TY - JOUR A1 - Thomsen-Schmidt, P. A1 - Hasche, K. A1 - Ulm, G. A1 - Herrmann, K. A1 - Krumrey, M. A1 - Ade, G. A1 - Stümpel, J. A1 - Busch, I. A1 - Schädlich, S. A1 - Schindler, A. A1 - Frank, W. A1 - Hirsch, D. A1 - Procop, Mathias A1 - Beck, Uwe T1 - Realisation and metrological characterisation of thickness standards below 100 nm N2 - High-accuracy film thickness measurements in the range below 100 nm can be made by various complex methods like spectral ellipsometry (SE), scanning force microscopy (SFM), grazing incidence X-ray reflectometry (GIXR), or X-ray fluorescence analysis (XRF). The measurement results achieved with these methods are based on different interactions between the film and the probe. A key question in nanotechnology is how to achieve consistent results on a level of uncertainty below one nanometre with different techniques. Two different types of thickness standards are realised. Metal film standards for X-ray techniques in the thickness range 10 to 50 nm are calibrated by GIXR with monochromatised synchrotron radiation of 8048 eV. The results obtained at four different facilities show excellent agreement. SiO2 on Si standards for SE and SFM in the thickness range 6 to 1000 nm are calibrated by GIXR with monochromatised synchrotron radiation of 1841 eV and with a metrological SFM. Consistent results within the combined uncertainties are obtained with the two methods. Surfaces and interfaces of both types of standards are additionally investigated by transmission electron microscopy (TEM). PY - 2004 U6 - https://doi.org/10.1007/s00339-003-2273-7 SN - 0947-8396 VL - 78 IS - 5 SP - 645 EP - 649 PB - Springer CY - Berlin AN - OPUS4-17195 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Hasche, K. A1 - Herrmann, K. A1 - Thomsen-Schmidt, P. A1 - Krumrey, M. A1 - Ulm, G. A1 - Ade, G. A1 - Pohlenz, F. A1 - Stümpel, J. A1 - Busch, I. A1 - Schädlich, S. A1 - Frank, W. A1 - Hirsch, D. A1 - Schindler, A. A1 - Procop, Mathias A1 - Beck, Uwe T1 - Ein Beitrag zu kalibrierten Nanometerschichten für unterschiedliche Anwendungsbereiche N2 - Nanotechnologien werden gegenwärtig als leistungsfähige Oberflächentechniken in erheblichem Umfange industriell genutzt. Dabei spielen dünne Schichten und deren Kenndaten eine wesentliche Rolle, z.B. als Röntgenspiegel oder optische und magnetooptische Datenträger. Die Schichtdicke zählt hierbei zu den technologisch wichtigen Parametern. Abgeleitet von Anwenderinteressen, werden für die Röntgenreflektometrie (XRR bzw. GIXR), Elektronenstrahl-Mikroanalyse (EPMA) und Röntgenfluoreszenzanalyse (XRF) einerseits und die Ellipsometrie andererseits zugeschnittene Schichtdickenmaßverkörperungen (SDM) entwickelt, gefertigt und untersucht. Das Ziel ist die Bereitstellung praxistauglicher, kalibrierter SDM, im weiteren Schichtdickennormale (SDN) genannt. SDN sind Maßverkörperungen, für die der Schichtdickenwert mit einer definierten Messunsicherheit bekannt und auf ein metrologisch anerkanntes Längennormal zurückgeführt ist. Berichtet wird über die Herstellung und messtechnische Charakterisierung der beiden spezifischen Varianten von Maßverkörperungen. T2 - 47. Internationales Wissenschaftliches Kolloquium. Technische Universität Ilmenau ; Herbstkonferenz der Gesellschaft für Arbeitswissenschaft ; 6. Workshop Multimedia für Bildung und Wirtschaft CY - Ilmenau, Deutschland DA - 2002-09-23 PY - 2002 UR - http://publica.fraunhofer.de/documents/N-14872.html VL - 47 SP - 568 EP - 569 PB - Techn. Univ. CY - Ilmenau AN - OPUS4-2284 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Hirsch, D. A1 - Bryan, C. A1 - Barthélémy, H. A1 - Chou, T. A1 - Binder, Christian ED - Steinberg, T. T1 - An analysis of autoignition temperature round robin test data N2 - Autoignition temperature (AIT) round robin tests were conducted by seven laboratories on eight polymeric materials. A statistical analysis was conducted that focused on investigating data variability both within and between test methods. With some exceptions, the methods ranked the materials consistently and as expected from their chemical makeup. There was no consistent difference between AIT values determined at 6.9 and 10.3 MPa. BAM and ASTM G72 consistently provided lower, more conservative AITs at both 6.9 and 10.3 MPa. Within an estimated accuracy obtained from all methods from this round robin, data from the following methods appeared to be more accurate than the rest: NF E 29763/88 and Parr Bomb at 6.9 MPa; automated ASTM G72 at 10.3 MPa. The following methods provided lower within-method variability than the average for all methods: BS 3N 100 and ASTM G72 at 6.9 and 10.3 MPa; Parr Bomb at 6.9 MPa. At 6.9 MPa the BAM method provided data with greater within-method variability than the average for all methods. For most materials, the automated ASTM G72 method at 10.3 MPa provided data with greater within-method variability than the average for all methods. Two data points for this method, Zytel? and Teflon? FEP, exceeded critical . At 6.9 MPa, the largest within-method variability resulted from NF E 29763/88 on Zytel, the only data that exceeded critical . Two extreme results were caused by significant effects of method-specific test parameters: BAM on Zytel at 6.9 MPa and BS 3N 100 on Viton? at 10.3 MPa. Statistically these results had a probability of less than 5 percent of occurring by chance. T2 - 9th International Symposium on Flammability and Sensitivity of Materials in Oxygen-Enriched Atmospheres CY - Paris, France DA - 2000-09-01 PY - 2000 SN - 0-8031-2871-1 U6 - https://doi.org/10.1520/STP12514S SN - 0066-0558 N1 - Serientitel: ASTM STP – Series title: ASTM STP VL - 9 IS - 1395 PB - ASTM CY - West Conshohocken, Pa. AN - OPUS4-7636 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -