TY - JOUR A1 - Florian, Camilo A1 - Déziel, J.-L. A1 - Kirner, Sabrina V. A1 - Siegel, J. A1 - Bonse, Jörn T1 - The role of the laser-induced oxide layer in the formation of laser-induced periodic surface structures N2 - Laser-induced periodic surface structures (LIPSS) are often present when processing solid targets with linearly polarized ultrashort laser pulses. The different irradiation parameters to produce them on metals, semiconductors and dielectrics have been studied extensively, identifying suitable regimes to tailor its properties for applications in the fields of optics, medicine, fluidics and tribology, to name a few. One important parameter widely present when exposing the samples to the high intensities provided by these laser pulses in air environment, that generally is not considered, is the formation of a superficial laser-induced oxide layer. In this paper, we fabricate LIPSS on a layer of the oxidation prone hard-coating material chromium nitride in order to investigate the impact of the laser-induced oxide layer on its formation. A variety of complementary surface analytic techniques were employed, revealing morphological, chemical and structural characteristics of well-known high-spatial frequency LIPSS (HSFL) together with a new type of low-spatial frequency LIPSS (LSFL) with an anomalous orientation parallel to the laser polarization. Based on this input, we performed finite-difference time-domain calculations considering a layered system resembling the geometry of the HSFL along with the presence of a laser-induced oxide layer. The simulations support a scenario that the new type of LSFL is formed at the interface between the laser-induced oxide layer and the non-altered material underneath. These findings suggest that LSFL structures parallel to the polarization can be easily induced in materials that are prone to oxidation. KW - Laser-induced oxide layer KW - Laser-induced periodic surface structures (LIPSS) KW - Surface chemistry KW - Femtosecond laser processing KW - Nanostructuring PY - 2020 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:b43-502530 SN - 2079-4991 VL - 10(1) IS - Special issue "Laser-generated periodic nanostructures" SP - 147-1 EP - 147-18 PB - MDPI CY - Basel AN - OPUS4-50253 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Florian, Camilo A1 - Deziel, J.-L. A1 - Kirner, Sabrina V. A1 - Siegel, J. A1 - Bonse, Jörn T1 - Femtosecond laser-induced oxidation in the formation of periodic surface structures N2 - Micro- and nanostructuring with laser-induced periodic surface structures (LIPSS) has been demonstrated to be feasible in a wide variety of materials including metals, semiconductors and dielectrics. Suitable processing regimes for flat, curved and complex surfaces have been identified for many materials, allowing the generation of diverse applications in fields such as optics, tribology and medicine, to name a few. A common side effect when producing such structures in air environment is the formation of a thin surface oxide layer in the laser irradiated areas. Previous studies have shown that oxidation plays an important role in the tribological performance for which the structures where created, and very recently it has been shown that the laser-induced oxide graded layers may contribute to the formation of a new type of embedded low-spatial frequency LIPSS (LSFL) with annomalous orientation parallel to the laser polarization, in addition to the appearance of the well-known high-spatial frequency LIPSS (HSFL) at the surface. In this contribution, we explore this effect experimentally for chromium nitride (CrN) irradiated with femtosecond laser pulses and compare the findings to finite-difference time-domain (FDTD) simulations of the intensity distributions at different depth positions. T2 - 2021 Conference on Lasers and Electro-Optics/Europe – European Quantum Electronics Virtual Conferences CY - Munich, Germany DA - 21.06.2021 KW - Femtosecond laser ablation KW - Finite-difference time-domain calculations KW - Laser-induced periodic surface structures (LIPSS) KW - Surface oxidation PY - 2021 SN - 978-1-6654-1876-8 U6 - https://doi.org/10.1109/CLEO/Europe-EQEC52157.2021.9542774 VL - 2021 SP - 1 PB - Institute of Electrical and Electronics Engineers (IEEE) CY - Piscataway, NJ, USA AN - OPUS4-53457 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -