TY - CONF A1 - Heunisch, Andreas A1 - Münchow, Marco A1 - Rabe, Torsten T1 - Verformung von LTCC-Multilayern mit vergrabenen Kavitäten im Laminier- und Sinternprozess T2 - Jahrestagung der Deutschen Keramischen Gesellschaft CY - Weimar, Germany DA - 2013-03-18 PY - 2013 AN - OPUS4-27871 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Heunisch, Andreas A1 - Marzok, Ulrich A1 - Münchow, Marco A1 - Müller, Ralf A1 - Rabe, Torsten T1 - In Situ Characterization of the Sintering Behavior of LTCC Laminates with Embedded Cavities by High Temperature Laser Profilometry T2 - IMAPS/ACerS 8th Int. Conf. and Exhib. on Ceramic Interconnect and Ceramic Microsystems Technolgies (CICMT 2013) CY - Orlando, FL, USA DA - 2013-04-23 PY - 2013 AN - OPUS4-29118 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Heunisch, Andreas A1 - Marzok, Ulrich A1 - Münchow, Marco A1 - Müller, Ralf A1 - Rabe, Torsten T1 - In situ characterization of the sintering behavior of LTCC laminates with embedded cavities by high temperature laser profilometry T2 - CICMT 2013 - IMAPS/ACerS 9th International conference and exhibition on ceramic interconnect and ceramic microsystems technologies CY - Orlando, FL, USA DA - 2013-04-23 KW - LTCC multilayer KW - Embedded cavities KW - High temperature laser profilometry KW - Low pressure lamination KW - Micro fluidics PY - 2013 U6 - https://doi.org/10.4071/cicmt-tha44 SP - 275 EP - 282 AN - OPUS4-35077 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -