TY - JOUR A1 - Cappella, Brunero A1 - Geuss, Markus A1 - Sturm, Heinz A1 - Heyde, M. A1 - Rademann, K. A1 - Spangenberg, T. A1 - Niehus, H. T1 - Dynamic plowing nanolithography on polymethylmethacrylate using an atomic force microscope N2 - We present dynamic plowing nanolithography on polymethylmethacrylate films, performed with a scan-linearized atomic force microscope able to scan up to 250 μm with high resolution. Modifications of the surface are obtained by plastically indenting the film surface with a vibrating tip. By changing the oscillation amplitude of the cantilever, i.e., the indentation depth, surfaces can be either imaged or modified. A program devoted to the control of the scanning process is also presented. The software basically converts the gray scale of pixel images into voltages used to control the dither piezo driving cantilever oscillations. The advantages of our experimental setup and the dependence of lithography efficiency on scanning parameters are discussed. Some insights into the process of surface modifications are presented. KW - Nanolithography PY - 2001 UR - http://rsi.aip.org/ U6 - https://doi.org/10.1063/1.1326053 SN - 0034-6748 SN - 1089-7623 VL - 72 SP - 136 EP - 141 PB - American Institute of Physics CY - Melville, NY AN - OPUS4-874 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Sturm, Heinz A1 - Cappella, Brunero A1 - Heyde, M. A1 - Ritter, C. A1 - Rademann, K. T1 - Dislocation of antimony clusters on graphite by means of dynamic plowing nanolithography N2 - Antimony clusters of different shapes and dimensions have been obtained by evaporating antimony on graphite. The dependence of the shape and dimensions of the particles on the evaporation parameters (effective layer thickness, temperature, pressure) is discussed. A characterisation of the different structures is presented. In particular, the decoration of graphite steps is discussed. Clusters have been dislocated by means of dynamic plowing nanolithography, both in vector and in image pattern mode. The dependence of the energy needed to dislocate a cluster on its dimensions and position is discussed. KW - Antimony clusters KW - Nanolithography PY - 2001 U6 - https://doi.org/10.1016/S0039-6028(00)01113-4 SN - 0039-6028 VL - 476 IS - 1-2 SP - 54 EP - 62 PB - Elsevier CY - Amsterdam AN - OPUS4-875 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Sturm, Heinz A1 - Heyde, M. A1 - Rademann, K. T1 - The use of a fibre-based light sensor for the calibration of Scanning Probe Microscopy piezos KW - Tunneling microscopy KW - Height calibration KW - Force-microscopy PY - 1999 SN - 1862-6300 SN - 0031-8965 VL - 173 IS - 1 SP - 225 EP - 234 PB - Wiley-VCH CY - Berlin AN - OPUS4-6857 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Heyde, M. A1 - Sturm, Heinz A1 - Rademann, K. T1 - New application for the calibration of scanning probe microscopy piezos KW - Scanning probe microscope KW - Piezoelectric translator KW - Calibration KW - Height Calibration KW - Force-Microscopy PY - 1999 SN - 0142-2421 SN - 1096-9918 VL - 27 IS - 5-6 SP - 291 EP - 295 PB - Wiley CY - Chichester AN - OPUS4-6858 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Sturm, Heinz A1 - Heyde, M. A1 - Rademann, K. T1 - Measuring SPM Piezo Displacement Responses PY - 1999 SN - 1551-9295 VL - 99 IS - 4 SP - 24 EP - 26 PB - Microscopy Society of America CY - Wappingers Falls, NY AN - OPUS4-6860 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Heyde, M. A1 - Sturm, Heinz A1 - Geuss, Markus A1 - Ritter, C. A1 - Rademann, K. T1 - Rastersondenmikroskopie als Werkzeug der Lithographie für Nanostrukturen PY - 1999 SN - 0946-641X VL - 6 IS - 3 SP - 28 EP - 33 PB - Universität CY - Berlin AN - OPUS4-6861 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -