TY - JOUR A1 - Wagner, G. A1 - Tiede, U. A1 - Meisel, M. A1 - Schulze, Rolf-Dieter A1 - Mackrodt, Brigitte T1 - Examination of universal microhardness of hard reaction layers resulting from reactions of organic polymers with container glass surfaces and their use for low-friction protective layers KW - Glas KW - Universalmikrohärte KW - Polymer, organisch KW - Gleitschutzschicht PY - 1995 SN - 0946-7475 VL - 68 IS - 10 SP - 318 EP - 326 PB - Verl. d. Dt. Glastechn. Ges. CY - Offenbach AN - OPUS4-592 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Griepentrog, Michael A1 - Mackrodt, Brigitte A1 - Mark, G. A1 - Linz, T. T1 - Properties of TiN hard coatings prepared by unbalanced magnetron sputtering and cathodic arc deposition using a uni- and bipolar pulsed bias voltage N2 - TiN hard coatings have been prepared by unbalanced magnetron (UBM) sputtering and cathodic arc deposition using uni- and bipolar pulsed bias voltages. For UBM sputtering using a unipolar pulsed bias voltage the average substrate bulk temperature Ts was reduced to 220 °C without considerable loss of microhardness and adhesion by variation of the pulse parameters. Determination of the average energy Ep delivered to the growing film per deposited particle leads to values lower than the critical transition energy (150 eV atom-1) between open porous and dense coatings. Using a bipolar pulsed bias voltage Ts decreased with increasing duration ton+ of the positive bias pulse. It was found that Ep increased with increasing ton+ up to values found for d.c. bias voltage. The coatings prepared using a bipolar pulsed bias voltage at low Ts are dense and in compressive stress with acceptable microhardness and adhesion. First results of the investigation of TiN coatings prepared by cathodic arc deposition using unipolar pulsed bias are given. KW - Titan nitrid KW - Magnetron Zerstreuung KW - Kathodenbogen Ablagerung KW - Wechselvorspannung PY - 1995 DO - https://doi.org/10.1016/0257-8972(95)08369-3 SN - 0257-8972 VL - 74-75 IS - 1 SP - 326 EP - 332 PB - Elsevier Science CY - Lausanne AN - OPUS4-625 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -