TY - JOUR A1 - Procop, Mathias A1 - Hodoroaba, Vasile-Dan A1 - Bjeoumikhov, A. T1 - Calculation of X-ray spectra for a side window tube JF - Microscopy and microanalysis T2 - Microscopy and Microanalysis CY - Chicago, IL, United States of America DA - 2006-07-30 KW - X-ray spectroscopy KW - X-ray tube KW - Microanalysis KW - XRF PY - 2006 DO - https://doi.org/10.1017/S143192760606123X SN - 1431-9276 SN - 1435-8115 VL - 12 IS - Supplement 2 PB - Cambridge University Press CY - New York, NY AN - OPUS4-12667 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Procop, Mathias A1 - Hodoroaba, Vasile-Dan A1 - Bjeoumikhov, A. A1 - Wedell, R. A1 - Warrikhoff, A. T1 - Improvements of the low-energy performance of a micro-focus x-ray source for XRF analysis with the SEM JF - X-ray spectrometry N2 - X-ray Fluorescence (XRF) with a scanning electron microscope (SEM) is a valuable completion of the analytical capabilities of SEMs. Small and compact micro-focus x-ray sources are mounted to the microscope chamber, and the x-ray spectra are monitored with conventional EDS systems. Up to now the x-ray tubes used for the micro-focus x-ray sources are equipped with beryllium windows about 100 µm thick. The poly-capillary x-ray lenses have their transmission maximum at photon energies around 10 keV. It drops down in both low- and high-energy ranges. Hence, L-radiation from an Mo or Rh target will be strongly attenuated, and the excitation of fluorescence in the soft x-ray range becomes very ineffective. A new micro-focus x-ray source was developed. It is characterised by a lower self-absorption in the tube target, thin beryllium windows and an x-ray optics having a large distance between its foci and the maximum of transmission at about 5 keV. Thus K line fluorescence of light elements becomes effectively excited by the L-radiation from Mo or Rh tube targets. The detection limit for sodium oxide in glass was found to be below 1 mass%. KW - Micro-focus-XRF KW - X-ray tube KW - X-ray optics KW - SEM PY - 2009 DO - https://doi.org/10.1002/xrs.1159 SN - 0049-8246 VL - 38 IS - 4 SP - 308 EP - 311 PB - Wiley CY - Chichester AN - OPUS4-19583 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -