TY - JOUR A1 - Martínez, F.L. A1 - Toledano, M. A1 - San Andrés, E. A1 - Mártil, I. A1 - González-Díaz, G. A1 - Bohne, W. A1 - Röhrich, J. A1 - Strub, Erik T1 - Compositional analysis of polycrystalline hafnium oxide thin films by heavy-ion elastic recoil detection analysis JF - Thin solid films KW - Hafnium oxide KW - Elastic recoil detection analysis KW - Oxygen KW - Interfacial silicon oxide PY - 2006 SN - 0040-6090 VL - 515 IS - 2 SP - 695 EP - 699 PB - Elsevier CY - Amsterdam AN - OPUS4-14270 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -