TY - JOUR A1 - Wendt, U. A1 - Nolze, Gert T1 - Correlation between Crystal Orientation, Channeling Contrast and Topography during FIB Milling of Cu Studied by FIB, EBSD, SEM, and AFM JF - Praktische Metallographie N2 - We have studied the anisotropic milling of Cu with respect to the milling rate and the milling topography, as well. The background is twofold: i) anisotropic milling has to be taken into account during the preparation of TEM specimens and in the manufacturing of micro parts from crystalline materials, and ii) the orientation depending milling behaviour can be used to generate topographies with specific properties with respect to, for example, adsorption, wear, and corrosion. KW - FIB KW - AFM KW - Crystal orientation KW - SEM PY - 2007 VL - 44 IS - 5 SP - 236 EP - 238 PB - Carl Hanser Verlag AN - OPUS4-38026 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -