TY - JOUR A1 - Shimizu, K. A1 - Habaki, H. A1 - Wirth, Thomas A1 - Hodoroaba, Vasile-Dan T1 - New Development of Surface Analysis from a Standpoint of Users (1)DS"rf-GDOES" responding to needs for short time, high accuracy, diversified regions, and low cost KW - Atomic beam spectroscopy KW - Emission analysis KW - Cathode sputtering KW - Emission spectroscopy PY - 2004 SN - 0452-2834 VL - 52 IS - 8 SP - 72 EP - 75 PB - Nikkan kogyo shinbunsha CY - Tokyo AN - OPUS4-14523 LA - jpn AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -