TY - JOUR A1 - Ritter, Martin A1 - Dziomba, T. A1 - Kranzmann, Axel A1 - Koenders, L. T1 - A landmark-based 3D calibration strategy for SPM N2 - We present a new method for the complete three-dimensional (3D) calibration of scanning probe microscopes (SPM) and other high-resolution microscopes, e.g., scanning electron microscopes (SEM) and confocal laser scanning microscopes (CLSM), by applying a 3D micrometre-sized reference structure with the shape of a cascade slope-step pyramid. The 3D reference structure was produced by focused ion beam induced metal deposition. In contrast to pitch featured calibration procedures that require separate lateral and vertical reference standards such as gratings and step height structures, the new method includes the use of landmarks, which are well established in calibration and measurement tasks on a larger scale. However, the landmarks applied to the new 3D reference structures are of sub-micrometre size, the so-called 'nanomarkers'. The nanomarker coordinates are used for a geometrical calibration of the scanning process of SPM as well as of other instrument types such as SEM and CLSM. For that purpose, a parameter estimation routine involving three scale factors and three coupling factors has been developed that allows lateral and vertical calibration in only one sampling step. With this new calibration strategy, we are able to detect deviations of SPM lateral scaling errors as well as coupling effects causing, e.g., a lateral coordinate shift depending on the measured height position of the probe. KW - Scanning probe microscopy KW - Focused ion beam KW - Calibration KW - 3D standards KW - Parameter estimation KW - Spatial coupling KW - Distortions KW - SPM KW - Landmarks KW - Nanomarker KW - Coupling KW - 3D calibration PY - 2007 U6 - https://doi.org/10.1088/0957-0233/18/2/S12 SN - 0957-0233 SN - 1361-6501 VL - 18 SP - 404 EP - 414 PB - IOP Publ. Ltd. CY - Bristol AN - OPUS4-16358 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -