TY - CONF A1 - Heunisch, Andreas T1 - Verformung von LTCC-Multilayern mit vergrabenen Kavitäten im Laminier- und Sinternprozess T2 - Jahrestagung der Deutschen Keramischen Gesellschaft CY - Weimar, Germany DA - 2013-03-18 PY - 2013 AN - OPUS4-27871 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Heunisch, Andreas A1 - Marzok, Ulrich A1 - Münchow, Marco A1 - Müller, Ralf A1 - Rabe, Torsten T1 - In situ characterization of the sintering behavior of LTCC laminates with embedded cavities by high temperature laser profilometry N2 - Three-dimensionally structured LTCC multilayer with channels and inner cavities are required for numerous applications like microreactors, microfluidic systems or sensors. For the performance of such devices, the dimensional accuracy of the embedded structures is crucial. In the green state, the desired structures can be precisely implemented in the LTCC tapes by laser cutting, punching or milling. Unfortunately, during lamination and sintering, shape integrity of cavities and channels is notably affected by warpage and deformation. To investigate the sintering behavior of structured LTCC laminates, a newly developed High Temperature Laser Profilometer (HTLP) can be used. The HTLP allows 3D in-situ shape detection of flat ceramic samples and tapes all along the sintering process. It is applicable for temperatures up to 1000 °C and sample sizes up to 200 mm × 200 mm × 10 mm. During a measurement, the rotating sample is scanned spirally by a linearly moving laser distance sensor through a slot in the furnace top wall. Distance and position values deliver a 3D surface image of the sample. Current lateral dimensions, which are determined by sintering shrinkage, can be measured continuously. Local deformation and warpage can be visualized time- and temperature-resolved. This new method was used, to analyze the sintering behavior of LTCC multilayer laminates containing large size cavities. These were fabricated out of punched green sheets by low pressure lamination without inserts. Samples with cavities of varying cross sections, as well as cavities with and without connection to the surface were observed. T2 - CICMT 2013 - IMAPS/ACerS 9th International conference and exhibition on ceramic interconnect and ceramic microsystems technologies CY - Orlando, FL, USA DA - 23.04.2013 KW - LTCC multilayer KW - Embedded cavities KW - High temperature laser profilometry KW - Low pressure lamination KW - Micro fluidics PY - 2013 DO - https://doi.org/10.4071/cicmt-tha44 SP - 275 EP - 282 AN - OPUS4-35077 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Heunisch, Andreas T1 - In Situ Characterization of the Sintering Behavior of LTCC Laminates with Embedded Cavities by High Temperature Laser Profilometry T2 - IMAPS/ACerS 8th Int. Conf. and Exhib. on Ceramic Interconnect and Ceramic Microsystems Technolgies (CICMT 2013) CY - Orlando, FL, USA DA - 2013-04-23 PY - 2013 AN - OPUS4-29118 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -