TY - JOUR A1 - Hodoroaba, Vasile-Dan A1 - Radtke, Martin A1 - Vincze, L. A1 - Rackwitz, Vanessa A1 - Reuter, Dirk T1 - X-ray scattering in X-ray fluorescence spectra with X-ray tube excitation - Modelling, experiment, and Monte-Carlo simulation JF - Nuclear instruments and methods in physics research B N2 - X-ray scattering may contribute significantly to the spectral background of X-ray fluorescence (XRF) spectra. Based on metrological measurements carried out with a scanning electron microscope (SEM) having attached a well characterised X-ray source (polychromatic X-ray tube) and a calibrated energy dispersive X-ray spectrometer (EDS) the accuracy of a physical model for X-ray scattering is systematically evaluated for representative samples. The knowledge of the X-ray spectrometer efficiency, but also of the spectrometer response functions makes it possible to define a physical spectral background of XRF spectra. Background subtraction relying on purely mathematical procedures is state-of-the-art. The results produced by the analytical model are at least as reliable as those obtained by Monte-Carlo simulations, even without considering the very challenging contribution of multiple scattering. Special attention has been paid to Compton broadening. Relevant applications of the implementation of the analytical model presented in this paper are the prediction of the limits of detection for particular cases or the determination of the transmission of X-ray polycapillary lenses. KW - X-ray scattering KW - X-ray fluorescence KW - Spectral background KW - Modelling KW - Monte-Carlo simulation PY - 2010 DO - https://doi.org/10.1016/j.nimb.2010.09.017 SN - 0168-583X SN - 1872-9584 VL - 268 IS - 24 SP - 3568 EP - 3575 PB - Elsevier CY - Amsterdam AN - OPUS4-22357 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Rackwitz, Vanessa A1 - Procop, M. A1 - Hodoroaba, Vasile-Dan T1 - Characterization of polycapillary X-ray semilenses with SEM/EDX JF - Microscopy and microanalysis KW - Polycapillary X-ray optics KW - Semi-lens KW - Parallelising mode KW - SEM KW - EDS KW - Acceptance area KW - FWHM KW - Transmission KW - Focal distance KW - XRF PY - 2010 DO - https://doi.org/10.1017/S1431927610054280 SN - 1431-9276 SN - 1435-8115 VL - 16 IS - Suppl 2 SP - 932 EP - 933 PB - Cambridge University Press CY - New York, NY AN - OPUS4-27219 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Hodoroaba, Vasile-Dan A1 - Rackwitz, Vanessa A1 - Reuter, Dirk T1 - Micro-focus X-ray fluorescence (mu-XRF) as an extension of the analytical SEM JF - Microscopy and microanalysis KW - mu-XRF KW - SEM KW - EDS PY - 2010 DO - https://doi.org/10.1017/S1431927610054115 SN - 1431-9276 SN - 1435-8115 VL - 16 IS - Suppl. 2 SP - 904 EP - 905 PB - Cambridge University Press CY - New York, NY AN - OPUS4-27220 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Rackwitz, Vanessa A1 - Warrikhoff, A. A1 - Panne, Ulrich A1 - Hodoroaba, Vasile-Dan T1 - Determination of emitted X-ray tube spectra by means of a calibrated instrumental setup JF - Microscopy and microanalysis KW - X-ray tube spectrum KW - XRF KW - SEM KW - EDS KW - Spectrometer efficiency PY - 2010 DO - https://doi.org/10.1017/S1431927610054292 SN - 1431-9276 SN - 1435-8115 VL - 16 IS - Supplement S2 SP - 930 EP - 931 PB - Cambridge University Press CY - New York, NY AN - OPUS4-22471 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -