TY - JOUR A1 - Procop, Mathias A1 - Hodoroaba, Vasile-Dan A1 - Terborg, R. A1 - Berger, D. T1 - Determination of the Effective Detector Area of an Energy-Dispersive X-Ray Spectrometer at the Scanning Electron Microscope Using Experimental and Theoretical X-Ray Emission Yields N2 - A method is proposed to determine the effective detector area for energy-dispersive X-ray spectrometers (EDS). Nowadays, detectors are available for a wide range of nominal areas ranging from 10 up to 150mm2. However, it remains in most cases unknown whether this nominal area coincides with the “net active sensor area” that should be given according to the related standard ISO 15632, or with any other area of the detector device. Moreover, the specific geometry of EDS installation may further reduce a given detector area. The proposed method can be applied to most scanning electron microscope/EDS configurations. The basic idea consists in a comparison of the measured count rate with the count rate resulting from known X-ray yields of copper, titanium, or silicon. The method was successfully tested on three detectors with known effective area and applied further to seven spectrometers from different manufacturers. In most cases the method gave an effective area smaller than the area given in the detector description. KW - Energy-dispersive X-ray spectrometer (EDS) KW - EDX KW - Effective area KW - X-ray emission yield KW - Geometrical collection efficiency PY - 2016 UR - https://www.cambridge.org/core/journals/microscopy-and-microanalysis/article/div-classtitledetermination-of-the-effective-detector-area-of-an-energy-dispersive-x-ray-spectrometer-at-the-scanning-electron-microscope-using-experimental-and-theoretical-x-ray-emission-yieldsdiv/E15B2E67C349201CF323E778EB9C6D94 U6 - https://doi.org/10.1017/S1431927616011788 VL - 22 IS - 6 SP - 1360 EP - 1368 PB - Cambridge University Press CY - New York, NY, USA AN - OPUS4-38858 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -