TY - JOUR A1 - Sennikov, P. A1 - Gornushkin, Igor B. A1 - Kornev, R. A1 - Nazarov, V. A1 - Polyakov, V. A1 - Shkrunin, V. T1 - Hydrogen Reduction of MoF6 and Molybdenum Carbide Formation in RF Inductively Coupled Low‑Pressure Discharge: Experiment and Equilibrium Thermodynamics Consideration N2 - The physical plasma parameters, temperature and electron number density, are studied in the RF-IC (RF inductively coupled) discharge at a reduced pressure of 3 Torr in mixtures of MoF6 with Ar, H2 and CH4. The emission spectra of mixtures are investigated. It is shown that in the presence of argon, the concentration of free electrons in plasma and dissociation rate of MoF6 increase. A main role of molecular hydrogen is the generation of atomic hydrogen that binds atomic fuorine and leads to the formation of gaseous and solid products. Exhaust gas mixtures exiting the reactor are analyzed by mass spectrometry. It is shown that for all cases, the conversion of MoF6 into reaction products is close to 100%. A thermodynamic analysis of the equilibrium composition of MoF6 systems with Ar, H2 and CH4 was carried out and the obtained results are in good agreement with experimentally observed composition of the solid and gas phases. Analysis of solid deposits from mixture MoF6/H2/Ar revealed the presence of molybdenum powder and large amount of amorphous MoFx. The deposit obtained from mixtures with methane, MoF6/H2/Ar/CH4, contained crystalline molybdenum carbide, Mo3C2. KW - Molybdenum carbide KW - RF ICP discharge KW - Reduction of MoF6 KW - Thermodynamic KW - Molybdenum PY - 2020 DO - https://doi.org/10.1007/s11090-020-10138-3 SN - 0272-4324 VL - 41 IS - 2 SP - 673 EP - 690 PB - Springer AN - OPUS4-51569 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Gaft, M. A1 - Nagli, L. A1 - Gornushkin, Igor B. A1 - Raichlin, Y. T1 - Review on recent advances in analytical applications of molecular emission and modelling N2 - The review mainly deals with two topics that became important in applications of laser-induced breakdown spectroscopy (LIBS) in recent years: the emission of halogen- and rare-earth-containing molecules and selective excitation of molecules by molecular laser-induced fluorescence (MLIF). The first topic is related to the emission of alkaline-earth diatomic halides MX, M = Ca, Mg, Ba, Sr and X = F, Cl, Br, and I and rare-earth element (REE) oxides LaO, YO, and ScO. These molecules form in laser-induced plasma (LIP) soon after its ignition and persist for a long time, emitting broad bands in a visible part of the spectrum. They are best detected after relatively long delay times when emission from interfering plasma species (atoms and ions) has already been quenched. Such behavior of molecular spectra allows of using, for their detection, inexpensive CCD detectors equipped with simple electronic or mechanical shutters and low-resolution spectrometers. A main target for analysis by molecular spectroscopy is halogens; these elements are difficult to detect by atomic spectroscopy because their most intense atomic lines lie in the vacuum UV. Therefore, in many situations, emission from CaF and CaCl may provide a substantially more sensitive detection of F and Cl than emission from elemental F and Cl and their ions. This proved to be important in mining and concrete industries and even Mars exploration. A similar situation is observed for REEs; their detection by atomic spectroscopy sometimes fails even despite the abundance of atomic and ionic REEs' lines in the UV-VIS. For example, in minerals and rocks with low concentrations of REEs, emission from major and minor mineral elements hinders the weak emission from REEs. Many REEs do not form molecules that show strong emission bands in LIP but can still be detected with the aid of LIP. All REEs except La, Y, and Sc exhibit long-lived luminescence in solid matrices that is easily excited by LIP. The luminescence can be detected simultaneously with molecular emission of species in LIP within the same time and spectral window. The second topic is related to the combination of MLIF and LIBS, which is a technique that was proved to be efficient for analysis of isotopic molecules in LIP. For example, the characteristic spectral signals from isotopic molecules containing 10B and 11B are easier to detect with MLIF-LIBS than with laser ablation molecular isotopic spectrometry (LAMIS) because MLIF provides strong resonance excitation of only targeted isotopes. The technique is also very efficient in detection of halogen molecules although it requires an additional tunable laser that makes the experimental setup bulky and more expensive. KW - Plasma induced luminescence KW - Molecular emission KW - Laser induced plasma KW - Plasma modeling KW - Molecular analysis KW - LIBS PY - 2020 DO - https://doi.org/10.1016/j.sab.2020.105989 VL - 173 SP - 105989 PB - Elsevier B. V. AN - OPUS4-51420 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Gojani, Ardian A1 - Gornushkin, Igor B. T1 - Räumlich aufgelöste Heterodyne-Spektroskopie N2 - Die räumlich aufgelöste Heterodyn-Spektroskopie (SHS) kombiniert dispersive und interferometrische Techniken zur Gewinnung spektroskopischer Informationen und kann in einem anpassbaren Instrument realisiert werden. SHS wird für die chemische Analyse von verschiedenen Materialien mit Hilfe der Laser-induzierten Plasmaspektroskopie (LIBS) und der Raman-Spektroskopie eingesetzt. KW - Raman spectroscopy KW - Spatial heterodyne spectroscopy KW - Laser-induced breakdown spectroscopy PY - 2020 UR - https://analyticalscience.wiley.com/do/10.1002/was.00080118/full VL - 5 SP - 2 EP - 4 PB - Wiley CY - Weinheim AN - OPUS4-51397 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Képeš, E. A1 - Gornushkin, Igor B. A1 - Pořízka, P. A1 - Kaiser, J. T1 - Tomography of double-pulse laser-induced plasmas in the orthogonal geometry N2 - The temporal evolution of laser-induced plasmas is studied in the orthogonal double-pulse arrangement. Both the pre-ablation mode (an air spark is induced above the sample surface prior to the ablation pulse) and the re-heating mode (additional energy is delivered into the plasma created by the ablation pulse) is considered. The plasmas are investigated in terms of the temporal evolution of their electron density, temperature, and volume. The plasma volumes are determined using a time-resolved tomography technique based on the Radon transformation. The reconstruction is carried out for both white-light and band-pass filtered emissivities. The white-light reconstruction corresponds to the overall size of the plasmas. On the other hand, the band-pass emissivity reconstruction shows the distribution of the atomic sample species (Cu I). Moreover, through spectrally resolved tomographic reconstruction, the spatial homogeneity of the electron density and temperature of the plasmas is also investigated at various horizontal slices of the plasmas. Our results show that the pre-ablation geometry yields a more temporally stable and spatially uniform plasma, which could be beneficial for calibration-free laser-induced breakdown spectroscopy (LIBS) approaches. On the contrary, the plasma generated in the re-heating geometry exhibits significant variations in electron density and temperature along its vertical axis. Overall, our results shed further light on the mechanisms involved in the LIBS signal enhancement using double-pulse ablation. KW - Laser-induced plasma KW - Laser-induced breakdown spectroscopy KW - Double-pulse laserinduced breakdown spectroscopy KW - Plasma tomography KW - Radon reconstruction PY - 2020 DO - https://doi.org/10.1016/j.aca.2020.06.078 SN - 0003-2670 SN - 0378-4304 VL - 1135 SP - 1 EP - 11 PB - Elsevier CY - Amsterdam AN - OPUS4-51142 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Qiu, Yan A1 - Yu, H. A1 - Gornushkin, Igor B. A1 - Li, J. A1 - Wu, Q. A1 - Zhang, Z. A1 - Li, X. T1 - Measurement of trace chromium on structural steel surface from a nuclear power plant using dual-pulse fiber-optic laser-induced breakdown spectroscopy N2 - Remote and on-line measurement of chromium on structural steel surface in nuclear power plants is critical for protection against fluid accelerated corrosion. To improve the insufficient sensitivity of fiber-optic laser-induced breakdown spectroscopy toward trace element detection, a dual-pulse spectral enhancement system is set up. In an iron matrix, for the purpose of improving sensitivity of trace chromium analysis and reducing the self-absorption of iron, the effects of key parameters are investigated. The optimal values of the parameters are found to be: 450 ns inter-pulse delay, 700 ns gate delay, 30 mJ/6 mJ pulse energy ratio, and 19.8 mm lens-to-sample distance (corresponding to a 799 μm laser focused spot size). Compared to the single-pulse system, the shot number of dual-pulse ablation is limited for reducing surface damage. After the optimization of the dual-pulse system, the signal-to-noise ratio of the trace chromium emission line has been improved by 3.5 times in comparison with the single-pulse system, and the self-absorption coefficient of matrix iron has been significantly reduced with self-reversal eliminated. The number of detectable lines for trace elements has more than doubled thus increasing the input for spectral calibration without significantly increasing the ablation mass. Three calibration methods including internal standardization, partial least squares regression and random forest regression are employed to determine the chromium and manganese concentrations in standard samples of low alloy steel, and the limit of detection is respectively calculated as 36 and 515 ppm. The leave-one-out cross validation method is utilized to evaluate the accuracy of chromium quantification, and the concentration mapping of chromium is performed on the surface of a steel sample (16MND5) with a relative error of 0.02 wt.% KW - Fiber-optic laser-induced breakdown spectroscopy (FO-LIBS) KW - Dual-pulse KW - Parameter optimization KW - Spectral enhancement KW - Self-absorption coefficient KW - Concentration mapping PY - 2020 DO - https://doi.org/10.1016/j.apsusc.2020.147497 SN - 0169-4332 VL - 533 IS - 147497 SP - 1 EP - 29 PB - Elsevier CY - Amsterdam AN - OPUS4-51143 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Gornushkin, Igor B. A1 - Sennikov, P. G. A1 - Kornev, R. A. A1 - Polyakov, V. S. T1 - Equilibrium calculations for plasmas of volatile halides of III, IV and VI group elements mixed with H2 and H2 + CX4 (X = H, Cl, F) relevant to PECVD of isotopic materials N2 - The composition of hydrogen and hydrogen-methane plasmas containing ~10% of BX₃, SiX₄, GeX₄ (X = F, Cl), SF₆, MoF₆ and WF₆ is calculated for the temperature range ~300-4000 K using the equilibrium chemical model. The calculations provide valuable information about thermodynamic parameters (pressure, temperature) needed for condensation of pure elements (in H₂ plasma) and their carbides (in H₂ + CH₄ plasma) and about intermediate reaction products. Using volatile fluorides for plasma chemical deposition alleviates obtaining monoisotopic elements and their isotopic compounds because fluorine is monoisotopic. PECVD is promising method for one-step conversion of fluorides to elemental isotopes and their carbides. For fluorides, further insight is needed into properties of plasmas supported by different types of discharges. KW - Plasma chemistry KW - Modeling chemical reactions KW - Plasma enhanced chemical vapor deposition KW - Reduction of volatile chlorides and fluorides by hydrogen PY - 2020 DO - https://doi.org/10.1007/s10967-020-07295-2 VL - 326 IS - 1 SP - 407 EP - 421 PB - Springer CY - Dordrecht AN - OPUS4-51144 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - Laser induced gas breakdown in reactive mixtures containing halides of boron and silicon: diagnostics and modeling N2 - We run two pilot LIP experiments in reactive gas mixtures. First, LIP is excited in BCl3 or BF3 plus H2 or CH4 to evaluate the efficiency of deposition of solid boron and boron carbide, materials that are largely used for refractory coatings. Second, we investigate a possibility of synthesis of fluorochlorosilanes SiFxCl4-x (x = 1, 2, 3) by LIP induced in SiF4+SiCl4 gas mixtures. Using fluorochlorosilanes with different combinations of F and Cl in the SiFxCly molecule may add flexibility in processes of silicon deposition and etching. The gases used and solid deposits are analyzed by optical emission spectroscopy (OES) and IR and mass spectrometry (MS). We also model the laser induced plasma by performing static equilibrium chemistry calculations to see whether desired reaction products are thermodynamically favorable and dynamic calculations of the expanding plasma plume to see how and where the products form. T2 - International Workshop on Laser Induced breakdown Spectroscopy CY - Online meeting DA - 01.12.2020 KW - Silicon halides KW - Chemical vapor deposition KW - Laser induced dielectric breakdown KW - Hydrogen reduction PY - 2020 AN - OPUS4-51725 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Kepes, E. A1 - Gornushkin, Igor B. A1 - Pořízka, P. A1 - Kaiser, J T1 - Spatiotemporal spectroscopic characterization of plasmas induced by non-orthogonal laser ablation N2 - Ablation geometry significantly affects the plasma parameters and the consequent spectroscopic observations in laser-induced breakdown spectroscopy. Nevertheless, plasmas induced by laser ablation under inclined incidence angles are studied to a significantly lesser extent compared to plasmas induced by standard orthogonal ablation. However, inclined ablation is prominent in stand-off applications, such as the Curiosity Mars rover, where the orthogonality of the ablation laser pulse cannot be always secured. Thus, in this work, we characterize non-orthogonal ablation plasmas by applying plasma imaging, tomography, and spectral measurements. We confirm earlier observations according to which non-orthogonal ablation leads to a laser-induced plasma that consists of two distinct parts: one expanding primarily along the incident laser pulse and one expanding along the normal of the sample surface. Moreover, we confirm that the former emits mainly continuum radiation, while the latter emits mainly sample-specific characteristic radiation. We further investigate and compare the homogeneity of the plasmas and report that inclined ablation affects principally the ionic emissivity of laser-induced plasmas. Overall, our results imply that the decreased fluence resulting from inclined angle ablation and the resulting inhomogeneities of the plasmas must be considered for quantitative LIBS employing non-orthogonal ablation. KW - Radon transformation KW - Laser induced plasma KW - Plasma tomography PY - 2020 DO - https://doi.org/10.1039/d0an01996h VL - 146 IS - 3 SP - 920 EP - 929 PB - The Royal Society of Chemistry AN - OPUS4-51774 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Gornushkin, Igor B. A1 - Sennikov, P. A1 - Kornev, R. A1 - Ermakov, A. A1 - Shkrunin, V. A1 - Polyakov, V. T1 - Laser induced dielectric breakdown for synthesis of chlorofluorosilanes N2 - Tetrafluorosilane (SF4) and tetrachlorosilane (SiCl4) plasmas have been widely used as a source of either F or Cl for etching silicon or as a source of silicon for deposition of Si-based materials. Using different combinations of F and Cl in molecules of chlorofluorosilane SiFxCly adds additional flexibility in realization of these processes. Direct synthesis of SiFxCl4-x (x=1, 2, 3) from SiF4 and SiCl4 is thermodynamically forbidden under standard conditions. This restriction is removed in low-temperature plasmas studied in this work: a laser induced dielectric breakdown (LIDB) plasma and steady-state inductively-coupled plasma (ICP). The plasmas differ in many respects including energy content, temperature, and electron density that lead to different ionization/excitation states of plasma species, which are observed from plasma optical emission spectra. IR spectroscopy and mass-spectrometry confirm the formation of three chlorofluorosilanes, SiF3Cl, SiF2Cl2, and SiFCl3 that constitute ~60% in products of LIDB plasma and split 50/50 between SiF3Cl, SiFCl3 and SiF2Cl2. Experimental observations are verified by equilibrium static calculations via the minimization of Gibbs free energy and by dynamic calculations via the chemical-hydrodynamic plasma model of a spherically expanding plasma plume. The both types of calculations qualitatively agree with the results of spectroscopic analysis and reproduce dominant presence of SiF2Cl2 as the temperature of the gas approaches the room temperature. KW - Chemical-hydrodynamic modeling KW - Chlorofluorosilanes KW - Laser induced dielectric breakdown KW - Inductively coupled plasma KW - Equilibrium chemical modeling PY - 2020 DO - https://doi.org/10.1016/j.jfluchem.2020.109692 VL - 241 SP - 109692 PB - Elsevier B.V. AN - OPUS4-51646 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Gornushkin, Igor B. T1 - Reverse deposition of TI-oxides under nanosecond laser ablation of TI N2 - Processes of laser induced oxidation of metals are typically studied in the framework of heterogeneous chemical reactions occurring on the irradiated surface, which lead to the formation of dense oxide films deposited on it. Such technology has many applications like color-laser marking technology and laser recording on thin metal films for creation of diffractive optical elements . Under the conditions of strong laser ablation, another oxidation mechanism becomes possible: evaporated atoms react with oxygen in a surrounding atmosphere and the products of such reaction are redeposited back onto the substrate. The chemical and phase composition of such deposited layer, its density, morphology and structure depend on the conditions of laser ablation. By varying these conditions, the main properties of such coating can be controlled that is important for some potential application (for example in biomedicine). In our report we present the study of the processes of redeposition of oxides structure under the conditions of multipulse nanosecond laser ablation of titanium (Grade 2) in air atmosphere at normal conditions. Our experiments show that titanium-implants with such deposited oxide layer have increased biocompatibility. Modelling of chemical reaction in laser-induced plasma coupled with experimental methods of plasma optical emission spectroscopy allows us to determine the types of main chemical reactions in laser plasma as well as it influences on the plume dynamics and vapor condensation kinetics. As a result, we propose the general physical picture of reverse deposition of oxides structure under the condition of strong nanosecond laser ablation. The formation of the titanium oxide precipitate is explained not only by collisions in the plasma, but also by the chemical interaction of titanium and oxygen, which leads to the formation of а low pressure area near the substrate and additionally stimulates the reverse deposition of oxides. We expect, similar processes are valid not only for titanium but also for other metals and, possibly, semiconductors. T2 - 28th International Conference on Advanced Laser Technologies CY - Online meeting DA - 06.09.2021 KW - Laser ablation KW - Laser induced plasma deposition KW - Surface coating KW - Emission spectroscopy KW - Titanium dioxide KW - Hydrodynamic model KW - Plasma chemistry PY - 2021 AN - OPUS4-53245 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -