TY - THES A1 - Ritter, Martin T1 - A landmark-based method for the geometrical 3D calibration of scanning microscopes N2 - Die Arbeit stelle eine neue Strategie und ein daraus abgeleitetes Verfahren zur geometrischen Kalibrierung von 3D Messgeräten im Mikrobereich vor. Das Verfahren beruht auf der Anwendung von räumlichen Kalibrierstrukturen mit Nanomessmarken (Nanomarker). Es konnte erfolgreich für die 3D Kalibrierung von Rasterkraftmikroskopen (SPM) und konfokalen Lasermikroskopen (CLSM) eingesetzt werden. Im Rahmen von vergleichbaren Untersuchungen werden die 3D Kalibrierstrukturen ebenfalls für die photogrammetrische Selbstkalibrierung im Rasterelektronenmikroskop (SEM) verwendet. N2 - This thesis presents a new strategy and a spatial method for the geometric calibration of 3D measurement devices at the micro-range, based on spatial reference structures with nanometer-sized landmarks (nanomarkers). The new method was successfully applied for the 3D calibration of scanning probe microscopes (SPM) and confocal laser scanning microscopes (CLSM). Moreover, the spatial method was also used for the photogrammetric self-calibration of scanning electron microscopes (SEM). In order to implement the calibration strategy to all scanning microscopes used, the landmark-based principle of reference points often applied at land survey or at close-range applications has been transferred to the nano- and micro-range in the form of nanomarker. In order to function as a support to the nanomarkers, slopeshaped step pyramids have been developed and fabricated by focused ion beam (FIB) induced metal deposition. These FIB produced 3D microstructures have been sized to embrace most of the measurement volume of the scanning microscopes. Additionally, their special design allows the homogenous distribution of the nanomarkers. The nanomarkers were applied onto the support and the plateaus of the slope-step pyramids by FIB etching (milling) as landmarks with as little as several hundreds of nanometers in diameter. The nanomarkers are either of point-, or ring-shaped design. They are optimized so that they can be spatially measured by SPM and CLSM, and, imaged and photogrammetrically analyzed on the basis of SEM data. The centre of the each nanomarker serves as reference point in the measurement data or images. By applying image processing routines, the image (2D) or object (3D) coordinates of each nanomarker has been determined with subpixel accuracy. In contrast to the spatial reference structures applied for the spatial calibration method introduced here, present calibration methods for scanning microscopes use sequential measurements of 2D lattice and height step structures. This means that the determination of the scale factor for the height measurement yields an average value for the full scan area. Thus, the height scale factor remains independent of the lateral scanning position, and, therefore, it will be impossible to determine the coupling of the lateral coordinate axes and the z-axis as a shear factor with the sequential calibration method. On this account, an affine geometrical model has been used here, that allows for scale factors in all space directions, and, for coupling between all coordinate axes. With the help of the correlative analysis of the measurement data of all measurement methods applied (SPM, CLSM and photogrammetric SEM), for the first time, all scale factors, as well as the linear coupling of the probes used for the height measurement could be determined dependent on the lateral scanning position. It could be shown that the scanning movement of the SPM and the CLSM is erroneous. Due to hysteresis effects and guidance errors of the scanning generators, due to errors and peculiarities of the control cycle, and because of misaligned attachment of the probe with respect to the scanning plane, the measurement coordinate system is not identical to the ideal reference coordinate system. Scale and orthogonality of the measurement coordinate system have to be calibrated and corrected, in order to maintain the traceability to the SI-unit meter, and, therefore, to allow for quantitative dimensional 3D measurements. However, the correlative analysis of the SPM, CLSM and photogrammetric SEM measurement data after 3D calibration resulted in mean residues in the measured coordinates of as little as 13 nm. Without the coupling factors the mean residues are up to 6 times higher. By taking into account the orthogonality of the measurement coordinate axes when performing a 3D calibration, a comparative and quantitative analysis of 3D scanning microscopy has been made possible. T3 - BAM Dissertationsreihe - 21 KW - landmark-based method KW - scanning microscopes KW - geometrical 3D calibration PY - 2007 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:b43-1373 SN - 978-3-86509-630-2 SN - 1613-4249 VL - 21 SP - 1 EP - 141 PB - Wirtschaftsverlag NW CY - Bremerhaven AN - OPUS4-137 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Ritter, Martin A1 - Dziomba, T. A1 - Hemmleb, M. A1 - Koenders, L. A1 - Kranzmann, Axel T1 - A 3D-Calibration Method for the Quantitative SPM Measurement of Hardness Indenters KW - 3D Calibration KW - SPM KW - Hardness Indenter PY - 2007 SN - 0970-3950 VL - 22 IS - 3 SP - 167 EP - 175 PB - Metrology Society of India CY - New Delhi AN - OPUS4-16357 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Ritter, Martin A1 - Dziomba, T. A1 - Kranzmann, Axel A1 - Koenders, L. T1 - A landmark-based 3D calibration strategy for SPM N2 - We present a new method for the complete three-dimensional (3D) calibration of scanning probe microscopes (SPM) and other high-resolution microscopes, e.g., scanning electron microscopes (SEM) and confocal laser scanning microscopes (CLSM), by applying a 3D micrometre-sized reference structure with the shape of a cascade slope-step pyramid. The 3D reference structure was produced by focused ion beam induced metal deposition. In contrast to pitch featured calibration procedures that require separate lateral and vertical reference standards such as gratings and step height structures, the new method includes the use of landmarks, which are well established in calibration and measurement tasks on a larger scale. However, the landmarks applied to the new 3D reference structures are of sub-micrometre size, the so-called 'nanomarkers'. The nanomarker coordinates are used for a geometrical calibration of the scanning process of SPM as well as of other instrument types such as SEM and CLSM. For that purpose, a parameter estimation routine involving three scale factors and three coupling factors has been developed that allows lateral and vertical calibration in only one sampling step. With this new calibration strategy, we are able to detect deviations of SPM lateral scaling errors as well as coupling effects causing, e.g., a lateral coordinate shift depending on the measured height position of the probe. KW - Scanning probe microscopy KW - Focused ion beam KW - Calibration KW - 3D standards KW - Parameter estimation KW - Spatial coupling KW - Distortions KW - SPM KW - Landmarks KW - Nanomarker KW - Coupling KW - 3D calibration PY - 2007 U6 - https://doi.org/10.1088/0957-0233/18/2/S12 SN - 0957-0233 SN - 1361-6501 VL - 18 SP - 404 EP - 414 PB - IOP Publ. Ltd. CY - Bristol AN - OPUS4-16358 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Ritter, Martin A1 - Dziomba, T. A1 - Kranzmann, Axel A1 - Koenders, L. T1 - A landmark based 3D calibration strategy for SPM T2 - Nanoscale 2006, METAS CY - Wabern, Switzerland DA - 2006-04-24 PY - 2006 AN - OPUS4-12174 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -