TY - THES A1 - Nooke, Alida T1 - Gas Detection by Means of Surface Plasmon Resonance Enhanced Ellipsometry N2 - In dieser Arbeit wurde der Nutzen von Ellipsometrie in Kombination mit Oberflächenplasmonen- resonanz an 40 - 50 nm Goldschichten als Sensorsystem für sicherheitstechnisch relevante Gase untersucht. Eine Kretschmann Konfiguration bestehend aus einem BK7 Glasprisma und einem mit dem Gold beschichteten BK7 Glasplättchen wurde auf einer Kupfermesszelle platziert, durch welche die Gase mit definiertem Volumenstrom geleitet wurden. Untersucht wurden verschiedenste Gase: entzündliche wie Kohlenwasserstoffe und Wasserstoff, oxidierende wie Sauerstoff und Ozon, toxische wie Kohlenmonoxid und inerte wie Helium und Stickstoff. Durch Einstellen eines festen Einfallswinkels und unter Benutzung des ellipsometrischen Parameters Δ als Messgröße konnten geringste Änderungen in der Gasphase detektiert werden. Die reinen Gase konnten anhand ihres Brechungsindexes unterschieden werden, wobei die Änderung der Gasatmosphäre in Δ einen Anstieg bzw. Abfall relativ zum Referenzgas (Luft oder Stickstoff) hervorrief. Die Analytgase wurden mit dem Referenzgas zu kleineren Konzentrationen gemischt und so die Nachweisgrenzen bestimmt, welche im niedrigen %-Bereich lagen. Zur Verbesserung des Sensors bezüglich der Langzeitstabilität wurden die Goldschichten zusätzlich mit 3 - 10 nm anorganischem Material (TiO2, ZrO2, MgF2 bzw. Fe: SnO2) beschichtet. Jede Schicht wurde mittels Rasterelektronenmikroskopie sowie Rasterkraftmikroskopie untersucht um Aufschluss über die Oberflächenbeschaffenheit zu erhalten. Mittels spektroskopischer Ellipsometrie wurden die optischen Konstanten sowie die Schichtdicken bestimmt. Alle Zusatzschichten schützten die Goldschicht vor unerwünschten Kontaminationen und verlängerten so die Lebensdauer des Sensors. Außerdem konnten die Nachweisgrenzen deutlich verbessert werden, welche mit den Zusatzschichten im unteren ppm-Bereich lagen. Eine besondere Eigenschaft konnte bei Fe: SnO2 beobachtet werden: durch die Eisendotierung ist das Material besonders sensitiv gegenüber dem giftigen Gas Kohlenstoffmonoxid, so dass Konzentrationen unter 1 ppm nachgewiesen werden konnten. Im Hinblick auf eine zukünftige industrielle Nutzung wurde dieses Sensorsystem an ein handelsübliches Rohr montiert, um so Puls- sowie Druckmessungen durchzuführen. Die potentiell ablaufenden Mechanismen an der Sensoroberfläche und denkbare zukünftige Anwendungsmöglichkeiten wurden diskutiert. In dieser Arbeit konnte gezeigt werden, dass Ellipsometrie in Kombination mit Oberflächenplasmonenresonanz als sensitive, schnelle Sensormethode zur Gasmessung genutzt werden kann und dass das Potenzial zu einer industriellen Nutzung gegeben ist. N2 - This thesis investigated gas sensing by means of surface plasmon resonance enhanced ellipsometry. Surface plasmons were excited in a 40 - 50 nm gold layer by a He-Ne-laser using the Kretschmann configuration, which was arranged on a self-made copper measuring cell. A fixed angle of incidence and the ellipsometric parameter Δ as the measured value were used to monitor changes in the gas phase. Different types of gases were investigated: flammable (hydrocarbons and hydrogen), oxidising (oxygen and ozone), toxic (carbon monoxide) and inert (helium and nitrogen). The gas types can be distinguished by their refractive indices, whereas the sensor responds instantly relative to the reference gas with an increase or a decrease in Δ. Diluting the analyte gas with a reference gas (nitrogen or air) allowed the detection limits to be determined, these lay in the low % range. The sensor stability was also enhanced as well as the sensitivity by modifying the gold layers with a 3-10 nm additional layer. These additional layers consisted of the inorganic materials TiO2, ZrO2, MgF2 and Fe: SnO2 which were deposited by different coating processes. Surface investigations were made of every utilised layer: scanning electron microscope and atomic force microscope measurements for surface topology and spectroscopic ellipsometry mapping to determine the optical constants and the layer thicknesses. All applied materials protected the gold layer from contaminations and thus prolonged the life span of the sensor. Furthermore, the detection limits were reduced significantly, to the low ppm range. The material Fe: SnO2 demonstrates a special behaviour in reaction with the toxic gas carbon monoxide: Due to the iron doping, the response to carbon monoxide is extraordinary and concentrations below 1 ppm were detected. In order to approach a future application in industry, the sensor system was adapted to a stainless steel tube. With this measuring arrangement, pulse and pressure experiments could be performed. The probable mechanisms occuring at the sensor surface and feasible applications in the future are discussed in this thesis. T3 - BAM Dissertationsreihe - 89 KW - surface plasmon resonance (SPR) effect KW - hazardous gases KW - sensor layer KW - gas sensor KW - ellipsometry PY - 2012 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-695 SN - 978-3-9815134-4-8 SN - 1613-4249 VL - 89 SP - 1 EP - 133 PB - Bundesanstalt für Materialforschung und -prüfung (BAM) CY - Berlin AN - OPUS4-69 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Beck, Uwe A1 - Hertwig, Andreas A1 - Kormunda, M. A1 - Krause, Andreas A1 - Krüger, Hannes A1 - Lohse, Volkmar A1 - Nooke, Alida A1 - Pavlik, J. A1 - Steinbach, J. T1 - SPR enhanced ellipsometric gas monitoring on thin iron doped tin oxide layers N2 - In this work, thin iron doped tin oxide layers (3–6 nm) were investigated with regard to gas sensitivity by means of surface plasmon resonance (SPR) effect with ellipsometric readout. The experimental set-up was a Kretschmann configuration with gold as metal layer. The sensor system was exposed to different concentrations of methane in the low ppm range and the sensor response of an uncoated gold layer compared to a gold layer coated with iron doped tin oxide. The additional layer effects stability with regard to drift behavior of the sensor and an increase in sensitivity. Furthermore, the sensor is able to detect the toxic gas carbon monoxide in low concentration range (down to 0.5 ppm). The thin layers were investigated by X-ray photoelectron spectroscopy, secondary electron microscopy and spectroscopic ellipsometry. The possible mechanisms taking place on the surface are discussed. KW - Gas sensing KW - SPR effect KW - Iron doped tin oxide KW - Ellipsometry PY - 2011 DO - https://doi.org/10.1016/j.snb.2011.08.036 SN - 0925-4005 SN - 1873-3077 VL - 160 IS - 1 SP - 609 EP - 615 PB - Elsevier CY - Amsterdam [u.a.] AN - OPUS4-24826 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Nooke, Alida A1 - Beck, Uwe A1 - Hertwig, Andreas A1 - Krause, Andreas A1 - Lohse, Volkmar A1 - Kormunda, M. A1 - Pavlik, J. A1 - Krüger, H. A1 - Steinbach, J. T1 - SPR gas monitoring with ellipsometric read-out on thon inorganic layers T2 - 7th Workshop ellipsometry CY - Leipzig, Germany DA - 2012-03-05 PY - 2012 AN - OPUS4-25555 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Nooke, Alida A1 - Beck, Uwe A1 - Hertwig, Andreas A1 - Krause, Andreas A1 - Krüger, Hannes A1 - Lohse, Volkmar A1 - Negendank, Detlef A1 - Steinbach, J. T1 - On the application of gold based SPR sensors for the detection of hazardous gases N2 - A gas sensor system based on the surface plasmon resonance (SPR) effect in a 44 nm Au layer was studied. The usability of this sensor system was investigated for several analyte gases and gas mixtures which are interesting due to their flammability, toxicity or greenhouse effect. The SPR effect of gold was measured in nitrogen and compared with the gaseous alkane series which caused a shift of the position of the SPR effect. For in situ measurements, the phase shift Δ at the SPR angle (ψ minimum) in the analyte gas mixtures was measured for investigated gases in comparison with nitrogen. With this method, detection limits of different gases could be determined, which lie in a range interesting for safety engineering. Furthermore the aging effect of the gold layers which leads to loss in sensitivity of the sensor was investigated. KW - Ellipsometry KW - SPR effect KW - Gas sensing KW - Gold layer PY - 2010 DO - https://doi.org/10.1016/j.snb.2010.05.061 SN - 0925-4005 SN - 1873-3077 VL - 149 IS - 1 SP - 194 EP - 198 PB - Elsevier CY - Amsterdam [u.a.] AN - OPUS4-21673 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Nooke, Alida A1 - Beck, Uwe A1 - Hertwig, Andreas A1 - Krüger, Hannes A1 - Weise, Matthias A1 - Krause, Andreas A1 - Lohse, Volkmar T1 - Surface Plasmon Enhanced Total Internal Reflection Ellipsometry for Detecting and Monitoring of Hazardous Gases T2 - 5th International Conference on Spectroscopic Ellipsometry CY - Albany, NY, USA DA - 2010-05-23 PY - 2010 AN - OPUS4-20719 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Nooke, Alida A1 - Krause, Andreas A1 - Krüger, Hannes A1 - Lohse, Volkmar A1 - Hertwig, Andreas A1 - Beck, Uwe A1 - Steinbach, J. T1 - Detektion von sicherheitstechnisch relevanten Gasen und Gasgemischen mithilfe der optischen Messmethode Ellipsometrie T2 - 10. Fachtagung: Anlagen-, Arbeits- und Umweltsicherheit CY - Köthen, Germany DA - 2010-11-04 PY - 2010 AN - OPUS4-22308 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Nooke, Alida A1 - Krause, Andreas A1 - Krüger, Hannes A1 - Lohse, Volkmar A1 - Hertwig, Andreas A1 - Beck, Uwe A1 - Steinbach, J. T1 - Gas sensing with ellipsometry and surface plasmon resonance T2 - 110. Bunsentagung CY - Berlin, Germany DA - 2011-06-02 PY - 2011 AN - OPUS4-23784 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Nooke, Alida A1 - Krause, Andreas A1 - Krüger, Hannes A1 - Lohse, Volkmar A1 - Hertwig, Andreas A1 - Beck, Uwe A1 - Steinbach, J. T1 - Gas sensing and monitoring with ellipsometry on modified gold layers T2 - 6th Workshop on ellipsometry, TU Berlin CY - Berlin, Germany DA - 2011-02-21 PY - 2011 AN - OPUS4-23295 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Nooke, Alida A1 - Beck, Uwe A1 - Hertwig, Andreas A1 - Krause, Andreas A1 - Krüger, Hannes A1 - Lohse, Volkmar A1 - Negendank, Detlef A1 - Steinbach, J. T1 - Ellipsometric detection of gases with the surface plasmon resonance effect on gold top-coated with sensitive layers N2 - An ellipsometric gas sensor based on the surface Plasmon resonance (SPR) effect of ~ 43 nm thick gold layers was investigated. To protect the gold layer from contamination and to improve the detection limits, the gold layers were top-coated with 5–6 nm thick layers of organic a-C:H or with inorganic metal oxides TiO2 or ZrO2. The additional layers increased the long-term stability, whereas the metal oxide layers protect better than a-C:H. Furthermore, the additional layers decreased the detection limits by one order of magnitude in case of a-C:H and two orders of magnitude in case of the oxides. It could be shown that the detection limits also depend on the kind of preparation (sol–gel process or physical vapour deposition) of the additional layers. KW - Gas sensor KW - SPR KW - Ellipsometry KW - Sensitive layer KW - TiO2 KW - ZrO2 KW - a-C:H PY - 2011 DO - https://doi.org/10.1016/j.tsf.2010.11.091 SN - 0040-6090 VL - 519 IS - 9 SP - 2659 EP - 2663 PB - Elsevier B.V. CY - Amsterdam AN - OPUS4-23353 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Nooke, Alida A1 - Krüger, Hannes A1 - Hertwig, Andreas A1 - Krause, Andreas A1 - Beck, Uwe A1 - Lohse, Volkmar T1 - Surface Plasmon Enhanced Total Internat Reflection Ellipsometry for Detection and Monitoring of Hazardous Gases T2 - International Conference on Spectroscopic Ellipsometry (ICSE V) CY - Albany, NY, USA DA - 2010-05-23 PY - 2010 AN - OPUS4-20040 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -