TY - CONF A1 - Beck, Uwe A1 - Hertwig, Andreas A1 - Reiners, Georg A1 - Weise, Matthias A1 - Hartung, J. A1 - Reinhold, E. A1 - Strümpfel, J. T1 - Ion-assisted vs. Plasma-assisted PVD: Preparation of Optical Multi-layers in a Versatile Cluster System Implementing Electron Beam and Sputter Technology T2 - 47th Annual Technical Conference Proceedings KW - Thin Film Technology KW - Ion-assisted PVD KW - Plasma-assisted PVD KW - Optical Multi-layers KW - Cluster Deposition System PY - 2004 SN - 0737-5921 SP - 86 EP - 90 PB - Society of Vacuum Coaters AN - OPUS4-3536 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -