TY - JOUR A1 - Rackwitz, Vanessa A1 - Warrikhoff, A. A1 - Panne, Ulrich A1 - Hodoroaba, Vasile-Dan T1 - Determination of the efficiency of an energy dispersive X-ray spectrometer up to 50 keV with a SEM N2 - Both electron and polychromatic photon excitations (micro-focus X-ray source) at a scanning electron microscope (SEM) are used to determine the efficiency of an energy dispersive X-ray spectrometer up to 50 keV by means of a calibrated X-ray spectrometer and reference materials (RM) specially selected for this purpose. KW - Detector efficiency KW - Calibration KW - XRF KW - EDS KW - SEM KW - EDS-TM001 KW - Scattering PY - 2009 U6 - https://doi.org/10.1039/b907815k SN - 0267-9477 SN - 1364-5544 VL - 24 SP - 1034 EP - 1036 PB - Royal Society of Chemistry CY - London AN - OPUS4-19714 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -