TY - JOUR A1 - Passiu, Cristiana A1 - Rossi, Antonella A1 - Bernard, Laetitia A1 - Paul, Dennis A1 - Hammond, John A1 - Unger, Wolfgang A1 - Venkataraman, Nagaiyanallur V. A1 - Spencer, Nicholas D. T1 - Fabrication and Microscopic and Spectroscopic Characterization of Planar, Bimetallic, Micro- and Nanopatterned Surfaces N2 - Micropatterns and nanopatterns of gold embedded in silver and titanium embedded in gold have been prepared by combining either photolithography or electron-beam lithography with a glue-free template-stripping procedure. The obtained patterned surfaces have been topographically characterized using atomic force microscopy and scanning electron microscopy, showing a very low root-mean-square roughness (<0.5 nm), high coplanarity between the two metals (maximum height difference ≈ 2 nm), and topographical continuity at the bimetallic interface. Spectroscopic characterization using X-ray photoelectron spectroscopy (XPS), time-of-flight secondary-ion mass spectrometry (ToF-SIMS), and Auger electron spectroscopy (AES) has shown a sharp chemical contrast between the two metals at the interface for titanium patterns embedded in gold, whereas diffusion of silver into gold was observed for gold patterns embedded in silver. Surface flatness combined with a high chemical contrast makes the obtained surfaces suitable for applications involving functionalization with molecules by orthogonal adsorption chemistries or for instrumental calibration. The latter possibility has been tested by determining the image sharpness and the analyzed area on circular patterns of different sizes for each of the spectroscopic techniques applied for characterization.This is the first study in which the analyzed area has been determined using XPS and AES on a flat surface, and the first example of a method for determining the analyzed area using ToF-SIMS. KW - XPS KW - AES KW - SIMS KW - Lateral resolution KW - Test pattern PY - 2017 UR - http://pubs.acs.org/doi/abs/10.1021/acs.langmuir.7b00942 U6 - https://doi.org/10.1021/acs.langmuir.7b00942 SN - 0743-7463 VL - 33 IS - 23 SP - 5657 EP - 5665 PB - ACS AN - OPUS4-40929 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -