TY - JOUR A1 - Procop, Mathias A1 - Hodoroaba, Vasile-Dan A1 - Rackwitz, Vanessa T1 - A microfocus X-ray source for improved EDS and XRF analysis in the SEM N2 - A microfocus X-ray source mounted on the analysis chamber of an SEM was used to excite X-ray fluorescence spectra and to detect chemical elements with concentrations below the detection limit of the electron-excited X-ray spectra conventionally measured with SEM/EDS. An aluminium alloy and a hard material ceramics were analysed as representative examples. It is demonstrated that the combination of the three analytical methods: (1) SEM imaging for surface morphology characterisation; (2) electron-excited X-ray spectroscopy with its high spatial resolution for element analysis of inclusions or precipitates; and (3) X-ray fluorescence for the detection of elements with concentrations below 0.1 mass% considerably improves the performance of SEM/EDX analyses. KW - Scanning electron microscopy KW - Microanalysis KW - Energy-dispersive X-ray spectroscopy KW - X-ray fluorescence KW - Micro-XRF KW - Materials science PY - 2011 SN - 2043-0655 VL - 25 IS - 4 SP - 11 EP - 13 PB - Wiley CY - Chichester AN - OPUS4-23764 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -