TY - CONF A1 - Rabe, Torsten A1 - Naghib Zadeh, Hamid A1 - Glitzky, C. A1 - Töpfer, J. T1 - Integration of Ni-Cu-Zn ferrite in LTCC-modules T2 - CICMT 2011 - 7th International conference and exhibition on ceramic interconnect and ceramic microsystems technologies (Proceedings) N2 - Integration of magnetic functional components in LTCC Circuit boards calls for co-firing of dielectric and ferrite tapes. Ni-Cu-Zn ferrites with permeability of p=900 were developed which can be fully densified at the Standard LTCC sintering temperature of 900 °C. Successful co-firing of this ferrite with dielectric tapes requires the adaptation of the shrinkage behavior of the materials as well as the thermal expansion during the cooling period - especially in the temperature range below the transformation point of the glassy phase of the dielectric tape. To match these preconditions, a new dielectric LTCC material with steep sintering curve and high thermal expansion coefficient was designed. Sintered multilayer composed of Ni-Cu-Zn ferrite and tailored dielectric tapes are free of cracks and possess no open porosity. No significant interdiffusion between the ferrite and dielectric tapes was found by EDX measurements. Compared to pure ferrite laminates the permeability of co-sintered Ni-Cu-Zn ferrite layers is drastically reduced to 400, i.e. a decrease of more than 50 %. To investigate the origin of this permeability reduction, Ni-Cu-Zn ferrite laminates were sintered separately, and in combination with alumina release tapes or dielectric tapes, respectively. SEM and EDX analysis of co-fired laminates reveal differences in the ferrite grain growth behavior. Ferrite laminates with homogeneous microstructure and grain size up to 50 pm exhibit large permeability. However, growth of ferrite grains does not take place near the interface between ferrite and release or dielectric tapes. There is a strong correlation between high permeability and volume fraction of large ferrite grains. Regions of fine and coarse grains inside the ferrite layers show different bismuth concentration; the Bi-content is larger in regions of fine ferrite grains. T2 - CICMT 2011 - 7th International conference and exhibition on ceramic interconnect and ceramic microsystems technologies CY - San Diego, CA, USA DA - 05.04.2011 KW - LTCC KW - Co-firing KW - Ferrite KW - Shrinkage behavior KW - Constrained sintering KW - Keramische Multilayer KW - Grenzflächenreaktion PY - 2011 SN - 0-930815-92-0 SP - 000266 EP - 000275 PB - IMAPS, International Microelectronics and Packaging Society AN - OPUS4-25072 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Naghib Zadeh, Hamid A1 - Rabe, Torsten A1 - Toepfer, J. A1 - Karmazin, R. T1 - Co-firing of LTCC modules with embedded ferrite layers T2 - EMPC-2011 - 18th European microelectronics & packaging conference (Proceedings) N2 - Further miniaturization of electronic packaging calls for integration of magnetic functional components into LTCC modules. For integration of magnetic function into LTCC, low fired MnZn- and NiCuZn-ferrites which can be fully densified at the standard LTCC sintering temperature of 900°C were developed. To co-fire these ferrite tapes with dielectric tapes the sintering shrinkage and the coefficient of thermal expansion of ferrite and dielectric tapes must be matched. For each ferrite material a new LTCC dielectric material was designed. The embedded ferrite tapes into new LTCC dielectric tapes can be sufficiently densified during co-firing at 900°C without any cracking. Compared to separately sintered ferrites the permeability of embedded ferrite tapes is reduced. For embedded NiCuZn ferrites permeabilities between 230 and 570 (at 2 MHz) according to the thickness of the embedded ferrite layer were measured. For embedded MnZn ferrites a permeability of 300 was measured. T2 - EMPC-2011 - 18th European microelectronics & packaging conference CY - Brighton, UK DA - 12.09.2011 KW - LTCC KW - Co-firing KW - Ferrite PY - 2011 SN - 978-0-9568086-0-8 IS - TuA2 SP - 1 EP - 6 AN - OPUS4-25021 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Naghib Zadeh, Hamid A1 - Rabe, Torsten T1 - Pressure-assisted sintering of multilayer transformer using LTCC-compatible NiCuZn-ferrite and silver conductor T2 - CICMT 2012 - 8th International conference on ceramic interconnect & ceramic microsystems technologies (Proceedings) T2 - CICMT 2012 - 8th International conference on ceramic interconnect & ceramic microsystems technologies CY - Erfurt, Germany DA - 2012-04-16 KW - LTCC KW - Ferrite KW - Silver conductor PY - 2012 SP - 000476 EP - 000483 (Session WP 1 / WP 15) AN - OPUS4-27775 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Naghib Zadeh, Hamid A1 - Rabe, Torsten A1 - Karmazin, R. T1 - Integration of MnZn-ferrite tapes in LTCC multilayer JF - Journal of electroceramics N2 - For co-firing of MnZn-ferrite tapes and LTCC dielectric tapes, the sintering shrinkage curves and the coefficient of thermal expansion of ferrite and dielectric tapes were matched. Highly densified embedded ferrite without any cracks could be manufactured by co-firing at 900 °C in nitrogen atmosphere. However, the permeability of MnZn-ferrite co-fired between dielectric tapes is significantly reduced (µ´=100) compared to that of the separately sintered ferrite (µ´=500). Changes in the phase stability and microstructure of MnZn-ferrite were investigated to explain the permeability reduction in the embedded ferrite. It is supposed that early densification of the dielectric tapes on the top and bottom of the ferrite layer prevent the gas exchange during sintering which is necessary for (Mn,Zn)Fe2O4 spinel formation. As a result, high amount of Fe2O3 secondary phase and a Mn-rich spinel phase with low permeability remain in the embedded ferrite layer. KW - LTCC KW - MnZn-ferrite KW - Co-firing PY - 2013 DO - https://doi.org/10.1007/s10832-013-9800-5 SN - 1385-3449 SN - 1573-8663 VL - 31 IS - 1-2 SP - 88 EP - 95 PB - Kluwer Acad. Publ. CY - Boston, Mass. [u.a.], USA AN - OPUS4-29385 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Naghib Zadeh, Hamid A1 - Glitzky, Carsten A1 - Österle, Werner A1 - Rabe, Torsten T1 - Low temperature sintering of barium titanate based ceramics with high dielectric constant for LTCC applications JF - Journal of the European Ceramic Society N2 - The sintering temperature of BaTiO3 powder was reduced to 900 °C due to the ZnO-B2O3-Li2O-Nb2O5-Co2O3 addition. Excellent densification was achieved after sintering at 900 °C for 2 h. The low sintering temperature of newly developed capacitor materials allows a co-firing with pure silver electrodes. The dielectric constant and the temperature stability of the dielectric constant are strongly correlated with the composition of the ZnO-B2O3-Li2O additives. A high dielectric constant up to 3000 and a dielectric loss less than 0.024 were measured on multilayer capacitors sintered at 900 °C with silver inner electrodes. KW - BaTiO3 and titanates KW - Capacitors KW - Dielectric properties KW - LTCC PY - 2011 DO - https://doi.org/10.1016/j.jeurceramsoc.2010.10.003 SN - 0955-2219 SN - 1873-619X VL - 31 IS - 4 SP - 589 EP - 596 PB - Elsevier Ltd. CY - Oxford AN - OPUS4-22886 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Naghib Zadeh, Hamid A1 - Glitzky, Carsten A1 - Rabe, Torsten A1 - Lissner, A. ED - J.G. Herinrich, ED - C. Aneziris, T1 - Development of capacitor materials with sintering temperature below 900 °C T2 - 10th International Conference and Exhibition of the European Ceramic Society (ECerS), June 17-20, 2007, Berlin (Proceedings) T2 - 10th International Conference and Exhibition of the European Ceramic Society (ECerS) CY - Berlin, Germany DA - 2007-06-17 KW - Capacitor KW - LTCC KW - Barium titanate PY - 2007 SN - 3-87264-022-4 SP - 554 EP - 558 PB - Göller CY - Baden-Baden AN - OPUS4-18925 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - CONF A1 - Rabe, Torsten A1 - Glitzky, Carsten A1 - Naghib Zadeh, Hamid A1 - Oder, Gabriele A1 - Eberstein, M. A1 - Töpfer, J. T1 - Silver in LTCC - Interfacial reactions, transport processes and influence on properties of ceramics T2 - CICMT 2009 - 5th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (Proceedings) T2 - 2009 IMAPS/ACerS - 5th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT) CY - Denver, Colorado, USA DA - 2009-04-21 KW - LTCC KW - Silver conductors KW - Interface KW - Sintering KW - Ferrite KW - Capacitor PY - 2009 SN - 0-930815-87-4 SP - 000085 EP - 000093 AN - OPUS4-19428 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - GEN A1 - Naghib Zadeh, Hamid A1 - Glitzky, Carsten A1 - Rabe, Torsten T1 - Low fired high-K dielectrics buried into LTCC substrates T2 - 5th Ceramic Interconnect and Ceramic Microsystems Technologies Conference N2 - Due to addition of minor amounts of suitable additive combinations to BaTiO3 powder the sintering temperature was reduced to 900 °C. Excellent densification (more than 98% of theoretical density) and good dielectric properties were achieved after sintering at 900 °C for 2 hours. Dielectric properties can be improved by modifying the composition of sintering additives and additon of further dopants. The low sintering temperature of newly developed capacitor material allows a co-sintering with pure silver electrodes. No interfacial reaction between silver electrodes and ceramics was observed by microprobe analysis. The dielectric constants of about 1200 to 3000 and the dielectric losses of about 0.008 to 0.02 were measured (f = 1 kHz, T = 25 °C). The temperature dependency of dielectric constant for new capacitor materials is low, almost X7R characteristics. Furthermore, the densification and the dielectric properties of embedded capacitors in LTCC were investigated. T2 - 5th Ceramic Interconnect and Ceramic Microsystems Technologies Conference CY - Denver, USA DA - 2009-04-20 KW - Capacitor KW - LTCC KW - Barium titanate PY - 2009 SN - 0-930815-87-4 IS - WA 32 SP - 000188 EP - 000192 AN - OPUS4-19377 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER - TY - JOUR A1 - Naghib Zadeh, Hamid A1 - Glitzky, Carsten A1 - Dörfel, Ilona A1 - Rabe, Torsten T1 - Low temperature sintering of barium titanate ceramics assisted by addition of lithium fluoride-containing sintering additives JF - Journal of the European Ceramic Society N2 - By addition of LiF-containing sintering additives to commercial BaTiO3 powder, more than 98% of the theoretical density was reached at a sintering temperature of 900 °C both on powder compacts and laminates. Dielectric measurements were performed on ceramic samples in the temperature and frequency ranges from -20 °C to 125 °C and from 103 to 106 Hz, respectively. High relative permittivity (εr ~ 3160) and low dielectric loss (tan δ ~ 0.014) were measured for tapes of the favoured material. The breakdown strength for tapes with a thickness of about 80 µm is 30 kV/mm. The microprobe analysis showed, that no interfacial reaction between the dielectric layer and the Ag-electrode had occurred. The newly developed barium titanate ceramics completely densifying at 900 °C turned out to be promising for integration of buried capacitors in LTCC multilayers. KW - LTCC KW - BaTiO3 KW - LiF KW - Capacitors PY - 2010 DO - https://doi.org/10.1016/j.jeurceramsoc.2009.07.005 SN - 0955-2219 SN - 1873-619X VL - 30 IS - 1 SP - 81 EP - 86 PB - Elsevier CY - Oxford AN - OPUS4-20133 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -