TY - JOUR A1 - Sturm, Heinz A1 - Schröter, Maria-Astrid A1 - Weimann, Christiane T1 - Imaging method for vibrating scanning force microscopy cantilevers for the analysis of mode shapes and nonlinear harmonic motion N2 - A specially designed scanning force microscope (SFM, atomic force microscope – AFM) was incorporated into the chamber of a commercial scanning electron microscope (SEM) to investigate vibrating SFM cantilevers at their resonance. Inherently, the spatial resolution of electron microscopy is higher than that of optical methods. In this paper we present vibration modes (eigenmodes) of two different SFM cantilevers. Their nonlinear behavior is also explored in order to depict their 2nd harmonics (twice the fundamental frequency). Imaging of the local vibration is performed by measuring the frequency- and phase-selective responses of the SE signal at different X and Y positions of the scanned electron beam. KW - Electron microscopy KW - Scanning force microscopy KW - Motion detection KW - Cantilever KW - Eigenmode KW - Harmonic KW - Nonlinearity KW - Harmonix cantilever PY - 2012 U6 - https://doi.org/10.1016/j.mee.2012.07.088 SN - 0167-9317 SN - 1873-5568 VL - 98 SP - 492 EP - 496 PB - Elsevier Science CY - Amsterdam, Netherlands AN - OPUS4-26431 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -