TY - CONF A1 - Cobet, C. A1 - Wollschläger, Nicole A1 - Esser, N. A1 - Richter, W. A1 - Baudach, Steffen A1 - Beck, Uwe A1 - Männ, Marion A1 - Brunn, S. A1 - Gruska, B. A1 - Richter, U. T1 - VUV-XUV-Ellipsometrie mit Synchrotronstrahlung T2 - 2. Workshop Ellipsometrie T2 - 2. Workshop Ellipsometrie CY - Berlin, Deutschland DA - 2002-02-18 PY - 2002 AN - OPUS4-2282 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Cobet, C. A1 - Baudach, Steffen A1 - Beck, Uwe A1 - Brunn, S. A1 - Gruska, B. A1 - Esser, N. A1 - Richter, W. T1 - A VUV-XUV ellipsometric setup at BESSY II: optical characterization of nitride semiconductors T2 - International Conference on Spectroscopic Ellipsometry (ICSE 3) T2 - International Conference on Spectroscopic Ellipsometry (ICSE 3) CY - Vienna, Austria DA - 2003-07-07 PY - 2003 AN - OPUS4-5001 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -