low-Energy Electrons N2 - Nanoparticles (NPs) and their fabrication routes are intensely studied for their wide range of application in optics, chemistry, and medicine. Γ-ray and ion irradiation of precursor matter are established methods that facilitate tailored NP synthesis without complicated chemistry. Here, we develop and explore NP synthesis based on irradiating precursor microparticles with low-energy electron beams. We specifically demonstrate the fabrication of plasmonic gold nanoparticles of sizes between 3 and 350 nm on an amorphous SiOx substrate using a 30 kV electron beam. By detailed comparison with electron scattering simulations and thermodynamic modeling, we reveal the dominant role of inelastic electron–matter interaction and subsequent localized heating for the observed vaporization of the precursor gold microparticles. This general principle suggests the suitability of electron-beam irradiation for synthesizing NPs of a wide class of materials. KW - Gold Nanoparticle KW - Scanning Electron Microscopy KW - In situ irradiation KW - Thermodynamic modelling KW - Heat Transfer PY - 2025 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-627609 DO - https://doi.org/10.1021/acsanm.4c06033 SN - 2574-0970 VL - 8 IS - 10 SP - 4980 EP - 4988 PB - ACS Publications CY - Washington, DC AN - OPUS4-62760 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -