TY - CONF A1 - Kautek, Wolfgang A1 - Rudolph, Pascale A1 - Brzezinka, Klaus-Werner A1 - Wäsche, Rolf ED - Meunier, M. T1 - Physical chemistry of the femtosecond and nanosecond laser-material-interaction with SiC and a SiC-TiC-TiB2 composite ceramic compound T2 - Physics and chemistry of advanced laser materials processing N2 - The interaction of nanosecond laser pulses in the ultraviolet wavelength range and femtosecond laser pulses in the near-infrared region with the direct semiconductor SiC and the composite compound SiC-TiC-TiB2 was investigated in respect to resulting physicochemical processes. Surface analytical techniques, such as XPS, µ-Raman, and EDX were used to identify the chemical changes between untreated and laser-treated areas. Single-pulse irradiation led to material modifications in the condensed state in most instances. Multi-pulse results differed depending on the pulse duration. In the nanosecond case, melting of the surface and redeposited material (debris) were observed. With femtosecond pulses instead, only negligible melting and few debris could be detected. Additionally, periodic structures (ripples) appeared, with parallel orientation and in most cases two different periodicities for a particular material. Laser ablation of all the studied compound materials exhibited preferential ablation of the lighter component elements. Crystal structure changes of the irradiated surface were observed as a consequence of laser-induced melting and resolidification. An oxidation process interfered with all this processes so that unstoichiometric oxides were formed. T2 - Symposium D - European Materials Research Society CY - Strasbourg, France DA - 2002-06-18 PY - 2002 UR - http://www.emrs-strasbourg.com/files/pdf/2002_SPRING/02_Prog_Dv2.pdf N1 - Serientitel: Applied surface science – Series title: Applied surface science VL - 208/209.2003,1 IS - 1 SP - 1 PB - Elsevier CY - Amsterdam AN - OPUS4-1732 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -