TY - CONF A1 - Chudoba, Thomas T1 - Modulus Measurements at ultra thin coatings T2 - 3rd European Symposium on nanomechanical testing CY - Hückelhoven, Germany DA - 2004-09-17 PY - 2004 AN - OPUS4-6859 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -