TY - JOUR A1 - Derrien, Thibault A1 - Koter, Robert A1 - Krüger, Jörg A1 - Höhm, S. A1 - Rosenfeld, A. A1 - Bonse, Jörn T1 - Plasmonic formation mechanism of periodic 100-nm-structures upon femtosecond laser irradiation of silicon in water N2 - The formation of laser-induced periodic surface structures (LIPSS) upon irradiation of silicon by multiple (N = 100) linearly polarized Ti:sapphire femtosecond laser pulses (duration τ = 30 fs, center wavelength λ0 ~ 790 nm) is studied experimentally in air and water environment. The LIPSS surface morphologies are characterized by scanning electron microscopy and their spatial periods are quantified by two-dimensional Fourier analyses. It is demonstrated that the irradiation environment significantly influences the periodicity of the LIPSS. In air, so-called low-spatial frequency LIPSS (LSFL) were found with periods somewhat smaller than the laser wavelength (ΛLSFL ~ 0.7 × λ0) and an orientation perpendicular to the laser polarization. In contrast, for laser processing in water a reduced ablation threshold and LIPSS with approximately five times smaller periods ΛLIPSS ~ 0.15 × λ0 were observed in the same direction as in air. The results are discussed within the frame of recent LIPSS theories and complemented by a thin film based surface plasmon polariton model, which successfully describes the tremendously reduced LIPSS periods in water. PY - 2014 DO - https://doi.org/10.1063/1.4887808 SN - 0021-8979 SN - 1089-7550 VL - 116 IS - 7 SP - 074902-1 EP - 074902-8 PB - American Institute of Physics CY - Melville, NY AN - OPUS4-31209 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Hermens, U. A1 - Kirner, Sabrina A1 - Emonts, C. A1 - Comanns, P. A1 - Skoulas, E. A1 - Mimidis, A. A1 - Mescheder, H. A1 - Winands, K. A1 - Krüger, Jörg A1 - Stratakis, E. A1 - Bonse, Jörn T1 - Mimicking lizard-like surface structures upon ultrashort laser pulse irradiation of inorganic materials N2 - Inorganic materials, such as steel, were functionalized by ultrashort laser pulse irradiation (fs- to ps-range) to modify the surface’s wetting behavior. The laser processing was performed by scanning the laser beam across the surface of initially polished flat sample material. A systematic experimental study of the laser processing parameters (peak fluence, scan velocity, line overlap) allowed the identification of different regimes associated with characteristic surface morphologies (laser-induced periodic surface structures, grooves, spikes, etc.). Analyses of the surface using optical as well as scanning electron microscopy revealed morphologies providing the optimum similarity to the natural skin of lizards. For mimicking skin structures of moisture-harvesting lizards towards an optimization of the surface wetting behavior, additionally a two-step laser processing strategy was established for realizing hierarchical microstructures. In this approach, micrometer-scaled capillaries (step 1) were superimposed by a laser-generated regular array of small dimples (step 2). Optical focus variation imaging measurements finally disclosed the three dimensional topography of the laser processed surfaces derived from lizard skin structures. The functionality of these surfaces was analyzed in view of wetting properties. KW - Femtosecond laser ablation KW - Laser-induced periodic surface structures KW - Lizard KW - Surface wetting KW - Fluid transport KW - Steel PY - 2017 UR - http://www.sciencedirect.com/science/article/pii/S0169433216328306 DO - https://doi.org/10.1016/j.apsusc.2016.12.112 SN - 0169-4332 SN - 1873-5584 VL - 418 IS - Part B SP - 499 EP - 507 PB - Elsevier, North-Holland CY - Amsterdam AN - OPUS4-40509 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Kirner, Sabrina V. A1 - Höhm, S. A1 - Epperlein, Nadja A1 - Spaltmann, Dirk A1 - Rosenfeld, A. A1 - Krüger, Jörg T1 - Applications of laser-induced periodic surface structures (LIPSS) N2 - Laser-induced periodic surface structures (LIPSS, ripples) are a universal phenomenon that can be observed on almost any material after the irradiation by linearly polarized laser beams, particularly when using ultrashort laser pulses with durations in the picosecond to femtosecond range. During the past few years significantly increasing research activities have been reported in the field of LIPSS, since their generation in a single-step process provides a simple way of nanostructuring and surface functionalization towards the control of optical, mechanical or chemical properties. In this contribution current applications of LIPSS are reviewed, including the colorization of technical surfaces, the control of surface wetting, the tailoring of surface colonization by bacterial biofilms, and the improvement of the tribological performance of nanostructured metal surfaces. T2 - SPIE Photonics West Conference, Laser-based Micro- and Nanoprocessing XI CY - San Francisco, USA DA - 27.01.2017 KW - Laser-induced periodic surface structures (LIPSS) KW - Laser processing KW - Surface functionalization KW - Application PY - 2017 SN - 978-1-5106-0625-8 SN - 978-1-5106-0626-5 DO - https://doi.org/10.1117/12.2250919 SN - 0277-786X SN - 1996-756X VL - 10092 SP - Article UNSP 100920N, 100920N-1 EP - 100920N-9 PB - SPIE CY - Bellingham, USA AN - OPUS4-39305 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Höhm, S. A1 - Rosenfeld, A. A1 - Krüger, Jörg A1 - Bonse, Jörn T1 - Laser-induced periodic surface structures on zinc oxide crystals upon two-colour femtosecond double-pulse irradiation N2 - In order to study the temporally distributed energy deposition in the formation of laser-induced periodic surface structures (LIPSS) on single-crystalline zinc oxide (ZnO), two-colour double-fs-pulse experiments were performed. Parallel or cross-polarised double-pulse sequences at 400 and 800 nm wavelength were generated by a Mach–Zehnder interferometer, exhibiting inter-pulse delays up to a few picoseconds between the sub-ablation 50-fs-pulses. Twenty two-colour double-pulse sequences were collinearly focused by a spherical mirror to the sample surface. The resulting LIPSS periods and areas were analysed by scanning electron microscopy. The delay-dependence of these LIPSS characteristics shows a dissimilar behaviour when compared to the semiconductor silicon, the dielectric fused silica, or the metal titanium. A wavelength-dependent plasmonic mechanism is proposed to explain the delay-dependence of the LIPSS on ZnO when considering multi-photon excitation processes. Our results support the involvement of nonlinear processes for temporally overlapping pulses. These experiments extend previous two-colour studies on the indirect semiconductor silicon towards the direct wide band-gap semiconductor ZnO and further manifest the relevance of the ultrafast energy deposition for LIPSS formation. KW - Laser-induced periodic surface structures, LIPSS KW - Laser ablation KW - Surface plasmon polariton PY - 2017 DO - https://doi.org/10.1088/1402-4896/aa5578 SN - 1402-4896 SN - 0031-8949 VL - 92 IS - 3 SP - Article 034003, 1 EP - 7 PB - IOP CY - Bristol, UK AN - OPUS4-39082 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Höhm, S. A1 - Kirner, Sabrina A1 - Rosenfeld, A. A1 - Krüger, Jörg T1 - Laser-induced periodic surface structures (LIPSS) - A scientific evergreen N2 - The current state in the field of laser-induced periodic surface structures (LIPSS, ripples) is reviewed. Their formation mechanisms are analyzed in ultrafast experiments (time-resolved diffraction and polarization controlled double-pulse experiments) and technological applications are demonstrated. T2 - Conference on Lasers and Electro-Optics (CLEO) - Science and Innovations 2016 CY - San Jose, CA, USA DA - 05.06.2016 KW - Laser materials processing KW - Optics at surfaces KW - Ultrafast phenomena KW - Laser-induced periodic surface strcutures (LIPSS) KW - Femtosecond laser ablation PY - 2016 SN - 978-1-943580-11-8 DO - https://doi.org/10.1364/CLEO_SI.2016.STh1Q.3 SP - STh1Q.3, 1 EP - 2 PB - Optical Society of America AN - OPUS4-37072 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Schmitt, R. A1 - Koerfer, F. A1 - Sadowny, O. A1 - Zimmermann, J. A1 - Krüger-Sehm, R. A1 - Xu, M. A1 - Dziomba, T. A1 - Koenders, L. A1 - Goch, G. A1 - Tausendfreund, A. A1 - Patzelt, S. A1 - Simon, S. A1 - Rockstroh, L. A1 - Bellon, Carsten A1 - Staude, Andreas A1 - Woias, P. A1 - Goldschmidtböing, F. A1 - Rabold, M. T1 - Virtuelle Messgeräte - Definition und Stand der Entwicklung N2 - Die Mikro- und Nanotechnologie gehört zu den Schlüsseltechnologien des 21. Jahrhunderts mit hohen Wachstumsprognosen, wie auch die im Auftrag des BMBF durchgeführte Studie “Nanotechnologie als wirtschaftlicher Wachstumsmarkt” von 2004 ausführlich darstellt. Aus diesem Trend resultiert ein steigender Bedarf an Messsystemen, die Nanostrukturen prozessnah bzw. im Fertigungsprozess charakterisieren können. Virtuelle Messgeräte liefern Erkenntnisse zur Entwicklung neuartiger Messsysteme, Analyse und Optimierung bestehender Verfahren sowie die Bestimmung der Messunsicherheit und modellbasierten Korrektur systematischer Fehler. Der virtuelle Messprozess umfasst neben dem Messmittel auch die Probe und die Wechselwirkungen zwischen beiden. In diesem Beitrag werden virtuelle Messgeräte vorgestellt sowie deren Anwendung diskutiert. N2 - Micro- and nanotechnology experienced a high economic growth in recent years. This yields in a growing demand for measuring instruments which are closely linked to the production process. Virtual measuring instruments provide knowledge for the development of new systems, the analysis and optimization of established devices as well as the determination of the uncertainty in measurement. The virtual measuring process consists of the measuring instrument, the sample, and the interaction between both. In this article examples of current developments of virtual instruments are presented and their way of utilization is discussed. KW - Virtuelle Messtechnik KW - Simulation KW - Messunsicherheit KW - Virtual metrology KW - Measurement uncertainty PY - 2008 DO - https://doi.org/10.1524/teme.2008.0872 SN - 0340-837X SN - 0178-2312 SN - 0171-8096 VL - 75 IS - 5 SP - 298 EP - 310 PB - Oldenbourg CY - München AN - OPUS4-17569 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Bonse, Jörn A1 - Rosenfeld, A. A1 - Krüger, Jörg ED - Panchenko, V. ED - Mourou, G. ED - Zheltikov, A. M. T1 - Femtosecond laser-induced periodic surface structures: recent approaches to explain their sub-wavelength periodicities N2 - The formation of laser-induced periodic surface structures (LIPSS) upon irradiation of semiconductors and dielectrics by linearly polarized high-intensity Ti:sapphire fs-laser pulses (τ ~100 fs, λ ~800 nm) is studied experimentally and theoretically. In the experiments, two different types of LIPSS exhibiting very different spatial periods are observed (socalled LSFL – low spatial frequency LIPSS, and HSFL - high spatial frequency LIPSS), both having a different dependence on the incident laser fluence and pulse number per spot. The experimental results are analyzed by means of a new theoretical approach, which combines the generally accepted LIPSS theory of J. E. Sipe and co-workers [Phys. Rev. B 27, 1141-1154 (1983)] with a Drude model, in order to account for transient changes of the optical properties of the irradiated materials. The joint Sipe-Drude model is capable of explaining numerous aspects of fs-LIPSS formation, i.e., the orientation of the LIPSS, their fluence dependence as well as their spatial periods. The latter aspect is specifically demonstrated for silicon crystals, which show experimental LSFL periods Λ somewhat smaller than λ. This behaviour is caused by the excitation of surface plasmon polaritons, SPP, (once the initially semiconducting material turns to a metallic state upon formation of a dense free-electron-plasma in the material) and the subsequent interference between its electrical fields with that of the incident laser beam, resulting in a spatially modulated energy deposition at the surface. Upon multi-pulse irradiation, a feedback mechanism, caused by the redshift of the resonance in a grating-assisted SPP excitation, is further reducing the LSFL spatial periods. The SPP-based mechanism of LSFL successfully explains the remarkably large range of LSFL periods between ~0.6 λ and λ. T2 - LAT 2010 - International Conference on Lasers, Applications, and Technologies CY - Kazan, Russia DA - 23.08.2010 KW - Femtosecond laser ablation KW - Laser-induced periodic surface structures (LIPSS) KW - Surface plasmon polaritons KW - Second harmonic generation (SHG) KW - Silicon KW - Semiconductors KW - Dielectrics PY - 2011 DO - https://doi.org/10.1117/12.879813 SN - 0277-786X N1 - Serientitel: Proceedings of SPIE – Series title: Proceedings of SPIE VL - 7994 SP - 79940M-1 EP - 79940M-10 CY - Bellingham, USA AN - OPUS4-23291 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Rosenfeld, A. A1 - Krüger, Jörg T1 - Implications of transient changes of optical and surface properties of solids during femtosecond laser pulse irradiation to the formation of laser-induced periodic surface structures N2 - The formation of laser-induced periodic surface structures (LIPSS) upon irradiation of silicon wafer surfaces by linearly polarized Ti:sapphire femtosecond laser pulses (pulse duration 130 fs, central wavelength 800 nm) is studied experimentally and theoretically. In the experiments, so-called low-spatial frequency LIPSS (LSFL) were found with periods smaller than the laser wavelength and an orientation perpendicular to the polarization. The experimental results are analyzed by means of a new theoretical approach, which combines the widely accepted LIPSS theory of Sipe et al. with a Drude model, in order to account for transient (intra-pulse) changes of the optical properties of the irradiated materials. It is found that the LSFL formation is caused by the excitation of surface plasmon polaritons, SPPs, once the initially semiconducting material turns to a metallic state upon formation of a dense free-electron-plasma in the material and the subsequent interference between its electrical field with that of the incident laser beam resulting in a spatially modulated energy deposition at the surface. Moreover, the influence of the laser-excited carrier density and the role of the feedback upon the multi-pulse irradiation and its relation to the excitation of SPP in a grating-like surface structure is discussed. KW - Femtosecond laser ablation KW - Laser-induced periodic surface structures KW - (LIPSS) KW - Optical properties KW - Surface plasmon polaritons KW - Semiconductors KW - Silicon PY - 2011 DO - https://doi.org/10.1016/j.apsusc.2010.11.059 SN - 0169-4332 SN - 1873-5584 VL - 257 IS - 12 SP - 5420 EP - 5423 PB - Elsevier B.V. CY - Amsterdam AN - OPUS4-23309 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Bonse, Jörn A1 - Rosenfeld, A. A1 - Krüger, Jörg T1 - On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses N2 - The formation of nearly wavelength-sized laser-induced periodic surface structures (LIPSSs) on single-crystalline silicon upon irradiation with single or multiple femtosecond-laser pulses (pulse duration τ=130 fs and central wavelength λ=800 nm) in air is studied experimentally and theoretically. In our theoretical approach, we model the LIPSS formation by combining the generally accepted first-principles theory of Sipe and co-workers with a Drude model in order to account for transient intrapulse changes in the optical properties of the material due to the excitation of a dense electron-hole plasma. Our results are capable to explain quantitatively the spatial periods of the LIPSSs being somewhat smaller than the laser wavelength, their orientation perpendicular to the laser beam polarization, and their characteristic fluence dependence. Moreover, evidence is presented that surface plasmon polaritons play a dominant role during the initial stage of near-wavelength-sized periodic surface structures in femtosecond-laser irradiated silicon, and it is demonstrated that these LIPSSs can be formed in silicon upon irradiation by single femtosecond-laser pulses. KW - Ab initio calculations KW - Elemental semiconductors KW - High-speed optical techniques KW - Laser beam effects KW - Polaritons KW - Silicon KW - Solid-state plasma KW - Surface plasmons KW - Surface structure PY - 2009 DO - https://doi.org/10.1063/1.3261734 SN - 0021-8979 SN - 1089-7550 VL - 106 IS - 10 SP - 104910-1 - 104910-5 PB - American Institute of Physics CY - Melville, NY AN - OPUS4-20453 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Procop, Mathias A1 - Klein, A. A1 - Rechenberg, I. A1 - Krüger, D. T1 - AES Depth profiling of semiconducting multilayer structures using an ion beam bevelling technique PY - 1997 SN - 0937-0633 VL - 358 SP - 358 EP - 360 PB - Springer CY - Berlin AN - OPUS4-7097 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Procop, Mathias A1 - Klein, A. A1 - Rechenberg, I. A1 - Krüger, D. T1 - AES Depth Profiling of Semiconducting Epitaxial Layers with Thicknesses in the Nanometre Range Using an Ion Beam Bevelling Technique KW - AES KW - Depth profiling KW - Ion beam bevelling PY - 1997 SN - 0142-2421 SN - 1096-9918 VL - 25 SP - 458 EP - 463 PB - Wiley CY - Chichester AN - OPUS4-7098 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Krüger, Jörg A1 - Martin, Sven A1 - Mädebach, Heinrich A1 - Urech, L. A1 - Lippert, T. A1 - Wokaun, A. A1 - Kautek, Wolfgang T1 - Femto- and nanosecond laser treatment of doped polymethylmethacrylate N2 - Femto- and nanosecond laser ablation of polymethylmethacrylate (PMMA) and PMMA doped with a linear absorber was investigated in the infrared spectral region. Ablation thresholds were determined and incubation phenomena were identified. The ‘degree’ of incubation was calculated employing a phenomenological model. The influence of the pulse duration on the machining quality of the polymers was examined. The presence of an absorbing chromophore is not a prerequisite for a controllable fs-laser structuring in contrast to the ns-treatment. Surface swelling always accompanied ablation. KW - Laser ablation KW - Laser beam machining KW - Doping thin films KW - Polymers-radiation effects PY - 2005 DO - https://doi.org/10.1016/j.apsusc.2005.01.078 SN - 0169-4332 SN - 1873-5584 VL - 247 SP - 406 EP - 411 PB - North-Holland CY - Amsterdam AN - OPUS4-7470 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Spickermann, J. A1 - Martin, K. A1 - Räder, H.J. A1 - Müllen, K. A1 - Schlaad, H. A1 - Müller, A. H. E. A1 - Krüger, Ralph-Peter T1 - Quantitative analysis of broad molecular weight distributions obtained by MALDI-TOF mass spectrometry PY - 1996 SN - 1469-0667 SN - 1356-1049 SN - 1365-0718 IS - 2 SP - 161 EP - 165 PB - IM Publications CY - Chichester AN - OPUS4-2153 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Schlaad, H. A1 - Müller, A. H. E. A1 - Kolshorn, H. A1 - Krüger, Ralph-Peter T1 - Mechanism of anionic polymerization of (meth)acrylates in the presence of aluminium alkyls PY - 1995 SN - 0170-0839 SN - 1436-2449 VL - 35 SP - 169 EP - 176 PB - Springer CY - Berlin AN - OPUS4-2144 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Sonnenschein, H. A1 - Kreher, T. A1 - Gründemann, E. A1 - Krüger, Ralph-Peter A1 - Kunath, A. A1 - Zabel, V. T1 - Novel Redox-Active Cyclophanes Based on 3,3'-Bisindolizines - Synthesis and Chirality PY - 1996 SN - 0022-3263 SN - 1520-6904 VL - 61 SP - 710 EP - 714 PB - American Chemical Society CY - Washington, DC AN - OPUS4-2147 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Starke, K. A1 - Ristau, D. A1 - Martin, Sven A1 - Hertwig, Andreas A1 - Krüger, Jörg A1 - Allenspacher, P. A1 - Riede, W. A1 - Meister, S. A1 - Theiss, C. A1 - Sabbah, A. A1 - Rudolph, W. A1 - Raab, V. A1 - Grigonis, R. A1 - Rakickas, T. A1 - Sirutkaitis, V. ED - Exarhos, G. J. T1 - Results of a round-robin experiment in multiple-pulse LIDT measurement with ultrashort pulses T2 - 35th Annual Boulder Damage Symposium ; 35th Annual Symposium on Optical Materials for High-Power Lasers CY - Boulder, CO, USA DA - 2003-09-22 KW - Multiple-pulse damage KW - ISO 11254-2 KW - S on 1-LIDT KW - Round-robin experiment KW - CHOCLAB PY - 2004 SN - 0-8194-5163-0 DO - https://doi.org/10.1117/12.525135 SN - 0038-7355 N1 - Serientitel: Proceedings of SPIE – Series title: Proceedings of SPIE IS - 5273 SP - 388 EP - 395 PB - SPIE, the International Society for Optical Engineering CY - Bellingham, Wash. AN - OPUS4-4948 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -