TY - CONF A1 - Ritter, Martin T1 - Accuracy estimation of SPM 3D-Calibration by Error separation T2 - Nanoscale 2008 CY - Turin, Italy DA - 2008-09-22 PY - 2008 AN - OPUS4-18446 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Ritter, Martin T1 - Systematic analytics of non-linear deviations by established standards and a new generation of 3D standards T2 - Nanoscale 2008 CY - Turin, Italy DA - 2008-09-22 PY - 2008 AN - OPUS4-18447 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Ritter, Martin T1 - Analysis of multimodal 3D microscopy measurements T2 - EMC CY - Aachen, Germany DA - 2008-09-01 PY - 2008 AN - OPUS4-18437 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -